presentation slides - Texas A&M University
presentation slides - Texas A&M University
presentation slides - Texas A&M University
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Handling Defect Clustering<br />
Scratch<br />
226 defects,<br />
Mechanical handling<br />
Defects detected with<br />
Optical in-line tools<br />
Particle contamination<br />
617 defects,<br />
CVD process contamination<br />
Source: Semiconductor Spatial Signature Analysis (SSA)