Manual - Leybold Repair by Tech Services
Manual - Leybold Repair by Tech Services
Manual - Leybold Repair by Tech Services
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Head<br />
32 ⏐GA10218_0101 - 5/2002<br />
3<br />
1<br />
2<br />
4<br />
P 2<br />
Diaphragm pump<br />
V 2a<br />
MS<br />
V 1<br />
V 2b<br />
Fig. 6 Vacuum diagram PhoeniXL300 dry<br />
Pos. Description<br />
1 MS: Mass Spectrometer, Helium sensor (180° magnetic field mass<br />
spectrometer)<br />
2 Turbomolecular Pump (TMP, provides high vacumm conditions in<br />
the MS)<br />
3 Pirani gauge P2 (fore vacuum pressure)<br />
4 Diaphragm pump (provides the foreline pressure for the TMP und<br />
pumps down the parts under test)<br />
5 Inlet Port<br />
6 Pirani gauge P1 (inlet pressure)<br />
V1 … V7: Electromagnetic Valves to control the gas flows<br />
300 Modul<br />
4.1.1.2 Vacuum System PhoeniXL<br />
6<br />
The PhoeniXL300 Modul has no roughing pump integrated as the other<br />
models. Therefore it can be used with an external pump only. This pump<br />
can be oil sealed or a dry version with a roughing capacity between 2.5<br />
and 65 m 3 /h. This pump has to be connected to the DN25 KF at the side<br />
or under the bottom of the PhoeniXL 300 Modul .<br />
V 7<br />
V<br />
4 b<br />
V 4 a<br />
V 6<br />
V 5<br />
P 1<br />
V 3<br />
5
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