Curvature - Laytec
Curvature - Laytec
Curvature - Laytec
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Thickness uniformity tuning using R 950/ R 633<br />
� Batch-mode fitting during growth with marked regions<br />
� Adjust growth parameter according to fit result after step A, B, C, ...<br />
A B C D E<br />
Growth Rate (µm/h)<br />
2.2<br />
2.18<br />
2.16<br />
2.14<br />
2.12<br />
2.1<br />
2.08<br />
2.06<br />
2.04<br />
2.02<br />
2<br />
1.98<br />
1.96<br />
1.94<br />
1.92<br />
1.9<br />
1.88<br />
1.86<br />
1.84<br />
1.82<br />
1.8<br />
Variation MO1-Run Flow<br />
Δr G = 20 nm/h<br />
Δr G = 9 nm/h<br />
Pos #08-1 Pos #08-2 Pos #08-3 Pos #08-4 Pos #08-5<br />
Measurement Position Center -> Edge<br />
B<br />
A<br />
E<br />
D<br />
C
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