Instr Manual: EXT Compound Molecular Pumps: EXT70H ... - Edwards

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1. Vent-valve2. Backing-port3. Cooling-water connectors4. Earth (ground) screw5. Electrical supply connector6. Allowance for right-angle cable connectorFigure 4 - EXT70H dimensions (mm)12 EXT Compound Molecular Pumps
1. Interstage-port (EXT250Hi only)5. Electrical supply connector2. Vent-valve6. Backing-port3. Earth (ground) screw7. Cooling-water connectors4. Purge-plug in purge-port8. Allowance for right-angle cable connectorFigure 5 - EXT250H dimensions (mm)EXT Compound Molecular Pumps 13
Page 2 and 3: Declaration of ConformityWe, BOC Ed
Page 4: Section Title Page5.3 Rotor life 27
Page 7 and 8: 1 INTRODUCTION1.1 Scope and definit
Page 9: 1. Inlet-flange2. Inlet-screen3. Ma
Page 12 and 13: 2 TECHNICAL DATA2.1 GeneralPerforma
Page 14 and 15: Figure 3 - Maximum allowed rate of
Page 16 and 17: Parameter EXT250H EXT250Hi NotesMas
Page 20 and 21: 3 INSTALLATIONWARNINGSafely route a
Page 22 and 23: 1. Vacuum chamber 12. High-vacuum g
Page 24 and 25: 3.3.3 Base mountingEnsure that the
Page 26 and 27: If the volume of your vacuum system
Page 28 and 29: 3.7 Cooling3.7.1 IntroductionCAUTIO
Page 30 and 31: 4 OPERATIONWARNINGDo not disconnect
Page 32 and 33: 4.5 BakeoutCAUTIONWhen you bake the
Page 34 and 35: 5.4 Clean the pumpWARNINGClean the
Page 36 and 37: Symptom Check ActionThe EXC Control
Page 38 and 39: Symptom Check ActionThe EXT is very
Page 40 and 41: 7 SERVICE, SPARES AND ACCESSORIES7.
Page 42 and 43: 7.4.4 EXDC Drive ModulesFit an EXDC
Page 44 and 45: 7.4.8 ACX air-coolerAn ACX air-cool
Page 46 and 47: This page intentionally blank.40 EX
Page 48 and 49: Form HS2Return of BOC Edwards Equip
Page 50: P800-80-000 Issue J 01A09-010UNITED

Instr Manual: EXT Compound Molecular Pumps: EXT70H ... - Edwards

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