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ABOUT<strong>to</strong>oling<br />

Accurate <strong>to</strong>ol registration boosts precision<br />

16 | MARCH/APRIL 2010 | <strong>MICROmanufacturing</strong><br />

New technology is permitting the consistent<br />

production and application of<br />

micro<strong>to</strong>ols down <strong>to</strong> 10μm in diameter and<br />

smaller. Tool and die shops are using these<br />

<strong>to</strong>ols <strong>to</strong> create microfeatures in hard and difficult-<strong>to</strong>-machine<br />

materials. One challenge<br />

in applying micro<strong>to</strong>ols, however, is their registration<br />

with respect <strong>to</strong> the workpiece. To<br />

prevent <strong>to</strong>ol breakage and meet <strong>to</strong>lerances,<br />

proper registration must be maintained.<br />

Microlution<br />

A Blum l<strong>as</strong>er <strong>to</strong>ol setter mounted on a Microlution<br />

5100-S machine <strong>to</strong>ol.<br />

Obviously, the old trick of pinching a piece<br />

of paper between the <strong>to</strong>ol and workpiece is<br />

not effective in the microworld. These small,<br />

fragile <strong>to</strong>ols are difficult <strong>to</strong> <strong>view</strong>, even with<br />

an optical microscope. As a result, new me<strong>as</strong>urement<br />

strategies are required. A combination<br />

of workpiece probing and <strong>to</strong>ol setting<br />

can provide an effective approach <strong>to</strong> achieving<br />

precise registration.<br />

Applying <strong>to</strong>ol setters<br />

A way <strong>to</strong> optimize precision in micromachining<br />

is <strong>to</strong> apply <strong>to</strong>ol setters that allow onmachine<br />

<strong>to</strong>ol location and size me<strong>as</strong>urement.<br />

However, not all <strong>to</strong>ol setters are useful for<br />

microapplications.<br />

The challenges of using <strong>to</strong>ol setters in<br />

micromachining must be unders<strong>to</strong>od within<br />

the context of spindle speed requirements.<br />

It’s typical <strong>to</strong> use pressurized air-bearing<br />

spindles that operate at speeds from 60,000<br />

<strong>to</strong> 250,000 rpm. These spindles can produce<br />

high error motions due <strong>to</strong> their relatively low<br />

stiffness. Hybrid ball bearing spindles have<br />

a stiffness of around 60 new<strong>to</strong>n/μm, while<br />

high-speed air bearing spindles can have a<br />

stiffness <strong>as</strong> low <strong>as</strong> 1 new<strong>to</strong>n/μm. These conditions,<br />

combined with misalignment of the<br />

<strong>to</strong>ol in the collet, can produce <strong>to</strong>ol runouts<br />

from 1μm <strong>to</strong> 10μm, and these values can vary<br />

with spindle speed and <strong>to</strong>ol changes. Me<strong>as</strong>uring<br />

the <strong>to</strong>ol diameter at zero speed will<br />

not provide useful calibration information.<br />

Ideally, the spindle should be operating at full<br />

speed during me<strong>as</strong>urement and should not<br />

s<strong>to</strong>p before engaging the workpiece.<br />

To address this issue, several companies<br />

have introduced noncontact, high-resolution<br />

l<strong>as</strong>er <strong>to</strong>ol setters for micromanufacturing (see<br />

pho<strong>to</strong>, left). These <strong>to</strong>ol setters can me<strong>as</strong>ure<br />

with the spindle operating at up <strong>to</strong> 150,000<br />

rpm. Integral air jets on some <strong>to</strong>ol setters<br />

keep cutting <strong>to</strong>ols clean. This can be vital for<br />

me<strong>as</strong>urement because chips and dirt particles<br />

can be nearly <strong>as</strong> large <strong>as</strong> the <strong>to</strong>ol itself.<br />

Solvents such <strong>as</strong> isopropyl alcohol or ace<strong>to</strong>ne,<br />

combined with an air bl<strong>as</strong>t, can effectively remove<br />

fluids and particles.<br />

One disadvantage of l<strong>as</strong>er <strong>to</strong>ol setters is<br />

they only detect <strong>to</strong>ol diameter and position in<br />

one direction. Typically, the <strong>to</strong>ol setter is oriented<br />

<strong>to</strong> me<strong>as</strong>ure in a direction that is planar<br />

with the structural loop of the machine <strong>to</strong>ol<br />

(typically the Y-axis). Due <strong>to</strong> thermal variations,<br />

this direction experiences more displacement,<br />

for which the <strong>to</strong>ol setter must<br />

compensate.<br />

The entire perimeter of a <strong>to</strong>ol is used during<br />

milling, and me<strong>as</strong>uring <strong>to</strong>ol runout in<br />

all directions is important. It is a misnomer<br />

that once <strong>to</strong>ol runout is me<strong>as</strong>ured in one direction<br />

it is the same in all directions. This is<br />

the c<strong>as</strong>e for collet-placement errors, but not<br />

spindle rotation errors. Spindles can scribe<br />

a multilobed profile <strong>as</strong> they rotate, and this

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