NEW NA VERS of PRICE LIST - Center for Nanoscale Systems ...

Center For Nanoscale Systems (CNS) at Harvard University USER FEE PRICE LISTNANOFABRICATION FACILITY TOOLS - Non-ACADEMIC RATES (effective 9/1/05)INSTRUMENT RATE/UNIT Quarterly CapEligibleCOMMENTSNF-01 General Cleanroom Access $150/day Y 1,2,7,8Staff Assistance (onsite, non-lithography) $50/hour Y 3,8Staff Assistance (lithography) $50/hour N 3,8Remote Staff Assistance (all cases) $100/hour N 4RIE-006 Nexx RIE $100/hour Y 7CVD-002 Nexx PECVD $100/hour Y 7CVD-001 CVD LPCVD $200/hour Y 7EL-1 Raith-150 E-Beam $400/hour N 7EL-2 JEOL 6400 E-Beam $200/hour N 7EL-3 JEOL 7000F E-Beam $300/hour N 7MW-1 Heidelberg Mask Writer $150/hour N 5,6,7Quarterly Cap (per Quarter/per User) $5,000 See Below.Comments:1. Cleanroom access fee may switch to an hourly rate at some point in the future.2. Access fee covers all cleanroom & related back-end tools not otherwise listed on rate sheet.3. Onsite Staff Assistance is part of the cap with the exception of the lithography tools (EL-1, EL-2, EL-3)4. Remote Staff Assistance is not part of the quarterly cap in all cases.5. Fee for the Heidelberg Mask Writer does not include a $12 per mask charge that will be added to total.6. Onsite Staff Assistance for the Heidelberg is already included in the rate as it is required for usage.7. Cleanroom Access Fee is not charged for the JEOL 6400 & 7000F as they are not in the cleanrooms. Access Feeis charged in addition to the hourly charge for all other Nanofabrication tools.Once the Quarterly Cap is reached by a User, they can use all Cap eligible tools free of charge until theend of the quarter. Cap is strictly per User, not per PI or per Project. Quarters are based upon Harvard’sfiscal year. Quarter start dates are the 1st of July, October, January, April. Training and qualification withCNS Nanofabrication Facility Staff counts as Assisted Use if done one-on-one.