Simulation of Lithography with SolidWorks - Foundation Coalition
Simulation of Lithography with SolidWorks - Foundation Coalition
Simulation of Lithography with SolidWorks - Foundation Coalition
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POSITIVE RESISTPositive MaskFigure 9. Left, select the top <strong>of</strong> the oxide layer; right, paste the mask sketch.Figure 10. Left, align the mask sketch <strong>with</strong> the substrate; right, extrude/cut <strong>with</strong>the settings shown.040920TSCD_<strong>Simulation</strong>sSolidworksB.doc 7Last printed 3/13/2005 5:06 PM