Simulation of Lithography with SolidWorks - Foundation Coalition

Figure 3. Set the color to the correct n or p type Si.Color of Process RuleWhen you add a layer, right click on that feature and set the Feature to the codedcolor of the material.When you cut through a layer set the color of that feature to the color of the layer!This will result in proper colors of the layer side walls.At your last step you need to select the final expose surfaces and color those the colorof the material that is showing.Layer Addition RuleWhenever you add a layer, you must step in from the prior edge by 1 mm. Theseprovides you—and me—with a check of where your layers are.Oxidation of Silicon (Oxide Mask)Silicon oxidation consumes Si as Si0 2 forms. The thickness ratio of oxide to Si is1:0.44. We will use a ratio of 1:0.5 with an extrude method. Figure 4 shows red is thecolor of the oxide layer.040920TSCD_SimulationsSolidworksB.doc 3Last printed 3/13/2005 5:06 PM