DEPFET Pixel Vertex Detector for the ILC - MPG HLL
DEPFET Pixel Vertex Detector for the ILC - MPG HLL
DEPFET Pixel Vertex Detector for the ILC - MPG HLL
You also want an ePaper? Increase the reach of your titles
YUMPU automatically turns print PDFs into web optimized ePapers that Google loves.
Figure 15: Top (left) and handle wafer side (right) of two diced chips (1 cm 2 )<br />
with four 10 mm 2 diodes on 50µm thin silicon<br />
150 nA/ cm 3 at 5 V bias voltage, both be<strong>for</strong>e and after etching of <strong>the</strong> handle<br />
wafer.<br />
Figure 16: Bulk generated current versus reverse bias voltage of three thin<br />
10 mm 2 PiN diodes<br />
2.6 Measurements on Single <strong>Pixel</strong>s and Small Matrices<br />
The principle features of <strong>DEPFET</strong> sensors <strong>for</strong> <strong>the</strong> <strong>ILC</strong> have been characterized<br />
with measurements on individual pixel structures and on small pixel<br />
17
Change language