Instr Manual: EXT Compound Molecular Pumps: EXT70H ... - Edwards
Instr Manual: EXT Compound Molecular Pumps: EXT70H ... - Edwards
Instr Manual: EXT Compound Molecular Pumps: EXT70H ... - Edwards
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CONTENTSSection Title Page1 INTRODUCTION 11.1 Scope and definitions 11.2 General description 21.3 Vent options and vent control 52 TECHNICAL DATA 62.1 General 62.2 Pumping media 62.2.1 <strong>Pumps</strong> without gas purge 72.2.2 <strong>Pumps</strong> with gas purge (<strong>EXT</strong>250H and <strong>EXT</strong>250Hi only) 72.3 Vent gas specification and vent control data 72.4 Purge gas specification (<strong>EXT</strong>250H and <strong>EXT</strong>250Hi only) 72.5 Cooling-water 82.6 Materials exposed to gases pumped 113 INSTALLATION 143.1 Unpack and inspect 143.2 Typical installation 143.3 Connect to the vacuum system 173.3.1 Inlet-screen 173.3.2 Mechanical fixing 173.3.3 Base mounting 183.3.4 Inlet connection and orientation 183.3.5 Backing connection 193.3.6 Interstage connection (<strong>EXT</strong>70Hi and <strong>EXT</strong>250Hi only) 193.4 Vent-valve connection and control 193.5 Purge gas connection (<strong>EXT</strong>250H and <strong>EXT</strong>250Hi only) 203.5.1 Connect the purge gas 203.5.2 Recommended purge gas flow 213.6 Electrical installation 213.6.1 EXC Controller 213.6.2 EXDC Drive Module 213.7 Cooling 223.7.1 Introduction 223.7.2 Forced-air cooling 223.7.3 Water-cooling 22Ipsitech 8204 (D) - 20054 OPERATION 244.1 Start-up 244.2 Stand-by 254.3 Shut-down 254.4 Safety interlocks and control system 254.5 Bakeout 265 MAINTENANCE 275.1 Introduction 275.2 Bearing life 27<strong>EXT</strong> <strong>Compound</strong> <strong>Molecular</strong> <strong>Pumps</strong>i
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