Simulation of Lithography with SolidWorks - Foundation Coalition

Figure 11. The result of the process. Rename the extrude/cut as Expose/Developand use right click to change the color to the color of the cut surface—thisphotoresist is white. If you stop, color the final exposed surfaces in the materialcolor, which the right image shows.Negative MaskAny mask that has nested closed regions of more than two sets must be usedrepeatedly. In the first use the outer lines and first set of lines within them are solid.Deeper nests of lines must be deleted or set as ‘construction’ lines. You paste in the maskas many times as needed to complete the exposure and development process.Figure 12. The inner portions of the negative mask must be set to constructionlines.040920TSCD_SimulationsSolidworksB.doc 8Last printed 3/13/2005 5:06 PM