2012-2016 Microsystem Technology Strategy and Roadmaps
2012-2016 Microsystem Technology Strategy and Roadmaps
2012-2016 Microsystem Technology Strategy and Roadmaps
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Nanotechnology Focus<br />
• Exploration <strong>and</strong> development of nano-scale devices <strong>and</strong><br />
material structures<br />
• Access to nano-scale technologies to develop novel devices<br />
or to enhance various functions of microsystems<br />
(acceleration, pressure, flow, sensitivity, etc.)<br />
• Access to nano-capabilities through micro/nano fabrication<br />
labs (“FACT lab”)<br />
– Deposition, e-beam patterning, characterization at nano-level<br />
• CAD tools for exploration <strong>and</strong> development of materials <strong>and</strong><br />
nano-scale structures <strong>and</strong> devices<br />
© <strong>2012</strong>, CMC <strong>Microsystem</strong>s <strong>Strategy</strong> <strong>and</strong> Roadmap, Work in Progress 34
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