Fluorescence X-ray Spectrometer System ZSX Series - Rigaku

The Rigaku Journal
Vol. 16/ number 2/ 1999
Product Information
Fluorescence X-ray Spectrometer System
ZSX Series
The ZSX: Innovative XRF Technology-Accelerated.
1 Introduction
The ZSX is a revolutionary WDXRF system that
combines innovative and powerful software with the
best available hardware technology. ZSX software
incorporates Rigaku's long accumulated experience
and expertise in X-ray spectrometry analysis with
cutting edge technology. While the ZSX is built on
solid, state-of­the-art technology, it features a simple
user interface. The novice is guided along with templates
that cover everything from sample preparation
to control samples. And, the experienced XRF analyst
can utilize the same interface to operate independently
with a full suite of analytical capabilities. ZSX software
contains the most advanced FP program available
and its EZ scan program allows rapid measurement
of unknown samples with no prior setup.
The ZSX hardware incorporates the best available
technology for high-sensitivity and high-resolution
measurements. Its design incorporates modular components
that allow a wide variety of configu-rations.
This design means that the ZSX is capable of
hardware upgrades on site. The ZSX can be configured
with normal (tube above) or inverted (tube below)
optics and high-powered side or end window X-ray
tubes. Its flexible layout means that valuable laboratory
space can be saved by remote location of the
X-ray generator and heat exchanger.
ZSX Options include an R-Theta sample stage, a
CCD camera and mapping capability for easy and
rapid surface mapping for contamination testing.
Micro-area analysis is possible down to 0.5 mm; and,
with the exclusive high focus end window tube and
high sensitivity optical system, there is a 10X increase
in intensity when compared to existing micro area
analysis systems offered.
The optional X-Y automatic sample changer
provides quick and reliable sample transport with or
without sample cups. Applications Packages that
provide turnkey solutions to applications problems,
such as steels, brass, oils, refractories and cement, are
also available.
2. Features
(1) A new 3-axis (2-22-22) goniometer makes it
possible to select a detector arrangement according to
the analysis objective, specifically, high-sensitivity
analysis or high-resolution analysis.
(2) Accurate mapping and point analysis can be
realized with the use of a CCD camera. This enables
the operator to identify faulty portions of the sample
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with CCD viewing and to specify the location of
analysis simply by a click of the mouse.
(3) A new r-2 stage is employed to allow
microarea analysis with optimized conditions. In
mapping and point analysis, there is no effect from the
unevenness of radiation from the X-ray tube or from
reflection with the analyzing crystal.
(4) The ZSX produces wavelength dispersive X-
ray fluorescence analysis with a measurable sample
diameter down to 50 :m.
(5) A variety of X-ray tubes are available
including a 30 :m thin window X-ray tube featuring
high sensitivity for light elements and an X-ray tube
optimal for small diameter samples.
(6) A tray system incorporated in the ASC
(automatic sample changer) facilitates the control and
conveyance of samples.
(7) The revolutionary software package contains a
full suite of analysis capabilities with a simple,
straightforward user interface.
(8) Windows NT Operating System.
3. Application Field
Application fields and specific examples are listed
below.
Applications Examples
Electronics and
magnetic
Chemical industry
Ceramics
Steel
Nonferrous metals
Mining
Petroleum, coal
Environmental analysis
Other
4. Optical System
LSI, memory disk, CRT parts, magnetic
materials
Catalyst, polymer, pharma ceuticals,
fertilizer, pigment, paint, oil & fat,
detergent, cosmetics
Silicon nitride, alumina, glass,
refractories, enamel, cement
Special steel, surface treat ment steel
plate, ferroalloy, cast iron, cast steel,
iron ores, plating liquid
Aluminum, shape memory alloy, copper
alloy, precious metal, Ni alloy, solder,
plating liquid
Ore, rock, volcanic ash
Grease, lubricant, cutting oil, kerosene,
heavy oil
Waste water, seawater, river water, airborne
dust, in- dustrial wastes
Soil , rock, plant, organisms, foodstuff
Fig. 1 shows the optical system of the ZSX. When
a sample is irradiated with the primary X-ray beam
from an X-ray tube, fluorescent X-rays whose
Fig. 1. New Optics of ZSX
Vol. 16 No. 2 1999 59

wavelengths are characteristic of the elements in the
sample will transpire. These secondary X-rays then
undergo spectral processing with the analyzing crystal
and are detected by the detector (SC, F-PC). The ZSX
Fig. 2. Sensitivity Comparison Profiles in Offset
Arrangement and Tandem Arrangement.
is equipped with a 3-axis (2-22-22) independent
driving goniometer. This allows for the selection of
the offset arrangement for high-resolution analysis or
for the tandem arrangement for high-sensitivity
analysis (SC+F-PC arranged in series).
The SC detector can be equipped with an optional
high-sensitivity slit. This can be installed in addition
to the standard high-resolution slit. This allows an
optimal combination to meet the desired analytical
requirement. Fig. 2 shows a sensitivity comparison
chart for the tandem arrangement. The sample
chamber employs a double vacuum system. A
preliminary vacuum chamber is also provided to
enable evacuation for a subsequent sample while
measurement of the current sample is occurring.
5. r-2 Sample Stage and CCD Point Analysis
Figure 3 depicts the X-ray intensity distribution
that takes place with the primary X-rays. The
conventional design enables the maximum X-ray
intensity to be obtained with a standard diameter
sample. However, for small diameter samples, the
measurement will occur at a position deviating from
the maximum X-ray intensity. With the ZSX, the use
Fig. 3. Sensitivity Comparison by use of the r-2 stage.
60 The Rigaku Journal

Fig. 4. CCD Picture of Granite Sample and Comparison Chart.
of the r-2 stage makes it possible to perform
measurements at the maximum X-ray intensity
position even for small diameter samples. And, when
used with the CCD camera, this r-2 stage is especially
effective for mapping processing by CCD viewing as
well as for the analysis of a faulty portion on the
sample.
Figure 4 shows the point analysis result of a rock
by the use of the r-2 stage along with the CCD camera.
6. Software
The ZSX software incorporates Rigaku's
longaccumulated experience and expertise in X-ray
spectrometry analysis with cutting edge technology. It
is so easy to use that even a novice can quickly use it
correctly. The ZSX software configuration is shown
below.
6.1. SQX(ScanQuantX)
Software for computation covering qualitative
analysis through semiquantitative values.
6.2. EZ scan
Sophisticated SQX analysis can be performed
with five easy steps.
6.3. Application packages
Turnkey solutions for a variety of applications.
These packages include standards set-up, optimal
calibration curves and program check standards.
6.4. Application templates
The user is guided along the analysis with
templates that incorporate steps from sample
pretreatment methods to measuring conditions up
to control samples.
6.5. Universal standard samples
A database of commercially available standard
reference samples is already in place. No
additional data entry work is necessary.
6.6. Fixed-precision measurement
If a required precision is entered, the analysis is
carried out with the optimized measurement time
for each of the unknown samples.
6.7. Energy saving function
The X-ray output can be automatically reduced
according to the amount of instrument idle time.
6.8. Automatic program run
This provides system ON/OFF, resumption after
power failure, auto aging, PR gas flow control,
etc.
6.9. Decision on material
Retrieval of standards is made, such as the JIS
(Japanese Industrial Standard), for instance.
6. 10. E-mail transfer
The analysis result, an error message, or other
information can be e-mailed.
6. 11. Remote control
Remote-control operation can be made using
LAN.
6.12. Remote diagnosis
Diagnosis of the system status can be made from
the Rigaku service station through e-mail.
6.13. Automatic selection of sample diameter
Automatic setting of the optimum area limiting
diaphragm is performed for a given sample
diameter.
Vol. 16 No. 2 1999 61

Fig. 5. ZSX Software Configuration
7. Configuration, Specification
X-ray generator
ZSX100e ZSX101e ZSX100s ZSX101s
Rated voltage & current
Voltage: 60 kV
Current: 150 mA (rkW spec.)
100 mA or 80 mA (ekW spec.)
(Upper limit of current value differs depending on
the tube type).
Voltage: 60 kV
Current: 80 mA
Max. Continuous Output 4 kW or 3 kW 3 kW
Stability "0.005% (for input variation "10%
Control
Safety device (standard), energy saving run (standard), automatic program run (optional)
X-ray spectrometer assembly
X-ray tube
Sample changer
End window type
Single target: Rh, W, Mo (3kW)
Cr (2.4 kW)
Thin window type: Rh (3kW, 4kW)
Micro analysis handling type: Rh (4kW)
Dual target: Rh/Cr (3/2.4 kW), Rh/W (3/3 kW)
One sample feed, 12-turret, ASC48
Side window type
Single target: Rh, Cr, W, Mo, Au (3kW)
Sample chamber
Sample inlet: Air lock system
Sample chamber inside turret: 2 positions with sample detector
Sample size: 51 mm N x 30 mm H max. (ZSX100e/100s)
51 mm N x 46 mm H max. (ZSX 101e/101s)
Stage Spinner or r-2 driving Spinner
Primary beam filter Select from Ti, Al, CU, Zr (2 kinds), and Fe One kind selectable from Ti, Al, Cu, Zr
62 The Rigaku Journal

ZSX100e ZSX101e ZSX100s ZSX101s
Area limiting diaphragm
Divergence slit
30 mm N fixed (no attenuator) or 35, 30, 25, 20, 10,
3, 1, 0.5 mm N and attenuator exchanger
(For spinner or r-2 driving)
Standard resolution, 1 kind, fixed or slit exchanger
Select from standard resolution, high resolution and
ultralight element use
30 mm N fixed (no attenuator) or 35, 30, 25, 20, 10
mm N (no attenuator exchanger)
(spinner)
Standard resolution, 1 kind, fixed or slit exchanger
Selection from standard resolution and high
resolution
Receiving slit
Goniometer
Crystal exchanger
Analyzing crystal
Detector
Vacuum system
Temperature stabilizer
Option
High resolution for SC (standard) high sensitivity for SC (optional), for F-PC (select for ZSX101e/101s)
2-22-22 3-axis independent drive system
Scan range: SC -1~118E (22)
F-PC 7~148E (22)
Scan speed: Max 1400E/min
Step angle: 1E/1000, 2E/1000, 5E/1000, 1E/100, 2E/100, 5E/100, 1E/100
Continuous scan: 0.1~240E /min (optional)
10-crystal exchanger or 4-crystal exchanger
Select from LIF(200) PET, Ge, TAP, RX-4, RX-9, RX-35, LiF (220)
Select from RX-40, RX-45, RX-60, RX-70, RX-80
For Ti~U: Scintillation counter (SC)
For Be~Zn: Gas-flow proportional counter (F-PC)
With center wire cleaner and gas density stabilizer
High-speed vacuum system (2 vacuum pumps), or general-purpose vacuum system (1 vacuum pump)
Temperature for control: 36.5EC"0.1EC
Powder sample attachment, automatic He substitution device, PR gas switching device, remote diagnosis,
remote control, mapping device, sample observation mechanism
Vol. 16 No. 2 1999 63