deo4 (pdf)
deo4 (pdf)
deo4 (pdf)
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CVD metali<br />
• Volfram:<br />
– WF 6 + 3H 2 -> W + 6HF<br />
– 2WF 6 + 3SiH 4 -> 2W + 3SiF 4 + 6H 2<br />
T~ 300 o C, hladni zidovi<br />
Athezija sa SiO 2<br />
slaba pa se koristi TiN kao medjusloj<br />
• Aluminijum:<br />
– Tri-izobutil-aluminijum (TIBA)<br />
– LPCVD, T~ 200-300 o C<br />
• Bakar:<br />
– Cu β-diketon, T~ 100-200 o C