Contacting various metal compositions using ViProbe® Vertical ...
Contacting various metal compositions using ViProbe® Vertical ...
Contacting various metal compositions using ViProbe® Vertical ...
You also want an ePaper? Increase the reach of your titles
YUMPU automatically turns print PDFs into web optimized ePapers that Google loves.
ViProbe ® on Al Pad.<br />
• Zygo Profilometer.<br />
• Depth of ViProbe ® Scrub on Al Pad post Pass 3,<br />
– Probe Mark Depth = 0.6µM<br />
June 6 to 9, 2010 IEEE SW Test Workshop 24