Prototyping of microfluidic systems with integrated ... - DTU Nanotech

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xii CONTENTS 3 Polymer materials – mainly Topas 21 3.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . 21 3.1.1 Why polymers? . . . . . . . . . . . . . . . . . . . 21 3.2 Polymer types . . . . . . . . . . . . . . . . . . . . . . . . 23 3.2.1 Thermoplastics . . . . . . . . . . . . . . . . . . . 24 3.2.2 Elastomers . . . . . . . . . . . . . . . . . . . . . 25 3.2.3 Thermosets . . . . . . . . . . . . . . . . . . . . . 25 3.3 Polymers in microfluidics . . . . . . . . . . . . . . . . . 26 3.4 Cyclic Olefin Copolymer (COC)/Topas . . . . . . . . . . 26 3.4.1 Glass transition temperature and viscosity . . . . 27 3.4.2 Optical properties . . . . . . . . . . . . . . . . . 29 3.4.3 Chemical resistance . . . . . . . . . . . . . . . . 30 3.4.4 Injection molding and extrusion . . . . . . . . . . 32 3.5 Resistance of COC to Reactive Ion Etching . . . . . . . 32 3.6 Summary . . . . . . . . . . . . . . . . . . . . . . . . . . 34 4 Fabrication methods 35 4.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . 35 4.2 Micro milling - an introduction . . . . . . . . . . . . . . 36 4.2.1 Experimental setup for micro milling . . . . . . . 38 4.2.2 Experimental results . . . . . . . . . . . . . . . . 39 4.3 Spin coating . . . . . . . . . . . . . . . . . . . . . . . . . 43 4.4 Spin coating Topas . . . . . . . . . . . . . . . . . . . . . 44 4.4.1 Spin coating Topas on Topas . . . . . . . . . . . 46 4.4.2 Experimental procedure . . . . . . . . . . . . . . 47 4.4.3 Results . . . . . . . . . . . . . . . . . . . . . . . 48 4.4.4 A simplified mathematical model . . . . . . . . . 48 4.5 Bonding and sealing of microfluidic systems . . . . . . . 51 4.6 Thermal bonding . . . . . . . . . . . . . . . . . . . . . . 52 4.6.1 Thermal bonding experiments and results . . . . 53 4.7 Roll lamination . . . . . . . . . . . . . . . . . . . . . . . 55 4.7.1 Experiments and experimental results . . . . . . 56 4.8 Laser bonding . . . . . . . . . . . . . . . . . . . . . . . . 57 4.8.1 Lasers in microfluidic manufacturing . . . . . . . 57 4.8.2 Laser bonding basics . . . . . . . . . . . . . . . . 58 4.8.3 Experimental results . . . . . . . . . . . . . . . . 59 4.8.4 A comment on different bonding tests . . . . . . 61 4.9 Summary . . . . . . . . . . . . . . . . . . . . . . . . . . 63
CONTENTS xiii 5 Optical waveguides in Topas 65 5.1 Waveguide fabrication . . . . . . . . . . . . . . . . . . . 66 5.1.1 Spin coating and laser bonding . . . . . . . . . . 66 5.1.2 Micro milling . . . . . . . . . . . . . . . . . . . . 67 5.2 Propagation loss measurements . . . . . . . . . . . . . . 69 5.3 Thermal treatment of the surface . . . . . . . . . . . . . 71 5.3.1 A note on various methods . . . . . . . . . . . . 72 5.3.2 Surface reflow using hot air . . . . . . . . . . . . 72 5.3.3 Results . . . . . . . . . . . . . . . . . . . . . . . 73 5.4 Optical cuvette absorbance measurements . . . . . . . . 76 5.5 A refractive index sensor . . . . . . . . . . . . . . . . . . 81 5.5.1 Design and fabrication . . . . . . . . . . . . . . . 81 5.5.2 Experimental results . . . . . . . . . . . . . . . . 83 5.5.3 Improvements . . . . . . . . . . . . . . . . . . . . 85 5.6 Summary . . . . . . . . . . . . . . . . . . . . . . . . . . 85 6 An optofluidic detector 87 6.1 The working principle . . . . . . . . . . . . . . . . . . . 88 6.2 Experiments . . . . . . . . . . . . . . . . . . . . . . . . . 89 6.2.1 Fabrication . . . . . . . . . . . . . . . . . . . . . 89 6.2.2 Experimental setup . . . . . . . . . . . . . . . . . 90 6.2.3 Linear scan . . . . . . . . . . . . . . . . . . . . . 90 6.2.4 Rotational scan . . . . . . . . . . . . . . . . . . . 91 6.3 Summary and discussion . . . . . . . . . . . . . . . . . . 94 7 Discussion and outlook 95 7.1 Discussion . . . . . . . . . . . . . . . . . . . . . . . . . . 95 7.2 Outlook . . . . . . . . . . . . . . . . . . . . . . . . . . . 96 7.2.1 Methods . . . . . . . . . . . . . . . . . . . . . . . 96 7.2.2 Materials . . . . . . . . . . . . . . . . . . . . . . 97 References 99 A Appendix: Peer-reviewed journal papers 108
Page 1 and 2: Prototyping of Microfluidic Systems
Page 3 and 4: Preface This thesis is one of the r
Page 5 and 6: joining the substrate, optical laye
Page 7 and 8: Disse metoder inkluderer: • Mikro
Page 9 and 10: Many thanks to the collaborators in
Page 11 and 12: microfluidic systems. In Klavs Jens
Page 13: Contents Preface i Abstract ii Resu
Page 17 and 18: Chapter 1 Introduction In the last
Page 19 and 20: 1.1 Downscaling 3 Figure 1.1: Scali
Page 21: 1.2 Prototyping of microfluidic sys
Page 24 and 25: 8 Theoretical aspects - microfluidi
Page 26 and 27: 10 Theoretical aspects - microfluid
Page 38 and 39: 22 Polymer materials - mainly Topas
Page 52 and 53: 36 Fabrication methods results are
Page 54 and 55: 38 Fabrication methods An impressiv
Page 56 and 57: 40 Fabrication methods Average roug
Page 58 and 59: 42 Fabrication methods a b c d e 1m
Page 60 and 61: 44 Fabrication methods Generally, t
Page 62 and 63: 46 Fabrication methods branch. Sec-
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48 Fabrication methods and the heig
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50 Fabrication methods Topas on Top
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52 Fabrication methods Table 4.2: C
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54 Fabrication methods Figure 4.8:
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56 Fabrication methods that the str
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58 Fabrication methods the excimer
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60 Fabrication methods 500 µm 500
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62 Fabrication methods wedge tests
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Chapter 5 Optical waveguides in Top
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5.1 Waveguide fabrication 67 It sho
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5.2 Propagation loss measurements 6
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5.3 Thermal treatment of the surfac
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5.4 Optical cuvette absorbance meas
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5.4 Optical cuvette absorbance meas
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5.5 A refractive index sensor 81 fr
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5.5 A refractive index sensor 83 a
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5.6 Summary 85 5.5.3 Improvements I
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Until further notice, Chapter 6 is
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96 Discussion and outlook transpare
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References [1] A. Manz, N. Graber,
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REFERENCES 101 [20] David Walton an
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REFERENCES 103 [41] Kiha Lee and Da
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REFERENCES 105 prototyping of polym
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REFERENCES 107 [81] M. Grumann, J.
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