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Magnetic Rotary Motion Feedthrough Units - Rigaku

Magnetic Rotary Motion Feedthrough Units - Rigaku

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FEEDTHROUGH INFORMATION<br />

Standard series<br />

The shaft is held with bearings at both ends of the housing. This series offers large transmission<br />

torque, no backlash, and high-precision rotation.<br />

The bearings on the vacuum side are treated with special grease suitable for use in an extremely<br />

high vacuum to assure a clean vacuum system.<br />

Common specifications<br />

Vacuum integrity<br />

Pressure differential<br />

Operating temp. range<br />

Leak rate<br />

Atmosphere<br />

Standard accessories<br />

:<br />

:<br />

:<br />

:<br />

:<br />

:<br />

10 -6 Pa<br />

250kPa<br />

0 to 100<br />

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