Magnetic Rotary Motion Feedthrough Units - Rigaku

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$The New Standard of X-ray Diffractometer: MultiFlex - Rigaku$

Function Enhanced Products High pressure type Pressure side Application: Specification: Sealing of high pressure container, etc. Pressure differential 350 kPa, revolution speed 3000 rpm With a purge port VAC ATM Application: Prevention of contamination with gas or dust particles Specification: 10 -4 Pa Gas induction type (vacuum chuck/union) Tel: 603-890-6001 Fax: 603-890-6016 www.rigaku.com Page 30
Ultra-High Vacuum <strong>Rigaku</strong> has developed a magnetic rotary seal unit featuring a unique structural system (Japanese patent no.3006780) as a rotary feedthrough system for ultra-high vacuum. The evacuation of an interstage port keeps oil mist and microbubbles of magnetic fluid base liquid from entering the vacuum side, preventing the contamination of the vacuum. The chamber remains in an ultra-high vacuum state as a result of differential pumping through an orifice. High torque can be transmitted with this unit. An example of an ultra-high vacuum system with the magnetic rotary seal RMS series System diagram <strong>Magnetic</strong> rotary seal unit Vacuum gauge on an ultra-high vacuum side Vacuum Chamber Vacuum gauge on a differential pumping side TMP RP The system has the following features: Ultra-high vacuum (up to 10 -8 Pa) is achieved by an orifice effect and the adoption of differential pumping that prevents base liquid mist from entering the ultra-high vacuum side Ultra High vacuum levels are attainable High rpm is possible Pressure measurement result Pressure [Pa] Baking temp. :220 Measured at 300 rpm Specifications Ultimate pressure Temperature range Rotation speed Evacuation system up to 10 -8 Pa 0 to 80 o C 100 to 700 rpm Differential pumping method Time [hour] Tel: 603-890-6001 Fax: 603-890-6016 www.rigaku.com Page 31
Page 1 and 2: Magnetic fluid sealing for vacuum a
Page 3 and 4: Magnetic fluid sealing for vacuum a
Page 5 and 6: Catalog Tips Features The unique Ma
Page 7 and 8: Excellent Magnetic-field Resistance
Page 9 and 10: Rigaku helps to provide a clean vac
Page 12 and 13: Solid Shaft Base Plate (Through Hol
Page 14 and 15: Solid Shaft BS (Nose mount) - LS (B
Page 16: Solid Shaft Nose Mount Nose mount N
Page 20 and 21: SuperseaL Solid Metric Shaft 2.75 I
Page 22 and 23: Solid Shaft Flange Mount H VAC E F
Page 24 and 25: Metric Solid Shaft Flanged and Nose
Page 26 and 27: Metric Hollow Shaft Cartridge Mount
Page 28 and 29: Metric Hollow Shaft Flange Mount A
Page 30 and 31: Custom-designed Products Various fu
Page 32 and 33: Direct Drive Motor Equipped Models
Page 40 and 41: Operational Environment Omni-Lev Mo
Page 42 and 43: FEEDTHROUGH INFORMATION Standard se
Page 44: Application Requirements for Magnet

Magnetic Rotary Motion Feedthrough Units - Rigaku

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