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Corrections performed by the foundry• Some manufacturingdistortions can bepredicted and fixedby introducingmodifications to themask OPC: OpticalProximity CorrectionFrom “Nano-CMOS Circuit and Physical Design”,Wong et al, IEEE PressCorrections performed by the foundryExamples ofcorrectionsautomaticallyintroduced by a OPCalgorithm to theshapes in the maskFrom “Nano-CMOS Circuit and PhysicalDesign”, Wong et al, IEEE Press