Piezoelectrics in Positioning - PZT & Piezo Actuators: Sub ...

Piezo • Nano • PositioningProperties / ApplicationsFeatures of Piezoelectric Positioning SystemsUnlimited ResolutionPiezoelectric actuators convertelectrical energy directly to mechanicalenergy. They make motionin the sub-nanometer rangepossible. There are no movingparts in contact with each other tolimit resolution.Fast ExpansionPiezo actuators react in a matter ofmicroseconds. Acceleration ratesof more than 10,000 g can be obtained.High Force GenerationHigh-load piezo actuators capableof moving loads of several tons areavailable today. They can covertravel ranges of several 100 μmwith resolutions in the sub-nanometerrange (see examples likethe P-056, in the “Piezo Actuators& Components” section).No Magnetic FieldsThe piezoelectric effect is related toelectric fields. Piezo actuators donot produce magnetic fields norare they affected by them. Piezodevices are especially well suitedfor applications where magneticfields cannot be tolerated.Low Power ConsumptionStatic operation, even holdingheavy loads for long periods, consumesvirtually no power. A piezoactuator behaves very much like anelectrical capacitor. When at rest,no heat is generated.No Wear and TearA piezo actuator has no movingparts like gears or bearings. Its displacementis based on solid statedynamics and shows no wear andtear. PI has conducted endurancetests on piezo actuators in whichno measurable change in performancewas observed after severalbillion cycles.Vacuum and Clean RoomCompatiblePiezoelectric actuators neithercause wear nor require lubricants.The new PICMA ® actuators withceramic insulation have no polymercoating and are thus ideal forUHV (ultra-high vacuum) applications.Operation at CryogenicTemperaturesThe piezoelectric effect continuesto operate even at temperaturesclose to 0 kelvin. PI offers speciallyprepared actuators for use at cryogenictemperatures.Piezoelectric nanopositioning systems large(e.g. for precision machining), medium (e.g. forinterferometry), small (e.g. for data storagemedium testing)Applications for Piezo Positioning Technology© Physik Instrumente (PI) GmbH & Co. KG 2008. Subject to change without notice.Cat120E Inspirations2009 08/10.182-174Data Storage MR head testing Spin stands Disk testing Active vibration cancellation Pole-tip recession testSemiconductors, Microelectronics Nano & Microlithography Nanometrologie Wafer and mask positioning Critical-dimension-test Inspection systems Active vibration cancellationPrecision Mechanics Fast tool servos Non-circular grinding,drilling, turning Active vibration cancellation Structural deformation Tool adjustment Wear compensation Needle-valve actuation Micropumps Linear drives Knife edge control in extrusiontools Micro engraving systems Shock wave generationLife Science, Medical Technology Scanning microscopy Patch clamp Nanoliter pumps Gene manipulation Micromanipulation Cell penetration MicrodispensersOptics, Photonics,Nanometrologie Scanning mirrors Image stabilization,pixel multiplication Scanning microscopy Auto focus systems Interferometry Fiber optic alignment Fiber optics switching Adaptive and active optics Laser tuning Stimulation of vibrationsSelection of piezo nanopositioning stages