Instr Manual: EXT Compound Molecular Pumps: EXT70H ... - Edwards

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2 TECHNICAL DATA2.1 GeneralPerformance See Tables 1 and 2Cooling, noise and electrical data See Table 3Dimensions See Figures 4 and 5Maximum inlet-flange temperature100 o CMaximum magnetic field5 mTInstallation category EN61010 part 1, Category 1Pollution degree EN61010 part 1, Category 2Equipment typeFixed equipment, for indoor use only2.2 Pumping mediaWARNINGVent dangerous gases and gas mixtures safely. Do not expose people to these gases.WARNINGDo not use EXT pumps to pump explosive gas mixtures as the pumps are not suitable forthis purpose.WARNINGOn EXT70Hi and EXT250Hi pumps, gas pumped through the interstage-port will mix withgas pumped through the pump-inlet. Ensure that the gases will not react or combine toform dangerous gases and substances.CAUTIONDo not use an EXT to pump gases containing more than 20% oxygen unless the pump isgas purged. If you do, the lubricant will polymerise and the pump will fail prematurely.CAUTIONDo not use an EXT to pump mercury vapour and do not allow mercury (for example, froma Mcleod gauge) to come into contact with the pump. If you do, the pump rotor maycorrode and fail.Note that concentrations of gases may be modified by the compression of the pump.6 EXT Compound Molecular Pumps
2.2.1 Pumps without gas purgeThe pumps are designed to pump the following residual gases normally used in high-vacuumsystems : Air Carbon monoxide Neon Ethane Methane Nitrogen Krypton Argon Propane Carbon dioxide Helium Hydrogen ButaneYou can use the pumps to pump oxygen and water vapour, subject to the following conditions : Oxygen The oxygen concentration must be less than 20% by volume. Water vapour You must ensure that vapour does not condense inside the pump;refer to Section 3.7.3.If you wish to pump a gas not in the list above, contact your supplier for advice. If you do notcontact your supplier, you may invalidate the warranty on the pump. The pumps are not suitablefor pumping aggressive or corrosive gases.2.2.2 Pumps with gas purge (EXT250H and EXT250Hi only)When purged with an inert gas, the pumps can be used to pump oxygen in concentrations above20% by volume.2.3 Vent gas specification and vent control dataAlthough the pump may be vented to atmospheric air, high relative humidity of the air maygreatly increase the subsequent pumping time. To reduce pump-down times you should ventthe pump with dry, clean gases.Vent gasDry air, nitrogen, argon or otherinert gasesMaximum dew point at atmospheric pressure -22 o CMaximum size of particulates1 mMaximum concentration of oil0.1 parts per millionMaximum allowed rate of pressure rise See Figure 32.4 Purge gas specification (EXT250H and EXT250Hi only)Purge gasDry nitrogen, argon or otherinert gasesMaximum dew point at atmospheric pressure -22 o CMaximum size of particulates1 mMaximum concentration of oil0.1 parts per millionAllowable purge gas flow (when required) 20 to 100 sccm (0.33 to 1.67 mbar l s -1 ,33 to 167 Pa l s -1 )Recommended purge gas flow 25 sccm (0.42 mbar l s -1 , 42 Pa l s -1 )Maximum allowable purge gas supply pressure 2 bar (gauge) ; 29 psig, 3 x 10 5 PaEXT Compound Molecular Pumps 7
Page 2 and 3: Declaration of ConformityWe, BOC Ed
Page 4: Section Title Page5.3 Rotor life 27
Page 7 and 8: 1 INTRODUCTION1.1 Scope and definit
Page 9: 1. Inlet-flange2. Inlet-screen3. Ma
Page 14 and 15: Figure 3 - Maximum allowed rate of
Page 16 and 17: Parameter EXT250H EXT250Hi NotesMas
Page 18 and 19: 1. Vent-valve2. Backing-port3. Cool
Page 20 and 21: 3 INSTALLATIONWARNINGSafely route a
Page 22 and 23: 1. Vacuum chamber 12. High-vacuum g
Page 24 and 25: 3.3.3 Base mountingEnsure that the
Page 26 and 27: If the volume of your vacuum system
Page 28 and 29: 3.7 Cooling3.7.1 IntroductionCAUTIO
Page 30 and 31: 4 OPERATIONWARNINGDo not disconnect
Page 32 and 33: 4.5 BakeoutCAUTIONWhen you bake the
Page 34 and 35: 5.4 Clean the pumpWARNINGClean the
Page 36 and 37: Symptom Check ActionThe EXC Control
Page 38 and 39: Symptom Check ActionThe EXT is very
Page 40 and 41: 7 SERVICE, SPARES AND ACCESSORIES7.
Page 42 and 43: 7.4.4 EXDC Drive ModulesFit an EXDC
Page 44 and 45: 7.4.8 ACX air-coolerAn ACX air-cool
Page 46 and 47: This page intentionally blank.40 EX
Page 48 and 49: Form HS2Return of BOC Edwards Equip
Page 50: P800-80-000 Issue J 01A09-010UNITED

Instr Manual: EXT Compound Molecular Pumps: EXT70H ... - Edwards

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