Curvature - Laytec
Curvature - Laytec
Curvature - Laytec
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Wafer asphericity (deviation from rotational symmetry)<br />
LiAlO 2<br />
bow: ~40 µm<br />
curvature || flat: 130 km -1<br />
curvature ⊥ flat: 2 km -1<br />
bow: ~30 µm<br />
curvature || flat: 50 km -1<br />
curvature ⊥ flat: 57km -1<br />
� Different curvature parallel and perpendicular to main flat<br />
GaN<br />
� Azimuthal position is unkown during in-situ curvature measurement<br />
due to satellite rotation
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