Magnetic Rotary Motion Feedthrough Units - Rigaku

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$The New Standard of X-ray Diffractometer: MultiFlex - Rigaku$

Application examples Epitaxial systems Vacuum transport robot Stirrer CVD Rotating anode X-ray generator Sputtering systems Ion implanter Semiconductor Processing Equipment LCD Processing Equipment Organic EL Display Processing Equipment etc. Vacuum chuck mechanism Gas induction mechanism Single crystal growth Arc discharger for CNT Vacuum furnace pressurized furnace Etching systems Tel: 603-890-6001 Fax: 603-890-6016 www.rigaku.com Page 4
Rigaku helps to provide a clean vacuum Magnetic rotary seal unit, developed with Rigaku's own technologies, is the optimum tool for the introduction of rotary motion into vacuum or differential pressure environments. Clean high vacuum Wide range of rotation speeds, from low to high High reliability with leak-free operation Long service life resulting from non-contact sealing Usable in pressurized, active gas atmospheres Concentric or eccentric multi-axial sealing units available High transmitted torque, zero backlash Custom designs are also available to suit your application Magnetic circuit configuration unique to Rigaku Unlike the conventional rubber seal or mechanical seal, the Rigaku magnetic rotary seal unit employs a magnetic fluid which fills the gap between the moving shaft and its stationary housing to act as sealer. Sealing is effected without friction by the action of a powerful high-energy magnet. This results in a long, wear-free service life. Moreover, because of the unique Rigaku magnetic circuit, very high reliability is attained, allowing a pressure differential of 202 kPa(30 PSIG). Another benefit of this unique seal design is near zero leakage: less than 1.3X10 -12 Pa . m 3 /sec (1.3X10 -11 std. cc/sec) (Helium). Its high reliability has already been confirmed in applications such as Rigaku high-power X-ray generators. The Rigaku magnetic rotary seal unit serves a broad spectrum of applications including the latest production equipment for semiconductors, liquid crystal/plasma FPDs and organic EL, and sealing of single axis and multi-axial rotary sections of clean robots. These magnets are arranged in opposition to each other (NS-SN-NS) to produce powerful magnetic flux patterns in opposing directions. The inner periphery of the pole piece has two knife edges at which the repulsive magnetic flux is concentrated. Consequently, an ideal magnetic circuit is formed to concentrate the magnetic fluid in the seal areas, maintaining the pressure differential across each stage. This design allows a large gap between the pole piece and the rotary shaft, thereby allowing high-speed shaft rotation, large shaft diameters and a long service life. Bearing Magnetic flux magnetic fluid Pole piece Permanent magnet Tel: 603-890-6001 Page 5 www.rigaku.com
Page 1 and 2: Magnetic fluid sealing for vacuum a
Page 3 and 4: Magnetic fluid sealing for vacuum a
Page 5 and 6: Catalog Tips Features The unique Ma
Page 7: Excellent Magnetic-field Resistance
Page 12 and 13: Solid Shaft Base Plate (Through Hol
Page 14 and 15: Solid Shaft BS (Nose mount) - LS (B
Page 16: Solid Shaft Nose Mount Nose mount N
Page 20 and 21: SuperseaL Solid Metric Shaft 2.75 I
Page 22 and 23: Solid Shaft Flange Mount H VAC E F
Page 24 and 25: Metric Solid Shaft Flanged and Nose
Page 26 and 27: Metric Hollow Shaft Cartridge Mount
Page 28 and 29: Metric Hollow Shaft Flange Mount A
Page 30 and 31: Custom-designed Products Various fu
Page 32 and 33: Direct Drive Motor Equipped Models
Page 34 and 35: Function Enhanced Products High pre
Page 40 and 41: Operational Environment Omni-Lev Mo
Page 42 and 43: FEEDTHROUGH INFORMATION Standard se
Page 44: Application Requirements for Magnet

Magnetic Rotary Motion Feedthrough Units - Rigaku

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