Contacting various metal compositions using ViProbe® Vertical ...
Contacting various metal compositions using ViProbe® Vertical ...
Contacting various metal compositions using ViProbe® Vertical ...
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ViProbe ® on Cu Pad.<br />
• 3D PMI (Zygo Profilometer).<br />
– x10 touchdown (flattening effect from re‐probe),<br />
– 0.266µM depth.<br />
June 6 to 9, 2010 IEEE SW Test Workshop 34