Instr Manual: EXT Compound Molecular Pumps: EXT70H ... - Edwards

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4.5 BakeoutCAUTIONWhen you bake the EXT pump to above 70 o C at the inlet-flange, you must cool the pumpby water-cooling, to prevent damage to the bearing lubricant.If you heat your EXT pump (and your vacuum system), you will speed up the degassing processso that the pump will reach ultimate vacuum in the shortest possible time. If you heat the pump,this will also prevent condensation of vapours inside the pump.You can use the BOC Edwards BX bakeout band to heat the pump (refer to Section 7). Fit theband around the pump, just below the inlet-flange. When you bake the pump or the system,make sure that the temperature of the inlet-flange does not exceed 100 o C.If you bake your vacuum system and the temperature of the system exceeds 200 o C, you mustput a radiation shield between the system and the EXT pump. This radiation shield will reducethe heat radiated onto the pump rotor.Typically, a bakeout of four hours is long enough to remove water condensation from the pump.However, the bakeout time will depend on the amount of condensation in the pump and thevacuum system, and the ultimate pressure you want to achieve.26 EXT Compound Molecular Pumps
5 MAINTENANCEWARNINGAllow the pump-rotor to stop, then disconnect the EXC Controller or EXDC Drive Modulefrom the pump before you remove the pump from your vacuum system for maintenanceor fault-finding procedures.5.1 IntroductionThe maintenance operations for the EXT Turbomolecular pumps are described in the followingsections. The ISX inlet-screen, the WCX water-cooler, the inlet-strainer and inlet-flange seals areavailable as spares (refer to Section 7). Fit the ISX inlet-screen as described in Section 3.3.1. Fit theWCX water-cooler as described in Section 3.7.3.5.2 Bearing lifeWhen supplied, the pump contains sufficient lubricant to supply the bearings for life. No routinemaintenance is therefore required between bearing replacements. The bearings are notuser-serviceable. The bearings will need to be replaced when they reach the end of their servicelife. This is typically more than 20,000 hours, but may be less; this depends on the type ofpumping duty on which the pump is used.When the bearings need replacement, we recommend that you exchange your pump for afactory reconditioned replacement. Alternatively, you can send your pump to a BOC EdwardsService Centre to have the bearings replaced.When you return EXT pumps to BOC Edwards Service Centres please use the procedureincluded at the end of this manual. However, the instruction to drain all fluids does not apply tothe lubricant in the EXT pump oil-reservoirs.5.3 Rotor lifeThe life of the EXT pump rotor is typically 40,000 to 50,000 cycles (of acceleration to full speed,and then deceleration to a stop). The pump rotor is not user-serviceable.We therefore recommend that you exchange your pump for a factory reconditioned replacementevery 20,000 cycles, or 10 years of use, whichever occurs first. Alternatively, you can send yourpump to a BOC Edwards Service Centre for a major service (which will include rotorreplacement).When you return EXT pumps to BOC Edwards Service Centres please obey the procedureincluded at the end of this manual. However, the instruction to drain all fluids does not apply tothe lubricant in the EXT pump oil-reservoirs.EXT Compound Molecular Pumps 27
Page 2 and 3: Declaration of ConformityWe, BOC Ed
Page 4: Section Title Page5.3 Rotor life 27
Page 7 and 8: 1 INTRODUCTION1.1 Scope and definit
Page 9: 1. Inlet-flange2. Inlet-screen3. Ma
Page 12 and 13: 2 TECHNICAL DATA2.1 GeneralPerforma
Page 14 and 15: Figure 3 - Maximum allowed rate of
Page 16 and 17: Parameter EXT250H EXT250Hi NotesMas
Page 18 and 19: 1. Vent-valve2. Backing-port3. Cool
Page 20 and 21: 3 INSTALLATIONWARNINGSafely route a
Page 22 and 23: 1. Vacuum chamber 12. High-vacuum g
Page 24 and 25: 3.3.3 Base mountingEnsure that the
Page 26 and 27: If the volume of your vacuum system
Page 28 and 29: 3.7 Cooling3.7.1 IntroductionCAUTIO
Page 30 and 31: 4 OPERATIONWARNINGDo not disconnect
Page 34 and 35: 5.4 Clean the pumpWARNINGClean the
Page 36 and 37: Symptom Check ActionThe EXC Control
Page 38 and 39: Symptom Check ActionThe EXT is very
Page 40 and 41: 7 SERVICE, SPARES AND ACCESSORIES7.
Page 42 and 43: 7.4.4 EXDC Drive ModulesFit an EXDC
Page 44 and 45: 7.4.8 ACX air-coolerAn ACX air-cool
Page 46 and 47: This page intentionally blank.40 EX
Page 48 and 49: Form HS2Return of BOC Edwards Equip
Page 50: P800-80-000 Issue J 01A09-010UNITED

Instr Manual: EXT Compound Molecular Pumps: EXT70H ... - Edwards

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