Piezoelectrics in Positioning - PZT & Piezo Actuators: Sub ...

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Piezo • Nano • PositioningMounting and Handling Guidelines© Physik Instrumente (PI) GmbH & Co. KG 2008. Subject to change without notice.Cat120E Inspirations2009 08/10.18Adherence to the followingguidelines will help you obtainmaximum performance andlifetime from your piezo actuators:Do not use metal toolsfor actuator handling. Do notscratch the coating on the sidesurfaces. The following precautionsare recommended duringhandling of piezoelectric actuators:I. Piezoelectric stack actuatorswithout axial preload aresensitive to pulling forces. Apreload of up to 50% of theblocking force is generallyrecommended.II. Piezoelectric stack actuatorsmay be stressed in the axialdirection only. The appliedforce must be centered verywell. Tilting and shearingforces, which can also be inducedby parallelism errorsof the endplates, have to beavoided because they willdamage the actuator. Thiscan be ensured by the useof ball tips, flexible tips,adequate guiding mechanismsetc. An exception tothis requirement is made forthe PICAShear actuators,because they operate in theshear direction.III. Piezoelectric stack actuatorscan be mounted by gluingthem between even metalor ceramic surfaces by acold or hot curing epoxy,respectively. Ground surfacesare preferred. Please,do not exceed the specifiedworking temperature rangeof the actuator during curing.IV. The environment of all actuatorsshould be as dry aspossible. PICMA ® actuatorsare guarded against humidityby their ceramic coating.Other actuators must be protectedby other measures(hermetic sealing, dry airflow, etc).2-216The combination of longtermhigh electric DC fieldsand high relative humidityvalues should be avoidedwith all piezoelectric actuators.V. It is important to shortcircuitthe piezoelectric stackactuators during any handlingoperation. Temperaturechanges and load changeswill induce charges on thestack electrodes whichmight result in high electricfields if the leads are notshorted: Should the stackbecome charged, rapid discharging—especiallywithouta preload—might damagethe stack. Use a resistorfor discharging.VI. Prevent any contaminationof the piezo ceramic surfaceswith conductive orcorrosive substances. Isopropanolis recommendedfor cleaning. Avoid acetoneand excessive ultrasoniccleaning at higher temperatures.No pulling force without preloadNo lateral force or torqueBall tips or flexures to decouple lateral forces orbending forcesBall tips or flexures to decouple bending forcesBolting between plates is not recommended
Piezo • Nano • PositioningSymbols and UnitsA Surface area [m 2 ](meter 2 )Linear Actuators & MotorsCd ijd sEfFf 0Coefficient of Thermal Expansion (CTE) [K -1 ] (1 / kelvin)Capacitance (F) [As/V]Piezo modulus (tensor components) [m/V] (meter/volt)Distance, thickness [m] (meter)Dielectric constant [As/Vm](ampere · second / volt · meter)Electric field strength [V/m] (volt/meter)Operating frequency [Hz] (hertz = 1/second)Force [N] (newton)Unloaded resonant frequency [Hz] (hertz = 1/second)Nanopositioning / PiezoelectricsPiezo Flexure Stages /High-Speed Scanning SystemsLinearVertical & Tip/Tilt2- and 3-Axis6-AxisFast Steering Mirrors /Active OpticsPiezo Drivers /Servo ControllersSingle-ChannelMulti-ChannelModularAccessoriesPiezoelectrics in Positioningg Acceleration due to gravity: 9.81 m/s 2 (meter/second 2 )Nanometrologyik Sk TCurrent [A] (ampere)Stiffness of restraint (load) [N/m] (newton/meter)Stiffness of piezo actuators [N/m] (newton/meter)MicropositioningIndexL 0Length of non-energized actuator [m] (meter)LL 0Change in length (displacement) [m] (meter)Nominal displacement with zero applied force, [m] (meter)L t=0.1Displacement at time t = 0.1 sec after voltage change, [m] (meter)mPQStMass [kg] (kilogram)Power [W] (watt)Charge [C] (coulomb = ampere x second)Strain [L/L] (dimensionless)Time [s] (second)T C Curie temperature [° C]UVoltage [V] (volt)U p-pPeak-to-peak voltage [V] (volt)2-217
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