Instr Manual: EXT Compound Molecular Pumps: EXT70H ... - Edwards

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Symptom Check ActionThe EXT is very noisyor there is excessivevibration or both(continued).Is the EXT making a constanthigh-pitched noise ?If so, the rotor is out of balance.Consult BOC Edwards or yoursupplier.None of the above. - Consult BOC Edwards or yoursupplier.Table 6 - Fault finding (continued)32 EXT Compound Molecular Pumps
6 STORAGE AND DISPOSAL6.1 StorageUse the following procedure to store the pump.1. Place protective covers over the inlet, outlet, interstage*, purge ✝ and vent ports.2. Place the pump in its packing materials. For fastest pump-down when the pump is put backinto service, seal the pump inside a plastic bag together with a suitable desiccant.3. Store the pump in cool, dry conditions until required for use. When required, prepare andinstall the pump as described in Section 3.4. Keep the pump upright at all times to prevent the drainage of oil from the bearing reservoir.5. Avoid long-term storage if possible. When long-term storage is necessary, the pump shouldbe set up and run for at least eight hours every six months.6.2 DisposalDispose of the EXT Turbomolecular Pump and any components and accessories safely inaccordance with all local and national safety and environmental requirements.Take particular care with any components which have been contaminated with dangerousprocess substances.Do not incinerate the pump. The pump contains phenolic and fluorosilicone materials whichcan decompose to very dangerous substances when heated to high temperatures.* EXT70Hi and EXT250Hi pumps only.✝ EXT250H and EXT250Hi pumps only.EXT Compound Molecular Pumps 33
Page 2 and 3: Declaration of ConformityWe, BOC Ed
Page 4: Section Title Page5.3 Rotor life 27
Page 7 and 8: 1 INTRODUCTION1.1 Scope and definit
Page 9: 1. Inlet-flange2. Inlet-screen3. Ma
Page 12 and 13: 2 TECHNICAL DATA2.1 GeneralPerforma
Page 14 and 15: Figure 3 - Maximum allowed rate of
Page 16 and 17: Parameter EXT250H EXT250Hi NotesMas
Page 18 and 19: 1. Vent-valve2. Backing-port3. Cool
Page 20 and 21: 3 INSTALLATIONWARNINGSafely route a
Page 22 and 23: 1. Vacuum chamber 12. High-vacuum g
Page 24 and 25: 3.3.3 Base mountingEnsure that the
Page 26 and 27: If the volume of your vacuum system
Page 28 and 29: 3.7 Cooling3.7.1 IntroductionCAUTIO
Page 30 and 31: 4 OPERATIONWARNINGDo not disconnect
Page 32 and 33: 4.5 BakeoutCAUTIONWhen you bake the
Page 34 and 35: 5.4 Clean the pumpWARNINGClean the
Page 36 and 37: Symptom Check ActionThe EXC Control
Page 40 and 41: 7 SERVICE, SPARES AND ACCESSORIES7.
Page 42 and 43: 7.4.4 EXDC Drive ModulesFit an EXDC
Page 44 and 45: 7.4.8 ACX air-coolerAn ACX air-cool
Page 46 and 47: This page intentionally blank.40 EX
Page 48 and 49: Form HS2Return of BOC Edwards Equip
Page 50: P800-80-000 Issue J 01A09-010UNITED

Instr Manual: EXT Compound Molecular Pumps: EXT70H ... - Edwards

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