DRAM Technology
DRAM Technology
DRAM Technology
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Scaling<br />
1. Design Rule<br />
. 80nm → 60nm → 40nm<br />
. Resolution<br />
2. Cell Layout<br />
. 16F 2 → 8F 2 → 6F 2 → 4F 2<br />
3. Chip Design<br />
. Cell Efficiency<br />
. Chip Architecture<br />
Wavelength Wavelength (nm) (nm)<br />
436<br />
365<br />
365<br />
248<br />
248<br />
193<br />
193<br />
Optical<br />
(Ultraviolet)<br />
DUV : Deep Ultraviolet<br />
VUV : Vacuum Ultraviolet<br />
EUV : Extreme Ultraviolet<br />
157<br />
126<br />
광원의 g-line i-line i-line line KrF KrF<br />
종류<br />
ArF ArF F 2 Ar 2<br />
DUV VUV<br />
13<br />
Non-Optical<br />
1 4x10-3 5x10-5 1 4x10-3 5x10-5 EUV XRL EPL IPL<br />
<strong>DRAM</strong> <strong>Technology</strong> SK hynix Lecture for POSTECH<br />
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