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Prototyping of microfluidic systems with integrated ... - DTU Nanotech

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3.2 Polymer types 25<br />

3.2.2 Elastomers<br />

As indicated by the name, elastomers are deformable, elastic polymers.<br />

The polymer chains are weakly crosslinked and can be stretched to high<br />

extensions. Subsequently, the structure can revert to its original shape<br />

because <strong>of</strong> the elasticity <strong>of</strong> the material.<br />

Poly(dimethylsiloxane)(PDMS) is by far the most commonly used<br />

elastomer in micr<strong>of</strong>luidics. In the crosslinked version, where a curing<br />

agent is added to a base, it has become popular for rapid prototyping<br />

<strong>of</strong> micr<strong>of</strong>luidic devices and as a stamp material for microcontact<br />

printing. Also, hot embossing using elastomer moulds has become a<br />

popular method, and has been named s<strong>of</strong>t embossing [21, 22]. PDMS is<br />

remarkable in that it can be cast against a mould to reproduce features<br />

smaller than 100 nm. The surface free energy is low, meaning that casts<br />

release easily from moulds. Furthermore, Young’s modulus is tunable,<br />

which has led to the development <strong>of</strong> valves and pumps in microdevices<br />

using reversible deformations. A standard grade PDMS like Sylgard<br />

184 from Dow Corning is temperature stable up to 250℃, and is optically<br />

transparent well into the ultraviolet range. Some PDMS types are<br />

resistant to temperatures up to 400℃.<br />

The surface properties <strong>of</strong> PDMS can be altered using oxygen plasma<br />

treatment, which makes the surface hydrophilic. This treatment also<br />

enhances the adhesion <strong>of</strong> the surface. PDMS adheres naturally to<br />

surfaces like glass, creating non-permanent bonds which can <strong>with</strong>stand<br />

lower pressures in e.g. micr<strong>of</strong>luidic channels, while irreversible bonds<br />

are created using plasma treatment.<br />

3.2.3 Thermosets<br />

Thermosetting plastics are polymers that are cured and thereby harden.<br />

The curing happens by adding energy through heat or irradiation, or<br />

by a chemical reactions (e.g. epoxy). This leads to cross-linking <strong>of</strong> the<br />

polymer chains by covalent bonds. These bonds will not break before<br />

the rest <strong>of</strong> the polymer chain, contrary to thermoplastics where the<br />

bonds between the chains break around the glass transition temperature,<br />

while the chains remain intact.<br />

In micr<strong>of</strong>luidics, the photoresist SU-8 is an example <strong>of</strong> a thermoset.<br />

Traditionally, it is used in silicon processing as a mask layer, where UV<br />

exposure through a mask crosslinks the SU-8 in the unmasked areas.<br />

The uncured areas are then removed, and the remaining crosslinked

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