Dektak 8 Advanced Development Profiler Manual

Dektak 8 Advanced Development Profiler 

Manual 

Software Version 8.34 

004-800-000 (standard) 

004-800-100 (cleanroom) 

Copyright © [2003, 2004] Veeco Instruments Inc. 

All rights reserved. 

Document Revision History: Dektak 8 Manual 

Revision Date Section(s) Affected Reference Approval 

G 12/29/04 All (SW V 8.34) N/A D. Page 

F 4/16/04 All. N/A D. Page 

E 1/23/04 Chapter 9, Sections 9.13, 9.14 N/A D. Page 

D 9/10/03 Chapter 4, p.81 N/A L. Burrows 

C 8/12/03 All. 477 C. Kowalski 

B 10/24/01 All. 445 C. Kowalski 

A 04/27/01 All. 402 J. Valencia

©2004, Veeco Instruments, Inc. 

All rights reserved. 

Printed in the United States of America. 

COPYRIGHT NOTICE: 

This document and the software (computer program) described in it are copyright © Veeco Instruments, 

Inc. They are protected by United States copyright laws and international treaty provisions. 

Under copyright laws, this guide and the software program contained herein may not be 

copied, in whole or in part, without prior written consent of Veeco Instruments, Inc., except in the 

normal use of the software or to make a backup copy. This exception does not allow copies to be 

made for others, whether or not sold, but all of the material purchased (with all backup copies) 

may be sold, given, or loaned to another person. Under the law, copying includes translating into 

another language or format. 

Veeco Instruments, Inc. retains all rights not otherwise expressly granted here. Nothing in this 

notice constitutes a waiver of our rights under U.S. Copyright laws or any other federal or state 

law. 

TRADEMARK NOTICE: 

Wyko, Vision, Dektak and N-Lite are trademarks or registered trademarks of WYKO Corporation 

and Veeco Instruments, Inc. Microsoft, Windows and Microsoft Excel are trademarks or registered 

trademarks of Microsoft Corporation. Dell is a registered trademark of Dell Computer Corporation. 

Intel, Pentium and Celeron are trademarks or registered trademarks of Intel Corporation. 

All other brand or product names are trademarks or registered trademarks of their respective holders. 

Veeco Instruments, Inc. 

2650 East Elvira Road 

Tucson, Arizona 85706 

The information in this document is subject to change without notice. No liability is assumed for 

errors contained herein or for incidental or consequential damages in connection with the furnishing, 

performance, or use of this material.

Table of Contents 

Chapter 1 System Overview 1 

1.1 Safety Precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3 

1.2 Included Reference Materials. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5 

1.3 Printer Selection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5 

1.4 Principle of Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6 

1.5 Configuration. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7 

1.5.1 Computer Console . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7 

1.5.2 Video Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7 

1.5.3 Profiler. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7 

1.5.4 Dual Switchable Video Cameras . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7 

1.5.5 Programmable X-Y Positioning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7 

1.6 Stylus Size Considerations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8 

1.7 Scan Speed Versus Stylus Force. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8 

1.8 Horizontal Resolution. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9 

1.9 Scan Data Storage Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9 

1.10 Dektak 8 Technical Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10 

1.11 Options and Accessories. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11 

1.12 Operation Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12 

1.12.1 Automation Program . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12 

1.12.2 Scan Routine . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12 

1.12.3 Sample Positioning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12 

1.12.4 Scanning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12 

1.12.5 Profile Manipulation and Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . 13 

1.12.6 Data Plot Display. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13 

1.12.7 Analytical Functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13 

1.12.8 Boundary Magnification . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13 

1.12.9 Side Bar Buttons . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14 

1.13 System Components. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15 

1.14 Tracer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16 

1.15 Excel Macro . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16 

Rev. G Dektak 8 Manual v

Chapter 2 Installation 17 

2.1 Facilities Requirements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18 

2.2 Installing the Vibration Isolated Workstation Option . . . . . . . . . . . . . . . 26 

2.3 Installing the Stage Assembly. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27 

2.4 Positioning the Universal Chuck. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29 

2.5 Shipping Bracket Removal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30 

2.6 Enclosure Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33 

2.7 Cabling and Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34 

2.8 Porous Vacuum Chuck (Option) Installation . . . . . . . . . . . . . . . . . . . . . 40 

2.9 Stylus Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41 

2.10 System Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41 

2.11 System Checkout. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41 

2.12 Optics Alignment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42 

Chapter 3 Basic Functions 43 

3.1 Software Interface. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44 

3.1.1 Stage Control. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44 

3.1.2 Microsoft Windows . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44 

3.1.3 Trackball . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44 

3.1.4 Keyboard Shortcuts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45 

3.2 Start Sequence (Normal Usage) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 49 

3.2.1 Power On. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 49 

3.2.2 System Tray Quick-Access Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 51 

3.2.3 Stage Control Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 53 

3.2.4 Template Editor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 54 

3.2.5 Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 56 

3.3 Sample Loading . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 56 

3.3.1 Stage Tracking. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 58 

3.4 Viewing the Sample . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 60 

3.4.1 Manual Theta Rotation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 61 

3.4.2 Stage Rotation (Optional Programmable Theta) . . . . . . . . . . . . . . . . . . . . . . 62 

3.4.3 Lowering/Raising the Stylus . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 62 

3.4.4 Optics Illumination Adjustment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 62 

3.4.5 Stylus Reticle Alignment. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 63 

3.4.6 Feature Reticle Alignment. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 65 

3.4.7 Sample Positioning Adjustments. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 66 

3.5 Unloading the Sample. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 67 

3.6 Power Down . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 67 

Chapter 4 Single Scan Operation 69 

4.1 Create a Single-Scan Automation Program . . . . . . . . . . . . . . . . . . . . . . 70 

vi Dektak 8 Manual Rev. G

4.2 Define Scan Location and Length . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 73 

4.3 Run a Scan Routine . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 76 

4.4 Reference/Measurement Cursors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 77 

4.4.1 Basic Cursor Positioning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 77 

4.4.2 Setting Cursor Bandwidths . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 78 

4.4.3 Cursor Positioning Using Arrows . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 79 

4.4.4 Numeric Entry Cursor Positioning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 80 

4.5 Stage Leveling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 81 

4.5.1 Manual Stage Leveling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 81 

4.5.2 Optional Power Stage Leveling. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 82 

4.6 Software Leveling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 85 

4.7 Setting the Zero Point. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 86 

4.8 Delta Average Step Height Measurement . . . . . . . . . . . . . . . . . . . . . . . . 87 

4.9 Plot Magnification . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 89 

4.10 Save Boundaries. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 90 

4.10.1 Showing Saved Boundaries. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 90 

4.10.2 Restoring Saved Boundaries . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 91 

4.11 Data Printout. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 92 

4.12 Saving an Automation Program . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 93 

4.13 Aborting an Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 94 

Chapter 5 Multiple Scan Operation 95 

5.1 Automation Program Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 96 

5.2 Opening a New Automation Program . . . . . . . . . . . . . . . . . . . . . . . . . . . 96 

5.3 Editing an Automation Program . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 98 

5.4 Program Entry . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 99 

5.4.1 Define Scan Location and Length . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 100 

5.4.2 Scan Routines Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 102 

5.5 Editing Scan Routines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 104 

5.5.1 Scan Parameters. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 104 

5.5.2 Display Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 105 

5.5.3 Data Processing Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 105 

5.5.4 Analytical Functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 106 

5.5.5 Global Editing of Scan Routine Parameters . . . . . . . . . . . . . . . . . . . . . . . . 106 

5.6 Automation Program Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 109 

5.6.1 Data File/Data Export . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 109 

5.6.2 Enabling Automation Program Summary (APS) . . . . . . . . . . . . . . . . . . . . 112 

5.6.3 Automation Program Summary Window . . . . . . . . . . . . . . . . . . . . . . . . . . 113 

5.6.4 Printer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 116 

5.6.5 Pause During Autoprogram. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 117 

5.6.6 Stage Control . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 118 

Rev. G Dektak 8 Manual vii

5.7 Deskew . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .119 

5.7.1 Establishing Program Deskew Points . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 120 

5.7.2 Establishing Scan Deskew Points . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 121 

5.7.3 Running an Automation Program Containing Deskew Points . . . . . . . . . . 123 

Chapter 6 Analytical Functions 127 

6.1 Analytical Functions Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 128 

6.2 Roughness Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 129 

6.3 Waviness Parameters. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 133 

6.4 Height Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 135 

6.5 Geometry Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 136 

6.6 Analytical Function Exercise . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 138 

6.6.1 Run Scan and Level Trace. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 138 

6.6.2 Average Roughness Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 139 

6.7 Determining the Cutoff Wavelength . . . . . . . . . . . . . . . . . . . . . . . . . . . 140 

6.8 Activating the Cutoff Filters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 141 

6.9 Entering Filter Cutoffs into a Scan Routine . . . . . . . . . . . . . . . . . . . . . 142 

6.10 Data Type Selection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 143 

6.11 Entering Data Type into a Scan Routine . . . . . . . . . . . . . . . . . . . . . . . 144 

6.12 Measuring and Entering Analytical Functions . . . . . . . . . . . . . . . . . . 145 

6.13 Entering Analytical Functions into a Scan Routine . . . . . . . . . . . . . . 146 

6.14 Deleting Analytical Functions or Results . . . . . . . . . . . . . . . . . . . . . . 147 

6.15 Smoothing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 148 

6.16 Activating the Smoothing Function . . . . . . . . . . . . . . . . . . . . . . . . . . 149 

6.17 Entering Smoothing into a Scan Routine . . . . . . . . . . . . . . . . . . . . . . 150 

Chapter 7 Scan Routine Parameter Description 151 

7.1 Scan Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 152 

7.1.1 Scan ID . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 152 

7.1.2 Stylus Type . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 153 

7.1.3 Scan Location . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 153 

7.1.4 Scan Length. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 154 

7.1.5 Scan Duration/Speed . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 155 

7.1.6 Scan Resolution. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 156 

7.1.7 Scan Type . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 157 

7.1.8 Stylus Force. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 158 

7.1.9 Measurement Range . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 159 

7.1.10 Profile . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 160 

7.1.11 Additional Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 161 

7.1.12 Deflection Scan . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 162 

7.2 Display Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 165 

viii Dektak 8 Manual Rev. G

7.2.1 Software Leveling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 165 

7.2.2 Reference/Measurement Cursors. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 166 

7.2.3 Display Range . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 167 

7.2.4 Display Data Type . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 167 

7.3 Data Processing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 168 

7.3.1 Filter Cutoffs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 168 

7.3.2 Smoothing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 169 

7.3.3 Step Detection Option . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 169 

7.4 Scan Routine Deskew Points . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 169 

Chapter 8 Menu and Toolbar Descriptions 171 

8.1 Startup Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 172 

8.2 File Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 174 

8.3 Run Menu. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 176 

8.4 Profiler Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 178 

8.5 Setup Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 180 

8.6 Calibration Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 186 

8.7 Window Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 189 

8.8 Help Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 190 

8.9 Automation Programs Window Menu Selections . . . . . . . . . . . . . . . . . 191 

8.9.1 Edit Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 191 

8.9.2 Deskew Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 192 

8.10 Scan Routines Window Menu Selections. . . . . . . . . . . . . . . . . . . . . . . 193 

8.10.1 Edit Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 193 

8.10.2 Deskew Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 194 

8.11 Sample Positioning Window Menu Selections . . . . . . . . . . . . . . . . . . 195 

8.11.1 Additional Menu Selections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 195 

8.11.2 Deskew Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 197 

8.11.3 Pop-Up Menu Selections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 197 

8.12 Data Plot Window Menu Selections. . . . . . . . . . . . . . . . . . . . . . . . . . . 201 

8.12.1 Edit Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 201 

8.12.2 Plot Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 202 

8.12.3 Analysis Menu. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 204 

8.13 Auto Prog Summary Window Menu Selections . . . . . . . . . . . . . . . . . 206 

8.13.1 Edit Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 206 

8.14 Toolbars and Icons . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 207 

8.14.1 Customizing the Toolbars . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 207 

8.14.2 Startup Window Toolbar and Icons . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 208 

8.14.3 Automation Programs Window Toolbar and Icons . . . . . . . . . . . . . . . . . . 209 

8.14.4 Scan Routines Window Toolbar and Icons . . . . . . . . . . . . . . . . . . . . . . . . 211 

8.14.5 Sample Positioning Window Toolbar and Icons . . . . . . . . . . . . . . . . . . . . 212 

8.14.6 Data Plot Window Toolbar and Icons . . . . . . . . . . . . . . . . . . . . . . . . . . . . 214 

Rev. G Dektak 8 Manual ix

8.14.7 Automation Program Summary Window Toolbar and Icons . . . . . . . . . . 215 

Chapter 9 Calibration, Maintenance and Warranty 217 

9.1 Care and Handling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 218 

9.1.1 Preventative Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 218 

9.2 Vertical Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 220 

9.2.1 Vertical Calibration Help Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 220 

9.3 Calibrating the 65 kÅ Range. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 221 

9.3.1 Scanning the 50 kÅ Calibration Standard . . . . . . . . . . . . . . . . . . . . . . . . . . 221 

9.3.2 Calculating Average Step Height . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 222 

9.3.3 Setting the Vertical Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 223 

9.4 Calibrating the 655 kÅ Range. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 224 

9.4.1 Scanning the 100 kÅ Calibration Standard . . . . . . . . . . . . . . . . . . . . . . . . . 225 



9.5 Calibrating the 2620 kÅ Range. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 228 

9.5.1 Scanning the 100 kÅ Calibration Standard . . . . . . . . . . . . . . . . . . . . . . . . . 229 



9.5.4 Vertical Calibration for the Extended Vertical Range Option . . . . . . . . . . . 232 

9.6 Clearing the Vertical Calibration. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 233 

9.7 Calibration Wizards . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 233 

9.8 Cleaning the Optical Flat . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 235 

9.9 Stylus Replacement and Tip Cleaning . . . . . . . . . . . . . . . . . . . . . . . . . 237 

9.9.1 Replacing the Stylus . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 237 

9.9.2 Cleaning the Stylus . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 241 

9.10 Optics Adjustment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 242 

9.10.1 Low Mag Camera Alignment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 243 

9.10.2 Low Mag Camera Focus and Alignment . . . . . . . . . . . . . . . . . . . . . . . . . 244 

9.10.3 High Mag Camera Alignment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 245 

9.10.4 High Mag Camera Rotation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 246 

9.10.5 High Mag Camera Focus. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 246 

9.10.6 Video Overlay Adjustment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 247 

9.11 Service Contracts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 248 

9.12 Major Repairs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 248 

9.13 Veeco Metrology Group Statement of Limited Warranty . . . . . . . . . . 250 

Appendix A Options, Accessories and Replacement Parts 253 

Appendix B Stress Measurement Option 257 

B.1 Description of Stress. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 258 

B.2 Identifying Substrate Characteristics . . . . . . . . . . . . . . . . . . . . . . . . . . 260 

x Dektak 8 Manual Rev. G

B.3 Entering Stress Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 262 

B.4 Stress Results . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 263 

B.4.1 Constraints and Limitations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 264 

Appendix C Step Detection Software Option 265 

C.1 Step Detection Parameters. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 267 

C.1.1 Every Step Page . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 268 

C.1.2 First Step Page . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 270 

C.2 Step Detection Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 273 

C.2.1 Performing Step Detection on a Single Scan . . . . . . . . . . . . . . . . . . . . . . . 273 

C.2.2 Programming Step Detection in a Scan Routine. . . . . . . . . . . . . . . . . . . . . 274 

C.2.3 Programming Step Detection on Multiple Scans . . . . . . . . . . . . . . . . . . . . 274 

Appendix D 3D Mapping Option 277 

D.1 3D Mapping Option. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 277 

D.2 Setting Up a 3-D Mapping Program . . . . . . . . . . . . . . . . . . . . . . . . . . . 279 

D.2.1 Files for Mapping Data. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 281 

D.3 Running a Map Program . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 282 

D.4 Vision Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 282 

D.4.1 Vision for Dektak Basic Functions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 282 

D.4.2 Vision for Dektak Toolbar . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 285 

D.5 Analyzing Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 289 

D.5.1 Processed Options. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 289 

D.6 Displaying Data. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 295 

D.6.1 Setting the Units . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 295 

D.6.2 Standard Display File . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 295 

D.6.3 Standard Plots . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 298 

D.6.4 Masking . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 311 

D.7 Dataset vs. Database . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 317 

D.7.1 Dektak Vision Databases . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 318 

Appendix E N-Lite Option 325 

E.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 326 

E.2 Main Functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 327 

E.3 Advanced Users . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 329 

E.3.1 N-Lite Algorithm Configuration File Entries . . . . . . . . . . . . . . . . . . . . . . . 329 

E.3.2 Stiction Problems . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 329 

E.4 Configuration File Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 331 

E.4.1 N-Lite Configuration File . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 331 

E.4.2 Hardware Configuration File . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 331 

E.4.3 Configuration File Example . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 332 

Rev. G Dektak 8 Manual xi

Index 335 

xii Dektak 8 Manual Rev. G

List of Figures 

Chapter 1 System Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1 

Figure 1.0a Dektak 8 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2 

Figure 1.4a Block Diagram of Dektak 8 Architecture . . . . . . . . . . . . . . . . . . . 6 

Figure 1.13a Dektak 8 Profiler Components . . . . . . . . . . . . . . . . . . . . . . . . . 15 

Chapter 2 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .17 

Figure 2.1a D8 Dimensions with Enclosure - Top View . . . . . . . . . . . . . . . . 19 

Figure 2.1b D8 Dimensions with Enclosure - Front View. . . . . . . . . . . . . . . 20 

Figure 2.1c D8 Dimensions with Enclosure - Side View . . . . . . . . . . . . . . . 21 

Figure 2.1d D8 Profiler without Enclosure . . . . . . . . . . . . . . . . . . . . . . . . . . 22 

Figure 2.1e D8 Profiler Dimensions - Top View . . . . . . . . . . . . . . . . . . . . . . 23 

Figure 2.1f D8 Profiler Dimensions - Front View . . . . . . . . . . . . . . . . . . . . . 24 

Figure 2.1g D8 Profiler Dimensions - Side View . . . . . . . . . . . . . . . . . . . . . 25 

Figure 2.3a Stage Assembly. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27 

Figure 2.3b Stage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28 

Figure 2.3c Scan Follower Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28 

Figure 2.4a Universal Chuck . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29 

Figure 2.4b Universal Chuck Mounting Holes and Vacuum Ports . . . . . . . . 30 

Figure 2.5a Z-Drive . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31 

Figure 2.5b Gantry Drive Brackets . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32 

Figure 2.5c Scan Head . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32 

Figure 2.6a Enclosure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33 

Figure 2.7a Rear View of Computer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36 

Figure 2.7b Serial-to-USB Adapter Cable . . . . . . . . . . . . . . . . . . . . . . . . . . . 36 

Figure 2.7c Rear of E-box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37 

Figure 2.7d Optional Theta Encoder . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38 

Figure 2.7e Counter Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38 

Figure 2.7f Counter Box Connection to Computer . . . . . . . . . . . . . . . . . . . . 38 

Figure 2.8a Porous Vacuum Chuck Assembly. . . . . . . . . . . . . . . . . . . . . . . . 40 

Figure 2.11a LED Banks on E-Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42 

Rev. G Dektak 8 Manual xiii


Chapter 3 Basic Functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43 

Figure 3.1a Trackball . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45 

Figure 3.1b Configuration Settings Dialog Box - Shortcuts Folder . . . . . . . 47 

Figure 3.2a Rear View of E-Box. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 49 

Figure 3.2b Startup Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 50 

Figure 3.2c Quick-Access Menu. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 51 

Figure 3.2d Stage Control Panel (in Sample Positioning Window) . . . . . . . 54 

Figure 3.2e Template Editor Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . 55 

Figure 3.3a Window Menu, Sample Positioning . . . . . . . . . . . . . . . . . . . . . 56 

Figure 3.3b Sample Positioning Window with Stage Control Panel . . . . . . 57 

Figure 3.3c Calibration Standard Positioning . . . . . . . . . . . . . . . . . . . . . . . . 58 

Figure 3.3d Low Magnification Button . . . . . . . . . . . . . . . . . . . . . . . . . . . . 58 

Figure 3.3e Camera View Pane (partial view) . . . . . . . . . . . . . . . . . . . . . . . 59 

Figure 3.4a Theta Knob . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 61 

Figure 3.4b Theta Rotate the Stage. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 61 

Figure 3.4c Stylus Movement Icons . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 62 

Figure 3.4d Profiler Menu, Stylus Down . . . . . . . . . . . . . . . . . . . . . . . . . . . 62 

Figure 3.4e Sample Positioning Window Pop-up Menu. . . . . . . . . . . . . . . . 63 

Figure 3.4f Stylus Reticle Alignment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 64 

Figure 3.4g Feature Reticle Alignment. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 65 

Figure 3.4h Update Alignment Reticule . . . . . . . . . . . . . . . . . . . . . . . . . . . . 66 

Figure 3.5a Load Sample Dialog Box. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 67 

Chapter 4 Single Scan Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 69 

Figure 4.1a New Automation Program . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 71 

Figure 4.1b Scan Routines Window with Default Scan Routine (#1 of 1) . . 72 

Figure 4.2a Stylus Reticule Positioned Properly. . . . . . . . . . . . . . . . . . . . . . 73 

Figure 4.2b Scan Location Dialog Box. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 74 

Figure 4.2c Scan Length Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 74 

Figure 4.2d Scan Parameters Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . 75 

Figure 4.3a Calibration Standard Profile . . . . . . . . . . . . . . . . . . . . . . . . . . . 76 

Figure 4.4a Setting Default Cursor Band Widths . . . . . . . . . . . . . . . . . . . . . 77 

Figure 4.4b Setting Cursor Band Widths: Handle and Dialog Box . . . . . . . 78 

Figure 4.4c Data Plot Box. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 79 

Figure 4.4d Cursor-Control Arrows . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 79 

Figure 4.5a Stage Leveling Knob . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 81 

Figure 4.5b Auto Leveling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 83 

Figure 4.5c Power Leveling Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . 83 

Figure 4.6a Cursor Positioning for Software Leveling . . . . . . . . . . . . . . . . . 85 

Figure 4.7a Setting the Zero Point . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 86 

Figure 4.8a Analytical Functions Dialog Box for Data Plot Window . . . . . 87 

Figure 4.8b Step Height Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 88 

Figure 4.9a Plot Magnification . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 89 

xiv Dektak 8 Manual Rev. G


Figure 4.10a Save Boundaries . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .90 

Figure 4.10b Restoring Saved Boundaries. . . . . . . . . . . . . . . . . . . . . . . . . . .91 

Figure 4.12a Automation Programs Window. . . . . . . . . . . . . . . . . . . . . . . . .93 

Figure 4.12b Save Dektak Data or Program Dialog Box. . . . . . . . . . . . . . . .94 

Chapter 5 Multiple Scan Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 95 

Figure 5.2a New Automation Program . . . . . . . . . . . . . . . . . . . . . . . . . . . . .97 

Figure 5.3a Copy to Range Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . .98 

Figure 5.4a Scan Routines Area. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .99 

Figure 5.4b Scan Location Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . .100 

Figure 5.4c Scan Length Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .102 

Figure 5.4d Scan Routines Window. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .103 

Figure 5.5a Scan Parameters for Routine #: 2 of 4 Dialog Box. . . . . . . . . .104 

Figure 5.5b Display Parameters Dialog Box . . . . . . . . . . . . . . . . . . . . . . . .105 

Figure 5.5c Data Processing Parameters Dialog Box . . . . . . . . . . . . . . . . .105 

Figure 5.5d Analytical Functions Dialog Box for the Scan Routines 

Window. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .107 

Figure 5.5e Analytical Function Appended . . . . . . . . . . . . . . . . . . . . . . . . .107 

Figure 5.6a Automation Programs Window: Automation Programs Options 

Section. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .109 

Figure 5.6b Automation Program Options Dialog Box: General Page . . . . 110 

Figure 5.6c Load Dektak Data or Program File Dialog Box: Scan Data . . . 112 

Figure 5.6d Automation Program Summary Window - Examples . . . . . . . 113 

Figure 5.6e Load Dektak Data or Program File Dialog Box: APS Data . . . 116 

Figure 5.6f Automation Program Options Dialog Box: Extended Page . . . 117 

Figure 5.7a Automation Program Deskew Points Dialog Box . . . . . . . . . .120 

Figure 5.7b Automation Program Deskew Point Setup Dialog Box . . . . . .121 

Figure 5.7c Scan Routine Deskew Points Dialog Box. . . . . . . . . . . . . . . . .122 

Figure 5.7d Scan Routine Deskew Point Setup Dialog Box . . . . . . . . . . . .122 

Figure 5.7e Automation Program Deskew Point Check Dialog Box. . . . . .123 

Chapter 6 Analytical Functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 127 

Figure 6.1a Analytical Functions Dialog Boxes . . . . . . . . . . . . . . . . . . . . .128 

Figure 6.2a Ra Roughness Analytical Function. . . . . . . . . . . . . . . . . . . . . .129 

Figure 6.2b Rp Roughness Analytical Function . . . . . . . . . . . . . . . . . . . . .130 

Figure 6.2c Rq Roughness Analytical Function. . . . . . . . . . . . . . . . . . . . . .130 

Figure 6.2d Rt Roughness Analytical Parameters . . . . . . . . . . . . . . . . . . . .131 

Figure 6.2e Rv Roughness Analytical Function. . . . . . . . . . . . . . . . . . . . . .131 

Figure 6.2f Rz Roughness Analytical Parameter . . . . . . . . . . . . . . . . . . . . .132 

Figure 6.3a Wa Waviness Analytical Function . . . . . . . . . . . . . . . . . . . . . .133 

Figure 6.6a Calibration Standard Positioning for a Roughness 

Measurement. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .138 

Figure 6.6b Compute Ra . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .139 

Figure 6.8a Roughness and Waviness Filters Dialog Box . . . . . . . . . . . . . .141 

Rev. G Dektak 8 Manual xv


Figure 6.9a Data Processing Parameters Dialog Box . . . . . . . . . . . . . . . . . 142 

Figure 6.10a Data Type Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 143 

Figure 6.11a Display Parameters Dialog Box. . . . . . . . . . . . . . . . . . . . . . . 144 

Figure 6.12a Analytical Functions Dialog Box (Data Plot Window) / Analytic 

Results . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 145 

Figure 6.13a Analytical Functions Dialog Box (Scan Routines Window) / 

Analytic Functions. . . . . . . . . . . . . . . . . . . . . . . . . . . . 146 

Figure 6.14a Deleting Analytical Functions . . . . . . . . . . . . . . . . . . . . . . . . 147 

Figure 6.16a Smoothing Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 149 

Figure 6.17a Data Processing Parameters Dialog Box: Smoothing 

Parameter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 150 

Chapter 7 Scan Routine Parameter Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 151 

Figure 7.0a Scan Routine Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 151 

Figure 7.1a Scan Parameter Dialog Box: ID. . . . . . . . . . . . . . . . . . . . . . . . 152 

Figure 7.1b Scan Parameter Dialog Box: Stylus Type . . . . . . . . . . . . . . . . 153 

Figure 7.1c Scan Parameter Dialog Box: Scan Location . . . . . . . . . . . . . . 154 

Figure 7.1d Scan Parameter Dialog Box: Length . . . . . . . . . . . . . . . . . . . . 155 

Figure 7.1e Scan Parameter Dialog Box: Duration. . . . . . . . . . . . . . . . . . . 156 

Figure 7.1f Scan Parameter Dialog Box: Resolution . . . . . . . . . . . . . . . . . 157 

Figure 7.1g Scan Parameter Dialog Box: Scan Type . . . . . . . . . . . . . . . . . 158 

Figure 7.1h Scan Parameter Dialog Box: Stylus Force. . . . . . . . . . . . . . . . 159 

Figure 7.1i Scan Parameter Dialog Box: Measurement Range . . . . . . . . . 160 

Figure 7.1j Sample Surface Profiles . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 160 

Figure 7.1k Scan Parameter Dialog Box: Profile . . . . . . . . . . . . . . . . . . . . 161 

Figure 7.1l Scan Parameter Dialog Box: Additional Parameters . . . . . . . . 162 

Figure 7.1m Scan Parameter Dialog Box: Deflection Parameters Page . . . 163 

Figure 7.2a Display Parameters Dialog Box: Software Leveling Parameter165 

Figure 7.2b Display Parameters Dialog Box: Cursor Positioning . . . . . . . 166 

Figure 7.2c Display Parameters Dialog Box: Display Range. . . . . . . . . . . 167 

Figure 7.2d Display Parameters Dialog Box: Display Data Type . . . . . . . 168 

Figure 7.3a Data Processing Parameters Dialog Box: Filters and 

Smoothing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 168 

Chapter 8 Menu and Toolbar Descriptions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 171 

Figure 8.1a Startup Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 172 

Figure 8.2a File Menu. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 174 

Figure 8.3a Run Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 176 

Figure 8.4a Profiler Menu. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 178 

Figure 8.5a Setup Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 180 

Figure 8.5b Appearance Folder. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 180 

Figure 8.5c Working Directories Folder . . . . . . . . . . . . . . . . . . . . . . . . . . . 181 

Figure 8.5d Diagnostics Folder. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 182 

Figure 8.5e Shortcuts Folder. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 182 

xvi Dektak 8 Manual Rev. G


Figure 8.5f Illumination Folder . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .183 

Figure 8.5g Leveling Folder. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .184 

Figure 8.5h Theta Encoder Folder . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .185 

Figure 8.6a Calibration Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .186 

Figure 8.6b Force Calibration Dialog Box. . . . . . . . . . . . . . . . . . . . . . . . . .186 

Figure 8.7a Window Menu. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .189 

Figure 8.8a Help Menu. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .190 

Figure 8.9a Automation Program Window: Edit Menu and Deskew Menu 191 

Figure 8.10a Scan Routines Window: Edit Menu and Deskew Menu. . . . .193 

Figure 8.11a Sample Positioning Window: Edit Menu and Deskew Menu.195 

Figure 8.11b Location for Routine #: m of n Dialog Box . . . . . . . . . . . . . .195 

Figure 8.11c Define Scan Length Dialog Box . . . . . . . . . . . . . . . . . . . . . . .196 

Figure 8.11d Sample Positioning Window Pop-Up Menu . . . . . . . . . . . . . .198 

Figure 8.12a Data Plot Window: Edit, Plot and Analysis Menus . . . . . . . .201 

Figure 8.12b Plot Data Type Dialog Box. . . . . . . . . . . . . . . . . . . . . . . . . . .203 

Figure 8.12c Set Bandwidths Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . .204 

Figure 8.13a Auto Prog Summary Window: Edit Menu . . . . . . . . . . . . . . .206 

Figure 8.14a Toolbar Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .207 

Figure 8.14b Customize Toolbar Dialog Box . . . . . . . . . . . . . . . . . . . . . . .207 

Figure 8.14c Startup Window Toolbar . . . . . . . . . . . . . . . . . . . . . . . . . . . . .208 

Figure 8.14d Automation Programs Window Toolbar . . . . . . . . . . . . . . . . .209 

Figure 8.14e Scan Routines Window Toolbar . . . . . . . . . . . . . . . . . . . . . . . 211 

Figure 8.14f Sample Positioning Window Toolbar . . . . . . . . . . . . . . . . . . .212 

Figure 8.14g Data Plot Window Toolbar . . . . . . . . . . . . . . . . . . . . . . . . . . .214 

Figure 8.14h Automation Program Summary Window Toolbar . . . . . . . . .215 

Chapter 9 Calibration, Maintenance and Warranty . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 217 

Figure 9.2a Vertical Calibration Help Dialog Box. . . . . . . . . . . . . . . . . . . .220 

Figure 9.3a Stylus Reticule Position . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .221 

Figure 9.3b 50 kÅ Calibration Standard Plot. . . . . . . . . . . . . . . . . . . . . . . .222 

Figure 9.3c Summary Results in APS Window of VERT_65K.mp 

Program. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .223 

Figure 9.3d Setting Vertical Calibration Parameters - 65 kÅ Range . . . . . .223 

Figure 9.3e Example Calibration Results Using a 50 kÅ Calibration 

Standard . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .224 


Figure 9.4b 100 kÅ Calibration Standard Plot . . . . . . . . . . . . . . . . . . . . . . .226 

Figure 9.4c Summary Results in APS Window of VERT_655K.mp 

Program. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .227 

Figure 9.4d Setting Vertical Calibration Parameters - 655 kÅ Range . . . . .227 

Figure 9.4e Example Calibration Results Using a 100 kÅ Calibration 

Standard . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .228 


Figure 9.5b 100 kÅ Calibration Standard Plot . . . . . . . . . . . . . . . . . . . . . . .230 

Rev. G Dektak 8 Manual xvii


Figure 9.5c Setting Vertical Calibration Parameters - 2620 kÅ Range . . . 231 

Figure 9.5d Example Calibration Results Using a 100 kÅ Calibration 

Standard . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 231 

Figure 9.5e Calibrating the Extended Vertical Range Option. . . . . . . . . . . 232 

Figure 9.5f Scanning the 750 µm Step Height Standard. . . . . . . . . . . . . . . 232 

Figure 9.6a Clear Vertical Calibration Dialog Box. . . . . . . . . . . . . . . . . . . 233 

Figure 9.7a Calibration Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 233 

Figure 9.7b Confirmation Dialog Box for Calibration Wizards . . . . . . . . . 234 

Figure 9.8a Stage Removal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 236 

Figure 9.9a Stylus Assembly. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 237 

Figure 9.9b Removing Sensor Shield . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 238 

Figure 9.9c Stylus Replacement Fixture . . . . . . . . . . . . . . . . . . . . . . . . . . . 238 

Figure 9.9d Stylus Replacement Fixture. . . . . . . . . . . . . . . . . . . . . . . . . . . 239 

Figure 9.9e Align Stylus Replacement Fixture . . . . . . . . . . . . . . . . . . . . . . 239 

Figure 9.9f Scan Head flush with Fixture. . . . . . . . . . . . . . . . . . . . . . . . . . 239 

Figure 9.9g Fixture with Captured Stylus. . . . . . . . . . . . . . . . . . . . . . . . . . 240 

Figure 9.10a LIS3 Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 243 

Figure 9.10b Low Mag Camera Focus and Alignment. . . . . . . . . . . . . . . . 244 

Figure 9.10c High Mag Camera and Fold Mirror. . . . . . . . . . . . . . . . . . . . 245 

Figure 9.10d High Mag Focus . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 246 

Figure 9.10e Video Setup Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . 247 

Appendix A Options, Accessories and Replacement Parts . . . . . . . . . . . . . . . . . . . . . . . . . . 253 

Appendix B Stress Measurement Option . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 257 

Figure B.1a Stress Results Dialog Box (Example) . . . . . . . . . . . . . . . . . . . 258 

Figure B.2a Stress Parameters Dialog Box. . . . . . . . . . . . . . . . . . . . . . . . . 260 

Figure B.2b Elasticity Constants Dialog Box . . . . . . . . . . . . . . . . . . . . . . . 261 

Figure B.4a Stress Results Dialog Box. . . . . . . . . . . . . . . . . . . . . . . . . . . . 263 

Figure B.4b Plot Data Type Dialog Box: Stress Plots . . . . . . . . . . . . . . . . 263 

Appendix C Step Detection Software Option . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 265 

Figure C.1a Step Detection Dialog Box: General Settings Page . . . . . . . . 267 

Figure C.1b Step Detection Dialog Box: Every Step Page. . . . . . . . . . . . . 269 

Figure C.1c Step Detection Dialog Box: First Step Page . . . . . . . . . . . . . . 270 

Figure C.2a Typical Scan of Multiple Steps . . . . . . . . . . . . . . . . . . . . . . . . 273 

Appendix D 3D Mapping Option. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 277 

Figure D.2a Scan Parameters Dialog Box--Map Scan Type. . . . . . . . . . . . 279 

Figure D.2b Scan Parameters Dialog Box: Map Parameters Page . . . . . . . 280 

Figure D.4a Vision for Dektak Start-Up Window . . . . . . . . . . . . . . . . . . . 282 

Figure D.4b Open a Dataset Icon . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 283 

Figure D.4c Open Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 283 

xviii Dektak 8 Manual Rev. G


Figure D.4d Subtract/Add Dialog Box. . . . . . . . . . . . . . . . . . . . . . . . . . . . .284 

Figure D.4e Customize Toolbar Window. . . . . . . . . . . . . . . . . . . . . . . . . . .288 

Figure D.5a Processed Options Dialog Box - Terms Removal Tab. . . . . . .290 

Figure D.5b Processed Options Dialog Box - Filtering Tab . . . . . . . . . . . .291 

Figure D.5c Processed Options Dialog Box - Masking Tab . . . . . . . . . . . .292 

Figure D.5d Processed Options Dialog Box - Data Restore Tab . . . . . . . . .293 

Figure D.5e Processed Options Dialog Box - General Tab . . . . . . . . . . . . .294 

Figure D.5f Processed Options Dialog Box - Dektak Tab . . . . . . . . . . . . . .295 

Figure D.6a Contour Plot . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .296 

Figure D.6b Set Default Output Dialog Box . . . . . . . . . . . . . . . . . . . . . . . .297 

Figure D.6c Main Analysis Plots . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .298 

Figure D.6d Contour Plot . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .299 

Figure D.6e Contour Plot Menu. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .301 

Figure D.6f 2D Analysis Plot. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .302 

Figure D.6g 3D Interactive Plot . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .305 

Figure D.6h 3D Plot . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .306 

Figure D.6i Filtered Histogram Plot. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .307 

Figure D.6j Filtered Bearing Ratio Analysis Plot . . . . . . . . . . . . . . . . . . . .310 

Figure D.7a Database Options Button . . . . . . . . . . . . . . . . . . . . . . . . . . . . .318 

Figure D.7b Database Options Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . .318 

Figure D.7c Define Database Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . .319 

Figure D.7d Database Units Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . .320 

Figure D.7e Pass/Fail Dialog Box.. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .321 

Figure D.7f List View of a Database . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .323 

Appendix E N-Lite Option. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 325 

Rev. G Dektak 8 Manual xix


xx Dektak 8 Manual Rev. G

Chapter 1 System Overview 

The Dektak 8 is an advanced surface texture measuring system that accurately measures surface 

texture below submicro-inch and film thickness to 262 µm (see Figure 1.0a). This chapter includes 

the following topics: 

• Safety Precautions: Section 1.1 

• Included Reference Materials: Section 1.2 

• Printer Selection: Section 1.3 

• Principle of Operation: Section 1.4 

• Configuration: Section 1.5 

• Stylus Size Considerations: Section 1.6 

• Scan Speed Versus Stylus Force: Section 1.7 

• Horizontal Resolution: Section 1.8 

• Scan Data Storage Requirements: Section 1.9 

• Dektak 8 Technical Specifications: Section 1.10 

• Options and Accessories: Section 1.11 

• Operation Overview: Section 1.12 

• System Components: Section 1.13 

• Tracer: Section 1.14 

• Excel Macro: Section 1.15 

Rev. G Dektak 8 Manual 1

System Overview 

Figure 1.0a Dektak 8 

2 Dektak 8 Manual Rev. G

1.1 Safety Precautions 


Safety Precautions 

CAUTION: Use Dektak 8 equipment only as specified in this manual and as specified in any 

documentation associated with its components. Any use of the equipment in an 

unspecified manner is strongly discouraged and may result in damage or injury as 

cautioned by signed warnings in this chapter and throughout the documentation. 

Table 1.1a Safety Symbols Key 

Symbol Definition 

This symbol identifies conditions or practices that could result in 

damage to the equipment or other property, and in extreme cases, 

possible personal injury. 

Ce symbole indique des conditions d'emploi ou des actions pouvant 

endommager les équipements ou accessoires, et qui, dans les cas 

extrêmes, peuvent conduire à des dommages corporels. 

Dieses Symbol beschreibt Zustände oder Handlungen die das Gerät 

oder andere Gegenstände beschädigen können und in Extremfällen 

zu Verletzungen führen können. 

This symbol identifies conditions or practices that involve potential 

electric shock hazard. 

Ce symbole indique des conditions d'emploi ou des actions comportant 

un risque de choc électrique. 

Dieses Symbol beschreibt Zustaende oder Handlungen die einen 

elekrischen Schock verursachen koennen. 

CAUTION: Only qualified personnel aware of the hazards involved may 

perform service and adjustments. 

ATTENTION: Toute réparation ou étalonnage doit être effectué par des 

personnes qualifiées et conscientes des dangers 

potentiels. 

VORSICHT: Service- und Einstellarbeiten sollten nur von 

qualifizierten Personen, die sich der auftretenden 

Gefahren bewußt sind, durchgeführt werden. 



Safety Precautions 

CAUTION: Follow company and government safety regulations. Keep 

unauthorized personnel out of the area when working on 

equipment. 

ATTENTION: Il est impératif de suivre les prérogatives imposées tant 

au niveau gouvernemental qu’au niveau des entreprises. 

Les personnes non autorisées ne peuvent rester près du 

système lorsque celui-ci fonctionne. 

VORSICHT: Befolgen Sie die gesetzlichen Sicherheitsbestimmungen 

Ihres Landes. Halten Sie nicht authorisierte Personen 

während des Betriebs fern vom Gerät. 

CAUTION: Voltages supplied to and within certain areas of the system are 

potentially dangerous and can cause injury to personnel. Powerdown 

everything and unplug from sources of power before doing 

ANY electrical servicing. (Digital Instruments, Veeco personnel, 

only.) 

ATTENTION: Les tensions utilisées dans le système sont 

potentiellement dangereuses et peuvent blesser les 

utilisateurs. Avant toute intervention électrique, ne pas 

oublier de débrancher le système. (Réservé au personnel 

de Digital Instruments/Veeco Metrology Group 

seulement.) 

VORSICHT: Die elektrischen Spannungen, die dem System zugeführt 

werden, sowie Spannungen im System selbst sind 

potentiell gefährlich und können zu Verletzungen von 

Personen führen. Bevor elektrische Servicearbeiten 

irgendwelcher Art durchgeführt werden ist das System 

auszuschalten und vom Netz zu trennen. (Nur Digital 

Instruments/Veeco Personal.) 


1.2 Included Reference Materials 

Help 

PDF 


Included Reference Materials 

The Dektak 8 reference information is provided in multiple formats for easy access. This manual 

provides a hard copy format of the Dektak 8 Manual. As a supplement to the printed manual, the 

Dektak 8 software contains the Portable Document Format (PDF) of the Dektak 8 Manual and any 

software release notices relevant to the current software version. These electronic files provide a 

convenient way to quickly search for a particular subject and the capability to print specific sections 

of the manual. Use the following procedures to find these alternate formats of the manual. 

To display Help in the Dektak 8 software, select Help > Contents, or press the F1 key on the 

keyboard. The Dektak 8 PDF format allows you to search Dektak 8 information while operating the 

tool. 

1. Locate the PDF file of the manual in the C directory of the computer. The path is C:\Program 

Files\Veeco\Dektak32\Docs\Dektak 8 Manual.pdf. 

2. Double-click Dektak 8 Manual.pdf to open the PDF version of the manual. 

1.3 Printer Selection 

Note: Due to Veeco copyright specifications, certain editing features for this file have 

been disabled. 

The Dektak 8 can transfer the data output to the computer printer port. Refer to the Microsoft 

Windows XP manual for a list of compatible printers and printer installation procedure. A LAN 

card is provided for connection to local area network printers. 



Principle of Operation 

1.4 Principle of Operation 

The Dektak 8 takes measurements electromechanically by moving a diamond-tipped stylus over 

the sample. The high precision gantry moves the stylus according to a user-programmed scan 

length, speed and stylus force. The stylus is mechanically coupled to the core of a Linear Variable 

Differential Transformer (LVDT). 

As the gantry moves the stylus, the stylus rides over the sample surface. Surface variations cause 

the stylus to be translated vertically. Electrical signals corresponding to stylus movement are 

produced as the core position of the LVDT changes. The LVDT produces an analog signal 

proportional to the position change, which in turn is conditioned and converted to a digital format 

through a high precision, integrating analog-to-digital converter. 

The digitized signals from a single scan are stored in computer memory for display, manipulation, 

measurement, and printing. The Dektak 8 stores programs that can easily be changed to suit both 

production and laboratory use. 

Figure 1.4a Block Diagram of Dektak 8 Architecture 

6 Dektak 8 Manual Rev. G 

010

1.5 Configuration 

This section describes the Dektak 8 Profiler Components (see Figure 1.13a). 

1.5.1 Computer Console 


Configuration 

The computer console incorporates a Dell Optiplex GX260 or better computer, comprising a 2.53- 

GHz Intel Pentium IV processor (or faster) with 512-MB RAM and 40-GB internal drive. It also 

includes a CD-R/RW drive and a 1.4-MB, 3.5" high density diskette drive. Microsoft® Windows® 

XP provides a user-friendly interface with pull-down menus and pop-up windows. 

1.5.2 Video Monitor 

The Dektak 8 video monitor is an optional 17" high resolution flat panel display color monitor. It 

displays programs and graphics in full color, along with a color video image of the substrate surface 

from either of two cameras. The Dektak 8 will display the substrate either alone or with 

superimposed graphics. 

1.5.3 Profiler 

The Dektak 8 profiler contains the mechanical and optical components for sample placement, 

sample viewing, scanning/measurement and environmental protection. A diamond-tipped stylus 

permits accurate measurements in a wide range of applications. In standard configuration, user 

programmable stylus force from 1 mg to 15 mg allows profiling on soft or hard surfaces. The N- 

Lite option enables programmable stylus forces down to 0.03 mg. 

1.5.4 Dual Switchable Video Cameras 

Dual video cameras provide both high magnification with a 1-mm horizontal field of view, and low 

magnification with an 8-mm top-down field of view. The two camera views are software switchable 

for coarse and fine sample positioning. The variable intensity illumination adjusts to view samples 

with differing reflectivity. 

1.5.5 Programmable X-Y Positioning 

A high precision programmable positioning system permits X-Y positioning to any location over a 

200 mm diameter (8" x 8") area, with +/-5 µm repeatability and 3.175 µm resolution. Theta rotation 

is accomplished manually on the standard system. With the optional motorized/programmable 

theta, rotation values in 0.1 degree increments up to 360 degrees may be programmed. You can 

control stylus position on the sample via the Dektak 8 keyboard or trackball. 



Stylus Size Considerations 

1.6 Stylus Size Considerations 

A stylus-based surface profiler measures the physical surface of the sample. To achieve optimum 

performance in certain applications, consider stylus size and shape. 

The radius of the recommended diamond stylus is 12.5 µm. This stylus meets most requirements 

for the majority of applications; however, some applications may require either a larger or smaller 

tip radius. Reducing the stylus tip radius increases the point pressure on the sample and may require 

resetting of the stylus force. You may program stylus force from 1-15 mg. 

Optional styli with radii of 0.2 µm, 0.7 µm, 2.5 µm, 5 µm, and 25 µm are available for applications 

which require high horizontal resolution or measurement of very soft films. 

New stylus developments include Super Sharp Styli with sub-100 nm radii and HAR tips with 5:1 

aspect ratios (200 µm X 20 µm and 20 µm X 2 µm). 

Consult your dealer for further information. 

1.7 Scan Speed Versus Stylus Force 

When using a low stylus force, the stylus may bounce off the surface if it encounters a large step at 

high scan speeds. In applications requiring light stylus force, use low or medium scan speed 

(in other words, a longer scan duration) at the shortest possible scan length. 


1.8 Horizontal Resolution 


Horizontal Resolution 

The Dektak 8 provides ultra high horizontal resolution with a maximum 60,000 data points 

available per scan. Scan length and scan duration determine the horizontal resolution of the Dektak 

8. The Dektak 8 maintains a constant sampling rate of 300 data points per second. By slowing scan 

speed, you can process more samples over a longer period of time over a given scan length. Scan 

time duration may be set anywhere from 3 to 200 seconds. The examples below provide the number 

of data points per scan at various scan durations for a 2000µm scan length. 

Duration Data Points 

Table 1.8a Data Points Per Scan 

Use the following formula to determine the number of data points for any given scan length and 

speed. 

OR 

The horizontal resolution of the Dektak 8 directly relates to the scan length and number of data 

points per scan. The scan length is selectable from 50 µm to 30 mm. Without altering the number of 

data points per scan, it is possible to adjust the horizontal resolution or the distance between data 

points by altering the scan length. The scan resolution parameter displays the distance between data 

points (in µm per sample). 

1.9 Scan Data Storage Requirements 

Resolution at Maximum 

Scan Length 

200 seconds 60,000 0.033 µm/sample 




3 seconds 900 2.222 µm/sample 

# Data Points/Scan = 

------------------------------------------------------------------------ 

Scan Length (in µm) 

Horizontal Resolution (in µm) 

# Data Points/Scan = 300 x Scan Duration (in seconds) 

Store scan data on either the hard disk or on floppy diskettes. The number of storable data files 

depends on the number of data points scanned. Each data point plotted requires five bytes of 

storage space. Therefore, a 13 second scan requires approximately 19,500 bytes of disk space. 



Dektak 8 Technical Specifications 

1.10 Dektak 8 Technical Specifications 

Table 1.10a Dektak 8 Technical Specifications 

Specification Standard Option 

Vertical Range 50 Å to 2,620 kÅ (0.1 microinch to 10 mils) 1 mm maximum 

Vertical Resolution (at various 

ranges) 

1 Å/65 kÅ, 10 Å/655 kÅ, 40 Å/2620 kÅ 160 Å, 1 mm 

Scan Length Range 50 µm to 50 mm (2 mils to 2") 100 mm maximum (200 mm stitched) 

Scan Speed Ranges 3 seconds to 200 seconds 

Software Leveling Two-point programmable or cursor leveling 

Stage Leveling Manual Automatic power leveling 

Stylus (none) 25 µm, 12.5 µm, 5 µm, 2.5 µm, 0.7 µm, 

0.2 µm 

Stylus Tracking Force Programmable, 1-15mg Down to 0.03 mg (N-Lite) 

Maximum Sample Thickness 25.4 mm (1") 76.2 mm (3”) 

Sample Stage Diameter 50 mm to 200 mm (2" to 8") 

Sensor Position Translation X Axis: 200 mm (8") 

Y Axis: 200 mm (8") 

Sample Stage Rotation Manual Theta, 360º Programmable Theta, 360º; with and 

without encoders 

Maximum Sample Weight 2.5 kg (5 lbs.) 

Power Requirements 

Current Phase 

100-120~ or 220-240~, 50/60 Hz 

5 A@100-120~ or 3 A @ 220-240~ (+/-10%) 

Single Phase 

Warm-up Time 15 min. for maximum stability 

Operating Temperature 21º C +/-3º C (70º F +/-5º F) 

Environmental Humidity 40%, +/-20% (non-condensing) 

Camera Field of View High mag. = 1 mm; Low mag. = 8 mm 

Color Camera Dual cameras: top-down view and 45º side view 

Sample Illumination Variable intensity white light LED 

Dimensions 18" W x 24" D x 19" H (profiler only) 


1.11 Options and Accessories 


Options and Accessories 

Table 1.11a details a selection of Dektak 8 options and accessories. See Appendix A for a complete 

list of options and accessories for the Dektak 8. 

Table 1.11a Dektak 8 Options and Accessories 

Interactive 3-D Software Provides 3-D renderings and surface area analysis. 

Stress Measurement Calculates tensile or compressive stress on processed 

wafers. Includes special fixturing for threepoint 

suspension of wafer. 

N-Lite Software 

(must have LIS 3 Sensor) 

Allows stylus-to-surface engage routines for ultralow 

force profiling. 

Ceramic Vacuum Chuck Removable chuck provides sample restraint 

for small samples and pieces of samples. 

Vacuum source required. 

Vibration Isolation Table Requires 50 PSI compressed air. 

Calibration Standards A broad line of calibration standards calibrate the 

system for virtually any application. Both step 

height and VLSI roughness standards are offered. 

Programmable Theta Stage Replaces standard manual theta to enable motorized, 

programmable rotation of the sample stage 

and deskew samples. 

High Resolution Programmable 

Theta Stage 

Motorized theta positioning with encoder feedback 

for high performance automation. 

Extended Vertical Range Increases the maximum vertical measurement 

range from 262 µm to 1 mm for measuring large 

steps or curved surfaces. 

Extended Scan Increases the maximum scan length from the standard 

50 mm to 100 mm for measuring planarity 

and stress. 



Operation Overview 

1.12 Operation Overview 

The following section defines some of the basic operating terms of the Dektak 8. 

1.12.1 Automation Program 

Automation program files can store a number of scan routines on the hard disk. Scan routines, 

along with their X,Y and theta stage locations, are inserted into the automation program. 

Automation programs are stored for various applications in Windows file format on the hard disk, 

giving the Dektak 8 virtually unlimited program storage capability. 

1.12.2 Scan Routine 

The Dektak 8 scan routine consists of sixteen individual parameters you may select using the 

trackball. The user may determine parameters such as scan length and speed, leveling, and stylus 

force. You may enter a maximum of 10,000 scan routines into each automation program file. 

1.12.3 Sample Positioning 

The sample is placed on the sample stage, and the stylus is positioned for scanning using controls 

for X-Y translation (via the gantry), and rotation and leveling (via the stage). Position the sample 

using the trackball. In fine positioning mode, the stylus/optics assembly tracks the motion of the 

trackball. A crosshair reference displays on the monitor during fine positioning. This software 

reticle superimposes over the video image of the sample surface. 

In the coarse positioning mode, a template in the shape of a wafer or disk displays on the monitor. 

With the trackball, simply point to the desired location on the template, double-click the location, 

and the gantry automatically translates to that position. You can also rotate the templates to 

accomplish theta rotation of the sample if your Dektak 8 is equipped with the Programmable Theta 

option. 

1.12.4 Scanning 

When a scan runs, the stylus lowers and contacts the sample surface. Each time the stylus is 

lowered into position, the tower fine-tunes the vertical position, referred to as “null,” to the 

optimum zero reference for the selected scan routine parameters. The stage moves the sample as 

the stylus rides over the surface features. The video monitor allows a view of both the physical 

scanning of the sample and the plotting of the data simultaneously. 

At the end of the scan, the stylus automatically retracts, the scan drive resets, and the system is 

immediately ready for the next scan. The surface features encountered by the stylus are represented 

as a two-dimensional profile which is plotted, scaled, and displayed on the video monitor. 


1.12.5 Profile Manipulation and Measurement 



An initial profile may require software leveling, zero referencing and software magnification to 

zoom in on an area of interest. Measurement is a continuous process facilitated by simple 

movements of the reference (R) and measurement (M) cursors. 

1.12.6 Data Plot Display 

The plotting screen displays scan data as well as various parameters from the scan routine, such as 

the stage X, Y and theta location, scan identification, scan length, scan speed, resolution, stylus 

force, measurement range and profile. Also shown are the vertical and horizontal distances between 

the cursor/trace intercepts, as well as the distances from the vertical and horizontal “zero” grid 

lines. If you request analytical functions, the results from those calculations also display. 

1.12.7 Analytical Functions 

The Dektak 8 has a wide range of analytical functions available for analysis of roughness, 

waviness, step height, and geometrical measurements. You can request up to 30 analytical functions 

per scan. 

1.12.8 Boundary Magnification 

Following a scan, you can modify boundary locations to magnify portions of the trace. These new 

boundary locations can be stored and recalled at any time. 




1.12.9 Side Bar Buttons 

Startup 

If you have checked the box Show side bar buttons in the Dektak Visual Settings section of the 

Appearance folder (Setup > Configuration Settings dialog box), the following large buttons will 

be displayed at the left side of the indicated windows. 

Table 1.12a Side Bar Buttons 

Window(s) Description Button 

Sample Positioning 

and Data Plot 

Open Automation Program file: 

Switch to Automation Program window: 

Switch to Sample Positioning window: 

Launch Dektak Help file: 

Move the gantry to the current scan routine’s 

scan location: 

Execute the current scan routine, but at the 

current stage location: 

Execute the current scan routine: 

Run the automation program: 

Abort the current operation: 


1.13 System Components 

Figure 1.13a Dektak 8 Profiler Components 


System Components 



Tracer 

1.14 Tracer 

1.15 Excel Macro 

The tracer allows highly detailed technical information to be logged into a file (Tracer.log). This 

file can then be sent to Veeco if a software problem occurs. To start the tracer, select Start > All 

Programs > Veeco > Dektak32 > Tracer.exe, or follow this path: C:\Program 

Files\Veeco\Dektak32\Tracer.exe. 

Note: Unless activated, tracing does not occur during realtime to prevent oversized 

logging files and realtime operation burden. 

Note: Previous versions of the Dektak 8 software included an Excel macro that 

allowed you to export scan data to Microsoft Excel. However, since the current 

version of the software allows you to export data as a comma-delimited text 

file, the macro is no longer needed or provided. See Data File/Data Export: 

Section 5.6.1 for more information. 


Chapter 2 Installation 

This chapter includes the following topics: 

• Facilities Requirements: Section 2.1 

• Installing the Vibration Isolated Workstation Option: Section 2.2 

• Installing the Stage Assembly: Section 2.3 

• Shipping Bracket Removal: Section 2.5 

• Enclosure Assembly: Section 2.6 

• Cabling and Connections: Section 2.7 

• Porous Vacuum Chuck (Option) Installation: Section 2.8 

• System Configuration: Section 2.10 

• System Checkout: Section 2.11 

• Optics Alignment: Section 2.12 


Installation 

Facilities Requirements 

2.1 Facilities Requirements 

Vibration Interference 

Floor 

Table 2.1a Facilities Requirements 

Facility Requirement 

Temperature Operating Range, 21°C, +/-3° (70°F, +/- 5°) 

Clean Room Not required (Class 1000 or better recommended). 

Relative 

Humidity 

Power 

Requirements 

Do not operate the system near sources of vibration (such as fans or motors) or in excessive flow of 

a clean room air duct. Place the tool in an area with little foot traffic and low acoustical noise for 

optimum performance. 

The floor must be level, rigid and capable of supporting 300 lbs (136 kg) on a vibration isolation 

table. 

System Location and Service Access 

40%, +/-20% relative humidity (non-condensing) 

100-120~ (+/-10%) volts at 5 amps, 1 Phase, 50/60Hz 

220-240~ (+/-10%) volts at 3 amps, 1 Phase, 50/60Hz 

Power Demand 720 VA maximum 

Power 

Connection 

Six 6-ft, 3-conductor, 16AWG, power cords supplied with system. Cords 

terminate with male NEMA L5-15 connectors. Connectors rated for 13 

amps, 1,625 watts @ 125 VAC. 

Vacuum 24" (610 mm) Hg minimum constant vacuum for the system with one 

fitting for 1/4" OD tubing. Standard fitting is 1/4" slip connect. 

Clean Dry Air 

(For Optional 

Vibration) 

50 psi clean air for the system with one fitting for 1/4" OD tubing. 

Standard fitting is 1/4" slip connect. 

Vibration Not to exceed 70 µg from 1 to 100 Hz on floor with flat noise spectrum. 

Acoustics Not to exceed 60 dB(A) across the frequency spectrum. 

Position the system with the work area in front to allow adequate working space for the operator. 

The rear of the system must have a minimum service access clearance of 24" (610 mm). 


Dimensions 

Dimensions in the following illustrations are given in inches and (centimeters). 

D8 with Enclosure 

Installation 


The dimensions of the system with the enclosure are shown in Figure 2.1a (top view), Figure 2.1b 

(front view) and Figure 2.1c (side view). 

Figure 2.1a D8 Dimensions with Enclosure - Top View 


Installation 


Figure 2.1b D8 Dimensions with Enclosure - Front View 


Figure 2.1c D8 Dimensions with Enclosure - Side View 

Installation 



Installation 


D8 Profiler without Enclosure 

Figure 2.1d D8 Profiler without Enclosure 

The dimensions of the D8 profiler without the enclosure are shown below in Figure 2.1e (top 

view), Figure 2.1f (front view), and Figure 2.1g (side view). 


Figure 2.1e D8 Profiler Dimensions - Top View 

Installation 



Installation 


Figure 2.1f D8 Profiler Dimensions - Front View 


Figure 2.1g D8 Profiler Dimensions - Side View 

Installation 



Installation 

Installing the Vibration Isolated Workstation Option 

CAUTION: Attempting to lift the unit without assistance may result in personal 

injury and/or damage to the equipment. 

2.2 Installing the Vibration Isolated Workstation Option 

The Newport Isostation Vibration Isolated Workstation option significantly decreases vibration 

and allows for more accurate profiling. This workstation is shipped with the Dektak 8, but needs to 

be placed under the Dektak 8 when it arrives at the final site. Refer to Newport’s IsoStation 

Vibration Isolated Workstation Instruction Manual (provided with the Dektak 8) to install this 

workstation. 

• Install per Section 1 in the Newport manual. 

• The table is pre-assembled, so refer to Sections 2.2 and 2.3 in the Newport manual to 

install the work surface and the optional keyboard tray. 


2.3 Installing the Stage Assembly 

1. Remove the long screws that secure the stage to the belt drive. 

Installation 

Installing the Stage Assembly 

2. Carefully align the stage over the glass block and gently set it on the glass, while preventing 

the scan flag from contacting the three scan sensor housings (see Figure 2.3b). Note that the 

white teflon guides go on opposite sides of the glass block (see Figure 2.3a). 

Figure 2.3a Stage Assembly 

Left 014 

Right 

CAUTION: Be careful to not bend or rotate the scan flag during handling. 

Attempting to lift the unit without assistance may result in personal 

injury and/or damage to the equipment. 

3. Carefully slide the stage while checking the alignment of the scan flag with the three scan 

sensor housings. The scan flag must trip the scan sensor without contacting the scan sensor 

housing. Adjust the scan flag by loosening the fasteners indicated in Figure 2.3b. 

Rev. G Dektak 8 Manual 27 

015

Installation 

Installing the Stage Assembly 

Scan Flag 

Fasteners 

Figure 2.3b Stage 

4. Slide the Stage over the belt to align its front edge with the stripe running across the belt (see 

Figure 2.3c). 

Note: The Programmable Theta and Stage Leveling options are shown. 

Figure 2.3c Scan Follower Assembly 

Sensor Housings 

Sensor Housing 

016 Sensor Flag 

5. Install the long screws in the middle and rear receiver holes (on the left side of the Stage) to 

engage the belt. 

If your unit includes the Programmable Theta and Auto Stage Leveling options, connect the cable 

to the stage cable connector (D Connector) on the right side of the profiler. 


017A

Installation 

Positioning the Universal Chuck 

Connect the vacuum line to the brass fitting on the left side of the stage assembly and connect the 

tubing service loop to the facility vacuum supply. 

2.4 Positioning the Universal Chuck 

A universal chuck (see Figure 2.4a) is provided with the Dektak 8 for use with various sizes of 

wafers. The chuck may be positioned on the stage as appropriate to hold wafers of a particular 

diameter in place with vacuum. A toggle switch, mounted on the left side of the frame, allows the 

operator to apply or remove vacuum as needed. 

Figure 2.4a Universal Chuck 

The default mounting of the universal chuck on the stage provides vacuum at just the single port in 

the center of the stage. To reposition the universal chuck: 

1. Remove the three mounting screws from the top of the chuck. 

Home (0°) Flag 

and Sensor 

Universal Chuck 

2. Identify the set of three mounting holes to be used as appropriate for the diameter of your 

wafers (see Figure 2.4b). Depending on the position of the chuck on the stage, vacuum is 

provided to specific ports and associated grooves as shown in the figure. 

3. Rotate the chuck to place the desired set of holes in the chuck over the mating set of holes in 

the stage. Be careful not to damage the home flag and sensor. 

4. Reinstall the three mounting screws, using the appropriate set of mounting holes in the 

chuck. 


Stage 

Manual Leveling 

Knob

Installation 

Shipping Bracket Removal 

Vacuum Grooves for: 

3” Wafer 

4” / 5” Wafer 

6” Wafer 

8” Wafer 

2.5 Shipping Bracket Removal 

Figure 2.4b Universal Chuck Mounting Holes and Vacuum Ports 

Default Mounting Hole and 

Screw (1 of 3) 

Center Vacuum Port 

Spare Wafer Alignment Pins 

Alternate Mounting Holes: 

3” Wafer (1 of 3) 

4” / 5” Wafer (1 of 3) 

6” Wafer (1 of 3) 

8” Wafer (1 of 3) 

To protect the precision sample stage and stylus mechanism during shipment, special fixtures are 

put in place to restrict their movement. 

CAUTION: Neglecting to remove any or all of the shipping brackets 

prior to operation may result in damage to the 

equipment. 

ATTENTION: Oublier d’enlever une ou toutes les pinces de maintien 

avant utilisation pourrait endommager les équipements. 

VORSICHT: Vor Inbetriebnahme müssen alle Transportklammern 

entfernt werden, um eine Beschädigung des Gerätes zu 

vermeiden. 

1. Place the Dektak 8 on a level surface, ensuring adequate service and maintenance clearance. 


Installation 


CAUTION: The shipping brackets and foam inserts must be 

reinstalled prior to shipping the unit to prevent damage 

to the equipment. Save all brackets and screws should it 

become necessary to return the unit. 

ATTENTION: Les pinces de maintien et les mousses de protections 

doivent être ré-installés avant d’expédier le systeme 

pour eviter d’endommager les équipements. Conserver 

les pinces de maintien et les vis au cas où il serait 

nécessaire de renvoyer le système. 

VORSICHT: Um eine Beschädigung des Gerätes zu vermeiden, 

müssen Transportklammern und Schaumstoffeinsätze 

vor der Verladung wieder installiert werden. Bewahren 

Sie alle Klammern und Schrauben auf, falls es 

notwendig sein sollte, das Gerät zurückzuschicken. 

2. Remove the 2 set screws securing the Z-Drive (see Figure 2.5a). 

Figure 2.5a Z-Drive 

Set Screws (2) 


018

Installation 


3. Remove the 2 gantry drive brackets (see Figure 2.5b). 

Figure 2.5b Gantry Drive Brackets 

4. Remove the special sensor-head restraint bracket (see Figure 2.5c). 

Figure 2.5c Scan Head 


020A 

Bracket 

019

2.6 Enclosure Assembly 

4 

Installation 

Enclosure Assembly 

1. The enclosure is shipped pre-assembled. Place the enclosure over the unit, and ensure the 

cables slide into the provided slot. Use the drawing (see Figure 2.6a) to identify enclosure 

components if required. 

3 

8 

Figure 2.6a Enclosure 

Quantity 

1 

1 

1 

1 

1 

1 

1 

1 

Title 

SCREW, FLAT HEAD, M4 X 12MM 

LEFT SIDE ENCLOSURE 

BACK, ENCLOSURE 

TOP - ENCLOSURE 

DOOR, ASSY 

PLATE, FRONT, LOWER ENCLOSURE 


7 

2 

1 

5 

6 

1 

RIGHT SIDE ENCLOSURE 

Item Number 

1 

2 

3 

4 

5 

6 

7 

8 

1 

4. SLIDE DOOR INTO REAR OPENING OF SLOT. 

3. ASSEMBLE ITEMS 9, 8, 5 IN SUCCESSION. 

2. ASSEMBLE; ITEMS 2 AND 4 USING THE 3 INDICATED FASTENERS 

DOOR IS PREASSEMBLED AT FACTORY. 

1 

NOTES: 

SCREW, BUTTON HEAD, M4 X 12MM 

021

Installation 

Cabling and Connections 

2.7 Cabling and Connections 

Air Pressure Connector (Optional for Vibration Isolation Table) 

The Dektak 8 optional vibration isolation table requires 50 psi minimum to operate properly. The 

regulator is set at the factory to reduce the facilities air pressure to 40 psi, but the regulator may 

need slight adjustments depending upon variations in facility air pressure. 

1. Connect the facility air pressure line (1/4" [6.35 mm] OD tubing) to the “one-touch” fitting 

attached to the air pressure regulator. 

2. After adjusting the pressure regulator output to 40 psi, turn on the air. 

Note: Allow at least 2 minutes for the vibration isolation table to fully engage. 

3. Check each corner of the table by pushing down gently. If the table is not floating freely on 

each corner, more adjustment may be necessary. 

Vacuum Connectors (Optional for Vacuum Chuck) 

The Vacuum Chuck requires no less than 24" Hg. (610mm) of vacuum. 

Power Supply Setting 

• Connect the facility vacuum line (1/4" [6.35mm] OD tubing) to the “one-touch” fitting. 

Note: To connect the lines, press them firmly into the fitting. The facility vacuum 

may now be turned on. 

The Dektak 8 operates on 60Hz AC with either 110V or 220V. The Dektak 8 requires four power 

connections, two electronic power supplies, a monitor and a computer. The power supply has been 

factory set at the appropriate voltage for the original user facility. If the unit is transferred to a 

facility where the voltage is different, the computer must be reset for alternate voltage. 

Complete the following procedure to verify or change the power supply setting: 

1. Verify the main power switch located on the front of the computer console is turned off. 

2. Verify the main power cable is disconnected from its primary power source and the 

computer console. 

3. Verify the voltage setting displays the correct voltage once the main power cable is 

disconnected from the computer. If it does not, change the voltage setting. 

Note: The voltage setting is located above the power switch on the back of the 

computer. 


. 

Installation 


a. To change the voltage supply setting, use a flat head screw driver and slide the setting 

switch until the appropriate voltage setting displays. 

b. Connect the facility electrical supply to the provided power strip using an approved 

IEC-320 power cord, rated at 16 amps or higher. 

Profiler Cable Connections 

CAUTION: Ensure all cables that connect to the power source are 

accessible to the operator. 

ATTENTION: S'assurer que tous les cables connectés aux prises de 

courants sont accessibles par l'utilisateur 

VORSICHT: Stellen Sie sicher, daß alle Spannungskabel für den 

Benutzer zugänglich sind. 

WARNING: Never connect the Dektak 8 to a power source which 

provides a voltage that is different from the power 

supply setting of the voltage select card. 

AVERTISSEMENT: Ne jamais brancher le Dektak 8 sur une prise 

produisant une ddp différente de celle 

programmée sur le circuit. 

WARNUNG: Das Dektak 8 darf niemals an eine Spannungsquelle 

angeschlossen werden, deren Spannung von der am 

Gerät eingestellten Spannung abweicht. 

The E-Box located on the rear of the profiler provides all cable connections for the Dektak 8, with 

the exception of the optional Theta Encoder. Two electronic power supplies connect to the E-Box. 

The upper connector provides power for the scan motors and X-Y-Z and theta positioning systems. 

The lower connector provides power to the electronics and signal conditioning board. The video 

cable and two communication cables also attach to the E-Box and the computer (see Figure 2.7a 

and Figure 2.7c, and Figure 1.13a). 

The E-Box connector for the coaxial video cable (video out) is located just below the power switch. 

It connects to the back of the computer using the video cable “A/V In” socket. The two 

communication cables connect to the two lower 13-pin connectors, one on the back of the E-Box 


Installation 


and the other on back of the computer. The E-Box connector to the left (when facing the back of the 

profiler, #2) connects to a USB port on the computer using the provided serial-to-USB adapter (see 

Figure 2.7b). The E-Box connector to the right (#1) connects to the COM 1 port on the computer. 

AC Power In 

COM 1 

USB (serial); 

Trackball; Keyboard 

Monitor 

Figure 2.7a Rear View of Computer 

Figure 2.7b Serial-to-USB Adapter Cable 

Voltage Settings 

Printer Port 

(Printer is 

User Provided) 

Video Cable 


181A 

182A 

LAN

Power Switch 

Video Out 

+5 and +12 VDC 

Power In 

COM 2 

Optional Theta Encoder 

Figure 2.7c Rear of E-box 

Installation 


If you have purchased the Optional Theta Encoder Package for your Dektak 8, the stage includes a 

scale mounted as a ring around its perimeter (see Figure 2.7d). An encoder readhead is located at 

the rear of the stage, to sense the markings on the scale. A cable carries the readhead signals to an 

external Counter Box (see Figure 2.7e), to be sent to the computer for use in determining the theta 

rotation of the stage. 

Make connections as follows: 

• Plug in the cable from the encoder readhead to the Readhead connector on the Counter 

Box. 

• A Gnd screw is provided for an optional ground (earth) connection. 

• Connect the second serial-to-USB adapter cable (see Figure 2.7b) between the 

connector labeled USB at the Counter Box and the computer’s USB port shown in 

Figure 2.7f. 

• Connect a power cable to the Power input on the Counter Box, and plug the power cable 

into a power strip (or surge protector). 


8078 

+24 VDC 

Power In 

COM 1

Installation 


Encoder 

Readhead 

Readhead and Gnd 

connections - left end 

Monitor Cable Connections 

Figure 2.7d Optional Theta Encoder 

Figure 2.7e Counter Box 

Figure 2.7f Counter Box Connection to Computer 

Stage 

Encoder Scale 

Ring 

AC Power and USB 

connections - right end 

Connect USB cable 

from Counter Box 

Here 

Connect USB cable 

from E-Box Here 

The 17" flat panel display color video monitor may be either positioned over the profiler or placed 

on a tabletop stand. The monitor cable connects to the video port on the back of the monitor and to 

the video board port on the computer. The power supply cable also connects to the back of the 

monitor and into a power strip. 


Other Computer Cable Connections 

The power-strip cable plugs into a power outlet or into a surge protector. The keyboard and 

trackball connect to the back of the computer (see Figure 2.7a). 

Installation 


Note: Verify that all cables are properly connected prior to plugging in the system and 

turning on the main power switch. 

CAUTION: Do not connect or disconnect any cables while the 

power is on. 

ATTENTION: Ne pas connecter ou déconnecter de cables lorsque 

l’appareil est branché. 

VORSICHT: Während die Spannungsversorgung eingeschaltet ist, 

dürfen Kabel weder vom Gerät getrennt, noch 

angeschlossen werden. 

CAUTION: Always use a surge protector; the surge protector allows 

all of the components to power-up simultaneously via 

the single master power switch. 

ATTENTION: Toujours utiliser un protecteur de circuit. Le protecteur 

de circuit sert à mettre sous tension tous les éléments du 

circuit simultanément via le connecteur central. 

VORSICHT: Benutzen Sie stets einen Überspannungsbegrenzer 

(“surge protector”). Der Überspannungsbegrenzer 

ermöglicht das gleichzeitige Einschalten aller 

Geräteteile mittels eines einzelnen Hauptschalters. 


Installation 

Porous Vacuum Chuck (Option) Installation 

2.8 Porous Vacuum Chuck (Option) Installation 

Vacuum Line 

The Porous Vacuum Chuck provides sample restraint for small samples and pieces of samples 

and/or samples that are irregularly shaped (see Figure 2.8a). The Porous Vacuum Chuck option 

includes the specialized chuck and the associated vacuum tubing. 

1. Place Vacuum Chuck assembly on the stage. 

Note: The Vacuum Chuck Assembly may be vacuum-secured to the scan stage by 

removing the screw from the bottom of the Vacuum Chuck. 

2. Use the vacuum tubing provided to connect the vacuum source to the Vacuum Chuck. 

Ensure the vacuum tubing does not affect the scan stage movement. 

3. Place the sample on the Porous Vacuum surface. 

4. Position the stage for scanning. 

Vacuum Connector 

Note: Disconnect the vacuum source to reposition or remove the sample. 

Figure 2.8a Porous Vacuum Chuck Assembly 

The Porous Vacuum Chuck option requires no less than 24" Hg. of vacuum. 

Porous Vacuum 

Surface 

Scan Stage 

• Connect the facility vacuum line (1/4" [6.35mm] OD tubing) to the Vacuum Chuck air 

connector. 

Note: To connect the line, press it firmly into the fitting. The vacuum may now be 

turned on. 


033A

2.9 Stylus Installation 

Install the stylus using the Stylus Replacement Fixture (see Section 9.9). 

2.10 System Configuration 

The Dektak 8 is comprised of three main components: 

1. Profiler with Electronics Box (E-Box). 

2. Monitor 

3. Computer with Keyboard and Trackball. 

Installation 

Stylus Installation 

It is possible to arrange these modular components in a number of configurations to suit your needs. 

For example, position the monitor over the profiler to reduce the overall footprint, or set the profiler 

on a vibration platform, separate from the monitor and computer, to isolate it from external 

vibration. 

2.11 System Checkout 

Once the appropriate cable connections are complete, turn on the power to the Dektak 8 to verify 

that the system is operating properly. The Dektak 8 operating software was loaded onto the hard 

disk at the factory prior to shipment. The use of the power bar (provided) allows all of the 

components to power-up simultaneously with the flip of the single master power switch. 

1. Verify the power switches on the monitor and profiler E-Box are in the “on” position. 

2. If using a surge protector, verify the switch on the surge protector is also turned on before 

turning on the master power switch located on the power bar. 

3. Press and release the power switch on the front of the computer. 

4. The computer starts up to the Windows Desktop. Double-click the Dektak 8 icon to run the 

Dektak 8 software. The Dektak 8 Startup window displays on the monitor when 

initialization is complete (see Section 8.1a). “Ready” displays in the status line at the lower 

left of the window. 

5. Select Calibration > Stylus Force... from the menu bar to open the Force Calibration 

dialog box (see Figure 8.6b). Use the slider in the Force DAC section to increase the DAC 

Value to maximum. Observe and verify the stylus swings to the down position. Use the 

slider to decrease the DAC Value to minimum. Observe and verify that the stylus moves to 

the up position. Then click Cancel to close the dialog box. 

6. Observe the two banks of LEDs on the side of the E-Box. The expected state of each LED is 

given in Figure 2.11a. 


Installation 

Optics Alignment 

2.12 Optics Alignment 

Figure 2.11a LED Banks on E-Box 

124C 

+5 V (normally ON) 

+/-12 V (normally ON) 


Scan Back Limit Switch 

Scan Forward Limit Switch 

Scan Home Switch 

Galil Error (normally OFF) 

(not used) (normally ON) 

Z Down (Tower) Limit Switch 

Z Up (Tower) Limit Switch 

Note: A Limit or Home LED turns 

OFF when the associated device 

activates its switch. 

(not used) (normally OFF) 

(not used) (normally OFF) 



Theta Home Enable (normally OFF) 

Heart Beat (pulses) 

Gantry Back Limit Switch 

Gantry Forward Limit Switch 

Gantry Left Limit Switch 

Gantry Right Limit Switch 

Refer to Section 9.10 for the procedure to adjust the optics. 


Chapter 3 Basic Functions 

This chapter details a step-by-step exercise for positioning the sample stage to measure the Veeco 

calibration standard (option). This exercise helps you become familiar with the various sample 

positioning features of the equipment, enabling you to quickly position samples for a large number 

of automation programs. The 10 kÅ calibration standard (option) exercise continues in Chapter 4 

and Chapter 5 in this manual. Chapter 4 describes single scan operation, and Chapter 5 describes 

multiple scan operation. By completing the entire exercise, you will become well acquainted with 

Dektak 8 basic operation procedures. 

Note: If you did not purchase the 10kÅ standard, use any suitable sample available. 


• Software Interface: Section 3.1 

• Start Sequence (Normal Usage): Section 3.2 

• Sample Loading: Section 3.3 

• Viewing the Sample: Section 3.4 

• Unloading the Sample: Section 3.5 

• Power Down: Section 3.6 


Basic Functions 

Software Interface 

3.1 Software Interface 

The Dektak 8 uses the following software interface and control devices: 

3.1.1 Stage Control 

The Dektak 8 has a precision sample stage which allows both automatic and semiautomatic sample 

positioning. Automatic or programmable positioning is described in detail in Chapter 4. 

Semiautomatic sample positioning is accomplished by using the trackball (or mouse) interactively 

with the various screens of the Microsoft ® Windows interface. 

3.1.2 Microsoft Windows 

The Dektak 8 uses Microsoft Windows XP as the operating environment, allowing integration of 

different tasks to increase efficiency and ease-of-use. 

Dektak 8 operational tasks are organized into windows, pop-up dialog boxes and pull-down menus. 

Virtually all Windows commands have equivalent keyboard shortcuts to provide full Windows 

control, keyboard control, or a combination of both Windows and keyboard operation (see ). 

The Dektak 8 system contains all the software necessary to run a Dektak 8. 

With Windows XP, you can take advantage of these features of the Windows environment: 

• Running multiple applications: You can run several applications under Windows at one 

time and easily switch between them, creating an integrated work environment. 

• Data exchange between applications: You can transfer data between Dektak 8 and other 

standard Windows applications, files, directories, and disks, and control all Windowsrelated 

tasks such as directory or file management and formatting disks. 

Operating the Dektak 8 under Windows XP indicates acceptance of the Microsoft software license 

agreement. “Microsoft” and “Windows" are registered trademarks of Microsoft Corporation. 

“Dektak” is a registered trademark of Veeco. 

3.1.3 Trackball 

The standard Dektak 8 ships with a trackball, but you may also operate the system using a mouse. 

Although a trackball typically has multiple buttons, the Dektak 8 uses primarily the left button for 

selecting commands in most applications, and the right button for opening context-sensitive menus 

(see Figure 3.1a). 

Rolling the trackball moves the pointer (the arrow on the screen). To select a command, move the 

tip of the pointer until it rests on the desired command and click the left button. 


The following definitions are used throughout the rest of this manual: 

• Pointing Device: Trackball. 

• Point: Move the tip of the pointer until it rests on the item of interest. 

• Press: Hold down the left button. 

• Click or Select: Quickly press and release the button. 

• Drag: Hold down the left button while moving the pointing device. 

• Double-click: Click the button twice in rapid succession. 

Left 

Button 

3.1.4 Keyboard Shortcuts 

Figure 3.1a Trackball 



Numerous shortcut keystrokes are provided in the Dektak 8 software. Many of the shortcuts are 

associated with menu items (see Chapter 8), while others perform the same functions as clicking 

the trackball button on certain items in the windows (see the tables below). 

Note: Combination keystrokes are indicated by “+”. For example, “Ctrl+N” means 

hold down the Ctrl key, press and release the N key, and then release the Ctrl 

key. 

Table 3.1a Keyboard Shortcuts for All Windows 

Keyboard 

Function 

Key(s) 

Esc (or A) Interrupts a scan or Multi-Scan program in progress. 

Deactivates Stage Tracking. 

Aborts the tower-down, gantry and stage-rotation motions. 

Note: You must reset the hardware if you have aborted operation while the gantry is 

moving or the stage is rotating (and the theta encoder option is not installed). 


079 

Right 

Button



Table 3.1b Keyboard Shortcuts for Data Plot Window 

Keyboard 

Key(s) 

Function 

Ctrl+R Selects the R cursor. 

Ctrl+M Selects the M cursor. 

Ctrl+F Toggles between fast and slow cursor movement speeds. 

Ctrl+ (Right 

Arrow) 

Moves the selected cursor to the right at the selected speed. 

Ctrl+ (Left 

Arrow) 

Ctrl+ (Up 

Arrow) 

Ctrl+ (Down 

Arrow) 

Moves the selected cursor to the left at the selected speed. 

Increases the width of the selected cursor at the selected speed. 

Decreases the width of the selected cursor at the selected speed. 

Table 3.1c Keyboard Shortcuts for Sample Positioning Window 

Keyboard 

Key(s) 

Function 

(Up Arrow) Increases illumination on the sample. 

(Down Arrow) Decreases illumination on the sample. 

Ctrl+Shift+L Moves gantry to center of rotation 

Ctrl+V Moves gantry to currently active scan routine’s scan location 

Ctrl+Shift+U Moves stage to unload position 

When Stage Tracking is active: (Note: press and hold Shift key for faster jogging movement) 

(Up Arrow) Jogs gantry to the right to move the image up 

(Down Arrow) Jogs gantry to the left to move the image down 

(Left Arrow) Jogs gantry rearward to move the image to the left 

(Right Arrow) Jogs gantry forward to move the image to the right 

+ Increases illumination on the sample. 

- Decreases illumination on the sample. 

1 Selects high mag camera 

2 Selects low mag camera 


Table 3.1d Keyboard Shortcuts for Automation Program Summary Window 

Keyboard 

Key(s) 

Function 

Ctrl+I Includes the highlighted scan results in the table (if they have previously been 

excluded). 

Ctrl+X Excludes the highlighted scan results in the table from being re-run. 

Ctrl+U Re-runs the scans that have not been excluded. 

Assigning Analytical Functions to Keystrokes 



Dektak 8 analytical functions can be assigned to the F11 and F12 function keys. This is useful if 

certain analytical functions are used frequently. The procedure for assigning an analytical function 

to a keystroke is described below. For a list of analytical functions and their descriptions, see 

Chapter 6. 

1. Click Setup > Configuration Settings... to display the Configuration Settings dialog box. 

Select the Shortcuts folder (see Figure 3.1b). 

Figure 3.1b Configuration Settings Dialog Box - Shortcuts Folder 

2. The Shortcuts folder allows an analytical function to be assigned to the F11 function key, 

and another to the F12 function key. In the F11 or F12 box, select an analytical function 

from the drop-down list to enter it into the box. 

3. Click OK to assign the selected analytical functions to the function keys and close the dialog 

box. 


144D



Note: Click Apply instead of OK if you want to keep the dialog box open to select 

other folders. 

4. When a scan has been run and the profile is displayed in the the Data Plot window, the 

selected analytical functions can be run with the F11 and F12 keys. The results of all 

analytical functions performed will display in the Analytic Results section of the Data Plot 

window. See Measuring and Entering Analytical Functions: Section 6.12. 


3.2 Start Sequence (Normal Usage) 

The following sections describe the basic procedure to start the Dektak 8. 

3.2.1 Power On 


Start Sequence (Normal Usage) 

1. Verify that all three Dektak 8 power cables are connected to an external power source. 

Note: Use a surge protector to guard against power surges. 

2. Turn on the Dektak 8 by flipping the power switch located on the rear of the E-Box (see 

Figure 3.2a). 

Figure 3.2a Rear View of E-Box 

Power Switch 

3. Turn the monitor on by pressing the power button located on the front of the monitor in the 

lower-right corner. 

4. Turn the computer on by pressing the power switch located on the front of the computer. The 

computer will start up to the Windows desktop. 

5. Double-click the Dektak 8 icon on the desktop to run the Dektak 8 software. The 

Dektak 8 sample stage will initialize and the Startup window will display. When 

initialization is complete, the text “Ready” will display in the lower left corner of the window 

(see Figure 3.2b). 


8028



Note: When other Dektak 8 windows are displayed, select Window > Close All 

Windows to redisplay the Startup window. 

Figure 3.2b Startup Window 


3.2.2 System Tray Quick-Access Menu 



Whenever the Dektak 8 software is running, an icon (similar in appearance to the one that you 

clicked to launch the software) appears in the system tray, located at the right side of the Windows 

task bar. Right-click this icon to pop up a quick-access menu (see Figure 3.2c). 

Figure 3.2c Quick-Access Menu 

See Run Menu: Section 8.3 

See Profiler Menu: Section 8.4 

See Help Menu: Section 8.8 

See File Menu: Section 8.2 

Items in this menu allow you to run scans or automation programs, reset the hardware, examine the 

software version and options, or close the program, all without having to navigate through the 

windows and menus in the program itself. 




ATTENTION: If the Dektak 8 does not turn on following the power-on procedure, 

do the following before contacting the Veeco service department: 

• Verify all cables are properly connected and free of obvious 

damage. 

• Verify the power switch on the front of the computer is in the 

ON ( | ) position. 

• Verify all power cords are connected properly. 

• Repeat the power on procedure. 

ATTENTION: Si le Dektak 8 ne s’allume pas lors du démarrage, suivre les 

indications suivantes avant de contacter Veeco: 

• Vérifier que tous les cables sont correctement connectés et non 

endommagés. 

• Vérifier que l'interrupteur à l'avant de l'ordinateur est en 

position 'ON' ( | ). 

• Verifier que tous les fils électriques sont branches correctement 

aux prises de courant 

• Répéter la procédure de démarrage 

ATTENTION: Falls sich das Dektak 8 mit dem beshriebenen Verfahren nicht 

einschalten lassen sollte, überprüfen Sie die folgenden Punkte, 

bevor Sie sich mit Veeco Metrology in Verbindung setzen: 

• Überprüfen Sie, ob alle Kabel korrekt installiert wurden, und 

daß sie keine offensichtlichen Schäden aufweisen. 

• Vergewissern Sie sich, daß der Hauptschalter an der Frontseite 

des Computers eingeschaltet ist ( | ). 

• Vergewissern Sie sich, daß alle Kabel zur Stromversorgung 

korrekt installiert wurden. 

• Wiederholen Sie den Einschaltvorgang. 


3.2.3 Stage Control Panel 



The Sample Positioning window contains a Stage Control Panel (see Figure 3.2d), which may be 

displayed at the right side of the window, or hidden in order to maximize the camera view pane. To 

display (or hide) the Stage Control Panel: 

• Select Profiler > Stage Control Panel from the menu bar, or 

• Click the Display/Hide Stage Control Window icon, or 

• Press CTRL+T on the keyboard. 

The top section of the panel contains an illustration of the template you have chosen for your 

application (see Setup: Section 3.2.5). The cross hairs provide a visual representation of the 

rotation (theta) of the stage. Any scan sites that you have defined are shown as red dots. The green 

dot shows the current location of the stylus on the sample. 

Note: The illustration of the template is always adjusted to fit in the display area in 

the top section, regardless of the actual template dimensions. 

The center section of the panel contains three categories of templates--disk, panel and wafer, along 

with any templates you have designed. (A 200-mm wafer is already provided.) Right-click in this 

section to open the Template Editor dialog box (see Template Editor: Section 3.2.4), where you 

can change existing templates and create new ones. 

The bottom section of the panel contains displays and buttons for monitoring and controlling the 

positions of the stage and gantry. The gantry, holding the stylus, can be moved in the X and Y 

directions, to place the stylus over any desired location on your sample. The stage may be rotated 

(if the Power-Theta option is installed), but otherwise it is not moved except to bring it forward to 

an unloading position, or during the performance of an actual scan. 

Moving the Gantry and Stage 

Two ways to move the gantry and stage are either by using the control buttons, or typing new 

values in the X, Y or Theta fields and clicking the Go button. If you want the updated position to 

be relative to the current positions, check (click) the Relative box; otherwise, the movement will be 

to the absolute positions that you specify. 

Note: Since the camera is mounted on the gantry at the right side of the stylus, the 

physical motions of the gantry are at right angles to the motions of the image of 

your sample that you see in the camera view pane. Refer to Table 3.2a. 

A third way to move the gantry is by placing the pointer at the desired location in the illustration of 

the template and double-clicking the left trackball button. 

A fourth way to move the gantry is through Stage Tracking. See Stage Tracking: Section 3.3.1. 




3.2.4 Template Editor 

Figure 3.2d Stage Control Panel (in Sample Positioning Window) 

Current Gantry 

(Stylus) X-Y Position 

Move Relative to 

Current Position 

Move Gantry to Center 

of Rotation of Stage 

Jog Gantry Up 

Jog Gantry Left 

Rotate Stage CW 

Table 3.2a Gantry Motions and Resulting Image Movement 

Button Gantry Moves: Image Moves: 

Jog Gantry Up To the Right Up 

Jog Gantry Down To the Left Down 

Jog Gantry Left Rearward Left 

Jog Gantry Right Forward Right 

Stage with Selected 

Template 

Template Selector 

and Editor 

Current Stage 

Rotation Angle 

Move to New Position 

Move Gantry to Current 

Scan Routine Location 

Move Stage to Unload Position 

Jog Gantry Right 

Stop Stage Motion 

Rotate Stage CCW 

Jog Gantry Down 

You can use the Template Editor dialog box (see Figure 3.2e) to create custom templates for 

various size disks, rectangular samples or wafers. The selected template serves to restrict access to 

just the area of the stage that is covered by your sample, as defined by the template. (The 200-mm 

wafer template permits access to any location on the sample stage.) 


To change an existing template: 

Figure 3.2e Template Editor Dialog Box 



1. Right-click in the center section of the Stage Control Panel to open the Template Editor 

dialog box. 

Note: You can also double-click the name of the template you want to change. 

2. Be sure the template you want to change is displayed in the fields at the left side of the dialog 

box. If not, click the name of the desired template in the Available Templates section. 

3. Make your changes to the parameters of the selected template and click Change. 

4. Click the close box at the upper right corner of the dialog box (or press the ESC key on the 

keyboard). 

Note: You cannot use the Change button if you change the name of a template. Use 

the Add button instead. Then select the previous name of the template in the 

Available Templates section and click Delete. 

To create a new template: 

1. Right-click in the center section of the Stage Control Panel to open the Template Editor 

dialog box. 

2. Type a name for your new template in the appropriate field (Disk, Panel or Wafer). 

3. Enter the parameters for your new template that correspond to your sample, and click Add. 

4. Click the close box at the upper right corner of the dialog box (or press the ESC key on the 

keyboard). 


003C


Sample Loading 

3.2.5 Setup 

Prior to positioning your sample, choose the appropriate template from the center section of the 

Stage Control Panel. The set-up menu contains a variety of templates designed for different 

applications. The 200-mm wafer template is the default template and can be used as a template to 

determine the outer diameter of the sample stage table. You can use the Template Editor dialog 

box (see Template Editor: Section 3.2.4, and Figure 3.2e) to create custom templates for various 

size wafers, disks or rectangular samples. 

Template Selection 

Complete the following procedure to select the desired template for your sample: 

3.3 Sample Loading 

1. If the Stage Control Panel is not displayed in the Sample Positioning window, select 

Profiler > Stage Control Panel from the menu bar. 

2. Click the name of the desired template in the template selection section of the Stage Control 

Panel. (Double-click the name of a template type to display templates stored under that 

type.) 

3. The selected template displays in the template section of the Stage Control Panel. 

The Dektak 8 automatically positions the stylus at the center of the sample stage during 

initialization. Prior to loading samples, verify that the stylus and optics tower are raised. Complete 

the following procedure to load a sample: 

1. Open the door to the Dektak 8 enclosure. 

2. Select Window > Sample Positioning from the system menu bar (see Figure 3.3a) to 

display the Sample Positioning window (see Figure 3.3b). 

Figure 3.3a Window Menu, Sample Positioning 

3. In the Sample Positioning window, verify that the Stage Control Panel is displayed. If not, 

select Profiler > Stage Control Panel from the system menu bar (or press CTRL+T on the 

keyboard). 


146A

Feature 

Reticule 

Cursor 

Stylus 

Reticule 

Figure 3.3b Sample Positioning Window with Stage Control Panel 



4. In the Stage Control Panel, select the Move Stage to Unload Position button (or press 

CTRL+SHIFT+U on the keyboard) to raise the Dektak 8 stylus and optics tower to its 

maximum height and move the stage forward to the unload position. (Refer to Figure 3.2d for 

an illustration of the buttons on the Stage Control Panel.) 

ATTENTION: Raise the tower prior to loading samples to protect the stylus and 

the sample from damage. 

ATTENTION: Remonter la tour avant d’installer les échantillons pour protéger le 

stylet et l’échantillon. 

ATTENTION: Vor dem Auflegen einer Probe sollte die Abtastspitze nach oben 

gefahren werden, um Abtastspitze und Probe vor einer möglichen 

Beschädigung zu schützen. 

5. Position the sample in the center of the stage below the stylus. 

Note: If you are using the calibration standard, it should be square with the sides of 

the machine and oriented on the stage as seen in Figure 3.3c. 


003D



Figure 3.3c Calibration Standard Positioning 

6. Click Yes in the Load Sample popup dialog box to return to stage center after placing the 

sample. 

3.3.1 Stage Tracking 

Front of the stage 

1. Click the Low Magnification button in the toolbar (see Figure 3.3d). 

Figure 3.3d Low Magnification Button 

2. Move the trackball pointer into the camera view pane (see Figure 3.3e). Left-click the trackball 

button once to activate Stage Tracking. When Stage Tracking is active: 

• The gantry (stylus) tracks the motion of the trackball along the X and Y axes. 

• You can also move the stylus with the arrow keys on the keyboard. (Hold down the 

SHIFT key for faster motion.) 

• The left arrow key moves the image to the left (the gantry moves to the rear). 

• The right arrow key moves the image to the right (the gantry moves to the front). 


8027

• The up arrow key moves the image up (the gantry moves to the right). 

• The down arrow moves the image down (the gantry moves to the left). 

• You can switch between cameras. 

• Press 1 on the keyboard (or keypad) to select the high mag camera. 

• Press 2 on the keyboard (or keypad) to select the low mag camera. 

• You can adjust the illumination on the sample. 

• Press + on the keyboard (or keypad) to increase illumination. 

• Press - on the keyboard (or keypad) to decrease illumination. 

3. Align the stylus with the center of the sample. 

4. Left-click a second time to deactivate Stage Tracking. 

Part of 

Camera View 

Pane 

Note: The stylus will automatically raise from the sample surface when Stage 

Tracking is on. 

Figure 3.3e Camera View Pane (partial view) 

5. Select Profiler > Tower Down to lower the optics tower toward the sample. 



Note: When using a 200-mm template, you should have access to an entire 8-inch 

wafer. However, the stylus should not be allowed to descend beyond the edge 

of the sample. 


057A


Viewing the Sample 

3.4 Viewing the Sample 

Once the sample is loaded, it is necessary to make a few adjustments for viewing. This section 

details the following view functions: 

• Manual Theta Rotation: Section 3.4.1 

• Stage Rotation (Optional Programmable Theta): Section 3.4.2 

• Lowering/Raising the Stylus: Section 3.4.3 

• Optics Illumination Adjustment: Section 3.4.4 

• Stylus Reticle Alignment: Section 3.4.5 

• Feature Reticle Alignment: Section 3.4.6 

• Sample Positioning Adjustments: Section 3.4.7 


3.4.1 Manual Theta Rotation 

You can alter X-Y positioning manually by rotating the stage of the Dektak 8 to allow a more 

desired view of the sample (NOT available with the Programmable Theta Option). 



1. Ensure the stylus is not touching the sample surface. Select Profiler > Tower Up to protect 

the sample and stylus from damage. 

2. Loosen the knob on the left side of the stage to release the secured stage (see Figure 3.4a). 

Theta Knob 

Figure 3.4a Theta Knob 

3. Slowly rotate the stage in the desired direction (see Figure 3.4b). 

Physically Rotate the 

Stage 

Figure 3.4b Theta Rotate the Stage 

4. Tighten the knob to secure the stage. 


176 

180



3.4.2 Stage Rotation (Optional Programmable Theta) 

The Stage Control Panel allows you to rotate the stage and make adjustments to the theta sample 

position. See Stage Control Panel: Section 3.2.3. 

3.4.3 Lowering/Raising the Stylus 

Lowering the stylus onto the sample surface nulls the stylus LVDT and brings the sample into 

focus. With the stylus lowered, you can properly align the stylus with the movable reticule. 

1. Raise or lower the stylus using the toolbar icons (see Figure 3.4c) or the Profiler menu. 

Click Profiler > Stylus Up or Profiler > Stylus Down (see Figure 3.4d). 

Note: The Tower Up and Tower Down commands will raise or lower the entire 

tower assembly which includes the video camera, illuminator and stylus 

mechanism. The Stylus Up command lifts the stylus only. The Stylus Down 

command slightly raises and then lowers the entire tower assembly until the 

stylus touches the sample surface. 

3.4.4 Optics Illumination Adjustment 

Figure 3.4c Stylus Movement Icons 

Stylus Down Stylus Up 

Figure 3.4d Profiler Menu, Stylus Down 

After lowering the optics tower to focus the camera, adjust the illumination level of the video 

image displayed on the Dektak 8 monitor using the toolbar icons (see Figure 8.14f), or the up and 

down arrow keys on the keyboard. 

Note: You can change the increment by which the illumination changes at each click. 

See Illumination Folder in Setup Menu: Section 8.5. 

Note: The sample should be in focus whenever the system is nulled by lowering the 

stylus onto the sample surface. If not, see Optics Adjustment: Section 9.10. 


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3.4.5 Stylus Reticle Alignment 



The stylus reticle may be aligned to a newly installed stylus, or to allow for tolerances in the stylus 

head. If the stylus tip is not properly aligned with the reticle in the camera view pane, adjust the 

reticle position. The reticle provides a reference point when positioning the sample stage. Because 

the stylus is raised off the surface during stage positioning, the reticle indicates where the stylus 

will touch on the surface. Complete the following procedure to align the reticle with stylus tip: 

Note: During initial set up, you may need to adjust the camera position to position the 

stylus within the stylus crosshair box. To adjust the camera position, see 

Optics Adjustment: Section 9.10. 

Complete the following procedure to align the reticule with the stylus tip: 

1. In the Sample Positioning window, right-click the trackball button to display the pop-up 

menu (see Figure 3.4e). 

Figure 3.4e Sample Positioning Window Pop-up Menu 

2. In the pop-up menu, click Stylus Reticule to display two options: Align and Reset. 

• Align allows you to manually reposition the reticule. 




Part of 

Camera View 

Pane 

• Reset repositions the reticule to the original default location in the center of the 

screen. 

3. Select Align to display the crosshair box (see Figure 3.4f). 

4. Align the crosshair with the stylus tip and then double-click the left trackball button. 

5. In the dialog box that appears, click Yes to update the stylus reticule location, No to retry the 

alignment, or Cancel to close the dialog box and return to the Sample Positioning window. 

Figure 3.4f Stylus Reticle Alignment 


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3.4.6 Feature Reticle Alignment 



The feature reticle is the smaller green reticle displayed in the camera view pane of the Sample 

Positioning window (see Figure 3.4g). 

Part of 

Camera View 

Pane 

Feature 

Reticule 

Cursor 

Figure 3.4g Feature Reticle Alignment 

Align the feature reticle with surface features away from the stylus to more accurately position the 

sample prior to scanning. Complete the following procedure for realigning the feature reticle: 

1. In the camera view pane, roll the pointing device to the desired location. 

Note: For best results, align the feature reticle with a unique, easily recognizable 

surface feature. 

2. Once the cursor is properly aligned with the desired feature, click the right button on the 

trackball. 

3. Click Update Alignment Reticule in the pop-up menu that appears (see Figure 3.4h). 




Figure 3.4h Update Alignment Reticule 

4. Click Yes in the Confirmation dialog box that pops up to update the feature reticule 

alignment. The feature reticule moves to the new location. 

3.4.7 Sample Positioning Adjustments 

Once the optics are properly adjusted, fine stage positioning can be accomplished. Use the Stage 

Control Panel (see Stage Control Panel: Section 3.2.3) or Stage Tracking (see Stage Tracking: 

Section 3.3.1) to position your sample as desired. 


3.5 Unloading the Sample 

3.6 Power Down 

Use the following procedure to unload a sample from the stage. 

1. Open the door to the Dektak 8 enclosure. 


Unloading the Sample 

2. In the Sample Positioning window, verify that the Stage Control Panel is displayed. If not, 

select Profiler > Stage Control Panel from the system menu bar (or press CTRL+T on the 

keyboard). 

3. In the Stage Control Panel, select the Move Stage to Unload Position button (or press 

CTRL+SHIFT+U on the keyboard) to raise the Dektak 8 stylus and optics tower to its 

maximum height and move the stage forward to the unload position. (Refer to Figure 3.2d for 

an illustration of the buttons on the Stage Control Panel.) 

4. Remove your sample from the stage. 

5. Click Yes in the Load Sample popup dialog box to return to stage center. 

Figure 3.5a Load Sample Dialog Box 

Use the following procedure to power down the Dektak 8. 

1. Exit the Dektak software. 

a. Select File > Exit from the menu bar. 

2. Exit Windows XP. 

a. Select Start > Shut Down. Click Shut Down in the dialog box that appears. 

3. Turn off the power switch on the rear of the Dektak 8 E-Box. 

4. Turn off the power switch at the front of the computer. 

Note: Turn off the power switches on the (optional) printer and the monitor. 



Power Down 


Chapter 4 Single Scan Operation 

This chapter details a step-by-step exercise for performing routine step height measurements on the 

10kÅ calibration standard (optional). It is a continuation of the exercise begun in Chapter 3 of this 

manual. The exercise teaches the user the basic operational skills required to program and run 

simple scan routines. This chapter includes the following topics: 

• Create a Single-Scan Automation Program: Section 4.1 

• Define Scan Location and Length: Section 4.2 

• Run a Scan Routine: Section 4.3 

• Reference/Measurement Cursors: Section 4.4 

• Stage Leveling: Section 4.5 

• Software Leveling: Section 4.6 

• Setting the Zero Point: Section 4.7 

• Delta Average Step Height Measurement: Section 4.8 

• Plot Magnification: Section 4.9 

• Save Boundaries: Section 4.10 

• Data Printout: Section 4.11 

• Saving an Automation Program: Section 4.12 

• Aborting an Operation: Section 4.13 

The Dektak 8 operates via a trackball and keyboard. The user interface screens work in conjunction 

with the trackball and keyboard. You may want to become familiar with the Dektak 8 user interface 

by reading Chapter 3 prior to completing this exercise. 


Single Scan Operation 

Create a Single-Scan Automation Program 

4.1 Create a Single-Scan Automation Program 

Prior to running a scan routine, you must first create an automation program. Automation programs 

are files that contain all the necessary information for performing single- or multiple-scan routine 

sequences. The procedures for creating a new single-scan automation program are described below. 

Note: If you have the 3D Mapping Option, see Appendix D. 

1. In the Startup window, select File > New from the system menu bar or click the Create 

New Automation Program icon to display the Automation Programs window containing 

the default automation program (default.mp). See Figure 4.1a. 

2. If you are currently in an automation program that has had changes made to it, a dialog box 

will appear asking if you want to save your changes to the current automation program. Click 

Yes to save the current automation program. 

Note: Be aware that if the current automation program was previously loaded and 

then modified, it will be saved under its original file name. If you want to 

preserve the original automation program, first select File > Save As... at the 

menu bar and choose a new file name for the modified program. Then select 

File > New. 

Note: If you select Window > Automation Programs from the system menu bar, the 

current automation program will be opened (if there is one); otherwise, the 

default automation program will be opened. 


Figure 4.1a New Automation Program 



3. The Automation Program window contains a default scan routine. You can double-click 

the highlighted scan routine (or select Window > Scan Routines from the system menu bar; 

or, click the Switch to Scan Routines Window icon) to display the parameters for the scan 

routine in the Scan Routines window (see Figure 4.1b). 


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Figure 4.1b Scan Routines Window with Default Scan Routine (#1 of 1) 

4. You can edit the options for this automation program and add or modify scan routine 

parameters. These features are discussed in more detail in Chapter 5. 

5. You can save the automation program with selected parameters for specific scan operations. 

See Saving an Automation Program: Section 4.12 for more information. 


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4.2 Define Scan Location and Length 


Define Scan Location and Length 

This procedure entails determining the appropriate scan starting location and length for measuring 

the optional calibration standard. You can define the scan location and scan length from the Sample 

Positioning Window as described below. 

1. Select Window > Sample Positioning from the stage menu to display the Sample 

Positioning Window. 

2. Activate the high magnification camera. 

3. Select Profiler > Tower Down. 

4. Use the Illumination Adjustment icons to adjust the illumination to view the sample. 

5. With the stylus tower down, initiate Stage Tracking (left-click in the camera view pane) for 

fine sample positioning. The image should now track the motion of the trackball. 

6. Position the stylus reticle to the left of the “dog-bone” step of the calibration standard, so that 

the vertical line of the stylus reticule is parallel with the length of the dog bone (see Figure 

4.2a). 

Dog Bone 

Stylus Reticule 

Figure 4.2a Stylus Reticule Positioned Properly 

7. With the stylus reticle properly positioned, click the trackball button a second time to 

deactivate Stage Tracking. 

8. Select Edit > Define Scan Location. The Location for Routine #: 1 of 1 dialog box pops 

up, showing the current X and Y coordinates of the stylus that you determined for this scan 

routine with Stage Tracking (see Figure 4.2b). You can accept the values shown, or edit the 

values with the keyboard. 

Note: The theta (T:) field appears only if you have the Power Theta Option installed. 


225 

Wide Portion: 

y 1,000 µm 

Narrow Portion: 

y 200 µm



Figure 4.2b Scan Location Dialog Box 

9. Click the Enter button in the Current Location section to assign the coordinates to the scan 

routine. 

10. Since we have only one scan routine in this exercise, we are finished defining scan locations. 

Click the close box at the upper right corner to close the dialog box. 

11. Now, select Edit > Define Scan Length. Stage Tracking is activated, but this time tracks 

only the left and right motion of the trackball to allow you to determine the distance you 

want to scan. 

12. Roll the trackball until the stylus reticle is to the right of the “dog-bone” step and click the 

left trackball button. The Length for Routine #: 1 of 1 dialog box pops up, showing the 

length of the scan that you determined with Stage Tracking (see Figure 4.2c). You can accept 

the values shown, or edit the values with the keyboard. 

Figure 4.2c Scan Length Dialog Box 

13. For this exercise, edit the scan Length to be 1000 µm. 

14. Click the Enter button in the Length section to assign the length to the scan routine. 




Note: A scan is always performed by moving the stage towards the front of the 

machine. (During the scan, the image will appear to be moving from right to 

left.) 

15. Since we have only one scan routine in this exercise, we are finished defining scan lengths. 

Click the close box at the upper right corner to close the dialog box. 

16. Select Window > Scan Routines from the system menu bar or click the Switch to Scan 

Routines Window icon to display the Scan Routines window (see Figure 4.1b). 

17. Click any of the ten underlined items in the Scan Parameters section of the window to open 

the Scan Parameters dialog box (see Figure 4.2d). 

Figure 4.2d Scan Parameters Dialog Box 

18. You can adjust other scan parameters in the dialog box, such as scan ID, Duration, 

horizontal Resolution, Stylus Force and Measurement Range (see Scan Routine 

Parameter Description: Section 7). Click OK to accept your entries and close the dialog 

box. 

Note: If you want to make other changes, you can click Apply instead of OK to 

accept an entry and keep the Scan Parameters dialog box open. 



Run a Scan Routine 

4.3 Run a Scan Routine 

1. Click the Run Currently Active Scan Routine icon, the F4 key, or select Run > Scan from 

the menu to run a scan routine. 

The following sequence of events occurs when you initiate a scan: 

a. The Data Plot window displays with the scaled grid superimposed over the camera 

view pane of the stylus and calibration standard. 

b. The stylus lowers onto the sample surface. After a brief pause, the scan commences. As 

the stylus scans across the calibration standard, the full scale profile trace plots on the 

scaled grid in real time. 

Note: Because the camera is mounted at the right side of the stylus, during a scan the 

video image shows the sample moving from right to left below the stylus. In 

actuality, during a scan the stage is moving from back to front. 

c. Once the scan is complete, the stylus lifts off the surface and the stage returns to the 

location where the scan originated. The profiler then automatically replots and rescales. 

The image displayed on the monitor should resemble Figure 4.3a. 

Figure 4.3a Calibration Standard Profile 


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4.4 Reference/Measurement Cursors 


Reference/Measurement Cursors 

The reference (R) cursor and measurement (M) cursor define the portion of the profile trace for 

leveling or performing analytical functions. You can adjust the bandwidth at each cursor to average 

the data points within the cursor’s bandwidth. This is useful for leveling and average step height 

measurements. 

4.4.1 Basic Cursor Positioning 

Cursor positioning is critical for obtaining accurate results. The simplest way to reposition the 

cursors is to use the mouse to drag the R and M cursors flags at the top of the cursors to new 

positions in the data plot. 

Selecting both R and M cursors allows you to reposition the cursors while maintaining the same 

distance between them. Hold down the Ctrl key while dragging with the left mouse button on the R 

or M cursor flag. Now, dragging either flag causes both cursors to move simultaneously. 

Refer to the following sections for alternate procedures to position the cursors and increase/ 

decrease cursor bandwidth: 

• Cursor Positioning Using Arrows: Section 4.4.3 

• Numeric Entry Cursor Positioning: Section 4.4.4 

For this exercise, use the default cursor band widths for leveling and measuring. To activate the 

default cursor bands select Plot > Default Bands from the menu bar (see Figure 4.4a). 

Note: To clear the cursor bandwidths, select Plot > Clear Bands 

Figure 4.4a Setting Default Cursor Band Widths 


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4.4.2 Setting Cursor Bandwidths 

The simplest way to change the bandwidth of the cursors is to use the mouse to drag the doubletriangle 

handles at the bottom of the cursors to new widths in the data plot (see Figure 4.4b). 

Note: When the cursors are near the edges of the plot, the handles might not be 

visible. 

To specify numerical values for the bandwidths, select Plot > Band Widths... from the menu bar 

(see Figure 4.4b). Enter the desired values for the R and M cursor widths in the Set Band Widths 

dialog box that pops up. 

Figure 4.4b Setting Cursor Band Widths: Handle and Dialog Box 

R Cursor Bandwidth Handle 


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4.4.3 Cursor Positioning Using Arrows 



The R. Cursor and M. Cursor sections (in the data plot box at the bottom of the window) indicate 

the locations of the cursors and their bandwidths. The Å numbers in the box indicate the points at 

which the cursors intercept the profile trace in relation to the vertical scale (see Figure 4.4c). 

Figure 4.4c Data Plot Box 

Special cursor-control arrow buttons at the bottom-right of the data plot pane allow you to work 

with the cursors (see Figure 4.4d). You can position the cursors by selecting a cursor, and then 

clicking and holding the left and right arrow buttons. Similarly, you can increase or decrease the 

selected cursor’s bandwidth by clicking the up and down arrow buttons. 

Figure 4.4d Cursor-Control Arrows 

Note: You can also use the arrow keys on the keyboard to position the selected cursor 

and change its bandwidth. Hold down the CTRL key while you press the arrow 

keys. 

1. Click the red R button (or press CTRL+R) to select the reference cursor. 

2. Click the green M button (or press CTRL+M) to select the measurement cursor. 

3. Press the F button (or press CTRL+F) to move the cursors or change their bandwidths at high 

speed. Press the F button (or press CTRL+F) again to move the cursors or change their 

bandwidths at slow speed. 

Note: After you have selected a cursor with the right or left cursor-control arrow, you 

can double-click in the data plot pane to snap the selected cursor to the 

horizontal location of the mouse pointer. 


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182A



4.4.4 Numeric Entry Cursor Positioning 

The white boxes in the data plot box display the cursor position (Pos) in relation to the horizontal 

scale, and their bandwidths (Width). See Figure 4.4c. Another way to alter cursor locations and 

bandwidths is by using the keyboard to numerically enter new values in these boxes. 

Note: For this exercise, the location of the R cursor should be set at 100 µm with the 

M cursor at 900 µm. 

1. Click in the upper white box indicating the R cursor horizontal Position. A blinking prompt 

appears in the box. 

2. Enter 100 using the keyboard and press ENTER. The R cursor repositions at 100 µm. 

3. Click in the lower white box indicating the M cursor horizontal Position. A blinking prompt 

appears in the box. 

4. Enter 900 and press ENTER. The M cursor repositions at 900 µm. 

The ASH section displays the vertical difference between the points at which the R and M cursors 

intercept the profile trace. The Distance section below it displays the horizontal distance between 

the cursors. 


4.5 Stage Leveling 


Stage Leveling 

Stage leveling is an important aspect of the Dektak 8 operation. You can level the stage manually or 

using one of two methods with the Automatic Stage Leveling Option. Refer to the following 

sections for procedures for each type of leveling: 

• Manual Stage Leveling: Section 4.5.1 

• Optional Power Stage Leveling: Section 4.5.2 

4.5.1 Manual Stage Leveling 

The standard Dektak 8 enables manual stage leveling by turning the leveling knob at the front of the 

stage (see Figure 4.5a). The closest possible manual leveling will ensure the best instrument 

performance. The manual leveling knob levels the stage about a pivot axis at the front of the stage. 

Leveling the stage must be accomplished using a sample that has a known horizontal surface. The 

Dektak 8 is adjusted to measure the horizontal surface as a level surface. This allows for sample 

surfaces not parallel to the reference surface block to be leveled using the procedure below. 

Stage 

Figure 4.5a Stage Leveling Knob 

Knob 

1. Perform stage leveling while a scan is in progress to view the affect of leveling on the profile 

trace in real time. To run a new scan, click Run > Scan. 

2. As the stage is moving and a trace is being generated on the screen, turn the leveling knob 

thumb wheel until the profile trace is tracking in a horizontal line. Clockwise rotation raises 

the trace and counter-clockwise will lower the trace. 


176



3. Again click Run > Scan. The profile must appear totally within the graphic boundaries to 

achieve the minimum acceptable manual leveling. If not, repeat the manual leveling 

procedure above. 

Note: For maximum performance of this instrument, it is very important to position 

the sample surface to within +/- 0.01º of level. Use the formula tan-1 (slope of 

leveled trace) to determine the level accuracy. 

To verify that the maximum possible level has been obtained, the cursors should be placed to 

intersect the same horizontal plane. 

The slope analytical function can be used to determine to what degree the stage is out of level. The 

slope of the trace between the cursors will be displayed in degrees. This angle indicates the amount 

that the trace is out of level. If the angle is greater than +/- 0.01º, repeat the above steps to obtain 

minimum possible slope/maximum possible level. 

Note: If the trace is extremely out of level, change the measurement range to the 

maximum range of 2,620kÅ. Level the trace as described above, change to the 

intermediate range and repeat the procedure until leveled. The best level is 

achieved by using the 65kÅ range. 

4.5.2 Optional Power Stage Leveling 

If the Power Leveling option is installed in your Dektak 8, you have two additional methods for 

leveling the stage besides the leveling knob: auto leveling and power leveling. 

Auto Leveling 

When auto leveling is activated, the stage automatically levels in relation to the points at which the 

profile trace intercepts the cursors. You can access the optional auto leveling feature only when the 

Data Plot window displays. It is used interactively with the reference and measurement cursors. 

The R and M cursors must be positioned on the same horizontal plane along the profile trace. For 

best results, position the R and M cursors as far apart as possible. 

Complete the following procedure for automatic stage leveling: 

1. Select Profiler > Stage Leveling > Auto Level from the system menu bar (see Figure 4.5b). 

Note: If the stylus is resting on the sample surface when you initiate auto leveling, the 

system will first raise the stylus. The stage then automatically levels according 

to the vertical difference between the cursors. 

2. When a second scan is performed, the profile trace should be adequately leveled to make a 

measurement. Additional leveling of the trace can be accomplished in software (see 

Software Leveling: Section 4.6). 


Power Leveling 

Figure 4.5b Auto Leveling 



The optional power leveling method allows you to level the stage using buttons on the screen. It is 

typically used in applications where the stage or sample is extremely tilted, to the point where the 

scan line runs off the scale. 

Complete the following procedure for power stage leveling: 

1. Select Profiler > Stage Leveling > Manual (Power) Leveling from the system menu bar to 

display the Power Leveling dialog box (see Figure 4.5c). The up- and down-arrow buttons 

allow you to raise or lower the stage at one end to adjust the level. 

Figure 4.5c Power Leveling Dialog Box 

2. Use the left trackball button to click and hold the down-arrow button if the scan trace has a 

positive slope or runs off the top of the screen. Release the trackball button to stop the stage 

from lowering. 

3. Use the left trackball button to click and hold the up-arrow button if the scan trace has a 

negative slope or runs off the bottom of the screen. Release the trackball button to stop the 

stage from rising. 


077A 

084A



4. Click the close box in the upper right corner when the desired stage leveling adjustments 

have been accomplished to clear the Power Leveling box from the screen. 

5. Run another scan to verify if you have adjusted the stage level satisfactorily. 

Note: The power leveling method uses a trial-and-error technique, so you will have to 

repeat the operation several times before the stage is leveled. 


4.6 Software Leveling 


Software Leveling 

Although the stage may have been adjusted mechanically, ensuing scans may show the profile trace 

slightly tilted. Software leveling allows the system to quickly level the profile trace without 

actually having to completely level the stage. You must software level the stage in order to obtain 

accurate step height measurements or accurate readings from analytical functions. Software 

leveling sets the reference and measurement cursors at zero to establish reference for 

measurements. 

Complete the following procedure to software level a trace: 

1. Position the R and M cursors along the baseline of the step. 

2. Click the Level icon, press F7, or select Plot > Level from the system menu bar. The profile 

trace will replot and level with the R and M cursor intercepts at zero (see Figure 4.6a). 

You can also program software leveling into the scan routine to level the trace automatically at the 

conclusion of the scan by selecting Edit > Enter Software Leveling. For more information see 

Software Leveling: Section 7.2.1. 

Figure 4.6a Cursor Positioning for Software Leveling 

Baseline 


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Setting the Zero Point 

4.7 Setting the Zero Point 

You may select any point on the profile trace as the zero point. The zero point is the point of 

reference from which all measurements are taken. Software leveling sets both the R and M cursor 

intercepts at zero. However, when the Zero function is activated, it sets the zero point only at the R 

cursor intercept. 

1. Position the R (reference) cursor at the desired zero location. 

2. Select Plot > Zero (or press F8 on the keyboard) to automatically replot the profile trace and 

establish the zero point at the R cursor intercept (see Figure 4.7a). 

Figure 4.7a Setting the Zero Point 

Zero Point 


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4.8 Delta Average Step Height Measurement 


Delta Average Step Height Measurement 

Once you run the scan routine and properly level and zero the profile, you can obtain an accurate 

step height measurement of the calibration standard using the delta average step height analytical 

function. Analytical functions are calculated using the R and M cursors. The cursor positions 

shown in Figure 4.8b are correct for the delta average step height calculation, with the R cursor at 

the base of the step and the M cursor at the top of the step. 

Complete the following procedure to calculate the delta average step height: 

1. Click the Analytical Functions icon or select Analysis > Analytical Functions to display 

the Analytical Functions dialog box (see Figure 4.8a). 

2. In the Height section, select ASH to activate the delta average step height function. 

3. In the Band Widths dialog box that pops up, you can enter new bandwidth values or accept 

the values displayed. Click OK. 

4. Click the Measure radio button located at the bottom of the Analytical Functions dialog 

box. 

Note: The Measure and Program radio button would enter the ASH function into 

the current scan routine to be performed automatically when the current scan 

routine runs again. 

Figure 4.8a Analytical Functions Dialog Box for Data Plot Window 

5. Click the COMPUTE button to calculate the average step height. The value displays in the 

Analytic Results area to the left of the data plot pane (see Figure 4.8b). 


186A


Delta Average Step Height Measurement 

Figure 4.8b Step Height Measurement 


185B

4.9 Plot Magnification 


Plot Magnification 

Once you run the scan and plot the profile trace, a portion of the data plot display can be isolated 

and magnified for more detailed analysis of the profile trace. 

1. To magnify an area of interest, move the trackball pointer into the data plot grid. 

2. Move the pointer to one corner of the area of the data plot pane you want magnified and leftclick 

on that location. Hold down the trackball button. 

3. Drag the pointer device away from the first corner at a diagonal to expand the box. 

4. Release the trackball button when the box covers the area of interest. For this exercise, the 

boundaries should look similar to those shown in Figure 4.9a. In the Plot menu that now 

pops up, you can choose Replot, to replot the profile trace with the new boundaries (similar 

to Figure 4.10a). 

Note: Click the REPLOT icon or select Plot > Replot from the menu bar if you want 

to replot and display the original profile trace. 

Figure 4.9a Plot Magnification 


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Save Boundaries 

4.10 Save Boundaries 

Complete the following procedure to save the new set of boundaries: 

1. Select Plot > Save Boundaries to display a dialog box requesting an identification number 

under which to save the boundaries (see Figure 4.10a). 

Note: You may use any number between 1 and 9. 

2. Enter an identification number for the plot boundaries using the keyboard (for this exercise 

enter 1). 

3. Click OK to clear the dialog box and save the current boundaries in memory under 

identification number 1. 

Note: If previous boundaries were saved under identification number 1, the new 

boundaries replace the old. 

4.10.1 Showing Saved Boundaries 

1. Select Plot > Show Boundaries to display the saved boundaries. 

Note: All of the boundaries currently saved in memory will display on the data plot 

pane along with their identification number. 

Figure 4.10a Save Boundaries 


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4.10.2 Restoring Saved Boundaries 


Save Boundaries 

The restore function allows you to replot the profile trace displayed on the data plot screen using a 

set of boundaries saved in memory. 

1. Select Plot > Restore from the menu bar to display a dialog box requesting the identification 

number of the desired boundaries to be restored (see Figure 4.10b). 

2. Enter the identification number using the keyboard. (For this exercise, enter 1.) 

3. Click OK to replot the current scan trace using the saved boundaries. 

Figure 4.10b Restoring Saved Boundaries 


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Data Printout 

4.11 Data Printout 

You may obtain a printout of all the scan data with the plotted profile, a summary of the scan data, 

the scan routine form, the automation program form, the expanded APS form and the automation 

program summary, using a Windows-compatible printer. 

or 

• Select File > Print, press CTRL+P, or press the F10 key, to display a standard Windows 

dialog box listing various printer options. 

• Click the PRINT icon to produce a printout on the currently active printer. 

Note: Drivers for the Windows-compatible printer must be installed before use. 


4.12 Saving an Automation Program 


Saving an Automation Program 

You may store an automation program on the Dektak 8 hard disk or on a diskette to open, rerun, or 

alter the automation program at a later time. For the purpose of this exercise, follow the procedure 

described below to save the automation program created in this chapter exercise onto the C drive. 

1. Click the Automation Program icon or select Window > Automation Programs from the 

system menu bar to display the Automation Programs window (see Figure 4.12a). 

Figure 4.12a Automation Programs Window 

2. Select File > Save As from the Automation Program window menu bar to display the Save 

Dektak Data or Program dialog box (see Figure 4.12b). 


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Aborting an Operation 

Figure 4.12b Save Dektak Data or Program Dialog Box 

3. Enter the file name and file type (for this exercise you can accept the file name 

’Default.mp’). 

4. Click Save. 

4.13 Aborting an Operation 

Note: The dialog box closes and the Automation Program is now saved on the hard 

disk under the designated file name. 

To abort a Dektak 8 operation, select the Abort icon or press the ESC or A key on the keyboard. 

Note: If you abort an operation while the stage is rotating, you will have to reset the 

hardware (Profiler > Reset Hardware from the menu, or CTRL+ALT+R at the 

keyboard). 


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Chapter 5 Multiple Scan Operation 

This chapter continues the exercise introduced in Chapter 3 using the optional 10kÅ calibration 

standard. By building on the experience gained in creating and performing a single scan operation, 

you can use the Dektak 8 to produce complex multi-scan sequences. This chapter discusses the 

following items: 

• Automation Program Description: Section 5.1 

• Opening a New Automation Program: Section 5.2 

• Editing an Automation Program: Section 5.3 

• Program Entry: Section 5.4 

• Editing Scan Routines: Section 5.5 

• Automation Program Options: Section 5.6 

• Deskew: Section 5.7 


Multiple Scan Operation 

Automation Program Description 

5.1 Automation Program Description 

The automation program is the basis for all operations performed on the Dektak 8. Automation 

programs are stored in files on the hard disk, giving the Dektak 8 ample program storage capability. 

Basic knowledge of Microsoft Windows commands will help in understanding and creating 

automation programs. For more information, see the Microsoft Windows XP operating system user 

guide and user reference. 

The Automation Program Window displays the current scan routines along with their X, Y, and 

theta locations, deskew points and data destination options. This window allows you to program 

the Dektak 8 for performing multi-scan operations at various locations on a sample. 

The Automation Program window menu bar contains File and Edit menus items not available in 

other windows. These menus are described in further detail in Chapter 8. 

5.2 Opening a New Automation Program 

For the purpose of the exercise, open a new automation program to create a multi-scan automation 

program. 

1. In the Startup window, select File > New from the system menu bar or click the Create 

New Automation Program icon to display the Automation Programs window containing 

the default automation program (default.mp). See Figure 5.2a. 

2. If you are currently in an automation program that has had changes made, a dialog box will 

appear asking if you want to save your changes to the current automation program. Click Yes 

to save the current automation program. 

Note: Be aware that if the current automation program was previously loaded and 

then modified, it will be saved under its original file name. If you want to 

preserve the original automation program, first select File > Save As... at the 

menu bar and choose a new file name for the modified program. Then select 

File > New. 

Note: If you select Window > Automation Programs from the system menu bar, the 

current automation program will be opened (if there is one); otherwise, the 

default automation program will be opened. 


Figure 5.2a New Automation Program 


Opening a New Automation Program 


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Editing an Automation Program 

5.3 Editing an Automation Program 

The procedure below describes how to copy a current scan routine to create an automation program 

containing multiple scan routines. An automation program may contain up to 10,000 scan routines; 

however, for the purpose of the exercise, you will create an automation program containing four 

scan routines. 

1. Click the Copy to Range icon or select Edit > Copy To Range to display a dialog box for 

entering the lower and upper limits of the range (see Figure 5.3a). 

Figure 5.3a Copy to Range Dialog Box 

Note: The flashing insertion point appears in the field labeled To Scan Routine #. 

2. Enter a numerical value into the field (enter 2 for the exercise). 

3. Click on the field below labeled Through Scan Routine #. 

4. Enter a numerical value into the field (enter 4 for the exercise). 

5. Click OK. 

Note: The current scan routine 1 copies to scan routines 2, 3 and 4 (listed in the Scan 

Routines area at the right side of the Automation Program window). Scan 

routine 2 is now the current scan routine. 


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5.4 Program Entry 


Program Entry 

The scan routine is identified in the Scan Routines area by five entries: the left number is the scan 

number, the center entry is the Scan Type and the three numbers to the right are the X location, Y 

location in µm and the theta (T) rotation in degrees (see Figure 5.4a). 

Note: Theta rotation displays only if the Power Theta option is installed. 

Figure 5.4a Scan Routines Area 

Double-click any of the scans listed in the Scan Routines area to open the Scan Routines window 

to display the parameters for that scan routine. 

At this point, all four scan routines in your current automation program have the same values. You 

can determine new values for the location and length of each scan routine in the Sample 

Positioning Window, using the functions described below in Section 5.4.1. Also, you can adjust or 

edit values for each scan routine in the Scan Routines windows, using the functions described 

below in Section 5.4.2. 


233B


Program Entry 

5.4.1 Define Scan Location and Length 

This procedure entails determining the appropriate scan starting location and length for measuring 

the optional calibration standard. You define the scan location and scan length from the Sample 

Positioning Window as described below. 

1. Select Window > Sample Positioning from the menu to display the Sample Positioning 

Window. 

2. Activate the high magnification camera. 





6. Position the stylus reticle just to the left of the feature that you want to measure. 

Note: For optimal repeatability in stage positioning, always select left for scan 

locations (that is, move the stylus to the left of the position desired and 

approach the position from that side before selecting it). This eliminates 

repeatability errors due to backlash in the gears. 

7. With the stylus reticle properly positioned, click the trackball button a second time to 

deactivate Stage Tracking. 

8. Select Edit > Define Scan Location (or press CTRL+L on the keyboard). The Location for 

Routine #: 1 of 4 dialog box pops up, showing the current X and Y coordinates of the stylus 

that you determined for this scan routine with Stage Tracking (see Figure 5.4b). You can 

accept the values shown, or edit the values with the keyboard. 

Note: The theta (T:) field appears only if you have the Power Theta Option installed. 

Figure 5.4b Scan Location Dialog Box 



Program Entry 

9. Click the Enter button in the Current Location section to assign the coordinates to the scan 

routine. 

Note: At this point, there are two ways you can proceed: 1) define the location for 

each of the scan routines in your automation program, and then go back and 

define the length of each of the scan routines; or, 2) define the location and then 

the length of each scan routine in turn. Choose the method that is appropriate 

for your particular scan routines. 

The following steps assume you want to define all of the scan-routine locations first: 

10. Click the Enter button in the Scan Browser section to select the next scan routine. 




13. Position the stylus reticle just to the left of the feature that you want to measure with the next 

scan routine. 

14. With the stylus reticle properly positioned, click the trackball button again to deactivate 

Stage Tracking. 

15. You can accept the values shown in the dialog box, or edit the values with the keyboard. 

Click the Enter button in the Current Location section to assign the coordinates to this scan 

routine. 

16. Repeat the above steps to define scan locations for each of the remaining scan routines. 

17. Click the close box at the upper right corner to close the dialog box. 

18. Select Edit > Go To Scan Routine (or press CTRL+G on the keyboard). Type 1 in the popup 

dialog box and press the ENTER key on the keyboard. This makes Scan Routine #1 the 

currently active scan routine. 

19. Press CTRL+V on the keyboard to move the stylus to the location you defined for the 

currently active scan routine (Scan Routine #1). 

20. Now, select Edit > Define Scan Length. Stage Tracking is activated, but this time tracks 

only the left and right motion of the trackball to allow you to determine the distance you want 

to scan. 

21. Roll the trackball until the stylus reticle is at the end of the scan, and click the left trackball 

button. The Length for Routine #: 1 of 4 dialog box pops up, showing the length of the scan 

that you determined with Stage Tracking (see Figure 5.4c). You can accept the value shown, 

or edit the value with the keyboard. 



Program Entry 

Figure 5.4c Scan Length Dialog Box 

22. Click the Enter button in the Length section to assign the length to this scan routine. 

Note: A scan is always performed by moving the stage towards the front of the 

machine. (During the scan, the image will appear to be moving from right to 

left.) 

23. Click the Enter button in the Scan Browser section to select the next scan routine as the 


24. Press CTRL+V on the keyboard to move the stylus to the location you defined for the 


25. Initiate Stage Tracking (left-click in the camera view pane), and roll the trackball until the 

stylus reticle is at the end of the scan. 

26. Click the left trackball button to deactivate Stage Tracking. 

27. You can accept the value shown in the dialog box, or edit the value with the keyboard. Click 

the Enter button in the Length section to assign the length to this scan routine. 

28. Repeat the above steps to define scan lengths for each of the remaining scan routines. 

29. Click the close box at the upper right corner to close the dialog box. 

5.4.2 Scan Routines Window 

The Scan Routines window allows you to edit the scan parameters and display parameters, and 

choose data processing settings, for each scan routine in your automation program (see Figure 

5.4d). The scan routine number is shown in the title bar at the top of the window, as well as the total 

number of scan routines in the automation program. 


Figure 5.4d Scan Routines Window 


Program Entry 

The scan routine shown in the Scan Routines window is the routine that was selected (highlighted) 

in the Automation Program window. However, there are several ways to display the other scan 

routines in this window without returning to the Automation Program window. 

• Click the Previous Scan Routine icon or the Next Scan Routine icon to display the 

previous or next scan routine, respectively. 

• Select Edit > Previous or Edit > Next at the menu bar to display the previous or next 

scan routine, respectively. 

• Press CTRL+< or CTRL+> on the keyboard to display the previous or next scan routine, 

respectively. 

• Select Edit > GoTo... at the menu bar (or press CTRL+G) to open the Go To dialog box, 

where you can type in a scan routine number. Then press the Enter key. 


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Editing Scan Routines 

5.5 Editing Scan Routines 

5.5.1 Scan Parameters 

Select any of the parameters in the Scan Parameters section of the Scan Routines window to 

open the Scan Parameters for Routine # dialog box (see Figure 5.5a). Use this dialog box to 

adjust or enter new values such as the scan length or duration for the scan routine. 

Note: You can use the > buttons in this dialog box to display and change the 

parameters for the previous and next scan routines, respectively. 

Figure 5.5a Scan Parameters for Routine #: 2 of 4 Dialog Box 

Note: The Map Parameters tab is available only if the 3D Mapping option has been 

installed. 


5.5.2 Display Parameters 



Select any of the parameters in the Display Parameters section of the Scan Routines window to 

open the Display Parameters dialog box (see Figure 5.5b). Use this dialog box to enter new values 

such as the cursor positioning or display range for the scan routine. 

5.5.3 Data Processing Settings 

Figure 5.5b Display Parameters Dialog Box 

Select either of the entries in the Data Processing section of the Scan Routines window to open 

the Data Processing Parameters dialog box (see Figure 5.5c). Use this dialog box to choose 

values for filters and smoothing. 

Note: Entering a value of zero (0) disables the function. 

Figure 5.5c Data Processing Parameters Dialog Box 


134C 

134B



For details on filters, see: For details on smoothing, see: 

Determining the Cutoff Wavelength: Section 6.7 Smoothing: Section 6.15 

Activating the Cutoff Filters: Section 6.8 Activating the Smoothing Function: Section 6.16 

Entering Filter Cutoffs into a Scan Routine: Entering Smoothing into a Scan Routine: Section 

Section 6.9 

6.17 

5.5.4 Analytical Functions 

Select Edit > Append Analytical Functions to open the Analytical Functions dialog box. Use 

this dialog box to select the analytical functions to be appended to the scan routine. See Chapter 6 

for details. 

Note: If you want to append the same analytical functions to all of the scan routines in 

your automation program, you can save time by using the Global Edit Mode, 

described in the next section. 

5.5.5 Global Editing of Scan Routine Parameters 

You can change individual scan parameters within each scan routine of an automation program at 

any time. Use the Global Edit Mode to edit the parameters of all the scan routines simultaneously 

within the automation program. 

To become familiar with the Global Edit Mode, follow the steps in the exercise given below. (It is 

assumed you are still working with your new automation program containing four scan routines.) 

1. Select Window > Scan Routines to display the Scan Routines window. The highlighted 

scan routine is displayed. (It does not matter which one.) 

2. Click the Global Edit icon or select Edit > Global Edit Mode. 

Note: A Global Edit Warning dialog box pops up to emphasize that Global Edit 

Mode affects all of the scans in the current automation program. Click YES to 

continue. A global edit symbol (similar to the icon) is displayed in the status 

bar at the bottom of the window: 

3. Click an entry in the Display Parameters section to open the Display Parameters dialog 

box (see Figure 5.5b). 

4. Click the Automatic Leveling check box. 

5. Enter 50 into each Cursor Width box. 


6. Click OK to close. 



7. Select Edit > Append Analytical Functions to display the Analytical Functions options. 

8. In the R cursor box enter 300. 

9. In the M cursor box enter 900. 

10. Under Height Parameters, click the ASH check box. 

11. In the Band Widths dialog box that pops up, enter 50 for each cursor width, and click OK 

(see Figure 5.5d). 

Figure 5.5d Analytical Functions Dialog Box for the Scan Routines Window 

12. Click Add to append the analytical function (see Figure 5.5e). 

13. Click Done when finished. 

Figure 5.5e Analytical Function Appended 

14. Select Edit > Global Edit Mode to disable Global Edit Mode. 

15. Display each scan routine in turn, and notice that all four scan routines have been modified. 

16. Select File > Save As... 


186C



17. Enter the desired file location and file name. The path of the file location is C:\Program 

Files\Veeco\Dektak32\Programs\, unless you have changed it (see Setup Menu: Section 

8.5). 

Note: You must include the file name extension “.mp”. 


5.6 Automation Program Options 


Automation Program Options 

You can select various options for the automation program to be performed at the conclusion of 

each scan routine (see Figure 5.6a). 

Figure 5.6a Automation Programs Window: Automation Programs Options Section 

Several data-destination options are available in the Dektak application: 

• Data File, Data Export; 

• Automation Program Summary (APS) File, APS Export; 

• Printer Output 

A Timing option allows you to pause before each scan until you decide to continue, or specify a 

time delay between scans. 

A Stage Control option allows you to move the stage to the unload position automatically when the 

automation program has finished. 

The procedure to select these options is described in the following sections. 

5.6.1 Data File/Data Export 

The data file and data export options allow you to save the data plot from the scan routine just 

concluded either as a Dektak data file or as ASCII data on the Dektak 8 hard disk. You can redisplay 

the plotted profile at a later date for further analysis. For an exercise, you will save the data 

to the C: drive. 

1. In the Automation Programs window, click Data File or Data Export in the Automation 

Program Options section to display the General page in the Automation Program 

Options dialog box. 




Figure 5.6b Automation Program Options Dialog Box: General Page 

2. In the Scan Data section, you have the following choices: 

• Accept the default file to save the scan data. 

Note: Unless otherwise specified, data automatically saves to the Default data file in 

the Dektak32\Data\Default folder on the C: drive. 

• Click the button to open the Select a Data File dialog box where you can select a data 

file or specify a new one. (For the exercise, enter Exercise.dat in the File name field. 

Then click Save to close the dialog box.) 

• Check the box Select At Run Time, which allows you to wait until the scan has run 

before you choose the file to save the scan data. 

3. Under Export in the Scan Data section, you have the following choices: 

• Check the box None, which prevents ASCII scan data from being exported. 


before you choose the file to save the exported ASCII scan data. 

• Click the button to open the Specify a File dialog box where you can select a text file or 

specify a new one for your exported ASCII scan data. The Additional Options section 

in this dialog box allows you to choose either tabs or commas as data delimiters, and to 

specify whether to overwrite or append data when using an existing file. 

4. In the Auto Program Summary (APS) section, you have the following choices: 

• Leave the boxes unchecked, which prevents APS data from being saved. 


177A



• Check the box Compute & Display, which selects the default file to save the APS data 

that will be computed. You can click the button to open the Select a Data File dialog 

box where you can select a text file or specify a new one for your APS data. 


before you choose the file to save the APS data. 

Note: See Enabling Automation Program Summary (APS): Section 5.6.2, for 

additional information and an exercise. 

5. Under Export in the Auto Program Summary (APS) section, you have the following 

choices: 

• Check the box None, which prevents ASCII APS data from being exported. 


before you choose the file to save the exported ASCII APS data. 

• Click the button to open the Specify a File dialog box where you can select a text file or 

specify a new one for your exported ASCII APS data. 

6. When you have finished, click OK to close the Automation Program Options dialog box. 

Opening Saved Scan Data Plot 

Note: Click Apply instead of OK if you want to keep the dialog box open to make 

other selections. 

For the purpose of the exercise, you will run the current automation program to demonstrate how 

the data file option saves data plots to the selected filename. 

1. Click the Run Automation Program icon or select Run > Auto Program to run the 

automation program and save the data plot. 

2. Select File > Open at the conclusion of the automation program to retrieve the data plots 

through the Load Dektak Data or Program File dialog box (see Figure 5.6c). 

3. Under Files of type, confirm that Scan Data has been selected. 

Note: A directory listing of the saved data plots appears. The data plot from scan 

routines 1, 2, 3 and 4 are filed under Exercise.001.dat, Exercise.002.dat, 

Exercise.003.dat, and Exercise.004.dat, respectively. 

4. Select Exercise.001.dat and click OPEN to redisplay the data plot from scan routine 1. 

Note: The data plot from scan routine 1 replots and redisplays. 




Figure 5.6c Load Dektak Data or Program File Dialog Box: Scan Data 

5.6.2 Enabling Automation Program Summary (APS) 

The auto program summary (APS) option provides a summary and listing of the analytical function 

results for an automation program. 

Note: All scan routines within the automation program must have identical scan 

routine parameters before the automation program summary can be computed. 

This may be accomplished using the global edit mode in the Scan Routines 

window. 

For the exercise, do the following: 

1. Click the Automation Programs icon or select Window > Automation Programs to 

display the Automation Program window. 

2. In the Automation Programs Options section, click APS File to display the General page 

in the Automation Program Options dialog box (see Figure 5.6b). 

3. In the Auto Program Summary (APS) section of the General page, check the box 

Compute & Display. Then click the button to open the Select a Data File dialog box. 

4. In the File name field, enter the filename Exercise for your APS data. (The extension .aps 

will be added automatically.) Click Select to close the dialog box. 

5. In the Automation Program Options dialog box, select the Extended page (see Figure 5.6f 

in Section 5.6.4). 

6. Check the box Print APS to produce a printout of the automation program summary. Click 

OK to close the Automation Program Options dialog box. 


251A



7. Select Run > Auto Program to run the current automation program and compute, display, 

print, and save the automation program summary. 

5.6.3 Automation Program Summary Window 

The Automation Program Summary window provides data in tabular form on the just concluded 

automation program (see Figure 5.6d-1). 

• The items in the bar above the table include: automation program filename, number of 

scan routines (at the far right side of the bar--not shown in the figure), and automation 

program start time and date. 

• The column headings display the locations of the reference and measurement cursors for 

each analytical function. 

• The first five row headings provide the mean, standard deviation, minimum, maximum, 

and range of the analytical function for all the scan routines. 

• The remaining items in the table provide the individual analytical function results for 

each scan routine. 

Figure 5.6d Automation Program Summary Window - Examples 

(1) 

Excluding Selected Scans 

Scans Selected Scans Excluded 

(2) (3) 

Use the following procedure to exclude selected scan results from the calculations displayed in the 

first five rows. 

1. Left-click the mouse on a row containing scan-routine results to be excluded. 

• Use the CTRL key on the keyboard along with the left mouse button to select 

multiple rows. 




• Use the SHIFT key on the keyboard along with the left mouse button to select two 

rows and all of the rows in between. 

2. The selected scan row(s) will be highlighted (see Figure 5.6d-2). 

Note: You can use the CTRL key on the keyboard along with the left mouse button on 

a row that has been selected if you want to de-select it. 

3. Select Edit > Exclude from the menu bar. Alternatively, you can: 

• Click the Exclude icon in the toolbar. 

• Press CTRL+X on the keyboard. 

• Right-click the mouse on a highlighted row and select Exclude from the pop-up 

menu. 

4. The excluded scan rows will display grayed-out data (see Figure 5.6d-3), and the 

calculations in the first five rows will not include the data from those rows. 

5. You can change any rows from excluded to included status by selecting the rows as 

described above. Then select Edit > Include from the menu bar. Alternatively, you can: 

Re-Running Selected Scans 

• Click the Include icon in the toolbar. 

• Press CTRL+I on the keyboard. 

• Right-click the mouse on a highlighted row and select Include from the pop-up 

menu. 

Use the following procedure to re-run certain scan routines if desired, without re-running the entire 

automation program. 

1. Left-click the mouse on a row containing scan-routine results to be re-run. (It does not matter 

if the row has previously been excluded.) 

• Use the CTRL key on the keyboard along with the left mouse button to select 

multiple rows. 

• Use the SHIFT key on the keyboard along with the left mouse button to select two 

rows and all of the rows in between. 

• Press CTRL+A on the keyboard to select every scan row. 

2. The selected scan row(s) will be highlighted (see Figure 5.6d). 

3. Select Edit > Re-run Scans from the menu bar. Alternatively, you can: 


• Click the Re-run Scans icon in the toolbar. 

• Press CTRL+U on the keyboard. 



• Right-click the mouse on the highlighted row and select Re-run Scans from the 

pop-up menu. 

Note: Be sure not to click Run. That will run all of the scans, regardless of your 

exclusions. 

4. The automation program will run all of the scan routines that were highlighted, and the new 

data will be displayed in the Automation Program Summary window in those rows. The 

calculations displayed in the first five rows will be updated. 

Note: Use the above procedures only on summary data that has just been acquired. 

Re-running scans with APS data that has been loaded from a file would 

produce meaningless results. 

Printing, Loading or Saving APS Files 

1. Click the Automation Program Summary icon or select Window > Auto Prog Summary 

to display the automation program summary. 

2. Select File > Print > Auto Program Summary (APS) to print an automation program 

summary. 

3. Select File > Open to open the Load Dektak Data or Program File dialog box (see Figure 

5.6e). 

Note: A listing of the files saved under the .aps file extension will display. 




5.6.4 Printer 

Figure 5.6e Load Dektak Data or Program File Dialog Box: APS Data 

4. Click the desired filename and click Load. 

5. Select File > Save or File > Save As to save an automation program summary to a file from 

the APS Window. 

6. Enter the desired filename in the dialog box that pops up and click Save. 

Note: This section applies only if a printer is connected to the computer or the 

network. The printer may require setup before the initial use (see Printer 

Selection: Section 1.3). 

In the Automation Programs window, click Printer Output in the Automation Program 

Options section to display the Extended page in the Automation Program Options dialog box. 

There are three printer options available: None, Print Plot, and Print APS (see Figure 5.6f). 

• If you select None, the printer will not produce any printouts. 

• If you select Print Plot, the printer prints the plotted profile trace after each completed 

scan routine, along with the scan data. 

• If you select Print APS, the printer produces a summary of the scan data only. 


195A

Figure 5.6f Automation Program Options Dialog Box: Extended Page 

5.6.5 Pause During Autoprogram 



In the Automation Programs window, click Timing in the Automation Program Options section 

to display the Extended page in the Automation Program Options dialog box (see Figure 5.6f). 

The Timing section allows you to program a pause or time delay between each scan routine to 

allow the operator time to visually inspect or record scan data. Three options are available: No 

Pause During Processing, Adjust Position Before Each Scan, and Delay. 

• When you select No Pause During Processing, all scan routines within the automation 

program run one right after another. 

• When you select Adjust Position Before Each Scan, the system stops after each scan 

routine to allow you to make any necessary adjustments to the sample position. Select 

Run > Continue to move to the next scan routine in sequence contained in the 

automation program. 

• Finally, the Delay selection permits you to type in a time delay in seconds between 

scans. 


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5.6.6 Stage Control 

In the Automation Programs window, click Stage Control in the Automation Program Options 

section to display the Extended page in the Automation Program Options dialog box (see Figure 

5.6f). 

The Stage Control section allows you to choose whether or not you want the stage to move 

automatically to the unload position at the profiler door after the automation program has 

completed, to allow easy loading and unloading of samples. 

• Check or uncheck Unload Stage When Done as appropriate. 


5.7 Deskew 


Deskew 

When developing an automation program on a production reference sample, all programmed X, Y 

and theta coordinates relate to the position of that particular sample as it rests on the sample stage. 

It is unlikely that you can load subsequent samples at the exact physical location of the reference 

sample used to define the automation program. Although tooling or fixturing pins are extremely 

helpful and recommended if you desire fast, accurate sample positioning, nevertheless slight 

sample and/or physical positioning variances will throw off--or skew--the programmed X, Y and 

theta coordinates. Therefore, you can establish deskew points for your samples, and for the 

individual scan routines, as described in the following paragraphs. 

Program Deskew Points 

Note: Your system should include the Power Theta and Theta Encoder options for 

maximum accuracy in using deskew points. 

To compensate for skewing, you can establish deskew points on the reference sample when the 

automation program is defined. You may select any easily identifiable landmarks on the reference 

sample as deskew points (e.g., test pads on a silicon wafer, or substrate corners). These points, 

called Program Deskew Points, are then used to correct for variations in the positions of subsequent 

samples before running your automation program on them. 

Scan Deskew Points 

The Program Deskew Points described above enable you to adjust the position of each sample 

before running your automation program on the sample. In some cases you may also want to verify 

and adjust the starting position of some of the individual scan routines in the automation program. 

The Scan Deskew Points serve this purpose. 

Before You Start 

Before you establish deskew points, you should be aware of several factors that affect the accuracy 

and performance of deskewing: 

• The center of rotation of the stage must be accurately calibrated. If you have not already 

performed this calibration, select Calibration > COR of Stage to open the Calibration 

Wizard for the center of rotation (COR) of the stage. Follow the step-by-step 

instructions presented in the Wizard to calibrate the center of rotation of the stage. 

• The reference sample on the stage must be as level as possible. See Stage Leveling: 

Section 4.5, for information on leveling the stage. 

• The stage must be fully returned back to its center position from the unload position 

each time you load a sample (click the Yes button in the Load Sample dialog box to 

return back to stage center). See Stage Control Panel: Section 3.2.3, and Unloading 

the Sample: Section 3.5. 



Deskew 

• Be sure to tower down over the features that you are using for your deskew points 

(select Profiler > Tower Down from the menu). 

5.7.1 Establishing Program Deskew Points 

Two deskew points are required. For best results, establish the two deskew points at the greatest 

diagonal position possible (at least 5” apart), and ensure that they are outside the area on the sample 

that contains the scan locations. The coordinates for Program Deskew Points display in the 

Automation Program Deskew Points section of the Automation Programs window. If you do 

not enter deskew points, Not Set will appear for each point. 

The procedure for setting reference deskew points for an automation program is described below. 

1. In the Automation Programs window, click one of the parameters in the Automation 

Program Deskew Points section (e.g., 1st Point) to open the Automation Program 

Deskew Points dialog box (see Figure 5.7a). 

Figure 5.7a Automation Program Deskew Points Dialog Box 

2. Check (select) the Enable Rotation box if you want to include theta rotation in the program 

deskew points you are establishing. 

Note: Deskew points established with just the X, Y coordinates are more accurate 

than ones that include theta rotation. Select Enable Rotation only if rotation is 

critical for your scan routines (i.e., scanning in the same orientation along your 

feature is required). 

3. Click Location to switch to the Sample Positioning window, where you can view your 

sample and identify landmarks to use as deskew points. 

4. In the Sample Positioning window, the Automation Program Deskew Point Setup dialog 

box is displayed for the 1st deskew point (see Figure 5.7b). 


Figure 5.7b Automation Program Deskew Point Setup Dialog Box 


Deskew 

Note: You can go directly to the Automation Program Deskew Point Setup dialog 

box in the Sample Positioning window if you select Deskew > Set Program 

Deskew Points from the menu bar in either the Automation Programs or 

Sample Positioning window. 

5. Position a feature under the stylus, using either stage tracking (see Stage Tracking: Section 

3.3.1), the Stage Control Panel (see Stage Control Panel: Section 3.2.3), or both. 

6. Select Profiler > Tower Down to lower the stylus, to ensure the tower is nulled over the 

feature prior to establishing the 1st deskew point. 

7. Click Set to accept the 1st deskew point. 

8. The dialog box is now ready for the 2nd deskew point. Position a feature under the stylus, 

using either stage tracking, the Stage Control Panel, or both. 


feature prior to establishing the 2nd deskew point. 

10. Click Set to accept the 2nd deskew point. The dialog box closes. 

11. Switch back to the Automation Programs window. You can verify the coordinates for your 

deskew points in the Automation Program Deskew Points section. 

12. Save your automation program. 

5.7.2 Establishing Scan Deskew Points 

For each scan routine, you can establish deskew points or not as desired. Two deskew points are 

required. For best results, establish the two deskew points at the greatest diagonal position possible, 

and ensure that they straddle the area containing the scan location. The coordinates for Scan 

Deskew Points display in the Scan Routine Deskew Points section of the Scan Routines window. 

If you do not enter deskew points for a scan routine, Not Set will appear for each point. 

The procedure for setting reference deskew points for a scan routine is described below. 



Deskew 

1. Click one of the parameters in the Scan Routine Deskew Points section (e.g., 1st Point) to 

open the Scan Routine Deskew Points dialog box (see Figure 5.7c). 

Figure 5.7c Scan Routine Deskew Points Dialog Box 

2. Check (select) the Enable Rotation box if you want to include theta rotation in the scan 

deskew points you are establishing. 

Note: Deskew points established with just the X, Y coordinates are more accurate 

than ones that include theta rotation. Select Enable Rotation only if rotation is 

critical for your scan routine (i.e., scanning in the same orientation along your 

feature is required). 

3. Click Location, which will switch to the Sample Positioning window, where you can view 

your sample and identify landmarks to use as deskew points. 

4. In the Sample Positioning window, the Scan Routine Deskew Point Setup dialog box is 

displayed for the 1st deskew point (see Figure 5.7d). 

Figure 5.7d Scan Routine Deskew Point Setup Dialog Box 

Note: You can go directly to the Scan Routine Deskew Point Setup dialog box in the 

Sample Positioning window if you select Deskew > Set Scan Deskew Points 

from the menu bar in the Sample Positioning window. 

5. Position a feature under the stylus, using either stage tracking (see Stage Tracking: Section 

3.3.1), the Stage Control Panel (see Stage Control Panel: Section 3.2.3), or both. 



Deskew 


feature prior to establishing the 1st deskew point. 

7. Click Set to accept the 1st deskew point. 

8. The dialog box is now ready for the 2nd deskew point. Position a feature under the stylus, 

using either stage tracking, the Stage Control Panel, or both. 


feature prior to establishing the 2nd deskew point. 

10. Click Set to accept the 2nd deskew point. The dialog box closes. 

11. Switch back to the Scan Routines window. You can verify the coordinates for your deskew 

points in the Scan Routine Deskew Points section. 

12. Save your automation program. 

5.7.3 Running an Automation Program Containing Deskew Points 

Once the program deskew points for the reference sample have been included in your automation 

program, you can run the program on subsequent samples, as follows: 

1. Select Run > Auto Program from the menu. The Sample Positioning window opens, the 

stage translates to the X, Y (and theta, if enabled) location of the reference deskew point, and 

the Automation Program Deskew Point Check dialog box displays with instructions for 

checking the 1st deskew point (see Figure 5.7e). 

Figure 5.7e Automation Program Deskew Point Check Dialog Box 

2. Left-click in the camera view pane to activate stage tracking. 

3. Roll the pointing device to line up the software reticle with the visually identifiable landmark 

selected as the 1st reference deskew point. 

4. Ensure the tower is nulled over the feature. 

5. Left-click again in the camera view pane to deactivate stage tracking, once the reticle is 

properly aligned with the 1st deskew point. 



Deskew 

6. Click Set in the dialog box to accept the current X, Y (and theta, if enabled) stage location as 

the 1st deskew point. 

Note: If you click Abort in the dialog box, a Deskew dialog box pops up, where you 

have the choice of whether or not to continue execution of the program 

(without deskew). If you then choose not to continue, you will have the option 

to clear the deskew points. 

7. If you clicked Set, the stage now translates to the X, Y (and theta, if enabled) location 

entered as the 2nd reference deskew point. 

8. Left-click in the camera view pane to activate stage tracking. 

9. Roll the pointing device to line up the software reticle with the visually identifiable landmark 

selected as the 2nd reference deskew point. 

10. Ensure the tower is nulled over the feature. 

11. Left-click again in the camera view pane to deactivate stage tracking, once the reticle is 

properly aligned with the 2nd deskew point. 

12. Click Set in the dialog box to accept the current X, Y (and theta, if enabled) stage location as 

the 2nd deskew point. 

Note: If you click Abort in the dialog box, you have the same choices as described 

for the 1st deskew point in the note above. 

13. If you clicked Set, the Data Plot window opens, and your automation program runs with the 

sample in the proper location as determined by the deskew offsets. 

Note: You should be aware that once you have accepted program deskew offsets, they 

remain associated with your automation program until you change or clear 

them. To clear the deskew offsets, select Deskew > Clear Program Deskew 

Points from the menu bar, or Clear All in the Automation Program Deskew 

Points dialog box. Always clear your deskew points, thereby resetting the 

deskew offsets to zero, before establishing new deskew points. 

14. If you have set deskew points for any of the scan routines in your automation program, the 

Sample Positioning window opens just before each of those routines is run, and the Scan 

Routine Deskew Point Check dialog box displays with instructions for checking the 1st and 

2nd deskew points for the scan routine. 

15. The procedure for checking scan routine deskew points and accepting or rejecting the offsets 

is the same as for the program deskew points. 

16. Once you apply the offsets, by clicking Yes, the Data Plot window opens, and your 

automation program continues with the scan routine properly located on the sample by its 

deskew offsets. 

Note: If you click No in the Deskew Results Confirmation dialog box, the scan 

routine runs without the deskew offsets applied. 



Deskew 

Note: You should be aware that once you have accepted scan deskew offsets, they 

remain associated with your scan routine until you change or clear them. To 

clear the deskew offsets, select Deskew > Clear Scan Deskew Points from the 

menu bar, or Clear All in the Scan Routine Deskew Points dialog box. 

Always clear your deskew points, thereby resetting the deskew offsets to zero, 

before establishing new deskew points. 


Chapter 6 Analytical Functions 

The analytical functions included as part of the standard Dektak software allow you to perform 

complex analytical computations on the profile data quickly and easily. You may enter multiple 

analytical functions into a scan routine to automatically calculate surface texture parameters on like 

samples. You can also perform analytical functions at the conclusion of a scan by selecting the 

desired parameters one-by-one. 

• Analytical Functions Description: Section 6.1 

• Roughness Parameters: Section 6.2 

• Waviness Parameters: Section 6.3 

• Height Parameters: Section 6.4 

• Geometry Parameters: Section 6.5 

• Analytical Function Exercise: Section 6.6 

• Determining the Cutoff Wavelength: Section 6.7 

• Activating the Cutoff Filters: Section 6.8 

• Entering Filter Cutoffs into a Scan Routine: Section 6.9 

• Data Type Selection: Section 6.10 

• Entering Data Type into a Scan Routine: Section 6.11 

• Measuring and Entering Analytical Functions: Section 6.12 

• Entering Analytical Functions into a Scan Routine: Section 6.13 

• Deleting Analytical Functions or Results: Section 6.14 

• Smoothing: Section 6.15 

• Activating the Smoothing Function: Section 6.16 

• Entering Smoothing into a Scan Routine: Section 6.17 


Analytical Functions 

Analytical Functions Description 

6.1 Analytical Functions Description 

The Dektak application has thirty different analytical functions for measuring surface texture. The following 

section provides the abbreviation for each function as it appears on the screen, along with a brief description 

of the parameter. By using these functions to analyze the profile data, you can obtain valuable information 

for controlling and monitoring a production process. 

The analytical functions are grouped by applications: roughness, waviness, height, and geometrical 

parameters. 

There are two similar versions of the Analytical Functions dialog box, depending on the window that is 

active when the dialog box is opened. 

• To open the Analytical Functions dialog box from the Scan Routines window, click 

the Append Analytical Functions to Current Scan Routine icon, or select Edit > 

Append Analytical Functions from the menu bar. See Figure 6.1a at the left. (For 

further information on this version of the Analytical Functions dialog box, see 

Entering Filter Cutoffs into a Scan Routine: Section 6.9.) 

• To open the Analytical Functions dialog box from the Data Plot window, click the 

Display Analytical Functions Dialog Box icon, or select Analysis > Analytical 

Functions from the menu bar. See Figure 6.1a at the right. (For further information on 

this version of the Analytical Functions dialog box, see Measuring and Entering 

Analytical Functions: Section 6.12.) 

Figure 6.1a Analytical Functions Dialog Boxes 

158A 

(from Scan Routines window) (from Data Plot window) 

If you plan to conduct extensive surface texture analysis, refer to the ANSI B46.1 specification on 

surface texture. You can obtain a copy of this specification from the American Society of 

Mechanical Engineers, 345 East 47th Street, New York, NY 10017, telephone number: 

1.800.THE.ASME. 


158B

6.2 Roughness Parameters 

The following parameters are listed alphabetically. 

Maxdev (Maximum Deviation) 

Calculates the furthest data point above or below the mean line. 

MaxRa (Maximum Ra) 


Roughness Parameters 

Identifies the portion of the assessment length which has the highest Ra. The assessment length, 

defined by the cursors, divides into nineteen overlapping segments. Each segment is equal to onetenth 

of the assessment length distance. The Ra is calculated for each segment. The R cursor 

positions in the center of the segment with the highest Ra. You can program only one MaxRa into a 

scan program. 

Ra (Average Roughness) 

Formerly known as Arithmetic Average (AA) and Center Line Average (CL), Ra is the universally 

recognized, and most used, international parameter of roughness. It is the arithmetic average 

deviation from the mean line (see Figure 6.2a). 

Figure 6.2a Ra Roughness Analytical Function 


159



Rp (Maximum Peak) 

The maximum height or the highest peak of the profile roughness above the mean line, within the 

assessment length (see Figure 6.2b). 

Rq (Root-Mean-Square (RMS)) 

Figure 6.2b Rp Roughness Analytical Function 

Determines the root-mean-square value of roughness corresponding to Ra (see Figure 6.2c). Rq has 

the greatest value in optical applications where it is directly related to the optical quality of a 

surface. 

Figure 6.2c Rq Roughness Analytical Function 


160 

161

Rt (Maximum Peak to Valley) 



The sum total of the maximum peak and maximum valley measurements of roughness within the 

assessment length (Rt = Rp + Rv) (see Figure 6.2d). 

Rv (Maximum Valley) 

Figure 6.2d Rt Roughness Analytical Parameters 

R t = R p + R v 

The lowest point, or the maximum depth of the profile roughness below the mean line, within the 

assessment length (see Figure 6.2e). 

Figure 6.2e Rv Roughness Analytical Function 


162 

R t is the sum total of the maximum valley and maximum peak of 

roughness. 

163



Rz_din (Ten Point Height Average) 

The average height difference between the five highest peaks and the five lowest valleys in 

accordance with DIN 4768/1 specification published by the Deutsche Institut fuer Normung c.v. 

(see Figure 6.2f). 

Skew (Skewness) 

Figure 6.2f Rz Roughness Analytical Parameter 

The symmetry of the profile about the mean line. It will distinguish between asymmetrical profiles 

of the same Ra or Rq. Skewness is non-dimensional. 

Note: For best results, software level the scan trace prior to calculating any analytical 

functions. 

R SK 

1 

----------- r 3 L 

= 

( x) 

dx 

3 

LRq 132 Dektak 8 Manual Rev. G 

∫ 

0 

164

6.3 Waviness Parameters 


Wa (Arithmetic Average of Waviness) 

The average deviation of waviness from the mean line (see Figure 6.3a). (Corresponds to Ra.) 

WMaxdev (Maximum Deviation of Waviness) 

Figure 6.3a Wa Waviness Analytical Function 

Measures the distance of the furthest data point above or below the mean line of the waviness 

profile. (Corresponds to Maxdev.) 

Wp (Maximum Peak of Waviness) 


Waviness Parameters 

Measures the maximum height of the highest peak of the waviness profile above the mean line. 

(Corresponds to Rp.) 

Wq (Root-Mean-Square of Waviness) 

Determines the root-mean-square (RMS) value of waviness. (Corresponds to Rq.) 

Wt (Maximum Peak to Valley of Waviness) 

The sum total of the maximum peak and maximum valley measurements of waviness 

(Wt=Wp+Wv). (Corresponds to Rt.) 


165



Wv (Maximum Valley of Waviness) 

The lowest point, or the maximum depth of the waviness profile below the mean line. (Corresponds 

to Rv.) 

Note: Waviness calculations are performed on raw profile data unless you activate the 

low pass waviness filter. 


6.4 Height Parameters 


ASH (Delta Average Step Height) 


Height Parameters 

Used to obtain a step height measurement in applications where roughness or noise is present on the 

profile trace. It computes the difference between two average height measurements. 

Avg Ht (Average Height) 

Calculates the average height of a step with respect to the zero line, using the R and M cursors to 

define the area of measurement. 

HSC (High Spot Count) 

The number of peaks per inch (or cm) that project above a line that is parallel to the mean line. A 

peak must cross above the threshold and then back below it. 

Pc (Peak Count) 

The number of peaks that project through a selectable band centered about the mean line of the 

assessment length. Pc is expressed in peaks/inch or peaks/cm. 

Peak (Maximum Peak) 

Calculates the maximum height above the baseline as determined by the cursor/trace intercepts. 

P_V (Maximum Peak to Valley) 

Calculates the vertical distance between the maximum peak and maximum valley. 

TIR (Total Indicated Reading) 

Calculates the vertical distance between the highest and lowest data points between the cursors. 

Valley (Maximum Valley) 

Calculates the maximum depth below the baseline determined by the cursor/trace intercepts. 



Geometry Parameters 

6.5 Geometry Parameters 


Area (Area-Under-The-Curve) 

Computes the area of a profile between the R and M cursors with respect to the horizontal zero grid 

line. You must level the profile for accurate results. If the profile is above the zero line, area is 

expressed as a positive value in square µm. If the profile is below the zero line, the result will be a 

negative value. 

Perim (Perimeter) 

Radius 

Slope 

Calculates the outside perimeter of a profile between the R and M cursors. A horizontal reference 

line is created using the R and M cursor intercepts. You must level the profile for accurate results. 

A least-squares-arc is fitted to the data points and the radius is calculated from the equation for a 

circle. The algorithm does not distinguish between concave and convex shapes. To maximize the 

accuracy of the results, the following factors must be considered: (1) the sample shape must 

approximate a sector of a circle, and (2) the stylus tip must traverse the apex of the sample if it is a 

sphere. Using the largest radius stylus possible helps minimize the error. (3) Repeatability errors 

may dominate the measurement if the chord rise is less than 100Å for scans longer than 1 mm. 

Calculates the arc tangent of the ratio of the vertical distance to the horizontal distance between the 

R and M cursor/trace intercepts. The result is expressed in degrees. Slope is useful only for 

relatively shallow slopes. If the stylus radius is too large or the step too steep, the stylus contacts the 

upper edge of the step before the lower edge and the slope measurement will be inaccurate. 

Sm (Mean Spacing Between Peaks) 

Calculates the mean spacing between peaks, as defined by downward crossing of the mean line, 

followed by an upward crossing to the next downward crossing. If the distance between these 

downward crossing points is less than 1 percent of the measurement length, than this peak is 

ignored. Sm is expressed as micro-inches or microns. 

Tp (Bearing Ratio) 

The percentage of points along the assessment length that project above a line that is parallel to the 

mean line. 


Volume 


Geometry Parameters 

The integration-by-shells technique is used to find the volume of a solid. This is accomplished by 

rotating the lamina delineated by the scan trace and a line segment connecting the cursor intercepts 

through 180 degrees about a vertical axis located half way between the cursors. 



Analytical Function Exercise 

6.6 Analytical Function Exercise 

This exercise demonstrates how to perform an average roughness measurement at the conclusion of 

a scan. For the purpose of this exercise, use an optically flat sample, such as the glass of the 

optional calibration standard. Position the calibration standard so that a 2 mm scan traverses across 

the glass portion of the standard without encountering a step (see Figure 6.6a). 

6.6.1 Run Scan and Level Trace 

1. Select Window > Automation Programs to display the Automation Programs window. 

2. Select File > New from the menu to enter the default scan routine into the current automation 

program. 

3. Select Run > Scan Here with the stage in position to run the current scan routine. 

Note: Once you run the scan routine and the profile plots, you must level the trace. 

4. Select Plot > Level to replot and level the trace. 

Note: Software level the trace prior to initiating any analytical function to obtain 

accurate results. 

Figure 6.6a Calibration Standard Positioning for a Roughness Measurement 

Stylus 

Dog bone 

Approximately 2 mm 


167

6.6.2 Average Roughness Measurement 


Analytical Function Exercise 

Once you run the scan and level the profile trace, you may perform an analytical function from the 

Data Plot window. The procedure for executing the Average Roughness (Ra) analytical function 

on the raw profile data is described below. The analytical function domain is on the data between 

the R and M cursors. You can relocate the cursors if desired, but for this exercise use the default 

cursor setting of 100 and 1900 µm for a 2 mm scan. 

1. Select Analysis > Analytical Functions to display the Analytical Functions dialog box 

with selections for setting roughness, waviness, heights, and geometry parameters. 

2. Click Ra under Roughness in the Analytical Functions dialog box (see Figure 6.6b). 

3. Click Measure in the Analytical Functions dialog box (selecting Measure and Program 

automatically enters the analytical function into the scan routine program). 

4. Click Compute to clear the dialog box and calculate the average roughness. 

Note: The result from the Ra function and the cursor locations display in the Analytic 

Results area located on the left of the Data Plot window. An asterisk appears 

next to the Ra indicating that the analytical function was calculated on raw, 

unfiltered data. 

Figure 6.6b Compute Ra 


199A


Determining the Cutoff Wavelength 

6.7 Determining the Cutoff Wavelength 

The Dektak application is equipped with short pass and long pass digital filters for filtering out 

high and low frequency signals. The cutoff frequencies define the intended difference between 

roughness and waviness. 

The filters are designed in accordance with the ANSI B46.1 specification on surface texture. The 

wavelengths are user selectable from 1 to 200,000 µm. 

The appropriate cutoff wavelength varies from application to application; however, the cut-off 

wavelength must be less than the scan length. Also, the cutoff value will not be accepted if fewer 

than 8 data points are available per cutoff wavelength. The Scan Resolution parameter displayed 

on the Scan Routines window provides the number of µm per sample for a given scan length and 

speed. The minimum acceptable cut-off wavelength must be at least eight times longer than the 

value listed as the scan resolution. This can be otherwise defined as: µm per sample x 8 = minimum 

acceptable cut-off wavelength. Veeco recommends for typical applications the cutoff filter be set at 

1/5 the scan length. 

For example, the default scan routine used for the purpose of this exercise has a scan length of 2000 

µm, a scan duration of 1 second and a scan resolution of 0.513 µm per sample. Multiplying 0.513 

by 8 equals 4.10, so the minimum acceptable cut-off wavelength is 5 µm. The scan length must 

equal the cut-off wavelength, so the maximum cutoff length is 2000. Therefore, you must select a 

cut-off value between 5 and 2000 µm. 

There are three separate cut-off filters for selecting the wavelength bypass frequency. The three 

filters are described below. 

Short (High) Pass Filter 

This filter calculates roughness data, filtering out low frequency waviness signals and allowing 

high frequency roughness data to pass through. 

Long (Low) Pass Filters 

This filter calculates waviness data, filtering out high frequency roughness signals and allowing 

low frequency waviness data to pass through. 

Band Pass Filter 

When you select the band pass filter, both the short pass and long pass filters are enabled to 

calculate the roughness data, creating a band that filters out high frequency signals above the band 

and low frequency signals below the band. 


6.8 Activating the Cutoff Filters 


Activating the Cutoff Filters 

To obtain accurate roughness measurements, activate the short pass filter. The procedure for 

activating the short pass and long pass filters is described below. 

1. Select Analysis > Cutoff Filter from the Data Plot window menu bar to display a dialog 

box for setting the roughness and waviness filters (see Figure 6.8a). 

2. Enter a value of 200 in the Short Pass Filter Cutoff field. 

3. Enter a value of 200 in the Long Pass Filter Cutoff field. 

4. Click OK to replot the profile trace with three separate scan traces. 

Note: The white trace represents the raw profile data, the yellow trace represents the 

roughness profile as determined with the short pass filter, and the red trace 

represents the waviness profile as determined by the long pass filter. 

Figure 6.8a Roughness and Waviness Filters Dialog Box 


200A


Entering Filter Cutoffs into a Scan Routine 

6.9 Entering Filter Cutoffs into a Scan Routine 

You can enter the short pass and long pass filters into the scan routine to automatically calculate 

roughness and waviness analytical functions. The procedure for entering filter cutoffs into a scan 

routine is described below. 

1. Under Data Processing in the Scan Routines window, click Filter Cutoffs to open the Data 

Processing Parameters dialog box (see Figure 6.9a). 

2. Enter a cutoff value of 200 µm in the Short Pass Filter Cutoff box for calculating 

roughness. 

3. Enter a cutoff value of 200 µm in the Long Pass Filter Cutoff box for calculating waviness. 

4. Click OK to close the dialog box and enter the cutoff values into the scan routine. 

Figure 6.9a Data Processing Parameters Dialog Box 


202A

6.10 Data Type Selection 

You may select the type of data to display in the Data Plot window. You may display the raw, 

roughness, and waviness profile data either individually or simultaneously. The procedure for 

selecting the data type is described below. 

1. Select Plot > Data Type to display a dialog box for selecting the raw, roughness, or 

waviness data type. 


Data Type Selection 

Note: All three selections should be activated as indicated by their respective check 

boxes (see Figure 6.10a). 

Click to 

clear 

Figure 6.10a Data Type Dialog Box 

2. Click to clear the Waviness check box. 

3. Click OK to replot the data with the roughness and raw data profiles displayed and the 

waviness profile deleted. 


197A


Entering Data Type into a Scan Routine 

6.11 Entering Data Type into a Scan Routine 

You can predetermine the type of profile data to display at the conclusion of a scan by entering the 

selected data types into the scan routine. The procedure for entering the data type into a scan 

routine is described below. 

1. In the Display Parameters section of the Scan Routines window, click Display Data Type 

to open the Display Parameters dialog box, where you can select from three display 

options: raw, roughness, and waviness (see Figure 6.11a). 

Note: When you use the default scan routine, the raw profile data is entered as the 

Display Data Type parameter. For this exercise, all three data types are 

displayed. 

2. Click the Waviness and Roughness check boxes to enter all three data types into the scan 

routine. 

Note: You cannot select the roughness data type unless you first activate the short 

pass filter. Likewise, you cannot select the waviness data type unless you 

activate the long pass filter. 

3. Click OK when finished. 

Once you enter the analytical functions, cutoff filters, and display data types into the current scan 

routine, they automatically execute whenever the current scan routine runs. 

Figure 6.11a Display Parameters Dialog Box 


203A

6.12 Measuring and Entering Analytical Functions 


Measuring and Entering Analytical Functions 

Once you activate the short pass roughness filter, perform the average roughness analytical function 

a second time. You may enter one or more analytical functions into the current scan routine from 

the Data Plot window to be automatically calculated whenever the current scan routine runs. As an 

exercise, the procedure for measuring the Ra function and entering it into the scan routine is 

described below. 

1. Select Analysis > Analytical Functions from the Data Plot window to display the 

Analytical Functions dialog box (see Figure 6.1a at the right). 

2. Under Roughness in the Analytical Functions dialog box, click Ra. 

3. Select Measure and Program in the Analytical Functions dialog box (see Figure 6.12a). 

4. Click Compute to close the Analytical Functions dialog box, perform the measurement, 

and enter the average roughness into the current scan routine. 

Note: The result from the Ra function displays in the Analytic Results area on the 

left side of the Data Plot window (see Figure 6.12a). The different results from 

the first Ra are calculated on the unfiltered raw profile data (shown with an 

asterisk) and the second Ra calculated on the filtered roughness data (shown 

without an asterisk). 

Figure 6.12a Analytical Functions Dialog Box (Data Plot Window) / Analytic Results 

Analytical Functions Dialog Box 

Analytic Results Section 


198A 

198B


Entering Analytical Functions into a Scan Routine 

6.13 Entering Analytical Functions into a Scan Routine 

You may enter one or more analytical functions into the Scan Routines window to be 

automatically calculated at the conclusion of the scan. The procedure for entering analytical 

functions into the scan routine is described in the exercise below. 

1. Select Window > Scan Routines to display the Scan Routines window. 

2. Select Edit > Append Analytical Functions to display the Analytical Functions dialog 

box. 

3. Under Waviness in the Analytical Functions dialog box, click Wa. 

Note: You may set the cursors at different locations for each individual analytical 

function. 

4. Enter 0 in the R Cursor box. 

5. Enter 1900 in the M Cursor box. 

6. Click Add to enter the Wa function into the Analytical Functions area on the right side of 

the Scan Routines window (see Figure 6.13a). 

7. Click Done when complete. 

Figure 6.13a Analytical Functions Dialog Box (Scan Routines Window) / Analytic Functions 


201A 

201B

6.14 Deleting Analytical Functions or Results 


Deleting Analytical Functions or Results 

When the Scan Routines window is displayed and an analytical function is listed, you can access 

the delete function from the Analytical Functions area. 

When the Data Plot window is displayed and an analytical result is listed, you can access the delete 

function from the Analytical Results area. 

The procedure for deleting an analytical function from the Scan Routines window is described in 

the exercise below. (The procedure for deleting an analytical result from the Data Plot window is 

similar.) 

1. Move the mouse pointer to the right-hand portion of the Scan Routines window where the 

analytical functions are listed. 

2. Select (highlight) the analytical function you want to delete (for the purpose of this exercise, 

select Wa). 

3. Select Edit > Delete Analytical Functions to display the Delete Analytical Functions 

dialog box (see Figure 6.14a). 

Note: If there is no analytical function selected (highlighted), the dialog box will not 

display. 

Figure 6.14a Deleting Analytical Functions 

204A 

4. Click OK in the Delete Analytical Functions dialog box to delete the highlighted analytical 

function from the scan routine. 

Note: If there are several analytical functions listed, and you want to delete a group of 

them, select (highlight) the first function in the group, select Edit > Delete 

Analytical Functions, and enter the number of items to be deleted in the 

Delete Analytical Functions dialog box. 


204B


Smoothing 

6.15 Smoothing 

Whenever you activate the smoothing function, the roughness, waviness, or raw profiles are 

calculated using the smoothed data. The smoothing function reduces high frequency/low amplitude 

noise on a trace. Some applications involve films deposited over rough substrates. This substrate 

roughness transfers to the film surface, which can make measurements difficult or questionable. 

The smoothing function may be used in one of two ways. In applications where rough samples will 

be run on a regular basis, you may enter smoothing into the scan routine. In this way, the smoothing 

function performs automatically on each scan profile. You may also select the smoothing function 

after a scan has completed. Both methods for smoothing are discussed on the following pages. 

The Dektak application offers three degrees of smoothing. The higher the degree, the more 

smoothing will be realized. 

• Degree 1: 5-point smoothing 



Once you select the degree of smoothing, a prompt asks for the value of the vertical distance 

between the maximum peak to valley roughness. Determine the maximum peak to valley distance 

of the high frequency low amplitude noise and enter this or a greater value. (You can easily use the 

TIR analytical function to determine the noise band.) The smoothing function smooths all data 

within the specified noise band by examining each data point in turn and comparing it with the 

previous and following points. 

For example, if Degree 1 is selected, five consecutive data points are used in the smoothing 

calculation. If they lie within the specified noise band, a running calculation is started. A first-order 

curve is fitted to all consecutive points lying within the noise band. As new points are examined, 

the routine calculates the new value of each point by looking at the four closest points that lie 

within the band. 

When the algorithm encounters a point that lies outside the band, the calculation is interrupted. The 

new point is left as is and becomes a center point of a new noise band. If the next five points are 

within the new band, the calculation restarts. If subsequent points lie outside the band, they are 

plotted as is and each becomes a new reference point. 

This technique is preferable to straight filtering since the slope of the profile is maintained. 


6.16 Activating the Smoothing Function 


Activating the Smoothing Function 

You may perform smoothing on profile data at the conclusion of a scan. The procedure for 

activating the smoothing function from the Data Plot window is described below. 

1. Select Window > Data Plot to display the Data Plot window with the replotted profile data. 

2. Select Analysis > Analytical Functions to display the Analytical Functions dialog box. 

3. Under Height, click TIR. 

4. Select Measure. 

5. Click Compute. 

Note: The total indicated reading peak-to-valley distance is calculated. 

6. Select Analysis > Smoothing to display a dialog box for entering smoothing parameters (see 

Figure 6.16a). 

7. Choose one of three available degrees of smoothing (for the purpose of this exercise, choose 

2 in the Degree section). 

8. Enter a value equal to or greater than the value displayed as the TIR result in the Band field. 

9. Click OK to smooth and replot the raw profile data. 

Figure 6.16a Smoothing Dialog Box 


206A


Entering Smoothing into a Scan Routine 

6.17 Entering Smoothing into a Scan Routine 

You may enter smoothing into the current scan routine to execute automatically at the conclusion of 

the scan. The procedure for entering smoothing into the scan routine is described below. 

1. Select Window > Scan Routines to display the Scan Routines window. 

2. In the Data Processing section, click Smoothing to display the Data Processing 

Parameters dialog box. 

3. Choose the desired smoothing Degree (1, 2, or 3) in the Smoothing Parameters section (see 

Figure 6.17a). 

4. Determine the smoothing band value by performing the Total Indicated Reading (TIR) 

analytical function on the scan to be smoothed. 

5. Enter a value equal to or greater than the TIR value in the Band field. 

6. Click OK to automatically smooth the profile data whenever the current scan routine 

executes. 

7. To clear smoothing, click Smoothing in the Data Processing section and enter “0” in the 

Band field. 

Figure 6.17a Data Processing Parameters Dialog Box: Smoothing Parameter 


206B

Chapter 7 Scan Routine Parameter Description 

This chapter describes the various scan parameters and display parameters of the Scan Routine 

Window (see Figure 7.0a). 

Figure 7.0a Scan Routine Window 

You can enter up to 10,000 different scan routines into a single automation program file. Each scan 

routine within an automation program contains all the necessary parameters for performing a 

specified scan. These individual parameters are user selectable, providing extraordinary flexibility 

to adopt the Dektak 8 for a wide range of applications. 

Scan Routine parameters discussed in this section include: 

Scan Parameters: Section 7.1 Data Processing: Section 7.3 

Display Parameters: Section 7.2 Scan Routine Deskew Points: Section 7.4 


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Scan Routine Parameter Description 

Scan Parameters 

7.1 Scan Parameters 

All of the scan parameters are user selectable and can be accessed from the Scan Routines 

window. To display the Scan Routines window, select Window > Scan Routines from the menu 

bar. The procedure for setting the various scan parameters is described below. To display the Scan 

Parameters dialog box, click any of the parameters under Scan Parameters, such as Scan ID or 

Scan Length (see Figure 7.0a). 

7.1.1 Scan ID 

This parameter allows you to assign a fifteen-digit scan identification file name or number. 

1. To display the Scan Parameters dialog box, click any of the parameters under Scan 

Parameters (see Figure 7.0a). 

2. Select the Nominal Parameters page. 

3. In the ID section enter the desired file name or number using the keyboard (see Figure 7.1a). 

Note: Most special characters are allowed in the file name, but no spaces. 

4. Click OK to close the dialog box and enter the ID into the scan program. 

Note: Click Apply if you want to enter the ID into the scan program but keep the 

dialog box open to make additional entries. 

Figure 7.1a Scan Parameter Dialog Box: ID 


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7.1.2 Stylus Type 



You can specify the type of stylus that is installed in your system. The Stylus Type parameter 

allows you to specify which stylus type is being used. 




3. In the Stylus Type section choose the desired stylus type from the drop-down list (see Figure 

7.1b). 

4. Click OK to close the dialog box and enter the stylus type into the scan program. 

7.1.3 Scan Location 

Note: Click Apply if you want to enter the stylus type into the scan program but keep 

the dialog box open to make additional entries. 

Figure 7.1b Scan Parameter Dialog Box: Stylus Type 

This parameter displays the X, Y, and theta (T) stage location at which the current scan routine 

performs. The X and Y parameters are expressed in µm, and the theta location is expressed in 

degrees. 

Note: Theta rotation displays only if the Programmable Theta option is installed. 


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3. Click in the desired box labeled X, Y, or T and enter the desired coordinates using the 

keyboard (see Figure 7.1c). 

4. Click OK to close the dialog box and enter the location into the scan program. 

7.1.4 Scan Length 

Note: Click Apply if you want to enter the location into the scan program but keep 


Figure 7.1c Scan Parameter Dialog Box: Scan Location 

Note: Because the numeric values of the X, Y, theta location are often not known, in 

most cases you will determine the stage location by using the Sample 

Positioning Window. From the menu in this window, select Edit > Define 

Scan Location. 

Scan lengths from 50 µm to 30,000 µm (30 mm) are possible. 





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3. In the Length field enter the desired scan length using the keyboard (see Figure 7.1d). 

Note: The scan length is expressed in microns (µm). 

4. Click OK to close the dialog box and enter the length into the scan program. 

7.1.5 Scan Duration/Speed 

Note: Click Apply if you want to enter the length into the scan program but keep the 

dialog box open to make additional entries. 

Figure 7.1d Scan Parameter Dialog Box: Length 

Note: The scan length can also be set from the Sample Positioning Window by 

selecting Edit > Enter Scan Length. You can enter the scan length manually 

using stage tracking, as discussed in Chapter 4. 

The Duration setting displays the amount of time it takes to complete a given scan. Scan duration, 

in conjunction with scan length, determines the horizontal resolution of a scan. Therefore, scan 

speed is directly related to the resolution. 

For example, a 13-second scan provides 3900 Sample data Points. You can set the scan duration 

from 3 to 200 seconds for a maximum of 60,000 data points per scan. 

Select a longer scan duration for long scan applications and measurements of very fine surface 

roughness requiring the highest horizontal resolution. When high throughput is the primary 

consideration, use a shorter scan duration. For most applications, a 10-20 second scan provides 

adequate resolution and throughput. 


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3. In the Duration field enter the desired scan duration (in seconds) using the keyboard (see 

Figure 7.1e). 

4. Click OK to close the dialog box and enter the duration into the scan program. 

7.1.6 Scan Resolution 

Note: Click Apply if you want to enter the duration into the scan program but keep 


Figure 7.1e Scan Parameter Dialog Box: Duration 

The Resolution parameter (see Figure 7.1f) displays the horizontal resolution for the scan length 

and scan speed (duration) entered into the scan routine. The scan resolution is expressed in µm/ 

sample, indicating the horizontal distance between data points. Data points are the points along the 

scan path at which data samples are taken. The more data points taken during a given scan length, 

the shorter the distance between data samples. Therefore, a scan routine with the lowest number of 

µm per sample provides the best possible horizontal resolution. 

Note: The resolution automatically adjusts in accordance with the new duration 

value. 


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7.1.7 Scan Type 

Figure 7.1f Scan Parameter Dialog Box: Resolution 



You can choose the type of scan to be run. The Scan Type parameter allows you to specify which 

scan type to use. 




3. In the Scan Type section choose the desired scan type from the drop-down list (see Figure 

7.1g): 

• Standard Scan: A normal scan type, in which the scan is performed across the surface 

of a sample. The tower is nulled before each scan; therefore, each successive scan has its 

own reference point. 

• Static Tower Scan: A special scan type, in which the scan is performed across the 

surface of a sample, but the tower is nulled before only the first scan. Each successive 

scan therefore uses the same initial reference point. 

• Static Scan: A special scan type, in which the scan is performed at the same point (the 

stage does not move). The tower is nulled before the scan. This scan type is primarily 

used for determining the noise and drift of the system. 

• Map Scan: The Dektak Three Dimensional (3D) Mapping Option allows Dektak 

surface profiler customers to measure, analyze, and view surface contour data in 3 

dimensions (X, Y, and Z). See Appendix D for complete information on 3D mapping. 


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• Deflection Scan: See Deflection Scan: Section 7.1.12. 

4. Click OK to close the dialog box and enter the scan type into the scan program. 

7.1.8 Stylus Force 

Note: Click Apply if you want to enter the scan type into the scan program but keep 


Figure 7.1g Scan Parameter Dialog Box: Scan Type 

You can set the stylus force from 1mg to 15 mg force. The Stylus Force parameter allows you to 

adjust the stylus force. 




3. In the Stylus Force field enter desired stylus force (see Figure 7.1h). 

4. Click OK to close the dialog box and enter the stylus force into the scan program. 

Note: Click Apply if you want to enter the stylus force into the scan program but 

keep the dialog box open to make additional entries. 


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7.1.9 Measurement Range 

Figure 7.1h Scan Parameter Dialog Box: Stylus Force 



The available vertical resolution depends upon the Measurement Range selected. When 

measuring extremely fine geometries, the 65 kÅ range provides a vertical bit resolution of 1 Å. For 

general applications, the 10 Å vertical resolution of the 655 kÅ range is usually adequate. When 

measuring thick films or very rough or curved samples, select the 2620 kÅ range with 40 Å 

resolution. 




3. In the Meas Range field, select one of the measurement ranges from the drop-down list: 65 

kÅ, 655 kÅ or 2620 kÅ (or 1 mm, optional). See Figure 7.1i. 

4. Click OK to close the dialog box and enter the measurement range into the scan program. 

Note: Click Apply if you want to enter the measurement range into the scan program 

but keep the dialog box open to make additional entries. 


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7.1.10 Profile 

Figure 7.1i Scan Parameter Dialog Box: Measurement Range 

The Profile setting scales the measurement range according to the profile selected. Three different 

profiles are available for a variety of sample surface characteristics (see Figure 7.1j). 

Figure 7.1j Sample Surface Profiles 

• Valleys: Provides 90 percent of the measurement range below the zero horizontal grid 

line. Used primarily for measuring etch depths. 

• Hills and Valleys: Provides 50 percent of the measurement range above the zero 

horizontal grid line and 50 percent below. Used in most applications, especially if the 

surface characteristics of the sample are not well known, or if the sample is out of level. 

• Hills: Provides 90 percent of the measurement range above the horizontal grid line. 

Used primarily for measuring step heights. 


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3. Select the desired profile (see Figure 7.1k). 

4. Click OK to close the dialog box and enter the selected profile into the scan program. 

7.1.11 Additional Parameters 

Note: Click Apply if you want to enter the selected profile into the scan program but 

keep the dialog box open to make additional entries. 

Figure 7.1k Scan Parameter Dialog Box: Profile 

You can choose to enable a soft touchdown when the stylus is lowered onto the sample. Soft 

touchdown is accomplished by gradually incrementing the stylus force up to the specified value, 

which slowly lowers the stylus. 

Note: Using this feature will significantly increase the time to perform a scan routine. 

Soft touchdown is particularly appropriate for soft samples when a Static Tower scan type is being 

used, to prevent damage to the sample. The Additional Parameters section allows you to make 

this selection. 


Parameters. 


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3. In the Additional Parameters section check the Soft Touchdown box to enable this feature 

(see Figure 7.1l). 

Note: This feature is available only when a Static Tower scan type has been selected. 

4. Click OK to close the dialog box and enable soft touchdown in the scan program. 

7.1.12 Deflection Scan 

Note: Click Apply if you want to enable soft touchdown in the scan program but keep 


Figure 7.1l Scan Parameter Dialog Box: Additional Parameters 

A Deflection Scan is a special scan type in which the scan is performed at the same point (the stage 

does not move), but the stylus force is successively incremented beyond the specified value. The 

tower is nulled before the scan. When the scan is completed, the Data Plot window displays the 

deflections plotted against the applied forces. This scan type is primarily used for determining the 

deflection and material properties (such as Young’s modulus) of movable devices (such as passive 

MEMS and cantilever devices) subjected to different applied forces. 

The Scan Type parameter allows you to specify which scan type to use. 





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3. In the Scan Type section choose Deflection Scan from the drop-down list (see Figure 7.1g). 

4. In the Stylus Force section, enter the stylus force to be applied at the start of the scan (see 

Figure 7.1h). 

5. Click Apply to enter the scan type and stylus force into the scan program and keep the dialog 

box open. 

6. Select the Deflection Parameters page to see the Additional Parameters section (see 

Figure 7.1m). 

7. Enter the Interval in msec during which each increment of stylus force should be applied. 

8. Enter the Increment in mg by which the stylus force is incremented after each interval. 

9. Click Apply. 

Example: 

Note: The End Force that will be applied by the stylus is calculated and displayed 

Figure 7.1m Scan Parameter Dialog Box: Deflection Parameters Page 

• Scan duration was set at 13 seconds (see Figure 7.1e). 

• Stylus force was set at 3 mg (see Figure 7.1h). 

• Interval is set at 1000 msec (1 second) (see Figure 7.1m). 

• Increment is set at 0.05 mg. 


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• End Force is calculated and displayed as 3.65 mg (13 seconds divided by 1 second, 

multiplied by 0.05 mg = 0.65 mg to be added in 0.05-mg increments to 3 mg). 


7.2 Display Parameters 


Display Parameters 

The Scan Routines window contains additional parameters under the heading Display Parameters 

allowing automatic manipulation of the graphic display of the profile trace. The display parameters 

are described below. 

7.2.1 Software Leveling 

You can program the Dektak application to software level the profile trace automatically, in relation 

to the cursor/trace intercepts, at the conclusion of a scan. In order to obtain accurate step height 

readings and analytical calculations, you must software-level the trace. You may also enter cursor 

band widths to perform delta average leveling. 

1. To display the Display Parameters dialog box, click any of the parameters under Display 


2. Select the Automatic Leveling check box to activate the two boxes for entering the R and M 

Cursor Widths into the software leveling parameter (see Figure 7.2a). 

• The default band width is 0, and the trace levels using the default fine-line cursors. 

• If you know the desired cursor widths, you can enter them into the scan routine. The 

first box sets the width of the reference cursor (R) and the second box sets the width of 

the measurement cursor (M). 

3. Click OK to enter automatic leveling and the leveling cursor widths into the scan routine. 

Figure 7.2a Display Parameters Dialog Box: Software Leveling Parameter 

Note: You can also enter cursor band widths from the Data Plot window. A delta 

averaging technique provides a roughness average reading of the section of the 

profile trace within the bands. The profile trace can then be leveled according to 

the two average readings. See Setting Cursor Bandwidths: Section 4.4.2. 


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7.2.2 Reference/Measurement Cursors 

The R Cursor and M Cursor parameters allow you to enter the reference and measurement cursor 

locations in relation to the horizontal scale of the Data Plot window into a scan routine. Whenever 

the scan routine executes, the cursors automatically position at the programmed locations. 

Note: You MUST select Automatic Leveling for cursor positioning values to take 

effect (see Software Leveling: Section 7.2.1). 

If you know the desired cursor settings, you can numerically enter the settings directly into the scan 

routine in the Scan Routines window. 


Parameters. 

2. Enter the desired cursor location for the R and/or M Cursor (see Figure 7.2b). 

3. Click OK to enter the cursor positions into the scan routine. 

Figure 7.2b Display Parameters Dialog Box: Cursor Positioning 

If you do not know the desired cursor settings, you can enter cursor locations into the current scan 

routine from the Data Plot window. 

4. To set the cursor locations for leveling, run a sample scan of the feature to measure. 

5. Position the reference cursor at a location along the reference plane (such as the base of a 

step or the lip of an etched depth) once the scan is complete (for more information on cursor 

positioning see Reference/Measurement Cursors: Section 4.4). 

6. To level the trace accurately, position the measurement cursor some distance away from the 

reference cursor, but along the same horizontal plane (such as the base of the step or the lip 

of the etched depth). 

7. Once the cursors are properly positioned, select Edit > Enter Software Leveling from the 

menu bar to enter the new cursor locations into the scan routine. 


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7.2.3 Display Range 



Note: The software leveling function now occurs at the specified cursor locations 

whenever the current scan routine executes and software leveling has been 

selected. 

The Automatic Ranging feature automatically scales and ranges the profile trace to fill 80 percent 

of the data plot display. However, in some applications where repetitive or like scans are compared, 

you can preset the graphic scale by numeric entry. 



2. To select automatic ranging, click Automatic Ranging. To set the display range at a 

specified value, click Set Range Values to display two additional boxes for entering the 

upper and lower boundaries of the graphic scale (see Figure 7.2c). 

3. Enter the desired setting for the lower boundary in the first box and the upper boundary in the 

second box. Then click OK. 

7.2.4 Display Data Type 

Figure 7.2c Display Parameters Dialog Box: Display Range 

This parameter allows you to display the raw profile data, roughness and waviness profile (see 

Figure 7.2d). You can display the raw profile and roughness or waviness profiles individually or 

simultaneously, to easily correlate the profiles. 


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Data Processing 

Figure 7.2d Display Parameters Dialog Box: Display Data Type 

See Entering Data Type into a Scan Routine: Section 6.11 for a detailed description of the 

function and use of the Display Data Type parameter. 

7.3 Data Processing 

The Dektak program provides parameters for processing profile data for specific applications. In 

the Scan Routines window are two parameters listed under the heading Data Processing; they are 

Filter Cutoffs and Smoothing. These parameters, which you can enter at the Data Processing 

Parameters dialog box (see Figure 7.3a), allow you to activate filter cutoffs and smoothing filters. 

See Chapter 6 for more information regarding their use and function. 

7.3.1 Filter Cutoffs 

Figure 7.3a Data Processing Parameters Dialog Box: Filters and Smoothing 

You may enter roughness and waviness filter cutoffs from the Scan Routines window or the Data 

Plot window. This parameter allows you to enter selected cutoff values into the current scan 

routine. A short pass filter is available for calculating roughness analytical functions. A long pass 

filter is available for calculating waviness analytical functions. 


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7.3.2 Smoothing 

The smoothing parameter allows you to activate a smoothing filter. When you use the smoothing 

function, raw, roughness and waviness profiles are calculated using the smoothed data. Three 

degrees of smoothing are available. The higher the degree, the more smoothing will be realized. 

7.3.3 Step Detection Option 

The Dektak 8 provides optional features for Step Detection. See Appendix C for instructions 

regarding these features. 

7.4 Scan Routine Deskew Points 

See Establishing Scan Deskew Points: Section 5.7.2 for instructions on setting up scan routine 

deskew points.

Chapter 8 Menu and Toolbar Descriptions 

This chapter provides a brief description of the various menus and menu selections available in the 

Dektak 8 software which were not discussed in detail in previous chapters. Many menu-selection 

functions can be performed by selecting the associated icon for the function (see Toolbars and 

Icons: Section 8.14 for more information). 


• Startup Window: Section 8.1 

• File Menu: Section 8.2 

• Run Menu: Section 8.3 

• Profiler Menu: Section 8.4 

• Setup Menu: Section 8.5 

• Calibration Menu: Section 8.6 

• Window Menu: Section 8.7 

• Help Menu: Section 8.8 

• Automation Programs Window Menu Selections: Section 8.9 

• Scan Routines Window Menu Selections: Section 8.10 

• Sample Positioning Window Menu Selections: Section 8.11 

• Data Plot Window Menu Selections: Section 8.12 

• Auto Prog Summary Window Menu Selections: Section 8.13 

• Toolbars and Icons: Section 8.14 

The Dektak program uses Microsoft Windows XP as the operating system. Whenever you first 

access the Dektak program, or close all windows, the Dektak Startup window displays (see Figure 

8.1a). The menu bar and the toolbar below it continually display at the top of all Dektak windows, 

and the status bar displays at the bottom. Each Dektak window has its own specific menus and 

toolbars. All of the various menu items and toolbar icons are described in the following sections. 


Menu and Toolbar Descriptions 

Startup Window 

8.1 Startup Window 

Default 

Menu Bar 

Toolbar 

The Dektak user interface consists of a variety of windows. When no other window is active, the 

Startup window is displayed, containing a default menu bar, toolbar and status bar (see Figure 

8.1a). 

Default Menu Bar 

Figure 8.1a Startup Window 

Status 

Bar 015B 

Status 

Progress 

Notification 

Messages 

Current Stage 

Bar 

Icon 

Position 

The default menu bar (see Figure 8.1a) provides access to the different types of operations 

available. The various menus contained within the default menu bar in the Startup window come 

under the headings 

File, Run, Profiler, Setup, Calibration, Window and Help. 

A description of the contents of each menu, the keyboard shortcuts (if any) associated with the 

menu items, and instructions for accessing them are provided in the following sections of this 

chapter. 

Note: Menu items appear “grayed out” when the function is not currently available. 

For example, the menu item File > Print... is not available when there is 

nothing to be printed. 


Additional Menus 

Toolbar 


Startup Window 

Note: Combination keystrokes are indicated by “+”. For example, “Ctrl+N” means 

hold down the Ctrl key, press and release the N key, and then release the Ctrl 

key. 

Most of the other windows contain at least one additional menu, as described in the following 

sections. 

Each window contains a unique toolbar, consisting of a set of icons to perform various functions 

when clicked. You can open some menu items with icons located in specific toolbars. See Toolbars 

and Icons: Section 8.14, for a complete description of each toolbar. 

Status Bar 

A status bar is visible at all times, located at the bottom of the screen. The status bar contains 

window-specific status messages, a progress bar (when appropriate), a notification icon when 

Global Editing Mode is active, and the current position of the stage (see Figure 8.1a). 



File Menu 

8.2 File Menu 

The File menu allows you to open and save files, and print scan data and parameters. To access the 

File menu, select File from the menu bar (see Figure 8.2a). 

New... Ctrl+N 

Figure 8.2a File Menu 

The New command creates a new automation program with a single scan containing the default 

scan parameters. 

Open... Ctrl+O 

The Open command opens an automation program or other previously saved files. Select File > 

Open to display a list of available files. 

Save Ctrl+S 

The Save command by default saves any recent changes to the current automation program. 

However, if the Data Plot window is active, scan data is saved. Likewise, if the Automation 

Program Summary window is active, APS summary data is saved. 

Save As... 

The Save As command by default saves an automation program under a different file name. Select 

File > Save As to display a list of file names currently in use, and type a new file name to use. If the 

Data Plot window is active, scan data is saved under a different file name. Likewise, if the 



File Menu 

Automation Program Summary window is active, APS summary data is saved under a different 

file name. 

Export... Ctrl+E 

The Export command by default exports an automation program as an ASCII file with a .txt file 

extension. Select File > Export to display a list of .txt file names currently in use, and type a new 

file name to use. If the Data Plot window is active, scan data is exported under a different .txt file 

name. Likewise, if the Automation Program Summary window is active, APS summary data is 

exported under a different .txt file name. 

Print... Ctrl+P 

Select File > Print to print a form appropriate for the active window. (If there is no predefined form 

for the window, the print function acts as a print-screen command, printing the entire current active 

screen.) 

Explore Dektak Directory... Ctrl+Alt+E 

Opens Windows Explorer at the active directory (\Veeco\Dektak32 by default). 

Exit... Alt+F4 

Closes the Dektak application (after confirmation) 



Run Menu 

8.3 Run Menu 

This pull-down menu runs a scan routine or an automation program. To access the Run menu, 

select Run from the menu bar (see Figure 8.3a). 

Scan F4 

Figure 8.3a Run Menu 

Select Run > Scan to run the current scan at the stage position specified in the scan. 

Scan Here Ctrl+F4 

Select Run > Scan Here to run the current scan, but at the current stage position. 

Auto Program F5 

Select Run > Auto Program to run all of the scan routines in the current automation program, 

beginning with scan routine 1. 

Auto Program From Ctrl+F5 

Select Run > Auto Program From to run the current automation program beginning at the 

selected scan routine. 


Continue 

The Continue function has two purposes: 


Run Menu 

• Select Run > Continue to run the next scan in sequence of a multiple scan automation 

program, when the autoprogram function (Adjust Position Before Each Scan) has 

been activated. 

• Select Run > Continue to continue at the next scan in sequence of a multiple scan 

automation program, when the automation program was aborted during a scan. 

Note: If you abort operation while the gantry is moving or the stage is rotating (and 

the theta encoder option is not installed), then you cannot continue. You must 

reset the hardware. 



Profiler Menu 

8.4 Profiler Menu 

This pull-down menu is used for controlling profiler functions. To access the Profiler menu, select 

Profiler from the menu bar (see Figure 8.4a). 

Tower Up Ctrl+F3 

Figure 8.4a Profiler Menu 

Select Profiler > Tower Up to lift the stylus and raise the tower and optics up to the home position. 

Tower Down Ctrl+Shift+F3 

Select Profiler > Tower Down to lower the tower and optics down to the stylus null position, and 

then raise the stylus from the sample. 

Stylus Up Ctrl+F2 

Select Profiler > Stylus Up to lift the stylus off the sample surface without raising the tower. This 

allows the user to view the video image of the sample surface while positioning the stage, without 

contact between the stylus and sample. 

Stylus Down Ctrl+Shift+F2 

Select Profiler > Stylus Down to lower the stylus onto the sample surface unless the tower is 

already in the home position. The tower and stylus automatically raise a small amount off the 

sample surface whenever the sample stage repositions. 


Stage Control Panel Ctrl+T 


Profiler Menu 

Select Profiler > Stage Control Panel to display the Stage Control Panel at the right side of the 

Sample Positioning window. Select the menu entry again to hide the Stage Control Panel. 


Note: The Stage Control Panel menu item is available only when the Sample 

Positioning window is open. Otherwise, the item is grayed out as shown here. 

Select Profiler > Stage Leveling to open the Stage Leveling submenu, which offers the following 

two choices. 

Auto Level 

Manual Leveling... 

Select Auto Level to level the stage mechanically using a stepper motor. The cursors must be set 

appropriately in the Data Plot window after running a scan in order for the automatic leveling to be 

performed correctly. (See Optional Power Stage Leveling: Section 4.5.2 for more information.) 

Select Manual Leveling to display a dialog box containing arrows you can click for leveling the 

stage by raising or lowering the rear of the stage using the stepper motor. (See Optional Power 

Stage Leveling: Section 4.5.2 for more information.) 

Note: The Stage Leveling menu item is available only if the Power Leveling option is 

installed. (See Appendix A.) 

Reset Hardware Ctrl+Alt+R 

Select Profiler > Reset Hardware for a complete hardware reset (same as the software 

initialization sequence). 

Note: You must reset the hardware if you have aborted operation while the gantry is 

moving or the stage is rotating (and the theta encoder option is not installed). 



Setup Menu 

8.5 Setup Menu 

This pull-down menu is used for setting up the Dektak 8 (see Figure 8.5a). 

Configuration Settings... 

Figure 8.5a Setup Menu 

Select Setup > Configuration Settings to open the Configuration Settings dialog box, which 

contains five folders as described below. 

Appearance folder 

Note: Click OK after making your selections to close the dialog box. Click Apply 

instead of OK if you want to keep the dialog box open to select other folders. 

Figure 8.5b Appearance Folder 

• In the Vertical Display Units section, choose the units to be used when displaying 

vertical values. 

Note: You must close the Dektak application and restart it for any changes to take 

effect. 



Setup Menu 

• In the Dektak Visual Settings section, check the box if you want the three large side bar 

buttons to be displayed along the left side of the Sample Positioning and Data Plot 

windows. (See Side Bar Buttons: Section 1.12.9.) 

Working Directories folder 

Figure 8.5c Working Directories Folder 

This folder allows you to specify the default working directories for data, program, export and 3d 

Map files. Check the box if you want icons for the directories to appear in the various file dialog 

boxes (Open, Save, Save As, etc.). 



Setup Menu 

Diagnostics folder 

Figure 8.5d Diagnostics Folder 

• The Diagnostics folder is for engineering use only. 

Shortcuts folder 

Figure 8.5e Shortcuts Folder 

This folder allows you to assign the F11 and F12 keys to a selected analytical function. (See 

Keyboard Shortcuts: Section 3.1.4 for more information.) 


Illumination folder 

Figure 8.5f Illumination Folder 


Setup Menu 

This folder allows you to set the increment to be used when changing the sample illumination (see 

Stylus Reticle Alignment: Section 3.4.5). Enter a value between 1 and 255 for the Illumination 

Increment for the Low Mag Camera and for the High Mag Camera. The default value for each 

camera is 3. 



Setup Menu 

Leveling 

Figure 8.5g Leveling Folder 

This folder allows you to determine the mechanical direction of the stage movement when the 

Stage Leveling menu item is selected. 

Note: The Leveling folder is available only if the Power Leveling option is installed. 

(See Appendix A.) 


Theta Encoder 

Figure 8.5h Theta Encoder Folder 


Setup Menu 

This folder provides a box for the appropriate Conversion Factor for the installed encoder, and 

allows Reverse Polarity to be selected if required by the installed encoder. These settings are 

determined at the factory. 

Note: The Theta Encoder folder is available only if the Power-Theta and Theta- 

Encoder options are installed. (See Appendix A.) 



Calibration Menu 

8.6 Calibration Menu 

This pull-down menu is used for calibrating various operations of the system. 

Stylus Force... 

Figure 8.6a Calibration Menu 

This selection opens the Force Calibration dialog box. 

Figure 8.6b Force Calibration Dialog Box 




In this dialog box you can choose the measurement range in the Stylus LVDT section, and 

manually select the amount of force to be placed on the stylus to change the position of the stylus in 

the Force DAC section. 

To calibrate the stylus force, follow the instructions given in the three steps listed at the right side of 

the dialog box. 

Vertical 

Select Calibration > Vertical to open the vertical submenu, which offers the following two 

choices. 

Set... 

Clear... 

Select Set or Clear to display a dialog box for setting and clearing the vertical calibration of the 

Dektak 8. (See Vertical Calibration: Section 9.2 for detailed information.) 

COR of Stage... 

Select Calibration > COR of Stage to open the Calibration Wizard for the center of rotation 

(COR) of the stage. 

Note: There are two different Wizards for COR calibration, depending on whether or 

not the Power-Theta option is installed. 

Follow the step-by-step instructions presented in the Wizard to calibrate the center of rotation of the 

stage. (See Calibration Wizards: Section 9.7 for detailed information.) 

Theta 

Select Calibration > Theta to open the Calibration Wizard for the theta calibration. 

Note: This Wizard is available only if the Power-Theta option is installed. 

Follow the step-by-step instructions presented in the Wizard to auto calibrate the theta motor. (See 

Calibration Wizards: Section 9.7 for detailed information.) 




Gantry Range... 

Select Calibration > Gantry Range to open the Calibration Wizard for the gantry range 

calibration. Follow the step-by-step instructions to adjust the software limits of the gantry motion 

to be coincident with the hardware limit switches for the gantry. (See Calibration Wizards: 

Section 9.7 for detailed information.) 

Gantry Orthogonality... 

Select Calibration > Gantry Orthogonality to open the Calibration Wizard for the gantry 

orthogonality calibration. Follow the step-by-step instructions to use a sample containing known 

orthogonal lines to adjust the gantry orthogonality. (See Calibration Wizards: Section 9.7 for 

detailed information.) 

Stage Backlash... 

Select Calibration > Stage Backlash to open the Calibration Wizard for the backlash 

calibration. Follow the step-by-step instructions to enable the backlash algorithm. The algorithm is 

enabled when a value other than 0 is in the X and Y fields. Backlash values are in µm for the gantry 

axes, and in degrees for stage theta (if appropriate). A value of 1000 µm is optimal. Enter 0 to 

disable the algorithm. (See Calibration Wizards: Section 9.7.) 

When the stage automatically positions for scanning, if the anti-backlash algorithm is enabled the 

scan location is approached from the left. This eliminates repeatability errors due to backlash in the 

gears. 


8.7 Window Menu 

This pull-down menu provides access to the various Dektak windows (see Figure 8.7a). 

Automation Programs Ctrl+1 

Figure 8.7a Window Menu 


Window Menu 

Select Window > Automation Programs to make alterations to the automation programs. 

Scan Routines Ctrl+2 

Select Window > Scan Routines to edit the scan parameters. 

Sample Positioning Ctrl+3 

This selection enables a real-time video display allowing you to position the stylus accurately to the 

points of interest on a sample. 

Data Plot Ctrl+4 

You can access the Data Plot selection only after a scan routine has run and plotted, or if previously 

saved scan data has been loaded from a file. The data plot screen displays the scaled profile trace. 



Help Menu 

Auto Prog Summary Ctrl+5 

This selection allows you to access the Auto Program Summary. Once APS is enabled in the 

Automation Program window and the automation program has run, the data will display. 

Alternatively, you can load and display APS data that was previously saved in a file. 

Close All Windows Ctrl+6 

8.8 Help Menu 

Select Window > Close All Windows to return to the Dektak Startup window (see Figure 8.1a). 

Contents F1 

Figure 8.8a Help Menu 

Select Help > Contents to display the Help system, or the Dektak8-Help.pdf file. You can also 

open Help by pressing F1 on the keyboard. 

About... 

Select Help > About to view the Dektak version, a list of installed options, and system 

information. 


8.9 Automation Programs Window Menu Selections 


Automation Programs Window Menu Selections 

When the Automation Programs window is open, two additional menu selections are provided 

(see Figure 8.9a). These menus are briefly described below. A more detailed description of the use 

and functions of the menu items is provided in Editing an Automation Program: Section 5.3 and 

Deskew: Section 5.7. 

8.9.1 Edit Menu 

Figure 8.9a Automation Program Window: Edit Menu and Deskew Menu 

Insert Default Scan… Insert 

Inserts a default scan routine at the highlighted scan in the list, or at the specified scan index 

number. 

Delete Scan Delete 

Removes the highlighted scan from the list. 

Delete Scan Range Ctrl+Delete 

Removes scans from the list within a specified range 

Copy To… Ctrl+C 

Copies the highlighted scan to a specified location in the list. 



Automation Programs Window Menu Selections 

Copy To Range… Ctrl+A 

Copies the highlighted scan to each of a specified range of scan locations in the list. 

8.9.2 Deskew Menu 

Set Program Deskew Points… 

Establish deskew points on a reference sample for an automation program (see Establishing 

Program Deskew Points: Section 5.7.1). 

Clear Program Deskew Points 

Clear the deskew points from the automation program. 


8.10 Scan Routines Window Menu Selections 


Scan Routines Window Menu Selections 

When the Scan Routines window is open, two additional menu selections are provided (see Figure 

8.10a). These menus are briefly described below. A more detailed description of the use and 

functions of the menu items is provided in Analytical Functions: Section 5.5.4 and Establishing 

Scan Deskew Points: Section 5.7.2. 


Note: See Deskew Menu: Section 8.9.2 for a brief description of the Deskew menu. 

Figure 8.10a Scan Routines Window: Edit Menu and Deskew Menu 

Next Ctrl+> 

Makes the next scan in the automation program list the active scan. 

Previous Ctrl+< 

Makes the previous scan in the automation program list the active scan. 

GoTo... Ctrl+G 

Makes the specified scan in the automation program list the active scan. Type the scan number in 

the pop-up Go To dialog box and press the ENTER key. 

Append Analytical Functions… Insert 

Opens the Analytical Functions dialog box, where functions may be selected to be attached to the 

scan routines. 



Scan Routines Window Menu Selections 

Delete Analytical Functions… Delete 

Opens the Delete Analytical Functions dialog box, where one or more analytical functions may be 

deleted from the scan routines. 

Global Edit Mode Ctrl+B 

Toggles the Global Edit Mode on or off. When on, changes made to the current scan routine are 

also made in all the other scan routines within a multiscan automation program. 


Set Scan Deskew Points… 

Establish deskew points on a reference sample for the current scan routine (see Establishing Scan 

Deskew Points: Section 5.7.2). 

Clear Scan Deskew Points 

Clear the deskew points from the current scan routine. 


8.11 Sample Positioning Window Menu Selections 

8.11.1 Additional Menu Selections 


Sample Positioning Window Menu Selections 

When the Sample Positioning window is open, two additional menu selections are provided (see 

Figure 8.11a). The Edit menu is briefly described below. A more detailed description of the use and 

functions of the menu items is provided in Define Scan Location and Length: Section 5.4.1, 

Establishing Program Deskew Points: Section 5.7.1 and Establishing Scan Deskew Points: 

Section 5.7.2. 

Edit Menu 

Note: See Deskew Menu: Section 8.9.2 for a brief description of the Deskew menu. 

Figure 8.11a Sample Positioning Window: Edit Menu and Deskew Menu 

Define Scan Location... Ctrl+L 

Select Edit > Define Scan Location to open the Location for Routine #: m of n dialog box (see 

Figure 8.11b). The Current Location section shows the x and y coordinates of the current position 

of the stylus, as well as the rotatonal angle T of the stage (if the Power-Theta option is installed). 

Figure 8.11b Location for Routine #: m of n Dialog Box 

• If you want to change any of the values shown, type them into the appropriate fields and 

click the Enter button in this section to accept the changes. 




• To display scan location values for other routines, click the arrows in the Scan Browser 

section, or enter the number of the desired scan routine in the Go to field. Then click the 

Enter button in this section. 

• Click the close box in the upper right corner of the dialog box when you have finished. 

Define Scan Length... Ctrl+H 

Select Edit > Define Scan Length to specify the length of a scan, starting at the location defined in 

the Location for Routine #: m of n dialog box. Follow the instructions shown in the upper left 

corner of the camera view pane: “Roll track ball in X direction along scan line.Then click the left 

mouse button to define the scan length.” When you click the mouse button, the Length for 

Routine #: m of n dialog box opens (see Figure 8.11c). 

Figure 8.11c Define Scan Length Dialog Box 

• If you want to change the value shown, type it into the field in the Length section and 

click the Enter button in this section to accept the change. 

• To display scan length values for other routines, click the arrows in the Scan Browser 

section, or enter the number of the desired scan routine in the Go to field. Then click the 

Enter button in this section. 

• Click the close box in the upper right corner of the dialog box when you have finished. 

Go To Scan Routine... Ctrl+G 

Makes the specified scan in the automation program list the active scan. Type the scan number in 

the pop-up Go To dialog box and press the ENTER key. 



Set Program Deskew Points… 



Establish deskew points on a reference sample for an automation program (see Establishing 

Program Deskew Points: Section 5.7.1). 

Clear Program Deskew Points 

Clear the deskew points from the automation program. 

Set Scan Deskew Points… 

Establish deskew points on a reference sample for the current scan routine (see Establishing Scan 

Deskew Points: Section 5.7.2). 

Clear Scan Deskew Points 

Clear the deskew points from the current scan routine. 

8.11.3 Pop-Up Menu Selections 

When the Sample Positioning window is open, you can open a pop-up menu (see Figure 8.11d) by 

right-clicking the mouse in the camera view pane. Several of the menu items are the same as ones 

listed in the Edit, Run, Profiler and Deskew menus. The other menu items are described below. 




Save Video Image... 

Figure 8.11d Sample Positioning Window Pop-Up Menu 

The video image of the sample surface can be saved as an image file which can be exported into 

other programs or documents for later viewing. You can choose to save the video image as a jpeg 

file (.jpg extension), a bitmap file (.bmp extension), a tiff file (.tif extension) or a tga file (.tga 

extension). The procedure for saving the video image is described below. 

1. In the Sample Positioning window, adjust the focus and sample position until the desired 

video image of the sample surface is displayed on the screen. 

2. Right-click the mouse anywhere in the video/graphics display area. 

3. Click Save Video Image in the pop-up menu.. 

4. The Save Video Image dialog box displays, enabling the current video image to be saved in 

the format you select. Enter the desired file name and directory location and click OK. 


Video Overlay Settings... 



Select Video Overlay Settings to open the Video Settings dialog box. This dialog box allows you 

to adjust parameters on the video card. See Video Overlay Adjustment: Section 9.10.6. 

Video 

Select Video to open the video submenu, which offers the following three choices. 

Video Only 

Select Video > Video Only to project the video image of the sample surface from the Dektak 8 

camera on the monitor. 

Graphics Only 

Select Video > Graphics Only to display the graphic screen on the monitor without the video 

image. 

Video and Graphics 

Select Video > Video and Graphics to superimpose the graphic screen over the video image of the 

sample surface. 


Select Stylus Reticule to open the stylus reticule submenu, which offers the following two choices. 

Align... 

Select Stylus Reticule > Align to open the Stylus Alignment window, where you can align the 

targeting cursor to the stylus tip. Then double click the left mouse button to open a Confirmation 

dialog box, where you can choose whether or not to update the stylus reticule location, or cancel 

and close the window. (See Stylus Reticle Alignment: Section 3.4.5 for more information.) 

Reset... 

Select Stylus Reticule > Reset to open a Confirmation dialog box, where you can choose whether 

or not to reset the stylus reticule location to its default (centered) location. 




Update Alignment Reticule 

Select Update Alignment Reticule to align the feature reticule with surface features away from the 

stylus to more accurately position the stylus prior to scanning. (See Feature Reticle Alignment: 

Section 3.4.6 for more information.) 


8.12 Data Plot Window Menu Selections 


Data Plot Window Menu Selections 

When the Data Plot window is open, additional menu selections are provided (see Figure 8.12a). 

These menus are briefly described below. A more detailed description of the use and functions of 

the menu items is provided in Single Scan Operation: Section 4 and Analytical Functions: 

Section Chapter 6 of this manual. 


Figure 8.12a Data Plot Window: Edit, Plot and Analysis Menus 

Delete Results... Delete 

Deletes selected analytic results (if any). Select (highlight) the analytic result in the list at the left 

side of the Data Plot window, and then select Edit > Delete Results... In the pop-up Delete 

Analytical Results dialog box, choose one of the following: 

• Select Delete 1 Item(s) to remove the highlighted analytic result from the list. 

• Type a number in the field to remove that number of analytic results from the list, 

starting with the highlighted one. 

• Select Delete All to remove all analytic results from the list. 

Enter Software Leveling 

Select Edit > Enter Software Leveling to capture the current positions of the R and M cursors. 




8.12.2 Plot Menu 

Replot F6 

Re-plots the trace according to the boundaries settings. Also redisplays the original boundaries if 

no boundary box is being drawn on the plot. 

Level F7 

Levels the trace at the current R and M cursor intercepts. 

Zero F8 

Changes the zero position of the graph vertically to align with the intercept of the R cursor and the 

plot. 

Data Type... 

Opens the Plot Data Type dialog box (see Figure 8.12b), where you can choose Raw, Roughness 

and/or Waviness in the Scan section. See Data Type Selection: Section 6.10 for details. 

Note: The Step Detection and Stress sections in this dialog box are for use with the 

optional Step Detection and Stress Measurement software packages. See 

Appendix A (Options, Accessories and Replacement Parts) for the 

descriptions and part numbers of these options. The stress measurement option 

is described in Appendix B, and the step detection option is described in 

Appendix C. 


Clear Bands 

Figure 8.12b Plot Data Type Dialog Box 

Resets the bands to zero width at the R and M cursors. 

Default Bands 



Sets the width of the bands at the R and M cursors to the number of samples acquired in 1 second, 

according to the formula: 

Band Widths... 

300 * (scan length) / (number of data points) 

Opens the Set Bandwidths dialog box (see Figure 8.12c), where you can type in the widths of the 

bands at the R and at the M cursors. 




Boundaries 

Figure 8.12c Set Bandwidths Dialog Box 

Select Boundaries to open the boundaries submenu, which offers the following three choices: 

Save... 

Opens the Save Boundaries dialog box, where you can assign a number between 1 and 20 to the 

current boundary box. 

Restore... 

Opens the Restore Boundaries dialog box, where you can recall a saved boundary box by 

specifying the number that you previously assigned to it. 

Show 

Displays the boundary boxes on the plot, with their assigned numbers appearing in their upper left 

corners. 

8.12.3 Analysis Menu 

Analytical Functions… Insert 

Opens the Analytical Functions dialog box, where functions may be selected in real time to be 

attached to the current scan and computed. 

Note: Analytical functions are not appended to the scan routine. In order to do that, 

you would use the Append Analytical Functions… item in the Scan Routines 

window Edit Menu (see Scan Routines Window Menu Selections: Section 

8.10). 


Cutoff Filters... 



Select Analysis > Cutoff Filters to open the Roughness and Waviness Filters dialog box, where 

you can specify values for Long Pass and Short Pass Filter Cutoffs. Check the box if you want to 

apply a Band Pass Filter. 

Smoothing... 

Select Analysis > Smoothing to open the Smoothing dialog box, where you can specify the 

Smoothing degree and Smoothing band. 

Step Detection... 

Select Analysis > Step Detection to open the Step Detection dialog box, where you can specify 

various parameters for performing the step detection function. See Appendix C.1 for more 

information. 

Compute Stress... 

Note: The Step Detection option must be installed for this menu item to appear. 

Select Analysis > Compute Stress to open the Stress Parameters dialog box, where you can 

specify various parameters for characteristics of the substrate being measured for stress. See 

Appendix B.4 for more information. 

Stress Results... 

Note: The Stress Measurement option must be installed for this menu item to appear. 

Select Analysis > Stress Results to open the Stress Results dialog box, where you can view the 

maximum and average compressive and tensile stresses as calculated from the stress curve,. See 

Appendix B.4 for more information. 

Note: The Stress Measurement option must be installed, and stress computed, for this 

menu item to appear. 



Auto Prog Summary Window Menu Selections 

8.13 Auto Prog Summary Window Menu Selections 

When the Auto Prog Summary window is open, an additional menu selection is provided (see 

Figure 8.13a). This menu is briefly described below. A more detailed description of the use and 

functions of the menu items is provided in Automation Program Summary Window: Section 

5.6.3 of this manual. 


Include Ctrl+I 

Figure 8.13a Auto Prog Summary Window: Edit Menu 

Enables selected scan routine(s) to be used in the summary calculations. 

Exclude Ctrl+X 

Excludes selected scan routine(s) from being used in the summary calculations. 

Re-run Scans Ctrl+U 

Re-runs selected (highlighted) scan routines in the automation program. 


8.14 Toolbars and Icons 


Toolbars and Icons 

Each window includes a toolbar containing a series of icons allowing you to perform a variety of 

different functions with a click of a button. These icons and their respective functions are described 

in the sections below for each window. 

8.14.1 Customizing the Toolbars 

Note: Some similar icons have slightly different functions depending on the particular 

toolbar in which they appear. 

You can customize the toolbar in each window to include only those icons you want. To customize 

a toolbar, right-click anywhere in the toolbar ribbon to pop up the Toolbar menu (see Figure 8.14a). 

Figure 8.14a Toolbar Menu 

Select Customize... to open the Customize Toolbar dialog box (see Figure 8.14b). 

Figure 8.14b Customize Toolbar Dialog Box 

The dialog box shown in the figure is associated with the Startup window, but is typical of the 

dialog box you would obtain at any window. (The specific contents of the list boxes reflect the 

toolbar of the particular Dektak window that is displayed.) 

The Current toolbar buttons list box at the right shows the buttons (icons) currently on the toolbar 

for the window that is displayed. 




The Available toolbar buttons list box at the left contains buttons that are not on the toolbar, but 

are available for use. 

1. To add a button (or a separator) to the toolbar, select (highlight) the item in the Available 

toolbar buttons list box and double-click it, or click the Add -> button. Your selection will 

be moved to the Current toolbar buttons list box and placed beneath the currently 

highlighted item in the list. (The separator line always remains available for use.) 

2. To remove a button (or a separator line) from the toolbar, select the item in the Current 

toolbar buttons list box and double-click it, or click the

Save: Save currently active automation program. 

Export: Export currently active automation 

program. 

Automation Program Window: Switch to 

Automation Program Window. 

Scan Routines Window: Switch to Scan 

Routines Window. 

Sample Positioning Window: Switch to Sample 


Data Plot Window: Switch to Data Plot 

Window. 

Automation Program Summary Window: 

Switch to Automation Program Summary 

Window. 

8.14.3 Automation Programs Window Toolbar and Icons 

Figure 8.14d Automation Programs Window Toolbar 

Table 8.14b Automation Programs Window Toolbar Icon Descriptions 

Description Icon 

New: Create new automation program. 

Open: Open automation program file. 







Print: Print automation program parameters. 

Export: Export currently active automation 

program. 

Copy: Copy currently selected scan routine. 

Copy to Range: Copy currently selected scan 

routine to a range of scan routines. 

Delete: Delete currently selected scan routine. 

Delete Range: Delete range of scan routines. 

Run Scan Routine: Run currently active scan 

routine. 

Run Scan Routine Here: Run currently active 

scan routine at current stage location. 

Run Automation Program: Run automation 

program. 






Window. 



Window. 


8.14.4 Scan Routines Window Toolbar and Icons 

Figure 8.14e Scan Routines Window Toolbar 

Table 8.14c Scan Routines Window Toolbar Icon Descriptions 


Open: Open automation program file. 


Print: Print automation program parameters. 

Previous Scan: Select and display previous scan 

routine of a multiscan automation program. 

Next Scan: Select and display next scan routine 

of a multiscan automation program. 

Append Functions: Append analytical functions 

to current scan routine. 

Global Edit: Enables and disables global edit 

mode for scan routines. 


routine. 


program. 











Window. 



Window. 

8.14.5 Sample Positioning Window Toolbar and Icons 

Figure 8.14f Sample Positioning Window Toolbar 

Table 8.14d Sample Positioning Window Toolbar Icon Descriptions 

Description Icon 

Select High Mag Camera: Select the highmagnification 

camera. 

Select Low Mag Camera: Select the lowmagnification 

camera. 

Increase Illumination: Increases sample 

illumination. 

Decrease Illumination: Decreases sample 

illumination. 

Video Display: Display video only. 

Graphics Display: Display graphics only. 

Video and Graphics Display: Display both 

video and graphics. 


Tower Up: Lift the stylus, raise the tower and 

optics to the home position. 

Tower Down: Lower the tower and optics to the 

stylus null position. The stylus is then raised 

from the sample. 

Stylus Up: Lift the stylus off the sample surface, 

while the tower and camera remain in the null 

position. 

Stylus Down: Move the tower down to the null 

position. Lower the stylus. 


routine. 




program. 

Abort: Abort current operation. 

Stage Control Window: Display/Hide Stage 

Control Window. 






Window. 



Window. 






8.14.6 Data Plot Window Toolbar and Icons 

Figure 8.14g Data Plot Window Toolbar 

Table 8.14e Data Plot Window Toolbar Icon Descriptions 


Open: Open scan data file. 

Save: Save scan data. 

Export: Export scan data. 

Print: Print scan data and parameters. 

Display Analytical Functions: Display 

Analytical Functions Dialog Box. 

Level: Level the trace at the current R and M 

cursor intercepts. 

Replot: Performs the replot function on the scan 

trace. 

Toggle Data Plot Size: Toggle data plot size. 


routine. 


program. 


Abort: Abort current operation. 









Window. 

8.14.7 Automation Program Summary Window Toolbar and Icons 

Figure 8.14h Automation Program Summary Window Toolbar 

Table 8.14f Automation Program Summary Window Toolbar Icon Descriptions 


Open: Open automation program summary file. 

Save: Save automation program summary. 

Export: Export automation program summary. 

Print: Print automation program summary. 






Include Scans: Include the currently selected 

scans. 

Exclude Scans: Exclude selected scans. 

Rerun Scans: Rerun scans. 


routine. 




program. 








Window. 


Chapter 9 Calibration, Maintenance and 

Warranty 


• Care and Handling: Section 9.1 

• Vertical Calibration: Section 9.2 

• Calibrating the 65 kÅ Range: Section 9.3 



• Clearing the Vertical Calibration: Section 9.6 

• Calibration Wizards: Section 9.7 

• Cleaning the Optical Flat: Section 9.8 

• Stylus Replacement and Tip Cleaning: Section 9.9 

• Optics Adjustment: Section 9.10 

• Service Contracts: Section 9.11 

• Major Repairs: Section 9.12 

• Veeco Metrology Group Statement of Limited Warranty: Section 9.13 


Calibration, Maintenance and Warranty 

Care and Handling 

9.1 Care and Handling 

Like any precision instrument, the Dektak 8 requires care in handling and operation. Please adhere 

to the following recommendations: 

• Allow the Dektak 8 to warm up for approximately 15 minutes prior to use to stabilize 

the electronics. 

• Do not use leadscrew lubricants. The leadscrews are Teflon-coated and require no 

additional lubricant. 

• Always position the sample so that the stylus is the only part of the stylus arm that 

touches the sample. 

• Always keep the profiler door closed when the Dektak 8 is not in use. 

• Never connect or disconnect any cables when power is on. 

• Do not lower the stylus tower without the stage assembly in place. 

• Do not move a sample during a scan. 

• Avoid vibration and shock during measurements (such as, an operator or observer 

touching or bumping a surface close to the instrument or the instrument itself during a 

scan). 

• Always raise stylus tower and optics assembly into maximum vertical position when the 

system is not in use, even when power is left on. 

9.1.1 Preventative Maintenance 

Stage 

Contamination of the stage will cause scan performance to decrease. To avoid this, Veeco 

recommends cleaning the stage regularly depending on use. Clean the stage before scanning if 

visible contamination is present on the exposed reference block. Generally, use the following 

guidelines for cleaning the stage: 

• Heavy use: Clean weekly, more frequently if environmental contamination is present. 

• Minimum use: Clean quarterly. 

Also see Cleaning the Optical Flat: Section 9.8. 


Dektak 8 Exterior 


Care and Handling 

Clean the exposed surfaces of Dektak 8 using a soft cloth and isopropyl alcohol or deionized water. 

Clean the profiler at a minimum of every six months, in addition to cleaning the profiler whenever 

visible contamination is present. 

Teflon Pads 

CAUTION: Dispose of wipes in an appropriately labelled solventcontaminated 

waste container. 

ATTENTION: Jeter les compresses de nettoyage daus une poubelle 

correctement étiquettée pour les solvents. 

VORSICHT: Entsorgen Sie Alkohol-getränkte Tücher in einem dafür 

vorgesehenen Behälter für Lösungsmittel abfälle. 

Replace the Teflon pads of the scan follower every 3 years. Contact Veeco for service. 



Vertical Calibration 

9.2 Vertical Calibration 

Software calibrate the Dektak 8 regularly (at least once a month) to ensure vertical measurement 

accuracy. Use 50 kÅ and 100 kÅ calibration standards for this purpose. Additional calibration 

standards are also available to calibrate the instrument for a wide variety of applications. Stepheight 

calibration standards range in thickness from 200 to 100,000 angstroms. All calibration 

standards are traceable to the National Institute of Standards and Technology and include a 

certificate of calibration. 

Note: Setting the vertical calibration for the Extended Vertical Range option requires 

use of the 750 µm step height standard provided with the option (see Section 

9.5.4). 

9.2.1 Vertical Calibration Help Window 

The Dektak application provides user instructions for setting vertical calibration. You can display 

these instructions from any window. The procedure to display the Vertical Calibration Help 

dialog box is described below. 

1. Select Calibration > Vertical > Set at the menu bar to display the Vertical Calibration 

Help dialog box (see Figure 9.2a). 

Figure 9.2a Vertical Calibration Help Dialog Box 

2. As shown in the dialog box, you must first run a scan using a calibration standard and 

calculate the average step height function on the scan data. Detailed instructions for sample 

positioning and running a scan are provided in Chapter 3 and Chapter 4 of this manual. 

3. Then you enter the actual step height of the calibration standard. The software compares the 

measured with the actual values of the calibration standard’s step height, and automatically 

sets a calibration factor. 

Note: You will have the choice of using the same calibration values for all 

measurement ranges, or calibrating each range separately. The following 

procedures show how to calibrate each range separately. 


9.3 Calibrating the 65 kÅ Range 

1. Place a 50 kÅ calibration standard on the center of the stage. 


Calibrating the 65 kÅ Range 

2. Select Window > Sample Positioning to display the Sample Positioning window. 

3. Use Stage Tracking (see Stage Tracking: Section 3.3.1) to ensure the sample is positioned 

beneath the stylus. 



6. Position the stylus reticule to the left of the narrowest portion of the “dog bone” on the 

calibration standard, so that the vertical line of the stylus reticule is parallel with the length of 

the dog bone (see Figure 9.3a). 

“Dog Bone” 


Figure 9.3a Stylus Reticule Position 

9.3.1 Scanning the 50 kÅ Calibration Standard 

1. Select File > Open... from the menu bar, and then in the popup dialog box select the 

VERT_65K.mp program from the \Dektak32\Programs directory. Click Load. 

2. Select Run > Scan Here from the menu bar (or press CTRL+F4 on the keyboard) to run one 

scan. 

3. Observe the trace as displayed in the Data Plot window. 

a. If the trace rises or falls as it progresses across the plot, level the stage (see Stage 

Leveling: Section 4.5). 

b. If the step does not start at 500 µm, move the stage in the appropriate direction and run 

another scan (see Define Scan Location and Length: Section 4.2). Repeat until the 

step starts at 500 µm. 


225 

Wide Portion: 

y1,000 µm 


y 200 µm



4. The resulting plot should resemble Figure 9.3b below. 

9.3.2 Calculating Average Step Height 

Figure 9.3b 50 kÅ Calibration Standard Plot 

1. Select Run > Auto Program from the menu bar (or press the F5 key on the keyboard) to run 

the five scans in the VERT_65K.mp program. 

2. At the conclusion of the automation program, the Auto Prog Summary window opens to 

display the summary results for the measured ASH. The figures in the first column should 

resemble those shown in Figure 9.3c. 


220B

Figure 9.3c Summary Results in APS Window of VERT_65K.mp Program 

9.3.3 Setting the Vertical Calibration 



1. Select Calibration > Vertical > Set... from the menu bar to open the dialog box (see Figure 

9.3d). 

Figure 9.3d Setting Vertical Calibration Parameters - 65 kÅ Range 

2. In the Set Vertical Calibration dialog box, select Set For This Range Only in the Set 

Options section. 

3. Enter the Measured Step Height obtained from the measured mean value of the step height 

(ASH) as displayed in the Auto Program Summary window. 

4. Enter the Actual Step Height of the step height standard. Click OK to close the dialog box. 






6. Compare the measured ASH (as corrected by the software) with the actual ASH of the step 

height (see Figure 9.3e). If the measured value is within 1% of the actual value, then the 

calibration has been correctly set. 

Figure 9.3e Example Calibration Results Using a 50 kÅ Calibration Standard 





















scan. 









225 

Wide Portion: 

y1,000 µm 


y 200 µm









resemble those shown in Figure 9.4c. 


220E

Figure 9.4c Summary Results in APS Window of VERT_655K.mp Program 





9.4d). 

Figure 9.4d Setting Vertical Calibration Parameters - 655 kÅ Range 







220F






height (see Figure 9.4e). If the measured value is within 1% of the actual value, then the 


Figure 9.4e Example Calibration Results Using a 100 kÅ Calibration Standard 


Note: If you have just performed calibration for the 655 kÅ range, and you have not 

moved the calibration standard or the stage, you can skip ahead to Scanning 

the 100 kÅ Calibration Standard: Section 9.5.1. 











220G










scan. 









225 

Wide Portion: 

y1,000 µm 


y 200 µm









resemble those shown in Figure 9.4c for the 655 kÅ range. 



9.5c). 


220E

Figure 9.5c Setting Vertical Calibration Parameters - 2620 kÅ Range 











height (see Figure 9.5d). If the measured value is within 1% of the actual value, then the 


Figure 9.5d Example Calibration Results Using a 100 kÅ Calibration Standard 


220H 

220I



9.5.4 Vertical Calibration for the Extended Vertical Range Option 

To set the vertical calibration for the 1mm stylus (the Extended Vertical Range option), use the 

750 µm step height standard provided with the option (see Figure 9.5e). 

Figure 9.5e Calibrating the Extended Vertical Range Option 

Scanning on the 750 µm step height standard differs from the step height standards used in 

previous exercises. The measured step height (750 µm) is the height of the standard itself, not a 

step on the standard. Scan across the top of the standard and on to the chuck surface, calibrating to 

the step down (see Figure 9.5f). 

750 µm Step Height Standard 

Note: To scan the 750 µm standard, you must use the Valleys setting under Profile in 

the Scan Parameters dialog box (see Profile: Section 7.1.10). 

Figure 9.5f Scanning the 750 µm Step Height Standard 

0.75 

750 µm 030 

1mm Stylus Tip 


9.6 Clearing the Vertical Calibration 


Clearing the Vertical Calibration 

Whenever you set the vertical calibration, the old values are automatically cleared and replaced by 

the new parameters. However, in some cases, it may be desirable to clear individual ranges or all 

ranges. This procedure is described below. 

1. Select Calibrate > Vertical > Clear from the menu to display the Clear Vertical 

Calibration dialog box (see Figure 9.6a). 

Note: The dialog box permits you to clear the vertical calibration from the various 

display ranges either individually or from all the ranges. 

2. Select the range or ranges to be cleared and click Clear. 

3. Click OK to clear the vertical calibration from the selected range or ranges and close the 

dialog box. 

9.7 Calibration Wizards 

Figure 9.6a Clear Vertical Calibration Dialog Box 

Wizards are provided in the Dektak 8 application to expedite the calibration of various mechanisms 

in the profiler. To open the appropriate wizard, select Calibration from the main menu, and then 

choose the desired operation (see Figure 9.7a). 

Figure 9.7a Calibration Menu 

Calibration Wizards 

Note: Theta calibration is available only if the Power-Theta option is installed. 


223A


Calibration Wizards 

All of the wizards use the same format: 

• The opening dialog box displays the description of the calibration procedure to be 

presented, and lists the requirements, if any. 

• The succeeding dialog boxes present the steps to follow to perform the specific 

calibration procedure. 

• When you have finished the procedure, a Confirmation dialog box pops up to allow 

you to save the new parameters, discard them, or return to the wizard to make changes 

(see Figure 9.7b). 

Figure 9.7b Confirmation Dialog Box for Calibration Wizards 


9.8 Cleaning the Optical Flat 


Cleaning the Optical Flat 

Periodically clean the optical flat under the scan stage to ensure measurement repeatability and 

optimum performance. The required cleaning frequency depends on the cleanliness of the 

environment in which the Dektak 8 operates. You must remove the Dektak 8 scan stage in order to 

clean the optical flat. The procedure for removing the stage and cleaning the optical flat is 

described below. 

1. Verify the stylus and optics are positioned at their maximum vertical height and moved to the 

back of the profiler to provide additional clearance for removing the stage by selecting 

Profiler > Unload. 

2. Turn off the Dektak 8 profiler and computer. 

3. Remove the stylus (see Section 9.9.1 ). 

4. Remove the horizontal bezel around the stage covering the cables by removing the six screws 

connecting the cover to the profiler base. 

5. If Programmable Theta option is installed, disconnect the cable connected to the right side of 

the scan stage. 

6. Turn off the vacuum source and disconnect the vacuum line from the stage. 

7. Unscrew and remove the two bolts located on the left side of the stage that feed under the belt 

drive. 

8. Remove the stage by lifting it off the optical flat with two hands and set the stage upsidedown 

on a clean, level surface. 

9. Clean the stage Teflon pads and optical flat (sides and top) with lint-free, non-abrasive 

tissues moistened with deionized water or laboratory grade alcohol. 

Note: Always wipe new spots with a clean portion of the tissue to avoid transferring 

contamination to another area 

ATTENTION: Do not use other solvents, such as spectrograde acetone, as they 

may attack the adhesives used to mount the Teflon pads. 

10. Buff the optical flat and stage pads with a clean, dry lint-free wipe. 



Cleaning the Optical Flat 

Stage/Belt 

Bolts 

ATTENTION: Do not touch the Teflon pads or the surface block after cleaning. 

11. Inspect the Teflon pad surfaces to ensure that no debris or excess adhesive is embedded in 

the pads. 

12. Reinstall the stage assembly. See Installing the Stage Assembly: Section 2.3 for the 

procedure to reinstall the stage assembly. 

13. Replace the horizontal bezel covering the cables and replace the six screws holding the bezel 

in place. 

14. Install the stylus (see Section 9.9.1 ). 

15. Turn on the Dektak 8. 

Note: If the scan stage does not home during initialization, you may not have 

reinstalled the scan stage in the correct location. 

Figure 9.8a Stage Removal 

Optical Flat Belt Drive 


8086 

Stage Cable 

Connector

9.9 Stylus Replacement and Tip Cleaning 

9.9.1 Replacing the Stylus 


Stylus Replacement and Tip Cleaning 

All Dektak 8 styli have the same shank size but differ in the radius of the diamond tip (see Figure 

9.9a). The procedure to remove and/or replace a stylus is described below. 

Figure 9.9a Stylus Assembly 

Note: The stylus suspension system is delicate. Use the stylus replacement fixture 

when removing or installing a stylus. 

1. Select Profiler > Tower Up to raise the stylus and optics tower to the maximum vertical 

position. 

2. Remove the stylus air shield using a small slot screwdriver to gently pry the sensor air shield 

down and away from the stylus head (see Figure 9.9b). Do NOT touch the stylus. 


022



Figure 9.9b Removing Sensor Shield 

3. Remove the stylus using the stylus replacement fixture. 

Figure 9.9c Stylus Replacement Fixture 

Stylus Head 

Sensor Shield 

Note: The quick release stylus mechanism enables fast and easy stylus replacement. 

a. Verify the fixture is in the disengaged position (the magnet wheel is rotated so a notch is 

visible). See Figure 9.9d. 


023 

(pry here)

Magnet 

Wheel, 

Notch 

Visible 

Magnet Disengaged 

(Stylus Released) 

Figure 9.9d Stylus Replacement Fixture 

183 

Alignment 

Pins 

Stylus 

Channel 

Magnet 

Wheel, 

Green Dot 

Visible 

b. Place the stylus replacement fixture underneath the scan head. 



c. Align the pins of the stylus replacement fixture with the stylus sensor housing 

(see Figure 9.9e). 

Figure 9.9e Align Stylus Replacement Fixture 

d. Push the stylus replacement fixture up until the bottom of the scan head is against the 

top of the stylus replacement fixture (see Figure 9.9f). Be sure the stylus is seated in the 

channel on the fixture. If necessary, gently tap the end of the stylus shaft (NOT the tip) 

with your finger to align the shaft with the channel. 

Figure 9.9f Scan Head flush with Fixture 

Magnet Engaged 

(Stylus Captured) 


186 

187 

184



Note: If the stylus is not properly seated in the channel, it will tend to rotate when you 

remove it. 

e. Rotate the magnet wheel to engage the magnet in the stylus replacement fixture. 

f. Carefully lower the stylus replacement fixture. 

The stylus is held in place magnetically (see Figure 9.9g). 

Figure 9.9g Fixture with Captured Stylus 

4. To remove the stylus from the stylus replacement fixture, disengage the magnet (rotate the 

wheel in either direction so a notch is visible) and gently lift the stylus out of the fixture. 

To install the stylus: 

Stylus 

5. Replace the stylus with a new one if necessary. 

6. Place the stylus in the stylus replacement fixture and rotate the magnet wheel back to the 

engaged position. 

7. Raise the stylus replacement fixture until it is once again in place under the scan head. 

8. Rotate the magnet wheel to the disengaged position. 

9. Carefully lower the stylus replacement fixture. 

10. Replace the sensor shield, being very careful not to touch the stylus tip. 

11. Align the stylus reticle position with the video image of the stylus tip. 

Note: See below for instructions for adjusting the video image of the stylus tip. 


188

9.9.2 Cleaning the Stylus 



A stylus may need to be cleaned periodically to remove any dust particles from the tip. Use the 

following procedure to clean the stylus tip. 

1. Select Stylus > Tower Up to raise the tower to the maximum vertical position. 

2. Remove any samples from the stage. 

3. Clean the tip using a lint-free swab moistened with deionized water or laboratory grade 

alcohol. Lightly touch the tip with the lint-free swab to remove dust. You may also use a 

small soft-bristle paintbrush. 

CAUTION: Dispose of wipes in an appropriately labelled solventcontaminated 

waste container. 

ATTENTION: Jeter les compresses de nettoyage daus une poubelle 

correctement étiquettée pour les solvents. 

VORSICHT: Entsorgen Sie Alkohol-getränkte Tücher in einem dafür 

vorgesehenen Behälter für Lösungsmittel abfälle. 



Optics Adjustment 

9.10 Optics Adjustment 

After replacing a stylus, you may need to adjust the optics to align the video image so that the 

stylus tip appears in the center of the screen. Alignment and focus of the Dektak 8 optics must be 

performed in the sequence outlined here. If a specific adjustment is acceptable as is, skip to the next 

instruction. 

Note: If the optical setup is substantially out of range, multiple iterations of this 

procedure may be required to optimize all adjustments. 

The following topics are included section: 

• Low Mag Camera Alignment: Section 9.10.1 

• Low Mag Camera Focus and Alignment: Section 9.10.2 

• High Mag Camera Alignment: Section 9.10.3 

• High Mag Camera Rotation: Section 9.10.4 

• High Mag Camera Focus: Section 9.10.5 

• Video Overlay Adjustment: Section 9.10.6 


9.10.1 Low Mag Camera Alignment 



1. Select Window > Sample Positioning and select the LOW MAG CAMERA button. 

2. Ensure the reticle is set to the default position in the center of the screen. In the Low Mag 

Camera view, align the end of the stylus tip with the red stylus reticle. 

3. Loosen (but Do Not Remove) the two LIS3 sensor fasteners (see Figure 9.10a). 

LIS3 Sensor Fasteners 

LIS3 Sensor 

Housing 

Figure 9.10a LIS3 Sensor 

4. While carefully avoiding the stylus tip and sensor wiring, grasp the sides of the sensor 

housing and adjust the position while aligning the tip of the stylus with the reticle. 

5. Retighten the two screws while restraining the housing by hand. 

Note: Low Mag Camera focus may also affect the alignment of the stylus in the Low 

Mag Camera view. If the desired stylus alignment cannot be achieved, proceed 

to the next step. 


817S



9.10.2 Low Mag Camera Focus and Alignment 

Vertical 

Slide 

Knob 

1. Adjust the knurled vertical-slide knob to the center of its travel (see Figure 9.10b). 

2. Loosen the Low Mag focus and alignment setscrews. by turning each counter-clockwise 

once. Do not remove the screws. 

3. Raise or lower the Low Mag Camera to achieve best focus and alignment when the stylus 

touches the sample. 

4. Tighten the focus and alignment setscrews. 

Figure 9.10b Low Mag Camera Focus and Alignment 

Low Mag 

Camera 

Low Mag Focus 

and Alignment 

Screws 

(High Mag 

Camera) 


815S

9.10.3 High Mag Camera Alignment 

Select the HIGH MAG CAMERA button. 



In the High Mag Camera view, align the tip of the stylus with the red stylus reticle using the 

position adjustment screws on the fold mirror as described below (see Figure 9.10c). 

High Mag 

Camera 

Vertical 

Adjustment 

Screw 

Vertical and 

Horizontal 

Adjustment 

Screw 

Figure 9.10c High Mag Camera and Fold Mirror 

1. Use the adjustment screw at the upper left side of the fold mirror for vertical adjustment. 

2. Use the adjustment screw at the lower right side of the fold mirror for horizontal adjustment. 

It is advised to align the stylus by turning the appropriate setscrew counter-clockwise. If the desired 

position is not obtainable, turn the lower left adjustment screw very slightly clockwise. (This 

setscrew affects both vertical and horizontal positioning.) 

Note: Turning the lower left adjustment screw excessively clockwise can damage the 

mirror. 


816S 

High Mag Camera 

Rotational 

Adjustment Screw 

Fold Mirror 

Horizontal 

Adjustment 

Screw



9.10.4 High Mag Camera Rotation 

1. Loosen the High Mag Camera rotational alignment screw (see Figure 9.10c). 

2. Rotate the High Mag Camera housing to orient the image to the camera view pane. 

3. Tighten the High Mag Camera rotational alignment screw. Do not overtighten. 

9.10.5 High Mag Camera Focus 

1. Loosen the High Mag Lens locking setscrew (see Figure 9.10d). 

2. Carefully rotate the lens to achieve proper focus when the stylus touches the sample. 

3. Tighten the locking setscrew when finished. 

High Mag 

Lens 

Figure 9.10d High Mag Focus 

(Fold Mirror) 

High Mag Lens 

Locking Screw 


HighMagLens

9.10.6 Video Overlay Adjustment 



You can also change parameters on the video card to improve the optics. Alter the digital 

processing parameters in the Video Setup dialog box. Use the following procedure to access this 

box: 

1. Select Setup > Video Overlay Settings from the menu bar to open the Video Setup dialog 

box (see Figure 9.10e). This dialog box allows you to adjust parameters on the video card. 

Figure 9.10e Video Setup Dialog Box 

Note: Do NOT alter any parameters in the Standard and Input Type sections of the 

Video Setup dialog box. 

2. Change the parameters in the Adjustments section you wish to alter, and click OK to return 

to the Dektak application software. 

Rev. G Dektak 8 Manual 247/(Next Page is Blank) 

157A 

Adjustments Section 

Standard Section 

(Do not alter) 

Input Type Section 

(Do not alter)

9.11 Service Contracts 

To maximize equipment operation and avoid major repairs, Veeco offers customized service 

contracts to meet customer needs and to extend the one-year factory warranty. Service contracts 

include routine maintenance to keep the equipment up to factory specification. 

For more information on service contracts, contact your local Veeco Service Center. 

9.12 Major Repairs 

The Dektak 8 cannot be readily repaired after major component failures without the assistance of 

specialized test equipment and software routines. In the event of equipment failure, please call the 

Veeco Service Center nearest you for assistance. 

Before calling the Veeco Service Center, do the following: 

1. Restart the Dektak 8 by closing the Windows application, turn off the system, then turning 

the power back on. 

2. Verify all cables are properly connected and free of obvious damage. 

3. Verify all power cords are connected properly. 

4. Verify the sample illumination is properly adjusted. 

5. Verify the stylus tower moves up and down when you activate the Tower Up and Tower 

Down functions. 

Note: All parts of the Dektak 8 must be serviced by the manufacturer or designated 

representative.


Major Repairs 

WARNING: Never open the profiler, E-Box, computer console or video 

monitor when connected to the primary power source. Major 

service should only be performed by qualified, factory-trained, 

Veeco service personnel. 

AVERTISSEMENT: Ne jamais ouvrir l’ordinateur ou l’écran video lorsqu’ils sont 

branchés sur une source de courant. Toute intervention majeure 

devrait seulement être réalisée par du personnel qualifié et formé 

par Veeco. 

WARNUNG: Computerkonsole und Videomonitor dürfen unter keinen 

Umständen geöffnet werden, während sie an die 

Spannungsversorgung angeschlossen sind. Größere 

Wartungsarbeiten sollten nur von qualifiziertem, und durch Veeco 

ausgebildetes Personal durchgeführt werden. 



Veeco Metrology Group Statement of Limited Warranty 

9.13 Veeco Metrology Group Statement of Limited Warranty 

This product is covered by the terms of the Veeco standard warranty as in effect on the date of 

shipment and as reflected on Veeco's Order Acknowledgement and Quote. While a summary of the 

warranty statement is provided below, please refer to the Order Acknowledgement or Quote for a 

complete statement of the applicable warranty provisions. In addition, a copy of these warranty 

terms may be obtained by contacting Veeco. 

WARRANTY. Seller warrants to the original Buyer that new equipment will be free of defects in 

material and workmanship for a period of one year commencing (x) on final acceptance or (y) 90 

days from shipping, whichever occurs first. This warranty covers the cost of parts and labor 

(including, where applicable, field service labor and travel required to restore the equipment to 

normal operation). 

Seller warrants to the original Buyer that replacement parts will be new or of equal functional 

quality and warranted for the remaining portion of the original warranty or 90 days, whichever is 

longer. 

Seller warrants to the original Buyer that software will perform in substantial compliance with the 

written materials accompanying the software. Seller does not warrant uninterrupted or error-free 

operation. 

Seller's obligation under these warranties is limited to repairing or replacing at Seller's option 

defective non-expendable parts or software. These services will be performed, at Seller's option, at 

either Seller's facility or Buyer's business location. For repairs performed at Seller's facility, Buyer 

must contact Seller in advance for authorization to return equipment and must follow Seller's 

shipping instructions. Freight charges and shipments to Seller are Buyer's responsibility. Seller will 

return the equipment to Buyer at Seller's expense. All parts used in making warranty repairs will be 

new or of equal functional quality. 

The warranty obligation of Seller shall not extend to defects that do not impair service or to provide 

warranty service beyond normal business hours, Monday through Friday (excluding Seller 

holidays). No claim will be allowed for any defect unless Seller shall have received notice of the 

defect within thirty days following its discovery by Buyer. Also, no claim will be allowed for 

equipment damaged in shipment sold under standard terms of F.O.B. factory. Within thirty days of 

Buyer's receipt of equipment, Seller must receive notice of any defect which Buyer could have 

discovered by prompt inspection. Products shall be considered accepted 30 days following (a) 

installation, if Seller performs installation, or (b) shipment; unless written notice of rejection is 

provided to Seller within such 30-day period. 

Expendable items, including, but not limited to, styli, lamps, pilot lights, filaments, fuses, 

mechanical pump belts, V-belts, wafer transport belts, pump fluids, O-rings and seals ARE 

SPECIFICALLY EXCLUDED FROM THE FOREGOING WARRANTIES AND ARE NOT 

WARRANTED. All used equipment is sold 'AS IS, WHERE IS,' WITHOUT ANY WARRANTY, 

EXPRESS OR IMPLIED. 

Seller assumes no liability under the above warranties for equipment or system failures resulting 

from (1) abuse, misuse, modification or mishandling; (2) damage due to forces external to the 

machine including, but not limited to, acts of God, flooding, power surges, power failures, 

defective electrical work, transportation, foreign equipment/attachments or Buyer-supplied 



Veeco Metrology Group Statement of Limited Warranty 

replacement parts or utilities or services such as gas; (3) improper operation or maintenance or (4) 

failure to perform preventive maintenance in accordance with Seller's recommendations (including 

keeping an accurate log of preventive maintenance). In addition, this warranty does not apply if any 

equipment or part has been modified without the written permission of Seller or if any Seller serial 

number has been removed or defaced. 

No one is authorized to extend or alter these warranties on Seller's behalf without the written 

authorization of Seller. 

NO CONSEQUENTIAL DAMAGES. LIMITATION OF LIABILITY. Seller shall not be 

liable for consequential damages, for anticipated or lost profits, incidental, indirect, special or 

punitive damages, loss of time, loss of use, or other losses, even if advised of the possibility of such 

damages, incurred by Buyer or any third party in connection with the equipment or services 

provided by Seller. In no event will Seller's liability in connection with the equipment or services 

provided by Seller exceed the amounts paid to Seller by Buyer hereunder. 

Buyer is advised that, if the equipment is used in a manner not specified by the manufacturer, the 

protection provided by the equipment may be impaired. 

Claims for Shipment Damage 

Service 

THE ABOVE WARRANTIES ARE EXPRESSLY IN LIEU OF ANY OTHER 

EXPRESS OR IMPLIED WARRANTIES (INCLUDING THE WARRANTY OF 

MERCHANTABILITY), AND OF ANY OTHER OBLIGATION ON THE PART 

OF SELLER. SELLER DOES NOT WARRANT THAT ANY EQUIPMENT OR 

SYSTEM CAN BE USED FOR ANY PARTICULAR PURPOSE OR WITH ANY 

PARTICULAR PROCESS OTHER THAN THAT COVERED BY THE 

APPLICABLE PUBLISHED SPECIFICATIONS. 

No claim will be allowed for equipment damaged in shipment sold under standard terms of F.O.B. 

Factory. Within thirty days of purchaser’s receipt of equipment, Veeco must receive notice of any 

defect which purchaser could have discovered by prompt inspection of equipment. In any event, 

Veeco shall have the option of inspection at purchaser's premises or at Veeco’s plant before 

allowing or rejecting the claim. 

Field service is available worldwide. Service and installations are performed by factory-trained 

Veeco service personnel. Contact your local Veeco sales/service office for prompt service. 


Appendix A Options, Accessories and 

Replacement Parts 

100 mm Scan 

Capability 

Table A.1a Options 

Item Description Part No. 

Provides the ability to perform scans up to 

100 mm in length. 

994-000-001 

Chuck Porous Vacuum Chuck 838-071 

Vibration Isolation 

Table 

Programmable Theta 

and Stage Leveling 

with Chuck Vacuum 

High Precision Theta 

Stage with Universal 

Chuck 

Stress Measurement 

Software 

Vision 3D Image and 

Analysis Software 

Extended Vertical 

Range 

N-Lite Low Inertia 

Sensor 3 Options 

200-mm Scan 

Capability 

Isolates external vibration. 994-000-003 

Enables theta locations to be programmed 

into automation programs as well as automatic/motorized 

leveling of sample stage. 

Closed-servo-loop theta positioning system 

with high precision accuracy for automation. 

Calculates tensile or compressive stress 

on processed wafers. Includes special fixturing 

for three-point suspension of wafer. 

3-D Mapping and image rendering 

software. 

Adds a fourth measurement range of 1 

mm to existing Sensor head. 

Enables stylus forces to be adjusted down 

to 0.03 mg force for measuring very soft 

films, or when using a very sharp, sub-µm 

stylus for measuring sub-µm lines and 

trenches. 

Provides scan capability of 200 mm in 

length. 

994-000-004 

838-052 

994-000-005 

994-000-006 

994-000-007 

994-000-008 

775-254 


Options, Accessories and Replacement Parts 

Table A.1b Accessories 


Low Inertia Sensor 3 

Styli 

Individual Calibration 

Standards 

Calibration Standards 

Set 

Color Code Size 

Orange Assy, Stylus, 5 µm 838-031-1 

Green Assy, Stylus, 0.7 µm R x 45° 838-030-3 

Gray Assy, Stylus, 2.5 µm R 838-031-2 

Yellow Assy, Stylus, 0.2 µm 838-030-5 

Red Assy, Stylus, 12.5 µm 838-031-3 

Black Assy, Stylus, 25 µm 838-031-4 

Gold Assy, Stylus,50 nm Sharp 

Tip (30°)--for N-Lite only 

Assy, Stylus, Hi Aspect 

Ratio, 2 x 10 (2w x 10d) 

Assy, Stylus, Hi Aspect 

Ratio, 20 x 200 (20w x 

200d) 

838-030-8 

838-030-2-1 

838-030-10 

Nominal 200 Å measurement 138365 

Nominal 500 Å measurement 138366 

Nominal 1 kÅ measurement 138367 





Five Calibration Standards. 

Certified nominal 200 Å and 500 Å, and NBS 

traceable nominal 1 kÅ, 5 kÅ, and 50 kÅ measurements. 

May be used with all Stylus Profilers. 

Includes a Certificate of Calibration and 

Cleanroom Compatible Case. 

Note: Factory Recertification of Calibration Standard(s) available. 

Advanced Training On-Site advanced system installation, operation 

and application training for one day (maximum 

8 hours), maximum 3 people. USA only. 

138375 

800571 

Clean Room Manual Operator manual printed on clean room paper. 004-800-100 


Environmental 

Enclosure 

Table A.1c Replacement Parts 


Conductive translucent enclosure protects 

sample and scan area from the adverse 

affects of dust, acoustic noise and air flow. 

Options, Accessories and Replacement Parts 

838-035 

Rev. G Dektak 8 Manual 255/(Next Page is Blank)

Appendix B Stress Measurement Option 

This appendix includes the following topics: 

• Description of Stress: Section B.1 

• Identifying Substrate Characteristics: Section B.2 

• Entering Stress Parameters: Section B.3 

• Stress Results: Section B.4 

Note: Stress Measurement is an optional feature that must be installed in the Dektak 

program prior to use. 


Stress Measurement Option 

Description of Stress 

B.1 Description of Stress 

The stress algorithm creates a curve comprising stress values for every data point on the scan trace. 

If a pre-stress (pre-deposition) scan data file is saved, the calculation proceeds (on all the scan data 

points) as follows: 

1. A running average with a window size of 1/10 the scan length loads and smooths the prestress 

scan data. 

2. The smoothed data is further smoothed using a segmented third order polynomial 

interpolation technique. 

3. The first and second derivatives of the smoothed data trace derives the curvature trace. 

4. Steps 1-3 are also applied to the post-stress scan data producing a curvature trace for the 

post-stress scan data. 

5. The stress curve computes from the comparison of the two curvature traces. 

6. The maximum and average compressive and tensile stresses are calculated from the stress 

curve, and displayed in the Stress Results dialog box (see Figure B.1a). 

Figure B.1a Stress Results Dialog Box (Example) 

Note: Only those values of the stress curve between the cursors are considered. 

Three-Point Substrate Suspension 

To compensate for substrate deflection created by gravity or by a vacuum hold stage, the stress 

option kit provides three-point substrate suspension. Three 0.25" diameter steel ball bearings 

suspend the substrate above the stage surface. These ball bearings insert into the holes on top of the 

stage. A magnet is also provided for removing the ball bearings from the stage. If necessary, raise 

the alignment pins on the stage by turning them clockwise. 


237A

Stress Reference 


Description of Stress 

Prior to calculating stress, you must establish a reference. You can calculate stress using a straight 

line as the reference, or by producing a preliminary reference scan on the sample prior to 

processing. In order to accurately measure stress accurately, the reference scan and the scan 

produced after thin film deposition must have identical scan parameters, including cursor locations 

(stress computes the data between the reference and measurement cursors). For this reason, save the 

scan parameters used to produce the original reference scan in an automation program file to use 

after deposition. 

Once you produce the reference scan, save the scan in a data file. The data file is then used as the 

reference for comparison and stress calculation. 



Identifying Substrate Characteristics 

B.2 Identifying Substrate Characteristics 

Collecting Stress Statistics: 

1. Position the R and M cursors to surround the portion of the scan trace over which to collect 

stress statistics. 

2. If a reference scan is used to compute stress, use the exact scan parameters for the reference 

scan to produce the scan on the substrate after deposition. Whether you use the default 

straight line reference or a reference scan to calculate stress, scan the substrate after thin film 

deposition. 

Note: The scan will automatically plot. 

3. Once you complete the scan on the substrate after deposition, enter the characteristics of the 

substrate being measured for stress into the stress calculation: 

a. Select Analysis > Compute Stress to display the Stress Parameters dialog box (see 

Figure B.2a). 

Note: The Thin Film Substrate box of the Stress Parameters dialog box displays 

the material, orientation, and elasticity of the thin film substrate. Several 

options are stored in memory to compute stress in a variety of applications. 

Figure B.2a Stress Parameters Dialog Box 

4. Click Select... in the Thin Film Substrate section to view the pre-programmed thin film 

substrate elasticity constants (see Figure B.2b). 


213A

Figure B.2b Elasticity Constants Dialog Box 

5. Select the thin film substrate to be measured for stress and click OK. 


Identifying Substrate Characteristics 

Rev. G Dektak 8 Manual 261/(Next Page is Blank) 

212A

B.3 Entering Stress Parameters 

Once you identify the substrate material and orientation, you can enter other stress parameters in 

the Stress Parameters dialog box (see Figure B.2a). 

1. Verify the correct value displays in the Elasticity field. If the elasticity of the substrate is 

different than the value displayed, click the field and enter the correct value. 

2. Click the Substrate thickness field and enter that value in µm. 

3. Click the Film thickness field and enter that value in µm. 

4. Click OK if the stress is to be measured against the default straight line reference to display 

the stress result. 

5. Click Select... in the PreDeposition Data File section if the stress is to be measured against 

a reference scan produced earlier and saved in a data file. The Specify a File dialog box 

opens. 

6. Browse the data folder and choose the appropriate file. Click Load to close the Specify a 

File dialog box. 

7. Click OK to close the Stress Parameters dialog box and open the Stress Results dialog box 

(see Stress Results: Section B.4).

B.4 Stress Results 


Stress Results 

The statistical results display in the Stress Results dialog box (see Figure B.4a). You can view 

these results at any time after stress has been computed by selecting Analysis > Stress Results 

from the Data Plot window. 

Figure B.4a Stress Results Dialog Box 

You can obtain a printout of stress results by either selecting the Print button from the Stress 

Results dialog box or as part of the Scan Data Summary printout. 

Upon completion of the stress computation, you can display the stress data traces on the scan data 

plot. Select Plot > Data Type... from the menu bar or right-click on the plot and select Data Type... 

to open the Plot Data Type dialog box (see Figure B.4b). 

Figure B.4b Plot Data Type Dialog Box: Stress Plots 

Note: Whenever a stress computation is performed, the vertical scale of the plot 

changes from angstroms to dynes/cm2 . 

You can select the following types of stress plots from the dialog box: 


237B 

237A


Stress Results 

Curve Fit 

Curve fit plots in cyan. 

PreDeposition 

Pre-deposition data curve plots in blue. 

PostDeposition 

Note: This choice is available only if a pre-deposition data file was loaded. 

Post-deposition data curve plots in green. 

Film Stress Curve 

Film stress curve plots in orange. 

Note: This choice is relevant only if a pre-deposition data file was loaded. 

B.4.1 Constraints and Limitations 

1. You must hardware level the stage and verify that the stage is in the same leveled position 

before running both the pre- and post-stress scans. 

2. Both pre- and post-stress scans must have the same number of data points. Do not abort 

either scan before completion. 

3. The algorithm performs best on flat wafers. Surface features can throw off the curve-fitting 

algorithm and produce invalid maximum stress values. 


Appendix C Step Detection Software Option 


• Step Detection Parameters: Section C.1 

• Every Step Page: Section C.1.1 

• First Step Page: Section C.1.2 

• Step Detection Setup: Section C.2 

• Performing Step Detection on a Single Scan: Section C.2.1 

• Programming Step Detection in a Scan Routine: Section C.2.2 

• Programming Step Detection on Multiple Scans: Section C.2.3 

The Dektak 6M Step Detection software enables the automatic computation of analytic functions 

on scanned features using a two step process. First, the Step Detection algorithm locates the leading 

and trailing edge of each scanned feature. Dektak reference and measurement cursors then 

automatically position at a relative distance from each detected edge, where chosen analytic 

functions (for example, Average Step Height, Slope, Peak,Valley, Peak to Valley, and so on) 

compute. The Step Finder is a filter that accentuates the edges of a scanned feature where a high 

variation (high frequency) between data points exist. 

Note: Verify that Step Detection is installed in the Dektak program prior to use. 


Step Detection Software Option 

How Does it Work? 

A least-squares fit algorithm determines the location of feature edges. The following variables are 

used by the least-squares fit algorithm to determine the fitting criteria of a line to scanned data 

points. 

Detection Method 

• First Step: Positions the R and M cursors for selected analytical functions relative to the 

beginning of the first step that matches the Step Description parameters. If a matching 

step is found, the ASH of the left edge and the right edge are the first two entries in the 

Analytic Results area. 

• Every Step: Positions the R and M cursors for selected analytical functions relative to 

every step that matches the Step Description parameters. 

Feature edges are determined by the relative change in slope of each line segment and the 

proximity (minimum width) from other line segments. The operational procedure for step detection 

is described in the following pages. 


C.1 Step Detection Parameters 


Step Detection Parameters 

The Step Detection dialog box displays all the necessary parameters for performing the step 

detection function. 

You can open the Step Detection dialog box from two of the Dektak 8 application windows. One of 

the choices displayed in the dialog box depends on the window from which the box was opened, as 

explained below. 

• To open the Step Detection dialog box from the Scan Routines window, click Step 

Detection in the Data Processing section (lower left corner of the window). 

• To open the Step Detection dialog box from the Data Plot window, select Analysis > 

Step Detection... from the menu bar. 

When the dialog box first displays it defaults to the Every Step Detection Method on the General 

Settings page (see Figure C.1a), and the Every Step tab appears. 

Figure C.1a Step Detection Dialog Box: General Settings Page 

You can adjust various parameters on this page to suit your requirements. 

Detection Range 

Note: If you select First Step as the Detection Method, the Every Step tab changes 

to a First Step tab. 

• Start Position: The position, in µm, to start searching for a step. 


217A



• End Position: The position, in µm, to end searching for a step. 

Automatic Leveling 

When selected, automatically levels the trace with the R and M cursors each placed near an edge at 

a Relative Position that you specify, at a distance from the edge that you specify. You can also 

specify the Width for each cursor. 

Save Changes To Scan Routine 

When checked, all entered Step Detection parameters save to the current scan routine. 

Enable Step Detection 

Note: This check box is available only when step detect has been initiated from the 

menu bar in the Data Plot window. 

When checked, performs Step Detection as specified on a completed scan. 

C.1.1 Every Step Page 

Note: This check box is available only when the dialog box is opened from the Data 

Processing section of the Scan Routines window. 

You may need to change the parameter values on the Every Step page depending on the steps to 

measure (see Figure C.1b). Click the Every Step tab to display the page. A description of the 

parameters contained in the Every Step page is provided below. 


Step Description: 

Figure C.1b Step Detection Dialog Box: Every Step Page 



• Min Height: Indicates the minimum height (in angstroms) of features to measure. You 

can enter decimal values to indicate any portion of angstroms. 

• Max Height: Indicates the maximum height (in angstroms) of the features to measure. 

• Smoothing: The minimum edge height used to search for potential steps, in angstroms. 

• + Steps: When selected, Step Detection searches for the first positive step matching Step 

Description parameters. 

• - Steps: When selected, Step Detection searches for the first negative step matching Step 

Description parameters. 

Analytical Functions: 

• ASH: Compute Average Step Height function. 

• Slope: Compute Slope function. 

• AvgHt: Compute Average Height function. 

• Peak: Compute Maximum Peak function. 

• Valley: Compute Maximum Valley function. 


217B



C.1.2 First Step Page 

• P_V: Compute Maximum Peak to Valley function. 

• Compute Average: Compute the average of all results of an analytical function. 

If you select First Step as the detection method, you can click the First Step tab to display the First 

Step page. A description of the parameters contained in the First Step page is provided below (see 

Figure C.1c). 

Step Description 

Figure C.1c Step Detection Dialog Box: First Step Page 

• Height: The desired height of the step to detect in angstroms. 

• Width: The desired width of the step to detect in µm. 

• Distance to Step: 

• R: The relative position of the R cursor to the left of the potential step being 

detected. 

• M: The relative position of the M cursor to the right of the potential step being 

detected. 


218A

Band Width 

Additional Parameters 




• R: Width of R cursor positioned to the left of the potential step being detected. 

• M: Width of M cursor positioned to the right of the potential step being detected. 

• Smoothing: Factor used for smoothing. Larger values result in more smoothing. 

• Tolerance: Error factor used for calculating the height and width of the matching step. 

• + Step: When selected, Step Detection will search for the first positive step matching 

Step Description parameters. 

• - Step: When selected, Step Detection will search for the first negative step matching 

Step Description parameters. 

Put a check mark in the boxes for the analytical functions desired: 

• ASH: Computes Average Step Height function. 

• Slope: Computes Slope function. 

• AvgHt: Compute Average Height function. 

• Peak: Compute Maximum Peak function. 

• Valley: Compute Maximum Valley function. 

• P_V: Compute Maximum Peak to Valley function. 

• Compute Average: Compute the average of all results of each selected analytical 

function. 

Then select each of the desired functions in turn from the Function drop-down list to enter the 

appropriate cursor information in the grid for each function: 

Distance To Step 

R (µm) 

The relative distance from the beginning of the detected step at which to place the R cursor prior to 

performing the corresponding analytical function. Negative values fall to the left of the beginning 

of the step, positive values to the right. You may enter up to 10 distances for each analytical 

function. 




M (µm) 

The relative distance from the beginning of the detected step at which to place the M cursor prior to 

performing the corresponding analytical function. Negative values fall to the left of the beginning 

of the step, positive values to the right. You may enter up to 10 distances for each analytical 

function. 

Band Width 

R (µm) 

R-cursor band width used when performing corresponding analytical function. You may enter up to 

10 widths for each analytical function. 

M (µm) 

M-cursor band width used when performing corresponding analytical function. You may enter up 

to 10 widths for each analytical function. 


C.2 Step Detection Setup 


Step Detection Setup 

Step Detection is typically used for finding and measuring steps when performing multi-scan 

operations. It scans similar features at multiple locations on multiple samples with the step heights 

measured automatically. 

Prior to using Step Detection in a multi-scan operation, create a sample scan of the feature to aid in 

setting up the Step Detection parameters. Using the scan shown in Figure C.2a as an example of a 

sample scan, the following pages demonstrate how to set up and perform Step Detection on a scan 

data file. 

Figure C.2a shows a scan across a feature with steps (trenches) located at approximately 350 µm 

and 1350 µm. The procedure to invoke Step Detection on an existing scan data file is provided 

below. 

Select Analysis > Step Detection from the menu bar with a scanned profile of multiple steps 

displayed in the Data Plot window (see Figure C.2a). 

Figure C.2a Typical Scan of Multiple Steps 

C.2.1 Performing Step Detection on a Single Scan 

1. With the Step Parameters dialog box displayed, select the Step Detection method (First 

Step or Every Step). 

2. Select the desired parameters for the scan to measure the scanned step or steps. 


240A



3. Click OK. 

The resulting scan after you enable Step Detection redisplays the plotted profile and detects and 

measures the steps applicable to selected Step Detection parameters. 

Selected analytical functions (such as ASH measurement) perform on the detected steps. The steps 

are detected, causing the ASH measurement to compute with R and M cursors positioned on either 

side of the step and displayed to the left of the plotted profile. 

You can now automatically locate the cursors to their corresponding position by highlighting the 

desired analytic result. 

C.2.2 Programming Step Detection in a Scan Routine 

The same criteria for locating feature edges on a single data file can be used for performing step 

detection on similar features during subsequent scans. 

1. Select Window > Scan Routines to display the Scan Routines window to enable Step 

Detection during a scan. 

2. Under Data Processing click Step Detection to display the default values in the Step 

Detection dialog box. 

3. Click the Step Detection Enabled check box to enable step detection while scanning. 

C.2.3 Programming Step Detection on Multiple Scans 

You can use the Automation Program Summary (APS) with step detection to automatically 

compute standard deviation and mean values of chosen analytic functions at each detected step for 

a series of scans. 

1. Select Window > Automation Programs to program a series of scans with Step Detection. 

2. Under Automation Program Options, click APS File to open the Automation Program 

Options dialog box. 

3. At the General page, in the Auto Program Summary (APS) section, click the Compute & 

Display check box. 

4. Accept the default file, or specify the desired file for the APS summary, and click OK. 

5. Select Edit > Copy To... to create a copy of the previously developed scan routine. 

6. In the dialog box that pops up, enter a numerical value for the new Scan Routine # into the 

field and click OK. 




7. Double-click the left mouse button on the newly created scan routine to allow modification 

of the new scan routine location. 

8. Modify any parameters of the scan routine you wish to alter. 

9. Select Window > Automation Programs to run the automation programs. 

10. Select Run > Auto Program From... after highlighting the first automation program to 

execute. 

The result is an Automation Program Summary with Mean, Standard Deviation, Minimum, 

Maximum and Range values for ASH measurements at each detected step. 





Appendix D 3D Mapping Option 


D.1 3D Mapping Option 

• 3D Mapping Option: Section D.1 

• Setting Up a 3-D Mapping Program: Section D.2 

• Running a Map Program: Section D.3 

• Vision Overview: Section D.4 

• Analyzing Data: Section D.5 

• Displaying Data: Section D.6 

• Dataset vs. Database: Section D.7 

The Dektak Three Dimensional (3D) Mapping Option is an add-on software package that allows 

Dektak surface profiler customers to measure, analyze, and view surface contour data in 3 

dimensions (X, Y, and Z), instead of the 2 dimensions (X and Z) that standard products provide. 

Dektak surface profilers collect 3-D data through the use of mapped scans. The mapped scan data is 

then converted into data files that the Vision for Dektak rendering software can use. 

Overview 

The 3D Mapping Option is intended to run on the Dektak 8 platform, within the software. However, 

the Vision for Dektak component can run as a stand-alone analysis tool on any computer that meets 

the system configuration specifications.You can call up the program through one of the standard 

Microsoft Windows functions (double-clicking an icon, using a shortcut, and so on). 


3D Mapping Option 


Minimum System Configuration to Run 3D Mapping Software 

Hardware: Pentium-based IBM compatible PC. 

Software: Microsoft Windows XP. The package is network-compatible based on the network 

compatibility of the underlying operating system. This typically includes remote file system 

storage and retrieval, along with remote printing. 

Software included with the 3D Mapping Option 

• Vision for Dektak, Image Analysis Software CD 

• Advanced Analysis, plug-in Software CD 


D.2 Setting Up a 3-D Mapping Program 

The following steps describe how to set up a 3-D map. 

1. Open the Scan Routines window. 


Setting Up a 3-D Mapping Program 

2. Click any of the entries in the Scan Parameters section at the left side of the window, to pop 

up the Scan Parameters dialog box (see Figure D.2a). 

3. Select the Nominal Parameters page in the dialog box. 

4. In the Scan Type section of the Nominal Parameters page, select Map Scan from the dropdown 

list. 

Figure D.2a Scan Parameters Dialog Box--Map Scan Type 

5. Click OK to close the dialog box and enter the scan type into the scan program. 

Note: Click Apply if you want to enter the scan type into the scan program but keep 


6. In the Sample Positioning window, locate the feature to be mapped, using either the high or 

low magnification camera to view the area. Null the stylus at any corner of the intended 

mapping area. 

Note: To null the stylus, first position the stylus horizontally over the sample. Select 

Tower Down and the stylus will descend vertically until the tip of the stylus 

reaches the surface of the sample. The Z value at this point becomes the 

reference point from which all the other Z values will be determined 




7. Select Edit > Define Map Area (or press CTRL+D on the keyboard). 

Note: The Define Map Area option exists in the Edit menu only if Map Scan is 

selected for the current scan routine. 

8. Follow the directions displayed: 

a. Roll the trackball to define the X extent. 

b. Click the left mouse button. 

c. Roll the trackball to define the Y extent. 

d. Click the left mouse button. 

The Scan Parameters dialog box now pops up (see Figure D.2b). 

Figure D.2b Scan Parameters Dialog Box: Map Parameters Page 

The software always calculates the coordinates at the lower left corner of the map area. It also 

enters those coordinates into both the Automation Program window (Scan Routines section) and 

the Location for the scan routine in the Scan Routines window (Scan Parameters section). The 

map will proceed from bottom to top, moving in the positive Y direction with each new scan line. 

9. Enter or change any of the parameters as desired in the Scan Parameters dialog box, at the 

Map Parameters page. For example, enter the number of Profiles (scan lines) up to 10,000, 

or the vertical scan Resolution (down to 1.0 µm/scan). 

Note: Entering a new value for Resolution will automatically reset the number of 

Profiles required for the specified Y Extent. Conversely, entering a new value 

for the number of Profiles will automatically reset the value for Resolution as 




required for the specified Y Extent. (The product of Profiles times Resolution 

equals Y Extent.) 

10. Click OK in the Scan Parameters dialog box to accept the scan parameters. The mapping 

parameters are now stored into the Automation Program. 

D.2.1 Files for Mapping Data 

In the Automation Programs window, click Data File in the Automation Program Options 

section to display the General page in the Automation Program Options dialog box. 

In the Scan Data section, you have the following choices for saving your data: 

• Accept the default file name to save the mapping data. 

• Click the button to open the Select a Data File dialog box where you can specify a new 

data file name. 

Note: Unless otherwise specified, mapping data automatically saves to Default.nnn 

data files in the Dektak32\Data\Default folder on the C: drive, in a sub-folder 

named MapSitem. The m is the same number as the number of the scan routine. 

• For example, if you specified 10 Profiles for scan routine #3 at the Map Parameters 

page, the default data files would be named Default.001, Default.002, and so forth. 

Once all of the data files have been created, the program automatically creates an image 

file, Default_MapSite3_Test.img, and stores it in the MapSite3 sub-folder along with 

the data files. 



Running a Map Program 

D.3 Running a Map Program 

To execute a mapping program, simply run the automation program containing the desired 

mapping parameters. 

Select Run > Auto Program to run the current automation mapping program. 

D.4 Vision Overview 

Note: The Data Plot window displays and plots each scan in real time. Once all the 

scans in the automation mapping program are complete, the image file (.img) is 

created. You can then access the image file from the Vision for Dektak software 

program. 

The Dektak 3D Mapping Option produces 3-D images of a sample that are converted into data that 

the Dektak Vision 3D rendering software can analyze, and are stored in a .img file (see D.2.1 

Files for Mapping Data). 

D.4.1 Vision for Dektak Basic Functions 

Start-Up Window 

Once started, the Vision for Dektak package displays a Start-Up Window that incorporates both a 

menu bar and a toolbar for command selection (see Figure D.4a). Use the Start-Up Window as a 

home base for performing data analysis, transformations, and image presentation. 

Figure D.4a Vision for Dektak Start-Up Window 


139

Open 


Vision Overview 

1. Select File > Open Stored Dataset or click the OPEN A DATASET icon to open a scanned 

image file and transfer the data into a working data buffer (current data set) for use by the 

package (see Figure D.4b). The Open Stored Dataset dialog box will display (see Figure 

D.4c). All data analysis, transformations, and image presentations perform from the current 

data set. 

Figure D.4b Open a Dataset Icon 

2. Choose the type of file you want to open by selecting the drop-down list box next to the 

Open box. Vision opens four different file types: Dektak (*.img), ASCII Files (*.asc), SDF 

(*.sdf), and OPD (*.opd). 

Note: The default file type for Vision for Dektak is .img. 

3. Select OPEN to browse for a file. A preview of the file you highlight will display for quick 

recognition of the file. 

Preview 

Window 

Add or Subtract 

Figure D.4c Open Dialog Box 

Use this option to combine several datasets by adding or subtracting every point in their surface 

profiles (see Figure D.4d). The datasets you add or subtract must have the same sized arrays. You 

can add two or more files together. You can subtract only two datasets. 


140



Save 

Figure D.4d Subtract/Add Dialog Box 

1. Select File > Subtract/Add Files to display the Subtract/Add dialog box. 

2. Select two files (or more, if adding) by clicking on the first file, then pressing CTRL and 

selecting the next file(s). 

3. Specify whether you want to Add or Subtract the files. 

4. Select the Auto Center Data check box to center the second surface with respect to the first. 

5. If the surfaces are not the same size, select the Auto Zoom Data option to resize the second 

surface to match the first. 

6. Click OK. The combined dataset will be displayed using the default output file. You can now 

apply analyses, processed options and masks to the averaged data. 

Note: This option applies to stored datasets. During a new measurement you can 

subtract two readings in the same location by making a difference 

measurement. 

Select File > Save As to save an image. This command is typically used when you have 

transformed the data set and wish to save the results of the transformation independent of the raw 

data set. 


141

Printing 



You can print the current window from anywhere within the package on an attached printer. There 

are three print options available: the entire display contents, the current window, or the client area 

of the current window. The entire display command sends every pixel shown on the monitor to the 

printer. The current window is defined as the current active MS Windows window, including the 

window border, sizing handles, title bar, menu bar, and window client area (contents). The client 

area is the portion of a window excluding the title bar, menu bar, and window border, if any. To 

print the current window press CTRL+P; to print the entire screen press CTRL+S; to print the current 

client area press CTRL+SHIFT+P. The specific portion of the screen is then sent to the current 

default printer as defined by MS Windows and the user. The page orientation of the output 

automatically changes so the largest possible image prints on a page. 

D.4.2 Vision for Dektak Toolbar 

Vision for Dektak has two modes: Lab mode and Production mode. Lab mode provides access to all 

analyses and configuration options. Lab mode has a specific toolbar (see Table D.4a). 

Table D.4a Vision Toolbar (Lab Mode) 

Production mode is limited to only the basic options required to take measurements according to a 

present configuration. A password must be supplied before you can return to Lab mode. Production 

mode has a specific toolbar (see Table D.4b). 

• Password = Wyko (It is not case sensitive). 

Table D.4b Vision Toolbar (Production Mode) 

The menu bar provides access to the most frequently used options of the Vision for Dektak 

software. The icons and buttons of the toolbars are described below (see Table D.4c). 




Open: Opens a dataset for viewing and analysis. 

Save: Saves the current database. 

Print: Prints the active dataset. 

Table D.4c Vision for Dektak Menu Bar 

Description Button/Icon 

Processed Options: Opens the Processed Options dialog box 

where you can set various data processing parameters. Lab 

mode only. 

Edit Masks for this Dataset: Opens the Mask Editor window 

Multiple Region Options: Opens the Options dialog box for 

the Multiple Region Analysis. 

Custom Analysis Options: Opens the Custom Analysis dialog 

box, allowing you to create custom display files. 

Custom Analysis Display: Opens the dialog box that allows 

you to select a custom display file for your data. 

Units Options: Opens the Units dialog box, which allows you 

to change the display units between English and metric. 

Database Options: Opens the Database Options dialog box. 

Here, you can perform most database-related functions, such as 

defining a database, updating a master database, or viewing the 

contents of a database file. 

Contour Plot: Applies a contour plot display file to the current 

dataset. 

Lab Mode Production Mode 


Editing the Toolbar 

Description Button/Icon 

2D Analysis: Applies the 2D display file to the current dataset. 

3D Interactive Plot: Applies the 3D display file to the current 

dataset and allows you to interact with the data. 

3D Plot: Applies the 3D display file to the current dataset. 

Filtered Histogram Analysis: Applies the Filtered Histogram 

analysis to the current dataset. 

Filtered Bearing Ratio Analysis: Applies the Filtered Bearing 

Ratio analysis to the current dataset. 

Edit Toolbar: Allows you to edit the buttons which are displayed 

on the toolbar. 

Set Lab/Production Mode: Allows you to switch between 

Lab Mode and Production Mode. 

Help Mode: Opens the Dektak Vision Help files. 



You can customize the toolbar in both Lab and Production modes to include only those operational 

and analysis buttons which you use regularly. Production mode, however, requires that you supply 

a password before you can customize the toolbar. 

To edit the toolbar: 

1. In Lab mode, click the Edit Toolbar icon or choose Edit > Edit Toolbar. In Production 

mode, click EDIT TOOLBAR, then enter your password. Either action opens the Customize 

Toolbar Window (see Figure D.4e). 




Figure D.4e Customize Toolbar Window 

2. The Unused Toolbar Buttons list box contains buttons that are not on the toolbar but are 

available for use. The Active Toolbar Buttons list box lists the buttons on the current 

toolbar. 

a. To add a button to the toolbar, select a button in the Unused Toolbar Buttons list, then 

click ADD. Your selection will be placed beneath the currently highlighted option in the 

Active Toolbar Buttons list. 

b. To add a separator between tool bar buttons, select a button in the Active Toolbar 

Buttons list. Click SEPARATOR to place a separator line beneath the selected button. 

c. To remove a button or separator from the toolbar, select a button or separator line in the 

Active Toolbar Buttons list, then click REMOVE. If you have selected a button, it will be 

moved to the Unused Toolbar Buttons list. If you selected a separator line, it will simply 

be removed. 

3. Select any other options that may be applicable: 

• LOAD DEFAULT TOOLBAR: Click this button to load the Dektak Vision default toolbar 

options. 

• Save as Default for All Configuration Files: Click this check box to save your most 

recent toolbar changes as the default for your current work session, and for all 

configuration files. If this box is unchecked, the program will apply your most recent 

toolbar changes only to the current work session. 

4. Click OK to accept your changes. 


142

D.5 Analyzing Data 


Analyzing Data 

After you have taken a measurement, you can use a number of options and analyses to produce a 

vast array of information about your sample data. Analyses calculate a wide range of statistics from 

measured data. Analyses can be applied automatically following each new measurement. The name 

of the analysis, in this case, is stored with the configuration file. Analyses can also be applied to 

stored datasets. 

Vision includes several standard analyses, such as producing 2D and 3D plots and displaying 

intensity. Most systems include additional analyses for more specific types of measurements. An 

analysis typically includes a graphical display file designed to show the calculated statistics, along 

with a plot of the data. Many analyses include an Options dialog box which allows you to 

configure the analysis to match your measurement 

The Analysis Menu displays the analysis options included in your system. Frequently accessed 

analyses appear directly on the menu. A comprehensive list of installed analyses appears under 

Analysis > Custom Options. 

Datasets 

A dataset contains raw data and parameters for a single measured part. Dataset files have an .img 

extension, designating a binary format specific to Dektak datasets. Dataset contents are shown onscreen 

in a display file, which typically shows a plot of the raw data and a list of the parameters. 

After the measurement is taken, it is saved with a temporary file name, ~last.img. If you wish to 

store the dataset, you must rename it. Select Save As from the file menu, then provide a path, file 

name, and select the type of file you would like to save it as. If you do not save/rename your file, it 

will be overwritten the next time a measurement is taken. 

Once you store a dataset, you can open it again at any time. To open a dataset, choose File > Open 

Dataset, then select the file to open. The data will be shown using the display file which was in use 

when the data was saved. 

When you open a dataset, you may change the way the file is displayed. To save these changes, 

choose File > Save Dataset. The next time you open the dataset, these viewing options will be 

used. 

Sample data can be from a just-completed measurement, or it can be from an existing dataset that 

you have just opened. To open a dataset, select File > Open Existing Dataset, then select the file to 

open. 

D.5.1 Processed Options 

Processed Options allow you to remove terms, apply filtering, and perform data operations to 

enhance the measurement data. Processed options can be applied to the current dataset only or can 

be set as the measurement default and saved in the configuration file. 




To access these options, select Analysis > Processed Options, or click the PROCESSED OPTIONS 

button on the toolbar. Either action will open the Processed Options dialog box (see Figure D.5a). 

Note: When you change options in this dialog box and click OK, the changes will be 

immediately effected in any currently open display windows. By saving your 

configuration, you can assure that your settings will be used each time you 

open your configuration file. 

Figure D.5a Processed Options Dialog Box - Terms Removal Tab 

Within the Processed Options dialog box you can set the options described below. 

Terms Removal 

Terms removal options remove tilt, curvature, or cylindrical characteristics inherent to your sample 

or measurement method (see Figure D.5a). 

Filtering 

• Tilt Only: Removes linear tilt from surface measurements. Since a wafer will always 

have some inherent tilt, this term is almost always removed. 

• Curvature and Tilt: Will make spherical samples appear flat, enabling you to observe 

the surface features instead of the spherical shape. Tilt is also removed. 

• Cylinder and Tilt: Causes a cylindrical surface to appear flat, allowing you to see the 

surface features, not the cylindrical shape. Tilt is also removed. 

The filtering algorithms create a modified data array to produce one of the following effects on the 

current data set (see Figure D.5b). 


143

Figure D.5b Processed Options Dialog Box - Filtering Tab 

Low Pass Smoothing (Box Car Filter) 



This filter removes the effects of high spatial frequency roughness, smoothing over features that are 

smaller than the specified window size. The program eliminates small scale roughness, making the 

most significant features of the dataset become easier to distinguish. 

Median Smoothing (Median Filter) 

The median of the valid points in each window is used as the data element in the new, smoother 

array. (In other words, it filters out noisy and "spiked" data.) The median is the value of the middle 

point when the points are sorted from smallest to largest. 

High Pass Smoothing (Edge Enhancing Filter) 

High spatial frequencies are emphasized. This filter removes major undulations and large-scale 

waviness, making small-scale roughness easier to distinguish. 

Digital Filters (Fourier Filtering) 

Digital filters selectively suppress roughness or waviness in a dataset. These filters work in the 

spatial frequency spectrum of the dataset rather than on the pixels themselves. By selecting 

different digital filter types, some of frequency content of the dataset can be selectively removed 

from the image, accentuating or attenuating features of selected size range. Select from the digital 

filter options (see Table D.5a). 


144



Table D.5a Digital Filter Options 

Digital Filter Description 

Fourier Low Pass Removes spatial frequency components above the specified Low 

Digital Cutoff Frequency. It makes the larger features of the 

dataset easier to distinguish. 

Fourier High Pass Removes spatial frequency components below the specified High 

Digital Cutoff Frequency. It accentuates surface roughness by 

minimizing the effect of large-scale waviness. 

Band Pass Passes spatial frequencies below the High Cutoff and above the 

Low Cutoff. 

Notch Filter Passes spatial frequencies above the High Cutoff and below the 

Low Cutoff. 

Fourier Filter Type Select the shape of the digital filter to apply: Rectangle, 

Butterworth (default is 3rd Order), or Exponential (the default 

is s = standard deviation = 0.2). You can also click Adv. Setup to 

access more options for digital filtering. 

Low Cut Off Specify the low cut off to be used for Fourier Filtering options. 

High Cut Off Specify the high cut off to be used for Fourier Filtering options. 

Mask Options 

Masks let you temporarily eliminate areas of information from a dataset so that you can focus on 

the pertinent data (see Figure D.5c) Using masks you can also analyze or modify specific portions 

of the data. Once you've defined a mask, you can save it to disk, to a dataset, or as part of a 

configuration file. 

Figure D.5c Processed Options Dialog Box - Masking Tab 


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• Use Analysis Mask: Activates the mask associated with the current analysis. 



• Use Terms Mask: Activates the current terms mask. For the mask option to be valid, 

you must set a mask for the selected dataset. If terms are selected for removal, but a 

terms mask is not applied, terms will be removed across the entire dataset. 

For more information on masks, refer to Section D.6.4. 

Data Restore 

Data restore (see Figure D.5d) fills in bad pixels in areas from the dataset to allow certain analyses 

that require all the data to be valid to work properly. 

Figure D.5d Processed Options Dialog Box - Data Restore Tab 

• Use Data Restore: Fills in small areas of bad pixels for the interpolation of 

measurement data. 

CAUTION: Data Restore is intended only to improve small areas of bad pixels. 

If used with a very rough sample or a sample with large areas of 

bad data, the results could be misleading. 

• Restore Only Interior: Extrapolate only the specified number of pixels if it connects 

two points together. 

• Restore Interior and Exterior: Extrapolate all data pixels up to the number specified 

below. 


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General 

Dektak 

• Data Restore Pixels: Set the number of pixels to restore for the above options. 

Centering data allows analyses involving the entire data set to be carried out (see Figure D.5e). 

• Center of Mass of Valid Pixels 

• Fit Center to Outside Valid Pixels 

Figure D.5e Processed Options Dialog Box - General Tab 

• Data Flip rotates an image about a particular axis. 

• Data Invert reverses the position of the image. 

Data Flattening flattens data using averages from the X or Y axes. 


078

D.6 Displaying Data 

Figure D.5f Processed Options Dialog Box - Dektak Tab 


Displaying Data 

Dektak Vision provides a large number of graphical plots allowing you to produce meaningful data 

from test results. 

D.6.1 Setting the Units 

You may wish to display your data in specific units or in a common unit system. By clicking the 

Units icon or by selecting Options > Units, you can display the Units dialog box. This dialog box 

allows you to choose which units (English or metric) you prefer to use, and which magnitude you 

prefer. This option can be set before the measurement and saved in the configuration file, or it can 

be changed at any time after the measurement. In addition, you can set the units you choose as the 

default for future measurements by checking the box entitled Set as Default. 

D.6.2 Standard Display File 

The standard .wdf display file includes the basic statistics from the measurement along with a 

contour plot of the results (see Figure D.6a). 


151



Display Files for Each Analysis 

Figure D.6a Contour Plot 

Dektak Vision includes many analysis routines to manipulate measurement results. Typically, each 

analysis includes its own display output that shows the relevant statistics and plots for that analysis. 

The file type of this output will be either .wdf or .cdf (custom display file). 

To use the display output from a different analysis: 

1. Select Analysis > Custom Options. 

2. Select your analysis from the scrolling list. 

3. Click Calculate to perform the analysis and display the output. 

Display Custom Files (.cdf) 

Your customer representative may provide you with one or more custom display (.cdf) files 

designed for your particular application. You can choose to use one of these output files, or you can 

create your own .cdf file as well. 

To create a custom display file: 

1. Select Edit > Create Custom Display. This will open a blank display file for editing. 

Note: You may also select Edit > Open Custom Display to view and edit an existing 

custom display file. It is often easier to alter an existing file than to create one 

from scratch. 


167



2. To add a rectangle to the display, select Edit > New Rectangle. Click the Filled Rectangle 

box to add a filled rectangle, then select the fill color. Click OK to add the rectangle to the 

display file, then position it and size it on the page. 

3. To add headings or other text, select Edit > New Static Text. Enter the text string, its size 

and typeface, then click OK. Position the text on the page. 

4. To add an analysis result field, select Edit > New Analysis Result. Select the result from the 

list, define its text characteristics on the left, then click OK. Position the field on the page. 

5. To add a plot, select Edit > New Plot Item. Select the desired plot from the list, choose the 

required calculation, then click OK. Position the plot on the page. 

6. To add an analysis results table, select Edit > New Plot Item. Select Results Table from the 

Type of Plot pull-down menu, then click OK. Position the table on the page. 

7. When you have completed the custom display, click the SAVE button on the toolbar, or select 

File > Save Custom File As. Save the custom display file for future use. 

Select a Default Output File 

The “Default Output File” is the display file that will appear each time you click the NEW 

MEASUREMENT button to take a measurement. To select the default output: 

1. Select Output > Default Output. This action will open the Set Default Output dialog box 

(Figure D.6b). 

2. Select the default output display format to use. If you choose to use a custom .cdf file, click 

BROWSE to select the path to the file. 

3. Click OK to accept the new default display. 

Figure D.6b Set Default Output Dialog Box 


147



Setting Titles and User Notes 

Dektak Vision offers two fields that you can customize on most display files: Title and Note (see 

Figure D.6d). The Title and Note are displayed on any of the standard display files. You may also 

add them to any custom display files. In addition, Dektak Vision allows you to set various “User 

Notes” which are saved with the file but do not appear on the display file. They may be viewed 

when the file is open. These parameters are optional; they will remain blank if you do not set them. 

To set the Title and Notes: 

1. Select Options > Set Title/Notes. 

2. Enter the title/note text in the appropriate boxes. 

3. Click OK. The active dataset will automatically be updated. 

To set the User Notes: 

4. Select Options > Set User Notes. 

5. Enter the text in the appropriate boxes. 

6. Click OK. The notes will be appended to the active dataset. They will not be visible on the 

display file. 

Dektak Vision does not automatically save the titles or notes you add to the dataset. To save the 

changes to your dataset, select File > Save. 

D.6.3 Standard Plots 

Analyses are the specific calculations performed upon measurement data to return particular results 

about the test part. Dektak Vision can perform many analyses on data. You can open several 

windows simultaneously, showing various analyses of the same measurement data. The icons for 

these plots are grouped in the Lab mode menu bar (see Figure D.6c). 

Contour Plot 

Contour Plot 

Figure D.6c Main Analysis Plots 

Filtered Bearing 

Ratio Analysis 

2D Analysis 3D interactive 3D Plot Filtered Histogram Analysis 

A contour plot provides a visual, pixel-for-pixel representation of your dataset and applicable 

dataset statistics. Data heights are color-coded for easy interpretation. To display a contour plot of 

the current dataset, select Analysis > Contour, Analysis > Custom Options > Contour Plot > OK, 


Title and 

Note Fields 



or click the CONTOUR PLOT button (see Figure D.6c). This option is available when a dataset is 

open. 

Contour 

Plot Box 

Contour Plot Box 

Figure D.6d Contour Plot 

Surface Plot 

The Contour Plot Box to the left of the surface plot contains statistics and information about the 

plot. The terms regarding the plot in the Contour Plot are defined below: 

• Lateral Surface Area: Lateral surface area of the plot. 

• Total Surface Area: Total surface area of the plot. 

• Surface Statistics: Surface statistics for the region measured. The statistics are based on 

the entire area. 

• Ra: Average Roughness 

• Rq: Root Mean Square (RMS) Roughness 

• Rz: Average Maximum Height 

• Rt: Maximum Height of Profile, Rp + Rv 

Height (Z) Scale 


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Surface Plot 

• Terms Removed: Lists the terms removed from the plot. 

• Filtering: Lists the filtering options in use. 

Plot of the surface as viewed from directly above (see Figure D.6d). Surface heights are depicted 

by the colors on the vertical height scale to the right of the plot. 


Vertical height scale, centered about the mean height (see Figure D.6d). The scale relates colors (or 

gray-scale levels) to the surface heights they represent. You can change the vertical scale with the 

Output > User Limits command. 

• Lateral Surface Area: Lateral surface area of the plot. 

• Total Surface Area: Total surface area of the plot. 



Plot Options Menu 

Right-click on a contour plot to access these options (see Figure D.6e): 

• Plot Options: Opens the Plot Options dialog box. 

• Analysis Options: Opens the Processed Options dialog box. 

• Color: Choose the colors used to designate data heights. 

• Background Color: Choose a background to enhance readability. If your plot contains 

data in the entire field of view, you will not see the effect of changing the background 

color. 

• Max Contrast: Provides maximum color contrast for data set displays. 

• Define Subregion: Zoom in on a rectangular area of your plot. Click Define Subregion, 

then click and drag to draw a rectangular region. A new window will appear showing 

your subregion and its statistics. After you have clicked Define Subregion, but before 

selecting the subregion, you may choose Abort Subregion to cancel. 

• After defining a subregion, a Zero Mean box will be added to the Processed 

Options dialog box. Right-click on the contour plot to open the Contour Plot menu, 

select Analysis Options, then select the Zero Mean check box to set the “zero” 

height to the mean height of the subregion. 


2D Analysis 



• Duplicate: Make a copy of the plot. You can then make changes to plot options and 

compare the plot to the original. Choose Full Resolution to copy every pixel, Half 

Resolution to copy every other pixel, or Quarter Resolution to copy every fourth 

pixel. 

• Save as TIFF: Saves only the Contour plot to a tagged image format (.tif) file. 

• Save to disk: Opens the Save As dialog box, which allows one to save the dataset. 

• Cursor Type: Choose the type of cursor to display. 

• Cursor Width: Choose the width of the Crosshair, 2-point or Radial cursors. 

Figure D.6e Contour Plot Menu 

The 2D Analysis displays a contour plot and X and Y profile plots (see Figure D.6f). You can 

access the 2D Plot by selecting Analysis > 2D Profile, Analysis > Custom Options > 2D Plot > 

OK, or by clicking the 2D ANALYSIS button (see Figure D.6c). This option is available when a 

dataset is open. 


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Contour Plot 

on 2D 

Cursor 

Parameters 

Figure D.6f 2D Analysis Plot 

The 2D profiles correspond to the cursor positions on the contour plot. You can view different 

profiles in the X and Y directions by moving the cursors on the contour plot. Point to the region of 

interest and click the left mouse button or click and drag the cursors. 

2D Analysis Plot Cursors 

On the 2D Analysis plots, set these cursors at the points of interest by clicking and dragging them 

to position (see Figure D.6f). The statistics to the right of the X and Y profile plots refer to the area 

between the cursors. The X and Y distance between the two points are shown above and to the right 

of the plot. 

You can expand the width of each cursor by clicking and dragging the arrows at its base. When 

expanded, the height of the cursor is the average height over the cursor region. 

When you have selected the Multiple Crosshairs cursor type, you may have several traces on the 

profile plots, each of which can have associated cursors. Only the cursors for the currently-active 

trace are shown. To show statistics for the different traces, you can click on the trace, or right-click 

on the profile plot and select Next Trace or Previous Trace. 

Cursor Parameters 

X Profile 

Y Profile 

2D Analysis 

Plot Statistics 

These parameters are related to the cursor positions on the contour plot (see Figure D.6f). If no 

cursors are present, parameters are based on the farthest left and the farthest right data points. The 

Cursor Parameter box is to the right of the 2D Analysis Plot (see Figure D.6f). 


Cursors 

169

Table D.6a Cursor Parameters 

Crosshair Multiple Crosshair 2-Point Radial 

X X position of 

cursor relative 

to lower left 

corner. 

Y Y position of 

cursor relative 

to lower left 

corner. 

Ht. Data height at 

crosshair 

X Profile 



Data profile corresponding to the X cursor or Radial cursor on the contour plot (see Figure D.6f). 

Y Profile 

X position of last two cursors 

touched, and the difference 

(delta) between them. 

Y position of last two cursors 

touched, and the difference 


Data height at crosshair of the 

last two cursors touched, and 

the height difference between 

them. 

Dist N/A Distance between crosshairs of 

the last two cursors touched. 

Angle N/A Angle created by a line 

between crosshairs of the last 

two cursors touched. Zero is 

horizontal. 

Data profile corresponding to the Y cursor or Circumference cursor on the contour plot (see Figure 

D.6f). 

2D Analysis Plot Statistics 

Surface statistics for the region between the cursors on the X profile or Y profile (see Figure D.6f): 

• Rq: Root mean square (RMS) roughness. 

• Ra: Average roughness. 

• Rt: Maximum height of profile, Rp + Rv. 

• Rp: Maximum peak height. 

• Rv: Maximum valley depth. 

X positions of the two endpoints 

and the difference 


Y positions of the two endpoints 



Data height at each endpoint 



Distance between the two 

endpoints. 

The angle of the line. Zero 

is horizontal. 

• Angle: Angle between the two intersection points. 

X position of center of circle 

and the end of the radius line, 

and the difference (delta) 

between them. 

Y position of center of circle 

and the end of the radius line, 

and the difference (delta) 

between them. 

Data height at center of circle 

and end of the radius line, and 

the difference (delta) between 

them. 

Radius of the circle. 

The angle of the radius line. 

Zero is horizontal. 




• Curve: Radius of curvature of region between the cursors. 

• Terms: Terms removed under Plot Properties. 

• Avg Ht.: Average height of region between cursors. 

• Area: Area under curve between the cursors. 

When one or both cursors are against the edge of the profile plot, the statistics will be shown for the 

entire profile. 

When using Multiple Crosshairs, your profile plots will include a trace for each set of crosshairs. 

Click on a trace to show statistics for it. You can also right-click on the profile plot and select Next 

Trace or Previous Trace. 

The crosshairs corresponding to the active trace will be marked on the contour plot. Therefore, you 

can look to the contour plot to see for which trace the statistics are shown. Also, the title of the 

profile plot will appear in the color of the currently-active trace. 

3D Interactive 

The 3D interactive plot lets you view a dataset in three dimensions, from any angle, with various 

color and lighting effects. 

1. Open a dataset, select Analysis > 3D Interactive Plot, Analysis > Custom Options > 3D 

Interactive Plot > OK, or click the 3D INTERACTIVE PLOT button to view the dataset in 3-D 

(see Figure D.6c). 

2. Click and drag in the plot to rotate the dataset in all three dimensions. 

Note: While the data is rotating, Vision will switch to a low-resolution mode to redraw 

the plot in real time. 


3D Plot 

3D Interactive Plot Menu 

Figure D.6g 3D Interactive Plot 

Right-click on the plot to view the following options in the 3D Interactive menu: 




• Plot Options: Opens the 3D Settings dialog box where you can adjust lighting, scaling 

and other plot options. 

• Color: Select the color palette. 

• Background Color: Choose the background color for the plot. 

The 3D Plot creates a 3-D rendering of the surface data (see Figure D.6h). Right-click on the plot to 

manipulate the view angle, lighting, rotation, and so on. The 3D plot is very frequently used and is 

therefore accessible from a number of locations. To use the 3D Plot, select Analysis > 3D, select 

Analysis > Custom Options > 3D Plot > OK, or click the 3D PLOT button (see Figure D.6c). 


170



3D Plot Menu 

Figure D.6h 3D Plot 

Right-click on the plot to view the following options in the 3D Interactive menu: 

3D Plot Box 

3D Plot Box 3D Plot 

• Plot Options: Control the appearance of the 3D plot. 


• Color: Choose the colors used to designate data heights. 

• Background Color: Choose a background to enhance readability. If your plot contains 

data in the entire field of view, you will not see the effect of changing the background 

color. 

• Max Contrast: Provides maximum color contrast for dataset displays. 

The 3D Plot Box to the left of the surface plot contains statistics and information about the plot. 

• Roughness: Roughness statistics for the region measured. The statistics are based on 





171









Vertical height scale, centered about the mean height (see Figure D.6h). The scale relates colors (or 

gray-scale levels) to the surface heights they represent. You can change the vertical scale with the 

Output > User Limits command. 

Filtered Histogram 

The histogram is a line graph representing the number of data points at each surface height. The 

vertical axis represents the number of data points contained within equally spaced intervals (bins), 

while the horizontal axis represents the surface height. 

To generate a histogram choose Analysis > Filtered Histogram > Calculate, or click the 

FILTERED HISTOGRAM ANALYSIS button (see Figure D.6c). 

Filtered Histogram Plot Box 

Figure D.6i Filtered Histogram Plot 

Filtered Histogram Plot 


172



Filtered Histogram Plot 

In addition to showing the height distribution, the histogram also shows the amount of noise in the 

measurement. For a random surface, noise spikes are suggested by infrequently occurring peaks. 

Filtered Histogram Options Dialog Box 

To access the Filtered Histogram Options dialog box, right-click on the histogram plot then 

choose Histogram Options. The following options are available in the Filtered Histogram dialog 

box: 

• Number of bins: Sets the number of bins (10 to 5000) used in the histogram 

calculation. 

• Mirror X Axis: Plots the histogram data on an X axis that is centered about zero. This 

allows you to see how the data points are distributed about a zero mean level. 

• Show All Open Datasets: The histogram for the dataset in the active window is drawn 

in black. Histograms for all other open datasets are drawn in different colors on the 

same plot. This allows you to compare the actual distributions of multiple datasets. 

• Show Gaussian: Displays a Gaussian curve on the histogram, based upon the RMS, the 

number of data points, and the current bin size. The curve lets you compare a normal, 

random distribution to the actual distribution of your dataset. 

• Show Q Value Stats: Q value statistics are calculated using a certain percentage of data 

points from the histogram. At each percentage point, the difference between the highest 

bin value and the lowest bin value is calculated. These statistics are useful for 

examining how the peak-to-valley changes as the number of data points changes. Q 

value statistics are calculated using 80%, 85%, 90%, and 95% of the data points. 

• To obtain a more detailed listing of the histogram data and Q value statistics, click 

the right mouse button on the histogram. Select Print Table to print two histogram 

data tables: one based on the point distribution, and one based on the Q value 

distribution. The Q value distribution may be listed in terms of percent (if the Q 

Value Table by Percent option is selected) or in terms of peak-to-valley. 

• Print Q Value Table by Percent: If this option is selected, the Q value distribution 

printed with the Print Table option described above is listed by percentage (in 

increments of 5%) for 5% to 100% of the data points. If this option is not selected, the Q 

value distribution is listed by peak-to-valley increments. 

• Log Scale: If selected, this option displays logarithmic units along the Y-axis of the 

plot. 

• Set as Default: Check this box to define the current options settings as the default 

settings. Any subsequent filtered histogram measurement will be analyzed using these 

settings. 


Filtered Histogram Plot Box 



The Contour Plot Box to the left of the surface plot contains the following statistics and parameters 

about the plot: 

• Roughness: Roughness statistics for the region measured. The statistics are based on 








Filtered Bearing Ratio Analysis Plot 

The bearing ratio curve (also called material ratio curve) is a graphical representation of the tp 

(bearing ratio) parameter in relation to the profile level (see Figure D.6j). This curve contains all of 

the amplitude information of a profile. 

The display file for the bearing ratio analysis shows the bearing ratio curve, along with various 

bearing ratio statistics. You can use the profile plot to mask portions of the data as well. 

To generate a filtered bearing ratio histogram, click the FILTERED BEARING RATIO ANALYSIS 

button (see Figure D.6c). 




Statistics 

Box 

Statistics Box 

Figure D.6j Filtered Bearing Ratio Analysis Plot 

To determine these parameters, the analysis calculates the area of minimum slope of the bearing 

ratio curve within a 40% window. This is accomplished by computing the height difference of the 

curve’s profile depth axis for points separated by 40% on the tp axis. The bearing ratio curve is first 

intersected at 0% and 40%, and the Htp is found. The 40% window is then moved to the right and 

the Htp monitored for each point until the minimum Htp value is found. 

• tp1: User-defined peak threshold (peak offset) 

• tp2: User-defined valley threshold (valley offset) 

• Htp: H1 - H2 

• H1: Height corresponding to tp1 

• H2: Height corresponding to tp2 

• Mr1: Peak material component 

• Mr2: Valley material component 

• RK: Core roughness depth 

• Rpk: Reduced peak height 

Filtered Bearing Ratio Analysis Plot 


173

• Rvk: Reduced valley depth 

• V1: Related to Rpk and MR1 

• V2: Related to Rpk and MR1 




Filtered Bearing Ratio Analysis Options 

Right click the Filtered Ratio Analysis plot and click Bearing Options to display the Bearing 

Ratio Options dialog box. The following options are available: 

D.6.4 Masking 



• Number of Bins: The bearing ratio calculation uses a histogram of heights. The number 

of bins specifies the number of equally spaced height intervals into which the data 

points fall. 

• Peak Offset: A percentage of the highest pixels in the dataset to be excluded from the 

analysis. 

• Valley Offset: A percentage of the lowest pixels in the dataset to be excluded from the 

analysis. 

• Upper (tp1): The peak threshold bearing ratio value, corresponding to the height H1 

Used to calculate the Htp height between bearing ratios (see Figure D.6j). 

• Lower (tp2): The valley threshold bearing ratio value, corresponding to the height H2. 

Used to calculate Htp (see Figure D.6j) 

• Set as Default: Check this box to define the current options settings as the default 

settings. Any subsequent bearing ratio measurement will be analyzed using these 

settings. 

• Show All Open Datasets: The histogram for the dataset in the active window is drawn 

in black. Histograms for all other open datasets are drawn in different colors on the same 

plot. This allows you to compare the actual distributions of multiple datasets. 

A mask, by temporarily eliminating regions of data from the display, enables you to focus on 

specific regions of interest for your analyses and to perform data modifications on specific portions 

of your data. You can also create a detector mask to mask detector pixels during a measurement. 

Once you have defined a mask, you can store it to disk for future use. 




Masks have a number of uses, including: 

Types of Masks 

Analysis Mask 

• Eliminating a bad spot from the sample surface (seen after data is taken). 

• Isolating a single area of the sample surface for repeated analyses. 

• Showing only those data points within a certain height range. 

• Fitting terms tilt, curvature, or cylinder terms to a region that you specify. 

• Eliminating detector pixel elements (while data is taken). 

An analysis mask enables you to block areas of data that could adversely affect your 

measurements. You can use an analysis mask to view or analyze specified portions of a dataset. 

With the analysis mask applied, the program eliminates the blocked data from the analysis, and the 

surface statistics change to depict the masked dataset. Retrieve data that was blocked by turning off 

the mask and re-analyzing the data. 

Terms Mask 

A terms mask acts like a filter, enabling you to define an area over which you can specify an area 

that more accurately defines a surface for terms analysis. Terms masks are typically used for 

surfaces with steps or other discontinuous features. For example, you can use a terms mask to 

perform a tilt, curvature, or cylinder terms fit. The fit performed on the masked area is then applied 

to the entire dataset. 

A terms mask is particularly useful when you want to fit terms to a surface that has an abrupt 

change. If you were to select tilt for terms removal, the resulting dataset would resemble a 

sawtooth. This is because the plane that best represents the data must take into account both planes 

forming the step. This "best fit" plane is approximately the average of the two plane surfaces; 

subtracting it produces the sawtooth. If you define a terms mask that covers only one side of the 

step, the terms fit will be based on the best fit plane over the flat part of the sample. 

Height Threshold (Histogram) Mask 

A height threshold mask blocks data points of a specified height or range of heights. This can be 

useful for looking at surfaces with features of distinctive heights. You can also use a height 

threshold mask to mask spikes that are not in the normal distribution of heights. When you create a 

height threshold mask, you examine a histogram of height data to determine which heights to mask. 


Detector Mask 



A detector mask blocks detector pixel elements during a measurement. This is useful for 

eliminating regions of the surface from the analysis, such as irrelevant background features. You 

can also use a detector mask to eliminate detector pixels that are defective and adversely affect your 

measurements. Note that unlike an analysis mask, a detector mask permanently eliminates data 

points from the raw data. The only way to “retrieve” these lost data points is to disable the detector 

mask and make another measurement of the same surface. 

Note: If you use the Data Restore function to restore data points that were included 

in the raw data but considered invalid for analysis purposes, the program will 

also attempt to restore the data points that were permanently blocked with the 

detector mask. 

Loading and Saving Masks 

To load and use an existing mask: 

1. Select Edit > Set New Measurement Masks. 

2. Locate the mask by clicking the BROWSE button next to the appropriate type of mask. 

3. Check the Apply Mask to Stored Data box to apply the mask. 

To save a mask to the current Configuration file, click SAVE from the Mask Editor window. 

Creating and Editing Masks 

Note: Analysis and terms masks are automatically saved with the dataset. Datasets are 

stored as raw data and processed data. If a mask is applied during analysis, the 

mask will be stored with the processed data. When you reopen the dataset, the 

mask can be reapplied to the dataset by turning on the mask. Remember that 

with a detector mask, masked regions of data are permanently blocked in the 

raw data. 

To create or edit Analysis, Terms or Height Threshold masks: 

1. Open a dataset. 

2. Select Edit > Edit Masks to access the Mask Editor Window. 

To create or edit a Detector Mask: 

3. Select Measurement Options > PSI Options. 

4. Click the EDIT DETECTOR MASK button to open the Detector Mask Editor window. 




You will use several cursor tools to create and change the mask. To use cursor tools, first select a 

cursor type from the Cursor pull-down menu. Move your cursor to the Mask Editor plot to begin 

creating a mask. 

For Local (Area) masks: 

Use the Crosshair tool to set an insertion point wherever you click on your plot. You can also drag 

to move the cursor point. Once you have an insertion point you can choose to perform functions to 

the selected Point of data, to data Above or Below the cursor, or to data to the Left or Right of the 

cursor. 

Use the four Area tools to create shapes within the mask area: 

• Rectangle: Press the left mouse button and drag to create a rectangular area. 

• Circle: Press the left mouse button and drag to create a circular area. 

• Ellipse: Press the left mouse button and drag to create an elliptical area. 

• Polygon: Place the mouse pointer over the location of one point on the polygon. Click 

to set your starting point, position the cursor and click once for each side you wish to 

create, then double-click to set the shape in place. A polygon can have up to 50 sides. 

After you've created an area, you can move it by holding down the Shift key while clicking and 

dragging it with the left mouse button. 

Note: By right-clicking in the Mask viewing region, you can select the size and the 

location of the mask to be displayed in pixels or in mm. 

You can also perform the following functions on an area: 

• Block: Block out sections of data. For example, if you are working with a circular 

cursor tool and you select Block, when you click on the INSIDE button the program will 

define a mask that blocks all the data inside the circle. 

• Pass: Allows data to pass through area(s) that may have been previously blocked. For 

example, if you create a blocked inner circle, select Pass, and then click on the INSIDE 

button, the program will define a mask that passes the data within the circle. 

• Invert: Used to invert the mask; exposed portions of your plot will be masked, and 

previously masked portions will be exposed. 

• Inside: Applies the selected function (Block, Pass, or Invert) to the inside of the area. 

• Outside: Applies the selected function to the outside of the area. 

• Entire: Applies the selected function (Block, Pass, or Invert) to the entire mask. May 

be used at any time as long as a cursor tool is not in the process of being created. To 

erase the current mask you can select Pass and then click on Entire. 




• Undo: Used to undo the most recent change made to the mask currently defined in the 

Mask Editor. 

With a mask visible in the mask editor window, select Mask Outline to create an outline of the 

mask on the dataset. You can then modify the identical, outlined mask. This is useful when you are 

making measurements of samples in which identical features from sample to sample vary slightly 

in size or position. 

For Height Threshold (Histogram) Masks 

The Height Threshold editor shows you a histogram of the height distribution for your sample. You 

have the option to create a high pass, low pass, or range pass mask. 

1. Select the number of cursors you wish to use—one cursor for a high or low pass mask, and 

two cursors for a selected range. 

2. If using one cursor, place your cursor at the cutoff point, then select Left (to mask all data 

left of the cursor, lower than the cutoff) or Right (to mask all data right of the cursor, higher 

than the cutoff). 

3. If using two cursors, place the two cursors at the cutoff points and select Outside (to mask all 

data outside the cursor range) or Inside (to mask all data inside the cursor range). 

4. Press Mask. The editor will mask the selected region(s) and adjust the histogram 

accordingly. You can repeat this process as many times as desired on the same histogram. 

Selecting Mask Views 

In the Mask Editor, you can select from three View options: 

• Select Data to see data wherever the mask is set to Pass. 

• Select Mask to view the mask itself. 

• Select Data & Mask to view the data and mask in four color sets. Data appears as either 

good or bad, as follows: 

• White indicates that data is good and unmasked. 

• Green indicates that data is good and masked. 

• Black indicates that data is bad and unmasked if a detector mask is not applied. If a 

detector mask is applied, black can indicate bad and masked data. 

• Red indicates that data is bad and masked. 




Selecting Data Displays 

In the Mask Editor window you can choose to display data before or after processing. 

Select Raw to see the data in its unprocessed state, without any terms applied. When making 

changes to a mask that has already been applied, raw data is sometimes better to use because the 

analysis mask has not been applied to it. 

You can also view Processed data that has had masks, terms, or other options applied to it. 

Saving Masks 

Terms, analysis and detector masks can all be saved independently of a dataset. By saving a mask 

separately from the data, you can use the same mask to apply to different datasets. 

To save a mask, open the Mask Editor and select To/From Disk from the Current Mask pulldown 

menu. Click Save and enter a file name for the mask. The mask will be saved into the 

specified directory with a .msk extension. 

Applying Masks and Filters 

After a mask has been created and saved, you can use the mask for measurements and data 

analysis. 

To Apply a Detector Mask: 

1. Select Edit > Set New Measurement Mask. 

2. Enter the path and file name of your saved detector mask in the appropriate slot (or choose 

Browse to determine the location of your mask). 

3. Close the Mask Editor. 

4. Select Hardware > Measurement Options > PSI Options. 

5. Check the Use Detector Mask box. 

To Apply an Analysis or Terms Mask to a New Measurement: 

1. Select Edit > Set New Measurement Mask. 

2. Enter the path and the file name of your saved mask in the appropriate slot (either Terms 

Mask or Analysis Mask). You may use the BROWSE button to determine the location of your 

mask. 

3. Close the Mask Editor. 



Dataset vs. Database 

4. Select Analysis > Processed Options to access the Processed Data Options dialog box. 

5. Check either the Use Analysis Mask or Use Terms Mask box. 

6. Select any terms to be removed, if applicable. Filtering, data invert, and data restore options 

can also be selected. 

7. Click OK to close the dialog box. 

With this configuration, all new measurements taken will have the selected mask applied. 

To Apply a Saved Analysis or Terms Mask to an existing (unmasked) dataset: 

1. Select Edit > Edit Mask. 

2. In the Current Mask pull-down menu, select To/From Disk. 

3. Click Load. 

4. Select your mask and press OK. 

The selected mask will be applied to the current dataset only. 

Saving a Mask to a Configuration File 

1. Create the mask. 

2. Select On and press SAVE. This will save the current mask, but will not permanently save the 

mask to the configuration file or to the disk. 

3. Select File > Save Configuration to save the mask to the current configuration file. 

D.7 Dataset vs. Database 

When you make a measurement, the system determines the height of every point on the sample. 

This data is the height profile, also known as the raw data. Dektak Vision analyses this raw data to 

determine the pertinent parameters. 

You can store data and parameters in two forms through Dektak Vision: datasets and databases. 

Datasets allow you to view snapshots of your process. Databases allow you to store data over time 

and to view trends in your process. 

A database stores analysis parameters from one measurement or from many measurements. 

Dektak Vision database files are comma-separated-variable files with .csv extensions. Raw data is 

not recorded in a database. 




The analysis options available for the data in the form of a dataset may also be recorded in a 

database, allowing you to compile long-term data or to apply various statistical analysis to your 

data. 

D.7.1 Dektak Vision Databases 

Once you have performed a measurement you can store the results to a Vision database. The basic 

steps to working with a database are: 

1. Define a database and the fields within it. 

2. Select and activate the database. 

3. Select whether to log data automatically or manually. 

4. Decide whether to add the contents of the current database to a master database. 

5. View or print the results of the database file. 

Click the DATABASE OPTIONS button (see Figure D.7a) on the toolbar to open the Database 

Options dialog box (see Figure D.7b). Here, you can reach most of the database functions. 

Figure D.7a Database Options Button 

Figure D.7b Database Options Dialog Box 


152

Defining a Database 



To work with a database, you must first define the database file to use. If no database file exists, or 

if you need parameters that differ from those in existing database(s), you will need to define a new 

database: 

1. Click the DATABASE OPTIONS button on the toolbar. 

2. Click the DEFINE button to open the Define Database dialog box. 

Figure D.7c Define Database Dialog Box 

3. The fields available for use in the database are listed in the left-hand column. The right-hand 

column will display the fields in the new database. The fields will be organized either 

alphabetically or by the analyses that create them. (Click Display All Entries to switch 

between the two views). 

4. Select a field in the Available Entries column, then use the ADD button to move it to the 

Selected Entries column. You can also double-click a field to move it to the Selected 

Entries list. 

5. To add fields from an existing database, click the TEMPLATE button, then select an existing 

database file. All fields in that database will be added to the Selected Entries column for 

your new database. The template option is particularly useful when you are creating a master 

database file. 

Note: All database file(s) used to update the master database must have the same 

fields as the master database. 

6. To remove a field from the database, choose the field in the right-hand list and click Delete. 

You can also remove a field by double-clicking on it, or remove all fields by clicking Delete 

All. 


153



7. Click the UNITS button to open the Database Units dialog box (see Figure D.7d). Here, you 

can set database values for default, metric, or English units. Results logged to the database 

will appear in the selected units. 

Figure D.7d Database Units Dialog Box 

8. Once you have defined the database, click OK, then specify a name for the file. 

Pass/Fail Criteria for Database Fields 

You can enter Pass/Fail criteria for each field in the database. All Pass/Fail criteria will be stored 

with the database. 

1. Click Pass/Fail from the Database Options dialog box to open the Define Pass/Fail dialog 

box (see Figure D.7e). 


154

Figure D.7e Pass/Fail Dialog Box. 

2. From the Parameter list, select the field for which you want to set pass/fail criteria. 

3. Type in the tolerances for the upper and/or lower limits. 

4. From the Pass pop-up, select when the part should be passed or failed: 

• Always Always pass the part (such as no pass/fail criteria). 

• < Pass if the measurement is less than the tolerance. 

• Pass if the measurement is greater than the limit. 

• => Pass if the measurement is greater than or equal to the tolerance. 

5. Repeat for each field that requires Pass/Fail criteria. 

Select and Activate a Database 

Once you have defined a database, you must select it for use and activate it, as follows: 

1. Click the DATABASE OPTIONS button on the toolbar. 

2. Type in the database path and name under Current Database, or click SET to locate the 

database file. 

3. Click OPEN to select the database. 

4. Click the Database Active check box to activate the database. 




174



5. To deactivate the database, click to clear the Database Active check box. 

Logging Data to a Database 

When you are making measurements from within Dektak Vision, you can decide to store 

measurement results automatically, semi-automatically, or manually: 

• Automatic Logging: Automatically stores the results to a database when you close a 

dataset. This is the default mode. 

• Semi-Automatic Logging: When you close a data set, asks you whether you wish to 

store results. To enable this mode, select the Prompt to Save check box in the 

Database Options dialog box. 

• Manual Logging: Stores results to a database only when you specifically request it. To 

manually log to a database, first make sure the data set from which you want to log data 

is open as the active window. Then select Options > Log to Database Now from the 

main Dektak Vision window. Statistics and other information for the active data set will 

be logged to the database. 

Using a Master Database 

Note: When one or more data sets are open, the Option menu will contain the Log to 

Database Now command. If a database has been activated and the current data 

set has not been logged, this command will be available for use. Select this 

option to add the current dataset to the database. 

A master database collects data from one or more databases. As you learned earlier, Dektak Vision 

can gather per-part measurement results into a database which can be used for statistical process 

control. You can also create and use master databases when you make measurements from within 

Dektak Vision. 

Master database files and current database files should use the same template to ensure consistency. 

To make sure the files are consistent, when you define a new master database file, use the 

TEMPLATE button to copy the template of the current database to the new master database. 

To work with a master database: 

1. Click the DATABASE OPTIONS button on the toolbar to access the Database Options dialog 

box. 

2. Select and activate the Current Database file you want added to the master database file. 

3. Either type in a Master Database path and file name, or click the SET button to open the 

Select a Database File dialog box where you can then choose a master database file. 

4. If you want the contents of the current database to be automatically printed after the master 

database is appended, select the Auto Print check box. 




5. If you want the contents of the current database to be automatically erased after the master 

database is appended, select the Auto Clear check box. This option erases logged data, so be 

sure you use it judiciously. 

6. Click the UPDATE button to append the master database with the contents of the current 

database. The current database values are appended to the end of the master database. 

Viewing or Printing a Database File 

You can view a database file on your computer monitor. Or, you can print a hard copy of your 

database file using two different formats. 

Viewing a Database File 


box. 

2. Click the LIST VIEW button to open the Select Database dialog box where you can choose a 

database to view. 

3. Make your selection and click Open. Dektak Vision will display a Database List View of 

the selected file. List view includes the name of the database file, logged parameters, 

statistics, and pass/fail information (see Figure D.7f). 

Figure D.7f List View of a Database 


175



Note: To display database results automatically in list view when you open a 

configuration (.ini) file, select the Display List View w/ Open Configuration 

check box in the Database Options dialog box. Save your configuration. 

You can also choose to view one or more of the fields as a graph or histogram. These options are 

available from the View menu in List View. 

For more information on using the list view options, refer to the Dektak Vision Online Help. 

Printing a Database File 


box. 

2. Click the LIST VIEW button to open the Select Database dialog box where you can choose a 

database file for viewing. 

3. Make your selection and click Open. Dektak Vision will display a List View of the selected 

file. 

4. From the database list view pull-down menus, select either File > Print All or File > Print 

Stats. If you select Print All, all logged parameters and their statistics will be included. If 

you select Print Stats, only the statistics will be included. 

Note: Following an automated measurement, the operator can click the PRINT button 

on the operator interface to print the results. Remember that you can also set up 

the system to automatically print results following each measurement. 


Appendix E N-Lite Option 


• Introduction: Section E.1 

• Main Functions: Section E.2 

• Advanced Users: Section E.3 

• Configuration File Setup: Section E.4 


N-Lite Option 

Introduction 

E.1 Introduction 

The N-Lite LIS 3 Option allows stylus-to-surface engage routine for ultra low force profiling. The 

sensor enables stylus force to be adjusted down to 0.03mg force for measuring very soft films or 

when using a very sharp, sub-micron stylus to measure sub-micron lines and trenches. 

The N-Lite LIS 3 Option includes the following characteristics: 

• Low force servoed sample engage. 

• Force range: 0.03mg to 2.0mg. 

• Reduced pre-scan stylus touch-down. 

• Does not alter the user interface. 

• Dektak 8 implicitly invokes N-Lite for scans less than 2mg. 

• Accurate measurement force: ± 20µg. 

• Vertical positioning accuracy: ± 0.20µm. 

• Automatic force calibration. 

CAUTION: To avoid damage to the stylus, do not use a stylus larger than 

2.5µm with the N-Lite option. 


E.2 Main Functions 

N-Lite Option 

Main Functions 

Three functions of the N-Lite option distinguish it as a necessary tool to produce very low, accurate 

forces for any sensor position: 

Servoed Engage 

• Servoed Engage 

• Fine Positioning 

• Stylus Retouch 

The servoed engage is designed to prevent the stylus from traveling across the sample surface 

during tower engagement. This significantly reduces the traverse distance and forces exerted on the 

sample surface. It is especially useful in preventing damage to soft samples with extremely sharp 

styli. By default, N-Lite is designed to limit stylus travel, following contact, to no more than 5µm 

vertically during the servoed engage. 

Fine Positioning 

Fine positioning precisely locates the sensor relative to the sample surface. During this operation, 

the servo is disabled, and the force is set to the minimum value necessary to remain on surface. 

There is a small amount of stylus traverse during this phase of the engage. 

Stylus Retouch 

The retouch accurately establishes the true minimum force necessary for the stylus to engage the 

sample surface. During this phase there is no profiler tower motion. The stylus lifts from the sample 

surface and then lowers to (retouches) the sample surface with the minimum possible force. This 

“minimum,” “zero,” force is used to dynamically shift the force calibration curve when applying 

the final scanning force, thus providing automatic force calibration. Since the retouch compensates 

for thermal and electrical drift in the sensor force mechanism, very precise forces (within ±20 µg) 

are possible. 

Due to the very low forces achievable with N-Lite, it is possible for the sensor to have limited 

downward travel from the final engage (null) position. This is because the sensor mechanism is a 

balanced pivot arm, with the balance point set so that the zero-force-coil position of the stylus rests 

at its upper stop. The force coil is energized to bring the stylus down into visibility and apply scan 

forces. Even though the jewel bearings used for the sensor pivot are effectively friction free, it still 

takes a small fraction of a milligram of force to swing the pivot-arm across the measurable range. 

When engaging N-Lite, it is possible for the sample surface to “disappear” below the reach of the 

stylus during scanning. As discussed above, at very low forces the stylus has limited downward 

travel from the final engage (null) position. Due to these sensor physics, proper use of the tool 

requires that the user: 


N-Lite Option 

Main Functions 

1. Carefully level the sample to prevent “walk away” from the stylus. 

2. Run tests and carefully level for map scans to prevent data distortion or loss. This problem 

will be evident when the sample “walks away” from the stylus on individual, intermittent, 

scans in the map. 

3. Specify and test scan forces adequate to deflect the stylus to the bottom of all depressed 

sample features to prevent the detail of these features becoming lost in temporary, 

unintended disengages. 

4. Know and understand the expected sample/scan shape, ensuring that measured data are 

correctly understood and evaluated. 

With proper use, N-Lite is a reliable feature of the Dektak tool. 

If you are unsure of how to make a particular measurement, or are experiencing difficulties, please 

contact Veeco Applications Support for assistance in designing specific tests to measure, quantify, 

and qualify your processes. 


E.3 Advanced Users 

E.3.1 N-Lite Algorithm Configuration File Entries 

N-Lite Option 

Advanced Users 

Note: In this version of Dektak 8 software, the N-Lite algorithm configuration file 

entries are stored in an algorithm specific initialization file. However, in 

future software releases these entries will be stored in the hardware 

initialization file. 

The N-Lite algorithm behavior is controlled by 43 parameters stored in the N-Lite configuration 

file. These parameters control all aspects of the algorithm: 

• Time limits 

• Motion 

• Stylus behavior 

• Measurement specifics 

• Performance and tuning 

Note: The default values used by the Dektak 8 system were tested and performed 

well for most scanning conditions. If your sample or measurement 

requirements are unusual, please consult Veeco Technical Support for 

assistance with tuning your system. 

In general, the only desirable tuning of the algorithm is an update of the “K 0” parameter of the 

servo PID. This parameter is discussed, below, in the Configuration File Setup section. 

E.3.2 Stiction Problems 

Static electricity is generally responsible for stiction problems during the retouch phase. Adjusting 

the “timeout” and “lift increment” parameters can help alleviate this problem. In this case, however, 

the system and sample grounding must be checked. If necessary, perform the following: 

1. Install the Dektak 8 Enhanced Grounding Kit. 

• This kit is for retrofit and upgrade systems only. 

• Verify the tool’s grounding following installation. 

2. Verify that the system is properly grounded to the site. 

3. Using a digital volt meter (DVM), verify that the system grounding is functioning properly. 


N-Lite Option 

Advanced Users 

4. Verify that appropriate grounding equipment is available and in use: 

• Static discharge mats 

• Wrist straps 

• Others 

5. Use proper sample handling. 

6. Mount an alpha-particle source on the system 

• Mount the source as close to the stylus tip as possible. 

• The source should not interfere with the sample or profiler mechanics. 

For all other issues, contact Veeco Applications or Technical support. 


E.4 Configuration File Setup 

N-Lite Option 

Configuration File Setup 

After installing the N-Lite software, you will need to configure your system tuning parameters to 

run the algorithm correctly. 

E.4.1 N-Lite Configuration File 

During N-Lite installation, several N-Lite initialization file parameters will move to the 

initialization file specific to your profiler. For example, if you have a D8p1000 these nLite.ini file 

parameters can now be found in [D8p1000.ini]. 

You can use any editor with text file compatibility to view and edit the sample configuration file 

(see the Notepad example below). Irrespective of the editor you use for the file, you must save it in 

text or ASCII file format. In general, word-processor formats will not work with the Dektak 

control software. 

Notepad 

1. Open Notepad by clicking Start > Programs > Accessories > Notepad. 

2. Select File > Open to open the Open dialog box. 

3. In the Open dialog box, select All Files under Files of type. The N-Lite configuration file 

will display in the selection window. 

4. Locate the N-Lite configuration file and highlight the file name. 

5. Click OPEN to open and edit the file. 

E.4.2 Hardware Configuration File 

Once you have the N-Lite configuration file open, open the hardware configuration file for your 

profiler. This file is also located in the Dektak binaries directory. Using a text editor, follow one of 

the procedures given for the N-Lite configuration file to open this file as well. The configuration 

file for your system is named based on the model number of the profiler, specifically: 

• .INI 

For example, if your profiler is a D8p1100, the hardware configuration file is named: D8p1100.INI 

Although you have opened this file, you will need to make no changes to it. 

1. Copy the hardware configuration value from the D0 entry of the [FORCE- 

CALIBRATION] section to the servo K0 (dac) entry of the appropriate section of the 

N-Lite configuration file. 


N-Lite Option 


2. Save and close the N-Lite configuration file. 

3. Close the hardware configuration file. Do not save this file. 

E.4.3 Configuration File Example 

The following is an example configuration file which implements the defaults for the d8p1100 

profiler: 

[d8p1100] 

algorithm timeout (msec)=120000 

algorithm retry limit (count)=8 

start phase timeout (msec)=200 

retract phase timeout (msec)=2000 

retract tower pulse period (tic/pulse)=4 

retract tower time (msec)=500 

stiction phase timeout (msec)=250 

servo phase timeout (msec)=4000 

servo goal (lvdt)=2048 

servo goal error (lvdt)=125 

servo run (sample)=300 

servo K0 (dac)=18176 

servo Kd [char] (dac-sample/lvdt)=3 

servo Kd [expt] (dac-sample/lvdt)=0 

servo Ki [char] (dac/lvdt)=-16777 

servo Ki [expt] (dac/lvdt)=-24 

servo Kp [char] (dac/lvdt)=-26214 

servo Kp [expt] (dac/lvdt)=-18 

proximity phase timeout (msec)=200 

proximity pulse period (tic/pulse)=4 

slow engage phase timeout (msec)=80000 

slow engage startup pause (msec)=200 

slow engage threshold (lvdt)=1250 

slow engage pulse period (tic/pulse)=16 

restore force phase timeout (msec)=200 

restore range identifier=3 

zero phase timeout (msec)=4000 

zero phase startup pause (msec)=200 

zero phase target (lvdt)=32767 

zero phase pulse period (tic/pulse)=32 


null phase timeout (msec)=8000 

null phase target (lvdt)=32767 

null phase pulse delay (msec)=5 

retouch phase timeout (msec)=10000 

retouch delay (msec)=500 

retouch lift delay (msec)=50 

retouch lift increment (dac)=32 

retouch lift offset (lvdt)=4096 

retouch top pause (msec)=500 

retouch touch delay 0 (msec)=50 

retouch touch delay 1 (msec)=100 

retouch touch error (lvdt)=1000 

retouch touch increment (dac)=16 

retouch touch offset (lvdt)=4000 

force phase timeout (msec)=200 

force value (dac)=2243 

N-Lite Option 



Index 

Symbols 

.cdf files 296 

.opd files 289 

.wdf files 295 

Numerics 

2D Analysis 301 

3D 305 

3D Interactive 304 

3D Plot 305 

A 

Abort 94 

Acoustics 18 

Air Pressure Connector 34 

Air Vacuum Connectors 34, 40 

Alignment 

High Mag Camera 245 

Low Mag Camera 243 

Analyses 298 

Analysis 

Custom Display file 296 

Analysis Mask 312 

Analytical Functions 13 

assigning keystrokes 47 

deleting functions or results 147 

entering into a scan routine 146 

measuring and entering 145 

Analytical Functions Description 128 

Analytical Functions Dialog Box 128, 204 

Area (Area-Under-the Curve) 136 

ASH (Delta Average Step Height) 135 

Auto Prog Summary Window 

edit menu 206 

Auto Prog Summary Window Menu 206 

Automatic Leveling (Step Detection) 268 

Automation Program 12 

description 96 

editing 98 

opening 96 

running with deskew points 123 

saving 93 

Automation Program Options 109 

data file/data export 109 

pause during autoprogram 117 

printer 116 

Automation Program Summary (APS) 112 

Automation Program Summary Window 113 

Automation Programs Window 

edit menu 191 

Automation Programs Window Menu 191 

Avg Ht (Average Height) 135 

B 

Boundaries 

saving 90 

Boundaries Submenu 204 

Boundary Magnification 13 

C 

Calculate button 296 

Calibration 

Vertical 220 

Calibration Menu 186 

Calibration Standards 11 

Camera 

color 10 

Camera Field of View 10 

Camera View Pane 58 

CDF file 296 

Clean Dry Air 18 

Clean Room 18 

Coarse Positioning 12 

Color Camera 10 

Computer Cable Connections 39 

Computer Console 7 


Index 

Configuration 7 

Configuration File 

N-Lite 329, 331 

Configuration Settings 

Appearance folder 180 

Diagnostics folder 182 

Illumination folder 183 

Shortcuts folder 182 

Working Directories folder 181 

Configuration Settings Dialog Box 180 

Contour Plot 298 

Contract 

Service 248 

Creating master database 319 

Custom display file 296 

Edit 296 

Open 296 

Save 297 

Customize Toolbar Dialog Box 207 

Customizing the Toolbars 207 

Cutoff Filters 

entering in scan routine 142 

D 

Data Plot Display 13 

Data Plot Window 

analysis menu 204 

edit menu 201 

Data Plot Window Menu 201 

Data Points Per Scan 9 

Data Processing 168 

filter cutoffs 168 

smoothing 169 

Data Restore 293 

Data Type 

displaying 167 

entering in scan routine 144 

Database 

.csv format 318 

Creating master database 322 

Current database 322 

Defining 319 

defining (creating) 319 

Internal 318 

List View 323 

Logging Options 322 

Master database 319, 322 

Master database, Defining fields 319 

Pass/Fail criteria 320 

Printing 323, 324 

Selecting 321 

Standard display file 295 

Viewing 323 

viewing or printing 323 

Dataset 289 

Default Menu Bar 172 

Default output file 297 

Deflection Scan 162 

Deskew 119 

Deskew Offsets 

clearing 124 

Deskew Points 

clearing 124 

establishing for automation program 120 

establishing for scan routine 121 

factors that affect accuracy 119 

program 119 

scan 119 

Detection Range (Step Detection) 267 

Detector Mask 313 

Dimensions 10 

Display Parameters 165 

display data type 167 

display range 167 

reference/measurement cursors 166 

software leveling 165 

Display Range 167 

Dual Switchable Video Camera 7 

E 

Editing Scan Routines 104 

analytical functions 106 

data processing settings 105 

display parameters 105 

global editing 106 

scan parameters 104 

Environmental Humidity 10 

Equipment Damage 

Symbol 3 

Exclude Selected Scan Results 113 

Extended Scan Option 11 

Extended Vertical Range 11 

Extended Vertical Range Option 

setting vertical calibration 232 

F 

Facilities Requirements 18 

Feature Reticle Alignment 65 

Feedback 


service 251 

File Menu 174 

new command 174 

Filter 

applying 316 

Filter Cutoffs 168 

Filtered Bearing Ratio Analysis Plot 309 

Filtered Histogram 307 

Filtering 290 

High Pass 291 

Low Pass 291 

Median Pass 291 

Floor 18 

Focusing 


Low Mag Camera 244 

Force 

Stylus Tracking 10 

Force Calibration Dialog Box 186 

G 

Geometry Parameters 136 

Area 136 

Perim 136 

Radius 136 

Slope 136 

Sm 136 

Tp 136 

Volume 137 

Global Edit Mode 106 

Graphical plots 


Default output file 297 

H 

Hardware Configuration File 

N-Lite 331 

Height Average 

ten point (Rz_din) 132 

Height Parameters 

ASH 135 

Avg Ht 135 

HSC 135 

P_V 135 

Pc 135 

Peak 135 

TIR 135 

Valley 135 

Height Threshold 312 

Help 5 

Help Menu 190 

High Mag Camera 

Alignment 245 

Focus 246 

Rotation 246 

High Spot Count (HSC) 135 

Horizontal Resolution 9 

HSC (High Spot Count) 135 

I 

Icons 

Attention 3 

IEC-320 Power Cord 35 

Illumination 

sample 10 

Interactive 3-D Software 11 

L 

Leveling 

software 10, 165 

stage 10 

Leveling (Step Detection) 

automatic 268 

Linear Variable Differential Transformer 6 

Low Mag Camera 

Alignment 243 

Focus 244 

M 

Maintenance 

Dektak 8 exterior 219 

preventative 218 

stage 218 

Teflon Pads 219 

Manual Theta Rotation 61 

Masking Options 292 

Masks 

Analysis 293, 312 

applying 316 

creating and editing 313 

data displays 316 

Detector 313 

Height Threshold 312 

loading and saving 313 

saving 316 

saving to configuration 317 

Terms 293, 312 

types 312 

views 315 

Master Database 322 

Index 


Index 

Maxdev (Maximum Deviation) 129 

Maximum Sample Thickness 10 

Maximum Sample Weight 10 

MaxRa (Maximum Ra) 129 

Measurement Cursor 166 

Measurement Range 159 

Microsoft Windows 44 

Microsoft Windows XP 7 

Monitor Cable Connections 38 

N 

New Command 174 

N-Lite 11 

Algorithm Configuration File 329, 331 

Configuration File Example 332 

Fine Positioning 327 

Hardware Configuration File 331 

Servoed Engage 327 

Stiction 329 

Stylus Retouch 327 

O 

OPD Files 289 

Opening Saved Scan Data Plot 111 

Operating Temperature 10, 18 

Operation Overview 12 

Optics Illumination Adjustment 62 

Option 

calibration standards 11 

Extended Vertical Range 11 

N-Lite Software 11 

Vacuum Chuck 11 

Vibration Isolation Table 11 

Optional Theta Encoder 37 

Options and Accessories 11 

P 

P_V (Maximum Peak to Valley) 135 

Pc (Peak Count) 135 

Peak (Maximum Peak) 135 

Peak to Valley 

maximum (P_V) 135 

Peaks 

mean spacing between (Sm) 136 

Perim (Perimeter) 136 

Personal Injury 

Symbol 3 

Plot Data Type dialog box 202 

Position the Sample 

coarse 12 

Power Connection 18 

Power Demand 18 

Power On 49 

Power Requirements 10, 18 

Power Supply Setting 34 

Powering Down 67 

Precision Scan Head 7 

Preventative Maintenance 218 

Principle of Operation 6 

Printer Selection 5 

Printout 92 

Processed 289 

Processed Options 289 


Filtering 290 

Masking Options 292 

Terms Removal 290 

Profile 160 

Profile Manipulation and Measurement 13 

Profiler Menu 178 

Program Entry 99 

Programmable X-Y Positioning 7 

Property Damage 

Symbol 3 

Q 

Quick-Access Menu 51 

R 

Ra (Average Roughness) 129 

Radius 136 

Reference Cursor 166 

Reference Material 5 

Relative Humidity 18 

Repairs 

Major 248 

Replacement Parts 255 

Re-Run Selected Scan Routines 114 

Restore Boundaries Dialog Box 204 

Rotation 


Roughness 

average (Ra) 129 

Roughness and Waviness Filters Dialog Box 205 


Maxdev 129 

MaxRa 129 

Ra 129 

Rp 130 

Rq 130 

Rt 131 


Rv 131 

Rz_din 132 

Skew 132 

Rp (Maximum Peak) 130 

Rq (Root-Mean-Square) 130 

Rt (Maximum Peak to Valley) 131 

Run Menu 176 

Rv (Maximum Valley) 131 

Rz_din (Ten Point Height Average) 132 

S 

Safety Hazards 

Attention 3 

Sample Illumination 10 

Sample Loading 56 

Sample Positioning 12 

Sample Positioning Window 56, 57 

additional menu selections 195 

deskew menu 197 

pop-up menu selections 197 

Sample Positioning Window Menu 195 

Sample Stage Diameter 10 

Sample Stage Rotation 10 

Sample Stage Translation 10 

Save Boundaries Dialog Box 204 

Saved Boundaries 

restoring 91 

showing 90 

Scan 

Extended Option 11 

Scan Data 

opening 111 

Scan Duration 155 

Scan ID 152 

Scan Length 154 

entering 73, 100 

Scan Length Range 10 

Scan Location 153 

entering 73, 100 


stylus type 153 

additional parameters 161 

deflection scan 162 

measurement range 159 

profile 160 

scan duration/speed 155 

scan ID 152 

scan length 154 

scan location 153 

scan resolution 156 

scan type 157 

stylus force 158 

Scan Resolution 156 

Scan Routine 12 

running 76 

Scan Routine Menu 

edit menu 195 

Scan Routines Window 

edit menu 193 

Scan Routines Window Menu 193 

Scan Speed 155 

Scan Speed Ranges 10 

Scan Speeds 8 

Scan Storage Data Requirements 9 

Scan Type 157 

Scanning 12 

Serial-to-USB Adapter Cable 36 

Service Contract 248 

Servoed Engage 

N-Lite 327 

Set Bandwidths dialog box 203 

Setup 56 

Setup Menu 180 

Side Bar Buttons 14 

Skew (Skewness) 132 

Slope 136 

Sm (Mean Spacing Between Peaks) 136 

Smoothing 169 

Smoothing Dialog Box 205 

Smoothing Function 148 

activating 149 

entering into scan routine 150 

Software Interface 44 

Software Leveling 10, 165 

Stage Control 44 

Stage Leveling 10 

Stage Rotation 

optional programmable theta 62 

Standard display file 295 

Standard Plots 298 

Start Sequence 49 

Startup Window 50 

Step Detection 265 

automatic leveling 268 

Index 


Index 

detection range 267 

performing on a single scan 273 

programming into a scan routine 274 

programming on multiple scans 274 

setup 273 

Step Height 

delta average 87 

Stiction Problems 

N-Lite 329 

Stress 

constraints and limitations 264 

results 263 

Stress Measurement Software 11 

Stress Parameters 

entering 262 

Stylus 10 

cleaning 241 

lowering/raising 62 

replacing 237 

replacing and tip cleaning 237 

type 153 

Stylus Force 158 

Stylus Reticle Alignment 63 

Stylus Retouch 

N-Lite 327 

Stylus Size 8 

Stylus Tracking Force 10 

Substrate Characteristics 

identifying 260 

Surface Block Bracket 31 

Symbols 

Attention 3 

System 15 

System Menu 

system menu bar 172 

System Menu Bar 172 

System Tray Quick-Access Menu 51 

T 

Technical Specifications 10 

Teflon Pads 

replace 219 

Temperature 

During Operation 18 

Template Selection 56 

Terms Mask 312 


Curvature and Tilt 290 

Cylinder and Tilt 290 

Tilt 290 

Use Analysis Mask 293 

Use Terms Mask 293 

Theta Rotation 

Manual 61 

Tip 

cleaning 241 

TIR (Total Indicated Reading) 135 

Toolbar 

Automation Program Summary window 215 

Automation Programs window 209 

customizing 207 

Data Plot window 214 

database options 

selecting a database 321 

New Measurement icon 297 

Sample Positioning window 212 

Scan Routines window 211 

Startup window 208 

Toolbars and Icons 207 

Tp (Bearing Ratio) 136 

Tracer 16 

Trackball 44 

V 

Vacuum 18 

Vacuum Chuck 11 

Valley 

maximum (RV) 131 

Valley (Maximum Valley) 135 

Vertical Calibration 220 

clearing 233 

extended vertical range option 232 

Vertical Range 10 

Vertical Resolution 10 

Vibration 18 

Vibration Interference 18 

Vibration Isolation Table 11 

Video Monitor 7 

Video Overlay 

adjusting 247 

Vision32 

Analyses 298 


Database 319 

Activating 321 

Defining 319 

List View 323 

Pass/Fail criteria 320 

Printing 323, 324 

Viewing 323 


Database, Defining fields 319 

Processed Options 289 


Filtering 290 

Masking 292 


Standard Plots 298 

2D Analysis 301 

3D Interactive 304 

3D Plot 305 

Contour Plot 298 

Filtered Bearing Ratio Analysis 309 

Filtered Histogram 307 

Toolbar 285 

Vision32 Toolbar 

Lab mode 285 

Production mode 285 

Volume 137 

W 

Wa (Arithmetic Average of Waviness) 133 

Warm-up Time 10 

Warranty 

claims for shipment damage 251 

service 251 


Wa 133 

WMaxdev 133 

Wp 133 

Wq 133 

Wt 133 

Wv 134 

WDF file 295 

Window Menu 189 

WMaxdev (Maximum Deviation of Waviness) 

133 

Wp (Maximum Peak of Waviness) 133 

Wq (Root-Mean-Square of Waviness) 133 

Wt (Maximum Peak to Valley of Waviness) 133 

Wv (Maximum Valley of Waviness) 134 

X 

X-Y and Fine Stage Position Adjustments 66 

Z 

Zero Point 

setting 86 

Index

Dektak 8 Advanced Development Profiler Manual

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