DS 7-7R 17-12R Semiconductor Fabrication Facilities ... - FM Global
DS 7-7R 17-12R Semiconductor Fabrication Facilities ... - FM Global
DS 7-7R 17-12R Semiconductor Fabrication Facilities ... - FM Global
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7-<strong>7R</strong><br />
6.0 BIBLIOGRAPHY<br />
The following codes, standards and publications provide additional information:<br />
BOCA National Fire Prevention Code, 1993, Chapter 15: Hazardous Production Material <strong>Facilities</strong><br />
National Fire Protection Association (NFPA)<br />
• Standard No. 45-1986 Edition: Fire Protection for Laboratories Using Chemicals<br />
• Standard No. 90A-1985 Edition: Installation of Air Conditioning and Ventilation Systems<br />
• Standard No. 91-1983 Edition: Blower and Exhaust Systems for Dust, Stock and Vapor Removal or<br />
Conveying<br />
• Standard No. 318-1998: Protection of Cleanrooms<br />
Pletsch, William, Integrated Circuits—Making the Miracle Chip, California: Pletsch & Associates, 1985<br />
<strong>Semiconductor</strong> Equipment and Materials International, SEMI S2-93, Safety Guidelines for <strong>Semiconductor</strong><br />
Manufacturing Equipment.<br />
Uniform Fire Code, 1997<br />
• Article 51—<strong>Semiconductor</strong> <strong>Fabrication</strong> <strong>Facilities</strong><br />
• Article 74—Compressed Gases<br />
• Article 80—Hazardous Materials<br />
REFERENCE DOCUMENT<br />
<strong>17</strong>-<strong>12R</strong> SEMICONDUCTOR FABRICATION FACILITIES<br />
Page 38<br />
Van Zant, Peter. Microchip <strong>Fabrication</strong>: A Practical Guide to <strong>Semiconductor</strong> Processing, Third Edition, New<br />
York: McGraw-Hill Publishing Company, 1997<br />
©2003 Factory Mutual Insurance Company. All rights reserved.
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