Curvature - Laytec
Curvature - Laytec
Curvature - Laytec
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Wafer curvature<br />
<strong>Curvature</strong> (1/km)<br />
250<br />
200<br />
150<br />
100<br />
50<br />
0<br />
-50<br />
-100<br />
desorption<br />
GaN<br />
<strong>Curvature</strong><br />
growth time (s)<br />
pocket temperature<br />
n-GaN (Al,Ga)N InGaN<br />
1200<br />
1000<br />
800<br />
600<br />
400<br />
T(°C)<br />
0<br />
-200<br />
-400<br />
cooling<br />
� Initial substrate<br />
curvature<br />
� Thermal induced<br />
substrate bow<br />
(concave)<br />
� Temperaturerelated<br />
curvature<br />
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