Manual - Leybold Repair by Tech Services

Recommendations

Info

Head Table of Contents 2 ⏐GA10218_0102 - 6/2002 1 General Information ........................................................................................8 1.1 Notes on the Use of this Handbook .................................................................... 8 1.1.1 Safety Symbols .................................................................................................. 8 1.1.2 Indications .......................................................................................................... 8 1.1.3 Symbols of Vacuum Technology ........................................................................ 8 1.1.4 Definiton of Terms .............................................................................................. 9 1.2 Support from LEYBOLD Service ....................................................................... 10 1.3 Introduction ...................................................................................................... 11 1.3.1 Purpose ........................................................................................................... 11 1.3.2 Technical Data PhoeniXL 300 ............................................................................. 12 1.3.2.1 Technical Data ................................................................................................. 12 1.3.2.2 Electrical Data .................................................................................................. 12 1.3.2.3 Other Data ....................................................................................................... 13 1.3.2.4 Ambient Conditions .......................................................................................... 13 1.3.3 Technical Data PhoeniXL 300 dry ........................................................................ 13 1.3.3.1 Technical Data ................................................................................................. 13 1.3.3.2 Electrical Data .................................................................................................. 14 1.3.3.3 Other Data ....................................................................................................... 14 1.3.3.4 Ambient Conditions .......................................................................................... 14 1.3.4 Technical Data PhoeniXL 300 Modul .................................................................... 15 1.3.4.1 Technical Data ................................................................................................. 15 1.3.4.2 Electrical Data .................................................................................................. 15 1.3.4.3 Other Data ....................................................................................................... 16 1.3.4.4 Ambient Conditions .......................................................................................... 16 1.4 Unpacking ........................................................................................................ 16 1.4.1 Supplied Equipment ......................................................................................... 16 1.4.2 Accessories and Options .................................................................................. 17 1.4.2.1 Sniffer line SL300 ............................................................................................. 17 1.4.2.2 Remote control ................................................................................................ 18 1.4.2.3 Partial flow system (PhoeniXL 300 only) .............................................................. 18
Head 2 Installation ......................................................................................................19 2.1 Working Location ............................................................................................. 19 2.2 Electrical Connections ...................................................................................... 20 2.2.1 Mains Power .................................................................................................... 20 2.2.2 Connections for the Data Acquisition Systems ................................................. 21 2.2.2.1 Option (Accessories) ........................................................................................ 21 2.2.2.2 Digital Out (Control) .......................................................................................... 22 2.2.2.3 Digital In (Control 2) .......................................................................................... 22 2.2.2.4 Recorder .......................................................................................................... 23 2.2.2.5 RS232 .............................................................................................................. 23 2.2.2.6 Remote Control ................................................................................................ 24 2.3 Vaccum Connections ....................................................................................... 24 2.3.1 Inlet Port ........................................................................................................... 24 2.3.2 Exhaust ............................................................................................................ 24 2.3.3 Vent ................................................................................................................. 24 2.3.4 Gas ballast connection ..................................................................................... 24 2.3.5 Connection of an external pump (Only PhoeniXL 300 Modul ) ................................ 25 2.4 Default settings ................................................................................................ 25 3 First Operation Check ...................................................................................27 3.1 Needed Equipment .......................................................................................... 27 3.2 Description of the Initial Operation .................................................................... 27 3.2.1 Startup and Measure ........................................................................................ 27 3.2.2 Internal Calibration ............................................................................................ 28 3.2.3 Verification with an external test leak ................................................................ 29 3.2.4 Measure with a test object ............................................................................... 29 3.2.5 Switch off ......................................................................................................... 29 4 Description and Working Principle ..............................................................30 4.1 Introduction ...................................................................................................... 30 4.1.1 Vacuum System PhoeniXL 300 ........................................................................... 30 4.1.1.1 Vacuum System PhoeniXL 300 dry ...................................................................... 31 4.1.1.2 Vacuum System PhoeniXL 300 Modul .................................................................. 32 4.1.2 Control Panel ................................................................................................... 34 4.1.2.1 LC Display ........................................................................................................ 34 GA10218_0102 - 6/2002 ⏐ 3
Page 1: Operating Instructions GA10218_0102
Page 5 and 6: Head 6.3 Mode .....................
Page 7 and 8: Head 7.3 Factor of Calibration - Ra
Page 9 and 10: 1.1.4 Definiton of Terms The range
Page 11 and 12: 1.3 Introduction 1.3.1 Purpose The
Page 13 and 14: 1.3.2.3 Other Data Valves solenoid
Page 15 and 16: 300 Modul 1.3.4 Technical Data Phoe
Page 17 and 18: � Blank flange DN 25 KF � Clamp
Page 19 and 20: 2 Installation 2.1 Working Location
Page 21 and 22: Fig. 3 Side views of the PhoeniXL L
Page 23 and 24: 2.2.2.4 Recorder The recorder outpu
Page 25 and 26: of these gas line must not exceed 1
Page 27 and 28: 3 First Operation Check The steps f
Page 29 and 30: 3.2.3 Verification with an external
Page 31 and 32: Pos. Description 4 Fore pressure pu
Page 33 and 34: P 2 external pump 2 7 4 1 V 6 V 2a
Page 35 and 36: 4.1.2.4 ZERO Button Pushing the ZER
Page 37 and 38: Fig. 11 Numerical entry of the Trig
Page 39 and 40: 4.1.4 Partial Flow Method In the pa
Page 41 and 42: level is taken over anew, provided
Page 43 and 44: 5 Operation of the PhoeniXL The Pho
Page 45 and 46: Fig. 14 Display: Measurement Mode w
Page 47 and 48: 6 Description of the Menu By pressi
Page 49 and 50: Explanation to figure 16: Key No. N
Page 51 and 52: 6.2.2 Display-range auto/manual �
Page 53 and 54:
the net leak rate from the part und
Page 55 and 56:
6.4.1 Trigger Level 1 � Main menu
Page 57 and 58:
6.4.6 Alarm delay � Main menu > T
Page 59 and 60:
6.5 Calibration � Main menu > Cal
Page 61 and 62:
6.6.1 Vacuum settings � Main menu
Page 63 and 64:
Softkey 2: Immediately The inlet po
Page 65 and 66:
Softkey 2: ↓ The entry of the nom
Page 67 and 68:
Since the effective pumping rates a
Page 69 and 70:
6.6.3 Mass � Main menu > Settings
Page 71 and 72:
The fundamental output voltage is s
Page 73 and 74:
Description of operation mode of th
Page 75 and 76:
Softkey 2: Time&Date See chapter 6.
Page 77 and 78:
Softkey 3: ↓ Decrease of the serv
Page 79 and 80:
Softkey No. 2: ↓ Decrease change
Page 81 and 82:
6.7 Information � Main menu > Inf
Page 83 and 84:
6.8.2 Change Menu-PIN � Main menu
Page 85 and 86:
After External Calibration ( Fig. 2
Page 87 and 88:
8 Error And Warning Messages The Ph
Page 89 and 90:
No. Displayed Message Description a
Page 91 and 92:
Head No. Displayed Message Descript
Page 93 and 94:
No. Displayed Message Description a
Page 95 and 96:
9.1.2 Opening the PhoeniXL 2 3 Fig.
Page 97 and 98:
egulations for the safety of the en
Page 99 and 100:
TMP-converter TDS Fig. 37 assembly
Page 101 and 102:
Appendix A B C D F G I L M Ambient
Page 103 and 104:
Abmessungen PhoeniXL Familie in mm
Page 105 and 106:
Fig. 4 Declaration of Conformance H
Page 107 and 108:
Head GA10218_0101 - 9/2002 ⏐ 108
show all

Manual - Leybold Repair by Tech Services

Create successful ePaper yourself

Delete template?

Save as template?