Curvature - Laytec

Summary
Temperature:
� Shows response of pocket temperature to process changes
Reflectance:
� Immediate access to important growth parameters (e.g. growth rate)
� Uniformity tuning using line scans across wafer diameter possible
� Morphology check with highly surface-sensitive 405 nm reflectance
Curvature measurement:
� Indispensable for understanding different strain components
� Quantitative analysis of material composition possible
� Shows response of wafer temperature to process changes
All:
� Enabling fast wafer-to-wafer and run-to-run analysis