Stresses in Cu Thin Films and Ag/Ni Multilayers - Harvard School of ...

Contents vi
4.2 Interfacial Thermodynamics ......................... 89
4.2.1 Fluid-Fluid Interfaces ......................... 89
4.2.2 Solid-Fluid Interfaces ......................... 90
4.2.3 Solid-Solid Interfaces ......................... 92
4.3 Principle of the Interface Stress Measurement ................ 95
4.4 Previous Measurements of the Ag/Ni {111} Interface Energy and Stress . . 96
4.5 Experiment .................................. 98
4.5.1 Film Preparation ........................... 98
4.5.2 Film Characterization ......................... 98
4.5.3 Curvature Measurements ....................... 99
4.5.4 X-Ray Diffraction .......................... 99
4.6 Results .....................................100
4.6.1 Microstructure ............................100
4.6.2 Substrate Curvature Stress . . . ...................101
4.6.3 Volume Stress .............................101
4.6.4 The Interface Stress ..........................105
4.7 Models for the Compressive Interface Stress .................107
4.7.1 Intermixing ..............................107
A Systematic Method of Extracting Strain and Composition Profiles
of Multilayers . . ...................110
Results from Diffuse Scattering ...................113
4.7.2 Excess Volume / Misfit Dislocations .................117
Excess Volume ............................122
Misfit Dislocations ..........................123
4.8 Conclusions and Future Research .......................125
Bibliography 126
A X-Ray Stress Analysis 145
A.1 Untextured Thin Films ............................147
A.1.1 Biaxial Stress Case ..........................148
Equibiaxial Stress Case ........................148
A.2 Textured Thin Films in Equibiaxial Stress ..................149
A.3 The Strain-Free Lattice Parameter in Biaxially Stressed Samples ......150
B X-Ray Errors 152
B.1 Mandatory Corrections ............................153
B.1.1 Lorenz-Polarization-Absorption Corrections to the Intensity ....153
B.1.2 Refraction Corrections ........................154
B.2 Geometric Errors . ..............................155
B.2.1 Receiving Position Errors . . . ...................155
B.2.2 Horizontal Divergence Errors . ...................157