Use of MicroManipulator 6400 Probe Station - Login | Nanolab, UCLA

PREPARED BY:
REVISED BY:
Superusers:
Use of MicroManipulator 6400 Probe Station
Thomas Szkopek DATE
Steve Franz, Lab Manager
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DATE
Extension
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x
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02/04/03
07/01/03

1.0 SCOPE
Use of M&M 6400 Probe Station
This document establishes the procedures for DC semiconductor device measurements
using the HP4145B parameter analyzer and Micromanipulator probe station located in the
UCLA nanolab.
2.0 APPLICABLE DOCUMENTS
Parameter Analyzer Logbook and Maintenance Logbook
M & M Probe Station Instruction Manual
HP 4145 Operation Manual
3.0 MATERIALS AND EQUIPMENT
HP4145B semiconductor parameter analyzer
Micromanipulator 6400 manual probe station
Low frequency probes.
Probe tips, 0.007” or 0.002” diameter.
Tweezers
HP System Disk (Floppy)
Data Disk (optional)
4.0 GENERAL
Measure only clean samples at the probe station. Exercise caution when moving probes or
stage as the tips are very delicate.
5.0 PROCESS PREPARATION
System Power Up
5.1.1 Verify the previous entry in the logbook does not indicate any problems
Refer to Figures 1, 2, and 3 for location of switches, levers and knobs.
5.1.2 Switch on the Micromanipulator translation stage by depressing the yellow
power button. The power indication LED should illuminate red.
5.1.3 Switch on the power to the stage vacuum pump located on the floor to the
left of probe station.
5.1.4 Rotate the microscope lamp power knob to desired brightness (usually a
setting of 1 or 2 is bright enough).
5.1.5 Ensure the HP4145B boot disk is in the disc drive of the HP4145B. Switch
on the HP4145B with the LINE button.
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. 6.0 PROCEDURE
6.1
Wafer Loading and Probe Contact
6.1.1 Use the lever to raise the probe table being careful not to collide the tips with
the microscope objective. If necessary, move the probes out of the way
first.
6.1.2 Ensure that the micromanipulator stage is clean, free of debris and the stage
vacuum is off. Carefully load your substrate which must be clean and free
from dirt, photoresist etc onto the stage with tweezers. Flip the vacuum
switch located at the left side of the station to apply suction. Vacuum is not
necessary for small substrate pieces. If a loud hissing noise is heard or your
sample is not being held down tightly, reposition your sample on the chuck
or clean the backside of your sample.
6.1.3 There are 3 probe arms. Select the probes to be used and gently swing them
into position under the microscope approximately where you want them.
MAKE SURE THE TIPS ARE UP BEFORE DOING THIS. Probes are
magnetically held to the platen.
6.1.4 Select the lowest magnifying objective, 2.5x (blue) to start.
6.1.5 Lower the probe table carefully with the table lever, taking care that the
probe tips do not make contact with your sample. You must depress the
white button on the table lever in order to unlock it BEFORE lowering
probe table.
6.1.6 Use the thumbwheel knob below the eyepiece to adjust eyepiece separation
to your eyes.
6.1.7 Adjust the microscope focus and zoom (1x) to obtain a view of your sample
with the largest field of view. The lateral microscope position can be
adjusted with the large black knobs located on the translation rails. Move
the probe arms on the table so that they are within view of the microscope.
6.1.8 Use the stage control joystick to move your wafer sample and locate the
desired device for testing. Depress the joystick for rapid stage movement.
Stage rotation can be effected with the stage rotation knob.
6.1.9 With the desired device in view, carefully adjust the fine lateral position of
the probe tips with the adjustment screws (assuming you have already done
gross positioning). There are 3 screws (Fig 2): one for forward/backward,
one for side to side and another for up down.
6.1.10 Carefully lower the probe tips by the fine height adjustment screws
(Up/Down in Fig 2) to make contact with your sample pads. Sample contact
will be visible as a change in lateral motion of the probe tip. Increase
magnification as needed using either the zoom knob or using a higher power
objective. . Do not lower the tip height beyond what is needed
to make contact.
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Note: Tips may now be simultaneously raised or lowered using the fine
table height adjust knob on the right side of the stage (Fig 1).
6.2
6.3
Parametric Analyzer Setup (Fig 3)
6.2.1 Press the NEXT button under page control to advance the current page to
the channel definition menu. Use the PREV button at any time to change or
review page content.
6.2.2 The measurement variables are assigned to 1 of 4 Source Monitor Units
(SMU’s) and voltage sources on the channel definition page. Three predefined
measurement modes can be selected: ß-trace, FET and DIODE. Use
the softkeys to select the desired mode. Each probe is labelled with the
SMU to which it is connected (SMU1, SMU2 etc); use the softkey CHAN
ASSIGN option to select the SMU’s as required by the probe arrangement
for your device. Press the NEXT button to advance to the source setup
page.
6.2.3 Use the cursors to navigate the source parameter fields. Use the softkeys to
select linear or logarithmic sweep. The start, stop, step parameters can be
set with the numeric key pad and postfix multipliers, followed by the ENT
key. Set the compliance values for maximum current or voltage to prevent
possible damage to your device under test. Press the NEXT button to
advance to the measurement and display mode setup page.
6.2.4 The graphics mode is selected by default. Use the cursors to navigate the
graphing parameter options. Select the desired variables to plot with the
softkeys. Select the desired scale (linear or logarithmic) with the softkeys.
Use the numeric key pad to enter the maximum and minimum plotting
range. Press the NEXT button to advance to the graphics plot page.
Parameter Measurement
6.3.1 Press the SINGLE measurement button to perform a single measurement
sweep. Continuous sweep can be selected with the REPEAT button. Use
the STOP button at any time to stop a measurement. The APPEND button
can be used to continue an interrupted measurement sweep.
6.3.2 Use the top softkey extension button to cycle through the softkey items
accessible. Use the AUTOSCALE softkey option to scale your plot to
your measured data. Use the MARKER softkey option to create a plot
marker controlled by the marker dial.
6.3.3 If the measurement data is noisy, use the SHORT, MED and LONG
integration time buttons to adjust the number of measurement samples per
plot point (0, 16 and 256 respectively).
6.3.4 If another device is to be measured on the same wafer, stop all
measurements. Raise the probe table with the fine table height adjustment
knob; note the direction for raising the table. Adjust the stage position for
the next device. Gently lower the probe table with the fine table height
adjustment knob. Use the PREV button to revisit the settings of previous
pages outlined in 6.2 onwards.
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6.4
6.5
Unloading Wafer
6.4.1 Raise the probe tips from your sample with the fine (Up/Down) adjustment
screws. Note the screw direction for raising the probe tips.
Raise the probe table and microscope using first the fine table height adjust
and then the table lever.
6.4.2 Flip the stage vacuum switch off. Carefully remove your sample with
tweezers.
6.4.3 If another wafer substrate is to be measured, proceed from step 6.1
onwards.
System Shutdown
6.5.1 Once all measurements are complete and the sample is unloaded, press the
LINE button on the HP4145B to switch the power off.
6.5.2 Rotate the microscope lamp power knob to switch the lamp off. Make sure
the probe table and microscope are in the up position.
6.5.3 Switch off the power to the vacuum pump.
6.5.4 Depress the yellow power button to turn off the Micromanipulator
translation stage. The red power indication LED should slowly dim.
6.5.5 Fill out a complete log book entry.
table lever
lamp power
stage vacuum switch
stage rotation
stage joystick
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fine table height
adjustment
Fig 1. M & M Probe Station and Controls
stage power

Fig 2. Probe arm and 3 fine adjust knobs
Fig 3. HP 4145 Parametric Analyzer
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