Modelling and Simulating the Selective Epitaxial Growth of ... - Imec

4a 3 4b
1
Figure 9: Silicon window – measurement template
experimental
results [nm]
simulation
results [nm]
target thickness [nm]
30,0 90,0 130,0 170,0
1 173,0 165,1 169,0 171,0
2 31,5 95,3 136,6 174,9
3 141,5 45,2 26,5 17,7
4a 23,6 63,9 69,8 80,6
4b 20,6 64,9 83,5 82,6
1 175,0 175,0 175,0 175,0
2 30,5 93,5 136,0 178,0
3 128,9 55,3 32,2 6,7
4a 23,0 59,9 71,4 84,2
4b 23,0 59,9 71,4 84,2
Table 1: Comparison: experimental vs. simulation results
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2
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