FILM THICKNESS MEASUREMENT (SCI FilmTek 2000)

2 Unless you will use a stored recipe and don’t need to make any changes,
you will need to log in as a power user. To do so, click on “Security” on
the pull down menu and select “Log-in”. Type in User Name: SCI and
the password located on the cover of the FilmTek manual. Also select
“Power user” (Fig 4).
Fig 4. Log in screen
3 Click the recipe pull down menu at the bottom right of the screen and
scroll to the desired program.
Programs will have a descriptive name for the film and substrate to be
measured as well as a suffix UV, vis (visible) or ir for the appropriate
wavelength range. The microscope must be set up correctly for the
wavelength range being measured as well. If the desired recipe does not
exist contact lab staff or the appropriate engineer to assist in designing a
program. In some cases samples may need to be sent to SCI for initial
characterization. In all cases a known standard must be used to
insure that meaningful measurements are being taken.
4 Make sure the appropriate lamp is on (section 5.1.1 and 5.1.2). The
microscope lamp should always be on for sample viewing and as a
visible/ir source.
5 Choose the appropriate objective lens (silver for visible/IR, black for UV)
and position the light beam over the center hole in the wafer stage with
NO SAMPLE.
6 If you are using UV also make sure the UV-vis shutter is “out”. For visible
and IR it should be “in”.
7 For IR, choose “Calibration”->”NIR Settings” and click the enable box at
the bottom left. The integration time may be changed here as well (see
step 11).
8 Press the “Background” button in the toolbar (2 nd button from the left). A
graph with a red line at 0 should be displayed.
This step is to zero the machine taking into account ambient and stray light. It
should be done hourly or whenever a recipe is changed.
9 Place the SCI silicon reference wafer shiny side up on the microscope
stage and position the wafer under one of the visible (silver) objectives.
Focus on a clean spot on the wafer so that the field diaphragm presents a
nice sharp edge. UV-vis shutter should be in.
10 For UV: Select the black objective lens, pull out the UV-vis shutter and
press “Reference” on the toolbar (leftmost icon-Fig 3). For visible/IR:
Simply press “Reference” on the toolbar (leftmost icon-Fig 3). Press
6