Manual - Leybold Repair by Tech Services

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Head 12 ⏐GA10218_0101 - 5/2002 1.3.2 Technical Data PhoeniXL 300 1.3.2.1 Technical Data Max. inlet pressure 15 mbar Minimum detectable Helium leak rates � in vacuum mode ≤5·10 -12 mbar l / s � in sniffer mode
1.3.2.3 Other Data Valves solenoid Dimensions (L × W × H) in mm 495 x 456 x 314 Weight in kg 40.0 Noise level dB (A) < 54 max. Audio alarm dB (A) 90 Contamination level (to IEC 60664-1) 2 Overvoltage category (to IEC 60664-1) II 1.3.2.4 Ambient Conditions For use within buildings Permissible ambient temperature (during operation) +10 °C … +40 °C Permissible storage temperature -10 °C … +60 °C Max. rel. humidity 80% (up to 31°C) linear decreasing to 50% at 40°C Max. permissible height above sea level 2000 m (during operation) 1.3.3 Technical Data PhoeniXL300 dry 1.3.3.1 Technical Data Max. inlet pressure 15 mbar Minimum detectable Helium leak rates � in vacuum mode ≤ 3·10 -11 mbar l / s � in sniffer mode < 1·10 -7 mbar l / s Minimum detectable Hydrogen leak rates � in vacuum mode ≤ 1·10 -8 mbar l / s � in sniffer mode < 1·10 -7 mbar l / s Maximum Helium leak rate which can be displayed 0.1 mbar l / s Measurement range 11 decades Time constant of the leak rate signal (blanked off, 63% of the final value) Pumping speed (Helium) at the inlet 2.5 l / s Detectable masses 2, 3 and 4 Mass spectrometer 180° magnetic sector field Ion source 2 filaments; Iridium/Yttria-oxide Inlet port DN 25 KF Run-up time (after starting) ≤ 2min Head GA10218_0101 - 5/2002 ⏐ 13
Page 1 and 2: Operating Instructions GA10218_0102
Page 3 and 4: Head 2 Installation ...............
Page 5 and 6: Head 6.3 Mode .....................
Page 7 and 8: Head 7.3 Factor of Calibration - Ra
Page 9 and 10: 1.1.4 Definiton of Terms The range
Page 11: 1.3 Introduction 1.3.1 Purpose The
Page 15 and 16: 300 Modul 1.3.4 Technical Data Phoe
Page 17 and 18: � Blank flange DN 25 KF � Clamp
Page 19 and 20: 2 Installation 2.1 Working Location
Page 21 and 22: Fig. 3 Side views of the PhoeniXL L
Page 23 and 24: 2.2.2.4 Recorder The recorder outpu
Page 25 and 26: of these gas line must not exceed 1
Page 27 and 28: 3 First Operation Check The steps f
Page 29 and 30: 3.2.3 Verification with an external
Page 31 and 32: Pos. Description 4 Fore pressure pu
Page 33 and 34: P 2 external pump 2 7 4 1 V 6 V 2a
Page 35 and 36: 4.1.2.4 ZERO Button Pushing the ZER
Page 37 and 38: Fig. 11 Numerical entry of the Trig
Page 39 and 40: 4.1.4 Partial Flow Method In the pa
Page 41 and 42: level is taken over anew, provided
Page 43 and 44: 5 Operation of the PhoeniXL The Pho
Page 45 and 46: Fig. 14 Display: Measurement Mode w
Page 47 and 48: 6 Description of the Menu By pressi
Page 49 and 50: Explanation to figure 16: Key No. N
Page 51 and 52: 6.2.2 Display-range auto/manual �
Page 53 and 54: the net leak rate from the part und
Page 55 and 56: 6.4.1 Trigger Level 1 � Main menu
Page 57 and 58: 6.4.6 Alarm delay � Main menu > T
Page 59 and 60: 6.5 Calibration � Main menu > Cal
Page 61 and 62: 6.6.1 Vacuum settings � Main menu
Page 63 and 64:
Softkey 2: Immediately The inlet po
Page 65 and 66:
Softkey 2: ↓ The entry of the nom
Page 67 and 68:
Since the effective pumping rates a
Page 69 and 70:
6.6.3 Mass � Main menu > Settings
Page 71 and 72:
The fundamental output voltage is s
Page 73 and 74:
Description of operation mode of th
Page 75 and 76:
Softkey 2: Time&Date See chapter 6.
Page 77 and 78:
Softkey 3: ↓ Decrease of the serv
Page 79 and 80:
Softkey No. 2: ↓ Decrease change
Page 81 and 82:
6.7 Information � Main menu > Inf
Page 83 and 84:
6.8.2 Change Menu-PIN � Main menu
Page 85 and 86:
After External Calibration ( Fig. 2
Page 87 and 88:
8 Error And Warning Messages The Ph
Page 89 and 90:
No. Displayed Message Description a
Page 91 and 92:
Head No. Displayed Message Descript
Page 93 and 94:
No. Displayed Message Description a
Page 95 and 96:
9.1.2 Opening the PhoeniXL 2 3 Fig.
Page 97 and 98:
egulations for the safety of the en
Page 99 and 100:
TMP-converter TDS Fig. 37 assembly
Page 101 and 102:
Appendix A B C D F G I L M Ambient
Page 103 and 104:
Abmessungen PhoeniXL Familie in mm
Page 105 and 106:
Fig. 4 Declaration of Conformance H
Page 107 and 108:
Head GA10218_0101 - 9/2002 ⏐ 108
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