Instr Manual: EXT Compound Molecular Pumps: EXT70H ... - Edwards
Instr Manual: EXT Compound Molecular Pumps: EXT70H ... - Edwards
Instr Manual: EXT Compound Molecular Pumps: EXT70H ... - Edwards
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Section Title Page5.3 Rotor life 275.4 Clean the pump 285.5 Fault finding 286 STORAGE AND DISPOSAL 336.1 Storage 336.2 Disposal 337 SERVICE, SPARES AND ACCESSORIES 347.1 Introduction 347.2 Service 347.3 Spares 347.3.1 ISX inlet-screen 347.3.2 Inlet-strainer (<strong>EXT</strong>250Hi pump only) 347.3.3 WCX water-cooler 357.3.4 Inlet-flange seals 357.4 Accessories 357.4.1 Installation 357.4.2 EXC Controller 357.4.3 Pump-to-controller cable 357.4.4 EXDC Drive Modules 367.4.5 BX bakeout band 367.4.6 FL20K foreline trap 367.4.7 TAV vent-valve and vent-port adaptor 367.4.8 ACX air-cooler 387.4.9 Vibration isolators 387.4.10 PRX purge-restrictor 387.4.11 VRX vent-restrictor 387.4.12 <strong>EXT</strong>70H/ISO63 interstage-port accessory kit 39RETURN OF BOC EDWARDS EQUIPMENTIllustrationsFigure Title Page1 Cross-section view of <strong>EXT</strong>70H pump 32 Cross-section view of <strong>EXT</strong>250H pump 43 Maximum allowed rate of pressure rise during venting 84 <strong>EXT</strong>70H dimensions (mm) 125 <strong>EXT</strong>250H dimensions (mm) 136 Typical pumping system with an <strong>EXT</strong>70H or <strong>EXT</strong>250H pump 157 Typical pumping system with an <strong>EXT</strong>70Hi or <strong>EXT</strong>250Hi pump 168 Correct installation of the inlet-screen 179 Installation of optional accessories (and spares): <strong>EXT</strong>250Hi shown 37ii<strong>EXT</strong> <strong>Compound</strong> <strong>Molecular</strong> <strong>Pumps</strong>
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