Simulation of Lithography with SolidWorks - Foundation Coalition

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Figure 7. You might need to add the Text Icon to the Sketch bar.Figure 8. Left, this mask removes material between the letters and the outerboarder. Right, this make removes material within the letters.040920TSCD_SimulationsSolidworksB.doc 6Last printed 3/13/2005 5:06 PM

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POSITIVE RESISTPositive MaskFigure 9. Left, select the top of the oxide layer; right, paste the mask sketch.Figure 10. Left, align the mask sketch with the substrate; right, extrude/cut withthe settings shown.040920TSCD_SimulationsSolidworksB.doc 7Last printed 3/13/2005 5:06 PM

Page 1 and 2: SIMULATION OF LITHOGRAPHY/MEMS/NEMS
Page 3 and 4: Figure 3. Set the color to the corr
Page 5: Figure 6. Positive photoresist over
Page 9 and 10: Figure 13. This negative mask requi
Page 11: EtchEtch chemical target specific m

Simulation of Lithography with SolidWorks - Foundation Coalition

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