DS 7-7R 17-12R Semiconductor Fabrication Facilities ... - FM Global

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7-7R Mini-environment enclosures will most always create shielded areas which are not adequately protected by cleanroom sprinkler systems. The protection guidelines developed by FM Global for specific tools and equipment address the need to provide internal protection to mitigate the shielding problem when a minienvironment enclosure is provided around that tool. 3.3.5 Vacuum Pumps Data Sheet 7-7 recommends that a foreline trap be installed to prevent oil backstreaming and damage to the furnace. Backstreaming can occur as a furnace tube or reactor chamber cools and pressure drops in the tube relative to pressure at the vacuum pump. This can allow oil mist from the vacuum pump to be drawn back into the furnace or reactor if the mechanical pump vanes can turn backwards. Mechanical pumps typically have a ratchet or other mechanism that prevents the pump from turning backwards. If, during a pump maintenance teardown and rebuild, the ratchet is inadvertently omitted during reassembly, then the pump could turn backwards, causing a potential problem. Diffusion pumps are also susceptible to backstreaming but are not usually directly connected to a furnace tube. The use of a dry type vacuum pump or one lubricated with an inert fluid eliminates the fire exposure. 3.4 Bulk Chemical Distribution A chemical delivery system filters, blends and transports chemicals through tubing/piping to the point-ofuse where controllers regulate the flow rate and pressure of delivery. This system includes the means to pressurize a chemical and control its distribution throughout the fab. It consists of a source of chemical, or storage vessel, a chemical delivery module and a piping system. Fluoropolymer tubing and components are typically used for acidic and caustic chemicals. The most common method of liquid transfer is by local distribution systems which are generally located in the service chases close to the equipment they serve. A liquid source supply and piping connected directly to the process equipment is provided. Liquids are manually delivered to these systems. Bulk chemical distribution systems represent a greater exposure than local distribution systems due to long runs of pressurized distribution piping which results in a much larger liquid release scenario. 3.5 Liquid Damage Exposures The most common causes of liquid release from distribution systems include items such as component failure on distribution piping, corrosion of fittings, and physical damage caused by personnel. When a liquid is released from its distribution system, contaminants can be quickly picked up by the cleanroom air handling system and distributed throughout the cleanroom space served by the air handling system. Depending on the type and amount of the liquid released, contamination of the cleanroom space, in-process product and process equipment is probable. The spread of airborne contaminants can be minimized following a spill by shutdown of the recirculating air system, operation of the smoke/contaminant control system and proper action by the Emergency Organization. Hydrochloric Acid (HCL) Sulfuric Acid (H 2SO 4) Nitric Acid (HNO 2) Hydrofluoric Acid (HF) Phosphoric Acid (H 3PO 4) Acetic Acid (CH 3COOH) Chromic Phosphoric Acid (CrPO 4) Hydrogen Peroxide (H 2O 2) Sodium Hydroxide (NaOH) Potassium Hydroxide (KOH) Ammonium Hydroxide (NH 4OH) REFERENCE DOCUMENT 17-12R SEMICONDUCTOR FABRICATION FACILITIES Page 26 Table 7. Common Nonflammable Semiconductor Process Liquids ©2003 Factory Mutual Insurance Company. All rights reserved.
Chill Water Supply/Return Heating Water Supply/Return Humidification Systems Deionized Water Systems Sanitary Hot/Cold Sprinkler Rain/Roof Drains Condensation Equipment Cooling Scrubber System 3.6 Protection Against Theft Table 8. Possible Water Damage Sources Theft of small high value electronic components has been a major problem in the last three years. Products such as processors are often in short supply when they are introduced and sold at a premium, making them an attractive product to thieves who can easily resell them on the black market. Memory products fell into a similar category but a significant price drop in 1996 reduced thefts considerably. The activities which curtail thefts are as follows: • Access control to sites and buildings • Reliable security systems • Employee controls • Adequate stock control systems • Access control to sites and buildings Site fences and barriers with manned or unmanned vehicle control points located at entrances and exits can be a significant deterrent to thieves. Where the layout of a site does not permit such controls, the use of barriers and speed control devices near loading docks can prevent ram raids. All visitors and employees should wear badges and visitors should be escorted at all times. Reliable security systems A security system is only as good as the people who respond to it and also depends on the original goal of the system designer. As a result, security systems should be under regular review to ensure that the changing needs of the site are being met. Closed circuit television (CCTV) with remote or duplicate recording of images, intruder alarms using a mixture of detection devices and airport style detection arches can all be used to tailor a security system to a particular site’s needs. Employee controls Theft by, or aided by, employees has been a significant problem in many countries. Carefully selecting new employees can help, but physical measures including enforcing access control restrictions, the wearing of employee badges, locating employee lockers away from production areas and providing employees with pocketless uniforms can all play a part in reducing theft by employees. Adequate stock control systems Related to employee control is stock control. High value shipments should receive special attention upon their arrival and dispatch, ideally with witnessed checking of the contents of packages. Without these vital checks it is difficult, if not impossible to trace the source of losses downstream. A typical system of incoming inspection includes immediate shipment counting by store personnel watched by security. The parts would then be stored in a secure area and inventory records updated. Whenever parts are then issued to the next stage, the issuer and receiver should check and sign for the parts to ensure that there is an effective audit trail. Special Exposures REFERENCE DOCUMENT 7-7R SEMICONDUCTOR FABRICATION FACILITIES 17-12R Page 27 In 1995 and early 1996, the U.K. experienced a new phenomenon—theft of memory chips and processors from personal computers located in offices. Because new memory was in short supply and the black market for stolen memory chips was significant, office buildings with a PC on every desk became prime targets for thieves. Computers were often severely damaged by thieves who ripped open units to get at the ©2003 Factory Mutual Insurance Company. All rights reserved.
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DS 7-7R 17-12R Semiconductor Fabrication Facilities ... - FM Global

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