NEW NA VERS of PRICE LIST - Center for Nanoscale Systems ...

Center for Nanoscale Systems (CNS) at Harvard UniversityUSER FEE PRICE LIST (effective 9/1/05)IMAGING AND ANALYSIS/CAMS - NON-ACADEMIC RATESINSTRUMENT RATE/UNIT STAFFASSISTANCERATE/UNITCOMMENTSHAR-001 JEOL 2010 FEG TEM/ STEM $400/hour includedHAR-005 Philips TEM EM-420T $300/hour included RETIRED INSept.05HAR-027 JEOL 2100 TEM $350/hour included Coming Soon! -Nov. 05HAR-002 LEO SEM “LEO A” $300/hour includedHAR-003 LEO SEM “LEO B” $300/hour includedHAR-004 Quanta 200 ESEM $300/hour includedHAR-007 XPS ESCA SSX-100 $300/hour included Assistance requiredHAR-006 AFM/STM Imaging: Omicron VT-25 $2,800/day included any usage in a daycounts as a full day.No partial daycharges.HAR-026 Park Scientific AFM $200/hour includedHAR-014 DualBeam 235 FIB/SEM $450/hour includedHAR-016A-016D CAMS $300/hour includedHAR-018 Confocal/multiphoton microscope $200/hour includedHAR-009 Precision Ion Mill $100/use includedHAR-024 Sputter Coater (Au, Cr, Pt-Pd) $100/use included in Bauer B-08HAR-017 Ultramicrotome $200/hour includedPLEASE NOTE THAT TRAINING COUNTS AS ASSISTED USE IF IT IS ONE-ON-ONE TRAINING. Ifany other Imaging and Analysis sample preparation tools not listed above are required as a pre-requisiteto your usage of any tool above, it will result in 1 extra hour being added to the total at the correspondingrate of the tool.

Center For Nanoscale Systems (CNS) at Harvard University USER FEE PRICE LISTNANOFABRICATION FACILITY TOOLS - Non-ACADEMIC RATES (effective 9/1/05)INSTRUMENT RATE/UNIT Quarterly CapEligibleCOMMENTSNF-01 General Cleanroom Access $150/day Y 1,2,7,8Staff Assistance (onsite, non-lithography) $50/hour Y 3,8Staff Assistance (lithography) $50/hour N 3,8Remote Staff Assistance (all cases) $100/hour N 4RIE-006 Nexx RIE $100/hour Y 7CVD-002 Nexx PECVD $100/hour Y 7CVD-001 CVD LPCVD $200/hour Y 7EL-1 Raith-150 E-Beam $400/hour N 7EL-2 JEOL 6400 E-Beam $200/hour N 7EL-3 JEOL 7000F E-Beam $300/hour N 7MW-1 Heidelberg Mask Writer $150/hour N 5,6,7Quarterly Cap (per Quarter/per User) $5,000 See Below.Comments:1. Cleanroom access fee may switch to an hourly rate at some point in the future.2. Access fee covers all cleanroom & related back-end tools not otherwise listed on rate sheet.3. Onsite Staff Assistance is part of the cap with the exception of the lithography tools (EL-1, EL-2, EL-3)4. Remote Staff Assistance is not part of the quarterly cap in all cases.5. Fee for the Heidelberg Mask Writer does not include a $12 per mask charge that will be added to total.6. Onsite Staff Assistance for the Heidelberg is already included in the rate as it is required for usage.7. Cleanroom Access Fee is not charged for the JEOL 6400 & 7000F as they are not in the cleanrooms. Access Feeis charged in addition to the hourly charge for all other Nanofabrication tools.Once the Quarterly Cap is reached by a User, they can use all Cap eligible tools free of charge until theend of the quarter. Cap is strictly per User, not per PI or per Project. Quarters are based upon Harvard’sfiscal year. Quarter start dates are the 1st of July, October, January, April. Training and qualification withCNS Nanofabrication Facility Staff counts as Assisted Use if done one-on-one.