Instr Manual: EXT Compound Molecular Pumps: EXT70H ... - Edwards

More documents

Recommendations

Info

Parameter EXT250H EXT250Hi NotesMass 8.0 kg 8.0 kgInlet-flangeDN100ISO-K/ DN100ISO-KDN100CFOutlet-flange DN25NW DN25NW11Vent-port/ 8inch BSP / 8inch BSPInterstage-port - DN25NW11Purge-port/ 8inch BSP / 8inch BSPInlet pumping speed# ‡N 2220 l s -1 220 l s -1 Pb < 5 mbar (500 Pa)Qi < 70 sccm (1.18 mbar l s -1 ,118 Pa l s -1 )He # ‡ 230 l s -1 230 l s -1 Pb < 1 mbar (100 Pa)Qi = 0 sccmH 2# ‡ 180 l s -1 180 l s -1 Pb < 0.5 mbar (50 Pa)Qi = 0 sccmInlet compression ratioN 2# > 2 x 10 7 > 2 x 10 7 Pb = 5 mbar (500 Pa)He # > 1.6 x 10 4 > 1.6 x 10 4 Pb = 2 mbar (200 Pa)#H 21500 1500 Pb = 1 x 10 -2 mbar (1 Pa)Interstage pumping speed ‡‡Ultimate pressure *#N 2- 8 l s -1 Pb = 5 mbar (500 Pa)Qi = 100 sccm (1.69 mbar l s -1 ,169 Pa l s -1 )Qp < 20 sccm (0.33 mbar l s -1 ,33 Pa l s -1 )N 2# - 11 l s -1 Pb = 5 mbar (500 Pa)Qi = 240 sccm (4.5 mbar l s -1 ,405 Pa l s -1 )Qp = 0 sccmMinimum backing pumpdisplacementMaximum continuous inletpressure §water-cooling at 15 o C §< 5 x 10 -9 mbar< 5 x 10 -7 Pa< 5 x 10 -9 mbar< 5 x 10 -7 Pa0.6 m 3 h -1 0.6 m 3 h -13 x 10 -1 mbar,30 Pa3 x 10 -1 mbar,30 Paair-cooling at 35 o C § 3 x 10 -2 mbar, 3 Pa 3 x 10 -2 mbar, 3 PaRecommended backing pump ✝ RV3 RV3Operating attitudeVertical and upright through tohorizontal 2 oNominal rotational speed 60000 r min -1 60000 r min -1Standby rotational speed 42000 r min -1 42000 r min -1Starting time to 90% speedEXC100E/L, EXDC80 190 sec 190 secEXC120 130 sec 130 secEXC300, EXDC160 100 sec 100 secPumping speeds are without inlet-screen or inlet-strainer (EXT250Hi only). Inlet-screens and inlet-strainers reducespeed by approximately 10%.#Pb = backing pressure, Qi = flow through the interstage-port (EXT250Hi only), Qp = flow through pump-inlet* Ultimate pressure 48 hours after bakeout with 2-stage rotary vane backing-pump.§Above this pressure, rotational speed drops below nominal.✝ A larger backing-pump may be required for maximum throughput.Table 2 - EXT250H/EXT250Hi technical data10 EXT Compound Molecular Pumps
Cooling methodForced-air/waterAmbient air temperature (forced-air cooling) 0 - 35 o CWater temperature (water-cooling)10 - 20 o CNoise level (at 1 metre)< 50 dB(A)Recommended controllerEXC120/EXC100E/EXC100LEXC120/100E/100L maximum VA input 250 VA with bakeout bandEXC120/100E/100L apparent power 60 VA typical operating conditionsOther compatible controllerEXC300EXC300 maximum VA input 480 VA with bakeout bandEXC300 apparent power 60 VA typical operating conditionsCompatible drive modulesEXDC80, EXDC160EXDC80 maximum power input93 WEXDC160 maximum power input187 WQuiescent apparent power10 VATable 3 - Cooling, noise and electrical data (all pumps)2.6 Materials exposed to gases pumpedThe following materials and component types are exposed to the gases pumped: aluminiumalloys, stainless steels, glass filled PTFE (polytetrafluoroethylene)*, PEEK (polyetheretherketone)450G ✝ , fluoroelastomer and nitrile ‘O’ rings, hydrocarbon lubricant, felt, rare earthmagnets, silicon nitride and phenolic resin.* EXT250H/Hi pumps only.✝ EXT70H/Hi pumps only.EXT Compound Molecular Pumps 11
Page 2 and 3: Declaration of ConformityWe, BOC Ed
Page 4: Section Title Page5.3 Rotor life 27
Page 7 and 8: 1 INTRODUCTION1.1 Scope and definit
Page 9: 1. Inlet-flange2. Inlet-screen3. Ma
Page 12 and 13: 2 TECHNICAL DATA2.1 GeneralPerforma
Page 14 and 15: Figure 3 - Maximum allowed rate of
Page 18 and 19: 1. Vent-valve2. Backing-port3. Cool
Page 20 and 21: 3 INSTALLATIONWARNINGSafely route a
Page 22 and 23: 1. Vacuum chamber 12. High-vacuum g
Page 24 and 25: 3.3.3 Base mountingEnsure that the
Page 26 and 27: If the volume of your vacuum system
Page 28 and 29: 3.7 Cooling3.7.1 IntroductionCAUTIO
Page 30 and 31: 4 OPERATIONWARNINGDo not disconnect
Page 32 and 33: 4.5 BakeoutCAUTIONWhen you bake the
Page 34 and 35: 5.4 Clean the pumpWARNINGClean the
Page 36 and 37: Symptom Check ActionThe EXC Control
Page 38 and 39: Symptom Check ActionThe EXT is very
Page 40 and 41: 7 SERVICE, SPARES AND ACCESSORIES7.
Page 42 and 43: 7.4.4 EXDC Drive ModulesFit an EXDC
Page 44 and 45: 7.4.8 ACX air-coolerAn ACX air-cool
Page 46 and 47: This page intentionally blank.40 EX
Page 48 and 49: Form HS2Return of BOC Edwards Equip
Page 50: P800-80-000 Issue J 01A09-010UNITED

Instr Manual: EXT Compound Molecular Pumps: EXT70H ... - Edwards

Create successful ePaper yourself

Delete template?

Save as template?