Manual - Leybold Repair by Tech Services

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Head 8 ⏐GA10218_0101 - 5/2002 1 General Information We recommend that you carefully read this operating instructions to ensure optimum operating conditions right from the start. This Technisches Handbuch contains important informations on the functions, installation, start-up and operation of the PhoeniXL. All the informations in this handbook are based for the PhoeniXL 300 leak detector. Changes in the use for the Models PhoeniXL300 dry and PhoeniXL 300 Modul are stated below the information for the PhoeniXL 300 . We reserve the right to modify the design and the specified data. The illustrations are not binding. 1.1 Notes on the Use of this Handbook 1.1.1 Safety Symbols Important remarks concerning operational safety and protection are emphasised as follows: Attention Information on correct handling or use. Disregard can lead to malfunctions or minor equipment damage. Caution Information on preventing any kind of physical injury. 1.1.2 Indications The references to diagrams consists of the figure number and the item number in this order. For example: Fig. 2/7 refers to item 7 in the figure 2. 1.1.3 Symbols of Vacuum Technology Given in the following are some important vacuum symbols which are used in this manual. Vacuum pump in general Turbomolecular pump Measuring instrument Valve
1.1.4 Definiton of Terms The range of the preamplifier and the vacuum ranges are selected automatically. The autoranging feature of the PhoeniXL covers the entire range or leak rates depending on the selected operating mode. Not only the leak rate signal, but also the pressure in the test sample (inlet pressure P1) and the forevacuum pressure (P2) are used for control purposes. Range switching between the main ranges is performed via valves. Fine range switching within the main ranges is implemented by switching over the gain factor of the preamplifier. This function automatically aligns the mass spectrometer so that a maximum leak rate is displayed. The control processor changes the voltage which erates the ions in the selected mass range until a maximum ion current is detected by the ion detector. During each calibration the mass alignment is run automatically. Determination and automatic adaptation of the internal background. Through this function, the internal zero level of the instrument is determined which is then substracted from the current leak rate signal. This fuction is run during the calibration process or when operating the start pushbutton, provided the PhoeniXL has been running previously for at least 20 seconds in the stanby or vent mode. GROSS is a measurement mode which allows high inlet pressure (15 to 0,2 mbar). The smallest detectable leak rate is 1 · 10-7 mbar l / s. FINE is a measurement mode with inlet pressure < 0.2 mbar. The minimum detectable leak rate is ≤ 5 ·10 -12 mbar l / s Precision is a measurement mode for the PhoeniXL 300 dry only from an inlet pressure < 0,1 mbar. In this mode the PhoeniXL300 dry has the highest sensitivity, the minimum detectable leak rate is ≤ 3·10 -11 mbar l / s. Pressure in the foreline between Turbo pump and rotary vane pump. The existing helium partial pressure in the measurement system. The level of the internal helium background is measured in the Stand-by mode and subtracted from the measured signal. The smallest leak rate the PhoeniXL is able to detect (≤ 5·10 -12 mbar l / s) in vacuum mode. The menu allows the user to program the PhoeniXL according to his requirements. The menu has a tree architecture. The PhoeniXL measures the leak rate of the test sample. Status of the PhoeniXL when supplied by the factory. Autoranging Autotune Mass alignment Auto zero GROSS FINE PRECISION Foreline pressure Internal helium background Minimum detectable leak rate Menu Measure Measurement mode Default Head GA10218_0101 - 5/2002 ⏐ 9
Page 1 and 2: Operating Instructions GA10218_0102
Page 3 and 4: Head 2 Installation ...............
Page 5 and 6: Head 6.3 Mode .....................
Page 7: Head 7.3 Factor of Calibration - Ra
Page 11 and 12: 1.3 Introduction 1.3.1 Purpose The
Page 13 and 14: 1.3.2.3 Other Data Valves solenoid
Page 15 and 16: 300 Modul 1.3.4 Technical Data Phoe
Page 17 and 18: � Blank flange DN 25 KF � Clamp
Page 19 and 20: 2 Installation 2.1 Working Location
Page 21 and 22: Fig. 3 Side views of the PhoeniXL L
Page 23 and 24: 2.2.2.4 Recorder The recorder outpu
Page 25 and 26: of these gas line must not exceed 1
Page 27 and 28: 3 First Operation Check The steps f
Page 29 and 30: 3.2.3 Verification with an external
Page 31 and 32: Pos. Description 4 Fore pressure pu
Page 33 and 34: P 2 external pump 2 7 4 1 V 6 V 2a
Page 35 and 36: 4.1.2.4 ZERO Button Pushing the ZER
Page 37 and 38: Fig. 11 Numerical entry of the Trig
Page 39 and 40: 4.1.4 Partial Flow Method In the pa
Page 41 and 42: level is taken over anew, provided
Page 43 and 44: 5 Operation of the PhoeniXL The Pho
Page 45 and 46: Fig. 14 Display: Measurement Mode w
Page 47 and 48: 6 Description of the Menu By pressi
Page 49 and 50: Explanation to figure 16: Key No. N
Page 51 and 52: 6.2.2 Display-range auto/manual �
Page 53 and 54: the net leak rate from the part und
Page 55 and 56: 6.4.1 Trigger Level 1 � Main menu
Page 57 and 58: 6.4.6 Alarm delay � Main menu > T
Page 59 and 60:
6.5 Calibration � Main menu > Cal
Page 61 and 62:
6.6.1 Vacuum settings � Main menu
Page 63 and 64:
Softkey 2: Immediately The inlet po
Page 65 and 66:
Softkey 2: ↓ The entry of the nom
Page 67 and 68:
Since the effective pumping rates a
Page 69 and 70:
6.6.3 Mass � Main menu > Settings
Page 71 and 72:
The fundamental output voltage is s
Page 73 and 74:
Description of operation mode of th
Page 75 and 76:
Softkey 2: Time&Date See chapter 6.
Page 77 and 78:
Softkey 3: ↓ Decrease of the serv
Page 79 and 80:
Softkey No. 2: ↓ Decrease change
Page 81 and 82:
6.7 Information � Main menu > Inf
Page 83 and 84:
6.8.2 Change Menu-PIN � Main menu
Page 85 and 86:
After External Calibration ( Fig. 2
Page 87 and 88:
8 Error And Warning Messages The Ph
Page 89 and 90:
No. Displayed Message Description a
Page 91 and 92:
Head No. Displayed Message Descript
Page 93 and 94:
No. Displayed Message Description a
Page 95 and 96:
9.1.2 Opening the PhoeniXL 2 3 Fig.
Page 97 and 98:
egulations for the safety of the en
Page 99 and 100:
TMP-converter TDS Fig. 37 assembly
Page 101 and 102:
Appendix A B C D F G I L M Ambient
Page 103 and 104:
Abmessungen PhoeniXL Familie in mm
Page 105 and 106:
Fig. 4 Declaration of Conformance H
Page 107 and 108:
Head GA10218_0101 - 9/2002 ⏐ 108
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