section 1 - World Intellectual Property Organization

12/2002
5766 PCT Gazette - Section I - Gazette du PCT 21 Mar/mar 2002
(43) 21 Mar/mar 2002 (21.03.2002)
(54) APPARATUS FOR INSPECTING MASK
APPAREIL POUR INSPECTION DE
MASQUE
(71) HOLON CO.,LTD [JP/JP]; 2-1, Shinjuku
2-chome, Shinjuku-ku, Tokyo 160-0022 (JP).
(for all designated States except / pour tous
les États désignés sauf US)
(71, 72) ITO, Minoru [JP/JP]; 6-10, Kobuchi
2-chome, Sagamihara-shi, Kanagawa
229-0004 (JP).
(72, 75) ANAZAWA, Norimichi [JP/JP]; c/o
HOLON CO., LTD, 2-1, Shinjuku 2-chome,
Shinjuku-ku, Tokyo 160-0022 (JP).
(74) OKADA, Morihiro; 21-20-603, Taira-machi
1-chome, Meguro-ku, Tokyo 152-0032 (JP).
(81) DE US.
(51) 7 H01J 37/244, 37/317
(11) WO 02/23582 (13) A2
(21) PCT/US01/28671
(22) 14 Sep/sep 2001 (14.09.2001)
(25) en (26) en
(30) 60/233,007 15 Sep/sep 2000 US
(15.09.2000)
(30) Not furnished / 12 Sep/sep 2001 US
non communiqué (12.09.2001)
(43) 21 Mar/mar 2002 (21.03.2002)
(54) FARADAY SYSTEM FOR ION IM-
PLANTERS
SYSTEME DE FARADAY POUR IM-
PLANTEURS IONIQUES
(71) VARIAN SEMICONDUCTOR EQUIP-
MENT ASSOCIATES, INC. [US/US]; 35
Dory Road, Gloucester, MA 01930 (US).
(72) BISSON, Jack; 3 Abbott Street, Groveland,
MA 01834 (US). ZHAO, Zhiyong; 9279
Scenic Bluff Drive, Austin, TX 78733 (US).
GAMMEL, George; 21 Leo Road, Marblehead,
MA 01945 (US). ALVARADO,
Daniel; 59 Elm Street, Methuen, MA 01844
(US). WALKER, Craig; 26 Quaker Street,
Newton, NH 03858 (US).
(74) MCCLELLAN, William, R.; Wolf, Greenfield
& Sacks, P.C., 600 Atlantic Avenue,
Boston, MA 02210 (US).
(81) IL JP KR.
(84) EP (AT BE CH CY DE DK ES FI FR GB GR
IE IT LU MC NL PT SE TR).
(51) 7 H01J 37/304, 37/317
(11) WO 02/23583
(21) PCT/US01/28272
(13) A2
(22) 10 Sep/sep 2001 (10.09.2001)
(25) en (26) en
(30) 09/662,471 15 Sep/sep 2000
(15.09.2000)
US
(43) 21 Mar/mar 2002 (21.03.2002)
(54) MONITOR SYSTEM AND METHOD
FOR SEMICONDUCTOR PROCESSES
SYSTEME ET PROCEDE DE SUR-
VEILLANCE DE PROCESSUS POUR
SEMI-CONDUCTEURS
(71) VARIAN SEMICONDUCTOR EQUIP-
MENT ASSOCIATES, INC. [US/US]; 35
Dory Road, Gloucester, MA 01930 (US).
(72) RADOVANOV, Svetlana, B.; 218 Pleasant
Street, Marblehead, MA 01945 (US). MAC-
INTOSH, Edward; 105 Congress Street,
Amesbury, MA 01913 (US). AYERS, Gary;
13 N. Washington Ave. #3, Woburn, MA
01801 (US). COREY, Philip; 8 Prospect
Court, Gloucester, MA 01930 (US).
(74) MCCLELLAN, William, R.; Wolf, Greenfield
& Sacks, P.C., 600 Atlantic Avenue,
Boston, MA 02210 (US).
(81) IL JP KR.
(84) EP (AT BE CH CY DE DK ES FI FR GB GR
IE IT LU MC NL PT SE TR).
(51) 7 H01J 37/317
(11) WO 02/23584
(21) PCT/US01/28824
(13) A2
(22) 14 Sep/sep 2001 (14.09.2001)
(25) en (26) en
(30) 60/232,704 15 Sep/sep 2000
(15.09.2000)
US
(30) 09/950,939 12 Sep/sep 2001
(12.09.2001)
US
(43) 21 Mar/mar 2002 (21.03.2002)
(54) ION IMPLANTER OPTIMIZED SCAN
WAVEFORM RETENTION AND RE-
COVERY
RECUPERATION ET RETENTION
D’UNE FORME D’ONDE DE BA-
LAYAGE OPTIMISEE POUR IMPLAN-
TEUR IONIQUE
(71) VARIAN SEMICONDUCTOR EQUIP-
MENT ASSOCIATES, INC. [US/US]; 35
Dory Road, Gloucester, MA 01930 (US).
(72) CUCCHETTI, Antonella; 6 Red Rock
Lane, Beverly, MA 01915 (US). OLSON,
Joseph; 5 College Lane, Beverly, MA 01915
(US). GIBILARO, Gregory; 165 Perkins
Row, Topsfield, MA 01983-1909 (US).
MOLLICA, Rosario; 16 Freeport Drive,
Wilmington, MA 01887 (US).
(74) MCCLELLAN, William, R.; Wolf, Greenfield
& Sacks, P.C., 600 Atlantic Avenue,
Boston, MA 02210 (US).
(81) IL JP KR.
(84) EP (AT BE CH CY DE DK ES FI FR GB GR
IE IT LU MC NL PT SE TR).
(51) 7 H01J 37/32
(11) WO 02/23585
(21) PCT/EP01/10180
(13) A2
(22) 3 Sep/sep 2001 (03.09.2001)
(25) en (26) en
(30) 09/662,566 15 Sep/sep 2000
(15.09.2000)
US
(43) 21 Mar/mar 2002 (21.03.2002)
(54) METHOD AND APPARATUS FOR DE-
TECTING LEAKS IN A PLASMA ETCH
CHAMBER
PROCEDE ET APPAREIL DE DE-
TECTION DE FUITES DANS UNE
CHAMBRE
PLASMA
DE GRAVURE PAR
(71) KONINKLIJKE PHILIPS ELECTRON-
ICS N.V. [NL/NL]; Groenewoudseweg 1,
NL-5621 BA Eindhoven (NL).
(72) SINGH, Kailash; Prof. Holstlaan 6,
NL-5656 AA Eindhoven (NL). SCOTT,
Gary; Prof. Holstlaan 6, NL-5656 AA Eindhoven
(NL).
(74) SMEETS, Eugenius, T., J., M.; Internationaal
Octrooibureau B.V., Prof Holstlaan 6,
NL-5656 AA Eindhoven (NL).
(81) JP KR.
(84) EP (AT BE CH CY DE DK ES FI FR GB GR
IE IT LU MC NL PT SE TR).
(51) 7 H01J 37/32
(11) WO 02/23586
(21) PCT/US01/28440
(13) A2
(22) 13 Sep/sep 2001 (13.09.2001)
(25) en (26) en
(30) 09/660,679 13 Sep/sep 2000
(13.09.2000)
US
(43) 21 Mar/mar 2002 (21.03.2002)
(54) APPARATUS FOR ETCHING NOBLE
METALS USING ION IMPLANTATION
AND METHOD OF USE
APPAREIL POUR GRAVER DES ME-
TAUX NOBLES PAR IMPLANTATION
IONIQUE ET SON PROCEDE D’UTILI-
SATION
(71) INFINEON TECHNOLOGIES NORTH
AMERICA CORP. [US/US]; 1730 North
First Street, San Jose, CA 95112-4508
(US). INTERNATIONAL BUSINESS MA-
CHINES CORPORATION [US/US]; New
Orchard Road, Armonk, NY 10504 (US).
(72) ATHAVALE, Satish; 111 Elm Crest Drive,
Fishkill, NY 12524 (US). LEE, Brian;
425 E. 76th Street, #10D, New York, NY
10021 (US). LEE, Heon; 201-D Commons
Way, Fishkill, NY 12524 (US). LEE,
Kilho; 324 Town View Drive, Wappingers
Falls, NY 12590 (US). LIMB, Young; 13
Kingswood Drive, Poughkeepsie, NY 12603
(US). PARK, Young Jin; 33 Kinderhook
Drive, Poughkeepsie, NY 12603 (US). SIM,
Jai-hoon; 28 Winthrop Court, Apt. E, Wappingers
Falls, NY 12590 (US).
(74) BRADEN, Stanton, C. et al. / etc.; Siemens
Corporation, Intellectual Property Dept., 186
Wood Avenue South, Iselin, NJ 08830 (US).
(81) JP KR.
(84) EP (AT BE CH CY DE DK ES FI FR GB GR
IE IT LU MC NL PT SE TR).
Published / Publiée :(q1)
(51) 7 H01J 37/32
(11) WO 02/23587
(21) PCT/US01/28600
(13) A2
(22) 12 Sep/sep 2001 (12.09.2001)
(25) en (26) en
(30) 09/660,006 12 Sep/sep 2000
(12.09.2000)
US
(43) 21 Mar/mar 2002 (21.03.2002)
(54) TUNGSTEN CHAMBER WITH STA-
TIONARY HEATER
CHAMBRE TUNGSTENE POURVUE
D’UN CHAUFFEUR FIXE
(71) APPLIED MATERIALS [US/US]; 2881
Scott Blvd., Mailstop 2061, Santa Clara, CA
95051 (US).