Contacting various metal compositions using ViProbe® Vertical ...

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Motivation • Minimum pad deformation post sort required for, – Die shipping direct to customer (automotive). – FCOL (Flip Chip on Lead) Bumping process. – OPM (Over Pad Metallisation) Assembly process. • Multiple ‘contact pad’ metal compositions, – Al, Au, Cu. • Multi‐site Sort >8 sites / Grid Array Pattern. – EWLP (Embedded Wafer Level Package). • WLCSP (Minus bump). June 6 to 9, 2010 IEEE SW Test Workshop 4
Motivation (Cont.) • Temperature Sort of products used in, – Automotive, – Industrial applications. • KGD (Data Sheet Specifications) with any combinations of the above. • Increased requirement for Vertical Probe Technologies. – Minimum pad deformation, Stable CRES. June 6 to 9, 2010 IEEE SW Test Workshop 5
Page 1 and 2: Denis Deegan Analog Devices Inc Sim
Page 3: Motivation. ViProbe ® Vertical Pro
Page 7 and 8: ViProbe ® Vertical Probe Technolog
Page 9 and 10: ViProbe ® Vertical Probe Technolog
Page 11 and 12: Motivation. ViProbe ® Vertical Pro
Page 13 and 14: CRES Measurement Setup. Method 2:
Page 15 and 16: CRES Measurement Setup. • Experim
Page 17 and 18: Evaluation Results Al, Au, Cu Pad.
Page 19 and 20: ViProbe ® on Al Pad. • Automotiv
Page 21 and 22: ViProbe ® on Al Pad. • Zygo Prof
Page 23 and 24: ViProbe ® on Al Pad. Pass 1 Pass 2
Page 25 and 26: ViProbe ® on Al Pad. • CRES base
Page 27 and 28: ViProbe ® on Au Pad. • EWLP -Au
Page 29 and 30: ViProbe ® on Au Pad. • 3D PMI (Z
Page 31 and 32: ViProbe ® on Cu Pad. • Cu RDL +
Page 33 and 34: ViProbe ® on Cu Pad. • 3D PMI (Z
Page 35 and 36: ViProbe ® on Cu Pad. • Measure C
Page 37 and 38: ViProbe ® on Cu Pad. • Online Cl
Page 39 and 40: ViProbe ® on Cu Pad. • Cu CRES S
Page 41 and 42: ViProbe ® Temperature Probe 160‘
Page 43 and 44: ViProbe ® Temperature Probe 200‘
Page 45 and 46: Motivation. ViProbe ® Vertical Pro
Page 47 and 48: ViProbe ® ADC Testing in Probe to
Page 53 and 54: Conclusions. • ViProbe ® used su
Page 55 and 56:
Acknowledgements. • Analog Device
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Contacting various metal compositions using ViProbe® Vertical ...

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