TIMARIS - Singulus Technologies AG
TIMARIS - Singulus Technologies AG
TIMARIS - Singulus Technologies AG
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Rotating-Substrate-Module<br />
(RSM)<br />
The Rotating-Substrate-Module<br />
(RSM) is a dedicated PVD module<br />
for R&D for different Semiconductors<br />
and other applications.<br />
Rotating-Substrate-Module (RSM)<br />
Essential technical features are:<br />
_ Up to 12 PVD cathodes in one<br />
chamber<br />
_ Rotating substrate deposition<br />
_ Co-sputtering<br />
_ DC-, pulsed DC-, RF-sputtering<br />
_ Wafer heating<br />
_ Base pressure < 10 -8 Torr<br />
_ In-situ aligning magnetic field<br />
_ Alternative equipment<br />
_ Ion source<br />
_ Surface metrology<br />
_ Low R&D costs<br />
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