new acad vers price list - Center for Nanoscale Systems - Harvard ...

Center for Nanoscale Systems (CNS) at Harvard UniversityUSER FEE PRICE LIST (effective 9/1/05)IMAGING AND ANALYSIS/CAMS - ACADEMIC RATESINSTRUMENT RATE/UNIT STAFFASSISTANCERATE/UNIT*COMMENTSHAR-001 JEOL 2010 FEG TEM/ STEM $45/hour $50/hourHAR-005 Philips TEM EM-420T $35/hour $50/hour RETIRED INSEPT.05HAR-027 JEOL 2100 TEM $40/hour $50/hour Coming Soon! -Nov.05HAR-002 LEO SEM “LEO A” $30/hour $50/hourHAR-003 LEO SEM “LEO B” $30/hour $50/hourHAR-004 Quanta 200 ESEM $30/hour $50/hour No Charge for OEBDept. users.HAR-007 XPS ESCA SSX-100 $30/hour included Assistance requiredHAR-006 AFM/STM Imaging: Omicron VT-25 $100/day included any usage in a daycounts as a full day.No partial daycharges.HAR-026 Park Scientific AFM $20/hour $50/hourHAR-014 DualBeam 235 FIB/SEM $40/hour $50/hourHAR-016A-016D CAMS $40/hour $50/hourHAR-018 Confocal/multiphoton microscope $20/hour $50/hourHAR-009 Precision Ion Mill $5/use N/AHAR-024 Sputter Coater (Au, Cr, Pt-Pd) $5/use N/A in Bauer B-08HAR-017 Ultramicrotome $10/hour N/A* PLEASE NOTE THAT THE STAFF ASSISTANCE RATE IS IN ADDITION TO THE NORMAL RATEWHEN CNS STAFF ASSISTS USER ON A TOOL. (Ex. 1 hr of assisted HAR-001 use is a total of $95/hr)PLEASE NOTE THAT TRAINING COUNTS AS ASSISTED USE IF IT IS ONE-ON-ONE TRAINING.(there is no charge for training if it is a group training.)

Center For Nanoscale Systems (CNS) at Harvard University USER FEE PRICE LISTNANOFABRICATION FACILITY TOOLS - ACADEMIC RATES (effective 9/1/05)INSTRUMENT RATE/UNIT Quarterly CapEligibleCOMMENTSNF-01 General Cleanroom Access $100/day Y 1,2,7,8Staff Assistance (onsite, non-lithography) $50/hour Y 3,8Staff Assistance (lithography) $50/hour N 3,8Remote Staff Assistance (all cases) $100/hour N 4RIE-006 Nexx RIE $50/hour Y 7CVD-002 Nexx PECVD $50/hour Y 7CVD-001 CVD LPCVD $80/hour Y 7EL-1 Raith-150 E-Beam $80/hour N 7EL-2 JEOL 6400 E-Beam $35/hour N 7EL-3 JEOL 7000F E-Beam $40/hour N 7MW-1 Heidelberg Mask Writer $80/hour N 5,6,7Quarterly Cap (per Quarter/per User) $2,500 See Below.Comments:1. Cleanroom access fee may switch to an hourly rate at some point in the future.2. Access fee covers all cleanroom & related back-end tools not otherwise listed on rate sheet.3. Onsite Staff Assistance is part of the cap with the exception of the lithography tools (EL-1, EL-2, EL-3)4. Remote Staff Assistance is not part of the quarterly cap in all cases.5. Fee for the Heidelberg Mask Writer does not include a $12 per mask charge that will be added to total.6. Onsite Staff Assistance for the Heidelberg is already included in the rate as it is required for usage.7. Cleanroom Access Fee is not charged for the JEOL 6400 & 7000F as they are not in the cleanrooms. Access feeis charged in addition to hourly charge for all other Nanofabrication tools listed above..Once the Quarterly Cap is reached by a User, they can use all Cap eligible tools free of charge until theend of the quarter. Cap is strictly per User, not per PI or per Project. Quarters are based upon Harvard’sfiscal year. Quarter start dates are the 1st of July, October, January, April.Training and qualification with CNS Nanofabrication Facility Staff counts as Assisted Use if done one-onone.