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Magnetic Rotary Motion Feedthrough Units - Rigaku

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Custom-designed<br />

Products<br />

Various functions may be achieved based on the standard items. Shafts, locating bosses,<br />

and bellows can be added to customize the <strong>Rigaku</strong> sealing system to your application.<br />

Flange Mount<br />

Solid Shaft Cantilevered* Type<br />

*The cantilevered design isolates both bearings from the process<br />

Prevention of dust generated from the<br />

bearing at vacuum side<br />

High speed rotation<br />

Long service life<br />

The cantilever type has the above features<br />

and is available with either solid or hollow<br />

shafts.<br />

Specifications:<br />

Vacuum integrity<br />

Atmosphere<br />

Bearing mechanism<br />

10 -6 Pa<br />

(pressure differential 250 kPa)<br />

For vacuum, inert gas, active gas<br />

Atmosphere side<br />

(cantilever bearing system)<br />

Consult us on diameter, rpm, and installation<br />

method (flange method).<br />

VAC<br />

Bearing location<br />

ATM<br />

Example of F1-20-W (20 mm-dia shaft)<br />

(with labyrinth)<br />

VAC<br />

Bearing location<br />

ATM<br />

Tel: 603-890-6001 Fax: 603-890-6016 www.rigaku.com<br />

Page 26

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